CN100542827C - Laser induced thermal imaging apparatus and use it to make the method for electronic installation - Google Patents
Laser induced thermal imaging apparatus and use it to make the method for electronic installation Download PDFInfo
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- CN100542827C CN100542827C CNB2006101219863A CN200610121986A CN100542827C CN 100542827 C CN100542827 C CN 100542827C CN B2006101219863 A CNB2006101219863 A CN B2006101219863A CN 200610121986 A CN200610121986 A CN 200610121986A CN 100542827 C CN100542827 C CN 100542827C
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Abstract
The invention discloses the method for a kind of laser induced thermal imaging (LITI) equipment and this device fabrication electronic installation of use.This LITI equipment comprises chamber, substrate support part, connecting frame and lasing light emitter or oscillator.Described LITI equipment is transferred to transferable layer on the surface of semi-finished product electronics device from membrane donator apparatus.Described LITI equipment utilization magnetic force is provided at the tight contact between the surface of transferable layer and semi-finished product electronics device.Produce magnetic force by the magnetic material that forms in two assemblies that separate of LITI equipment, the described surface of transferable layer and semi-finished product electronics device is between described two assemblies.Magnet or magnetic material are formed in two following assemblies of LITI system: 1) semi-finished product device and membrane donator apparatus; 2) semi-finished product device and connecting frame; 3) substrate support part and membrane donator apparatus; Perhaps 4) substrate support part and connecting frame.
Description
The application requires respectively on August 30th, 2005 and was submitted to 10-2005-0080348 number and the interests of 10-2005-0109822 korean patent application of Korea S Department of Intellectual Property on November 16th, 2005, by reference disclosing of above-mentioned application is contained in this.
Technical field
The present invention relates to the production of electronic installation, more particularly, the present invention relates to use laser induced thermal imaging (LITI) technology in electronic installation, to form organic material layer.
Background technology
Some electronic installation comprises organic layer.For example, organic light emitting apparatus (OLED) comprises various organic layers.Making ins all sorts of ways forms this organic layer.For example, these methods comprise sedimentation, gunite and laser induced thermal imaging (LITI) method.
In the LITI method, use film donor (film donor) device that transferable layer is provided.Described donator apparatus is placed on the electronic installation of partly making (semi-finished product device), makes transferable layer contact the surface of semi-finished product device (accepting the surface), and described transferable layer will be transferred on the described surface.Then, laser beam is applied on the zone of selection of donator apparatus, thereby in the region generating heat of the selection of donator apparatus.Described thermal conductance causes the expectation of transferable layer and partly peels off.When donator apparatus was removed, the part of peeling off of transferable layer was retained on the described surface of semi-finished product device.
Typical LITI equipment utilization suction makes and keeps transferable layer to contact the described surface of semi-finished product device in said process.Fig. 1 is the cutaway view of LITI equipment 100.LITI equipment 100 comprises chamber 110, substrate support part 120 and lasing light emitter or oscillator 130.Substrate support part 120 comprises and is used for that semi-finished product electronics device 140 is contained in semi-finished product device holding tank 121 wherein and is used for membrane donator apparatus 150 is contained in wherein donator apparatus holding tank 123.
For high accuracy and low defective ground partly being transferred on the semi-finished product device by organic material, need at transferable layer and accept to form between the surface closely contact.LITI equipment 100 comprises the extraction sector that is used to form this tight contact.Described extraction sector comprises pipe 161 and 163 and vavuum pump P.Downward by managing 161 the bleed semi-finished product device (not shown) that make and keep being placed in the groove 121.Bleed and make donator apparatus (not shown) contact downwards and with described semi-finished product device by managing 163 with keeping being placed in the groove 123.In order to guide the described behavior of bleeding, in described chamber, need air or other gas medium.
Because the processing of carrying out before or after LITI handles also is to carry out in vacuum environment usually, utilize the whole process of the LITI processing of suction under the condition of destroying vacuum environment, to be performed.
The discussion of this part is for the background information of correlation technique is provided, rather than constitutes the approval part to prior art.
Summary of the invention
An aspect of of the present present invention provides a kind of equipment that is used for laser induced thermal imaging (LITI), and described equipment comprises: lasing light emitter; The substrate support part comprises the surface in the face of lasing light emitter, and described substrate support part is constructed to hold on described surface and will be used for the device of laser induced thermal imaging, and described substrate support part comprises magnet.
The substrate support part can comprise the magnetosphere with magnet.Magnetosphere also comprises namagnetic substance and a plurality of magnets that are blended in the namagnetic substance.Magnetosphere is arranged to substantially parallel with the described surface of substrate support part.Magnet can comprise permanent magnet or electromagnet.Electromagnet is electrically connected to external power source, and is constructed to optionally be energized.Magnet comprises one or more forms of selecting from the group that comprises plate, sheet, piece, bar and particle.The substrate support part also can comprise nonmagnetic portion.
Described equipment also comprises: the semi-finished product device comprises and accept the surface, and this semi-finished product device is placed on the described surface of substrate support part; Membrane donator apparatus comprise transferable layer, and this membrane donator apparatus is placed on the described acceptance surface of semi-finished product device.Described equipment also comprises the connecting frame between lasing light emitter and substrate support part, described connecting frame is removable between the primary importance and the second place with respect to the substrate support part, primary importance and substrate support part are at a distance of first distance, the second place and substrate support part are at a distance of second distance, second distance is greater than first distance, connecting frame is constructed to make membrane donator apparatus press to the semi-finished product device at the primary importance place, and connecting frame comprises at least a magnetic material of selecting from permanent magnet, electromagnet and the group that can be formed by the material of magnetic attraction.The semi-finished product device can not comprise permanent magnet or electromagnet.
Semi-finished product device and membrane donator apparatus are arranged such that described acceptance surface and transferable layer contact with each other.Between described acceptance surface and transferable layer, there is not bubble basically.Membrane donator apparatus also comprises the magnetic material of selecting from permanent magnet, electromagnet and the group that can be formed by the material of magnetic attraction.
Another aspect of the present invention provides a kind of method of using the said equipment to make electronic installation, and described method comprises: semi-finished product electronics device is placed on the described surface of substrate support part, described semi-finished product device comprises the acceptance surface in the face of lasing light emitter; Membrane donator apparatus is placed on the acceptance surface of described semi-finished product device, described membrane donator apparatus comprises in the face of the first surface of lasing light emitter and the second surface of faces substrate support member; The acceptance surface of described semi-finished product device is contacted with the second surface of membrane donator apparatus; Make described membrane donator apparatus press to described semi-finished product device.
Described method also comprises laser beam is shone step on the membrane donator apparatus.Described method can be performed under vacuum environment.Described magnet comprises electromagnet, and the step of press mold donator apparatus comprises the described electromagnet of activation.Membrane donator apparatus comprises magnet or can be by the material of magnetic attraction, and the step of press mold donator apparatus comprises the magnet that makes magnet and membrane donator apparatus or can be interacted by the magnetism of material ground of magnetic attraction.The connecting frame that provides between membrane donator apparatus and lasing light emitter also is provided the step of press mold donator apparatus, described connecting frame comprises magnet or can be by the material of magnetic attraction, and the step of press mold donator apparatus comprises the magnet that makes magnet and connecting frame or can be interacted by the magnetism of material ground of magnetic attraction.
Description of drawings
By the description of carrying out below in conjunction with accompanying drawing, it is clear and easier to understand that above-mentioned aspect of the present invention and advantage will become, wherein:
Fig. 1 represents the schematic cross sectional views of laser induced thermal imaging apparatus;
Fig. 2 represents the schematic cross sectional views of laser induced thermal imaging apparatus according to an embodiment of the invention;
Fig. 3 represents the schematic, exploded perspective view of laser induced thermal imaging apparatus according to an embodiment of the invention;
Fig. 4 A and Fig. 4 B represent according to an embodiment of the invention the schematic cross sectional views of the electronic installation that part is made;
Fig. 4 C represents according to an embodiment of the invention the schematic plan of the electronic installation that part is made;
Fig. 5 A represents the perspective schematic view of substrate support part according to an embodiment of the invention;
Fig. 5 B represents along the schematic cross sectional views of the substrate support part of the line I-I ' intercepting of Fig. 5 A;
Fig. 6 A to Fig. 6 C represents according to the schematic phantom in the donator apparatus of the embodiment of the invention;
Fig. 7 represents the perspective schematic view of connecting frame according to an embodiment of the invention;
Fig. 8 represents the flow chart of laser induced thermal imaging method according to an embodiment of the invention;
Fig. 9 A to Fig. 9 F represents laser induced thermal imaging method according to an embodiment of the invention;
Figure 10 A to Figure 10 D represents laser induced thermal imaging method according to an embodiment of the invention;
Figure 11 represents the perspective schematic view of laser oscillator according to an embodiment of the invention.
The specific embodiment
Various embodiment of the present invention is described with reference to the accompanying drawings.In the accompanying drawings, identical label refers to identical or intimate parts or element.
In an embodiment, LITI equipment utilization magnetic force provides the tight contact between membrane donator apparatus and the semi-finished product device.Different with bleeding in the LITI equipment of Fig. 1, magnetic force need not have air or fluid in chamber.In an embodiment, both can under vacuum condition, also can under non-vacuum condition, carry out and utilize magnetic force that membrane donator apparatus is contacted with the semi-finished product device.
Fig. 2 represents the LITI equipment 200 according to an embodiment.Represented LITI equipment 200 comprises chamber 210, substrate support part 260, connecting frame 230 and lasing light emitter or oscillator 220.Chamber 210 provides the space that utilizes membrane donator apparatus 241 to handle semi-finished product (perhaps part is made) electronic installation 250.Substrate support part 260 is configured for and supports semi-finished product device 250 and membrane donator apparatus 241.Connecting frame 230 is connected to chamber 210 movingly, so that downward gravity to be provided above membrane donator apparatus 241.In a particular embodiment, can omit connecting frame 230.Membrane donator apparatus 241 comprises transferable layer (not shown).Transferable layer will be transferred on the semi-finished product device by laser.Laser oscillator 220 is disposed on the connecting frame 230.Laser oscillator 220 is constructed to make laser to shine on the membrane donator apparatus 241 by connecting frame 230.
In one embodiment, the operation of LITI equipment 200 is as follows: at first, semi-finished product device 250 is put into chamber 210, and be placed on the substrate support part 260.Then, membrane donator apparatus 241 is placed on the semi-finished product device 250.Membrane donator apparatus 241 contacts at least in part with semi-finished product device 250.Utilize magnetic force to make membrane donator apparatus 241 push down semi-finished product device 250.In this step, transferable layer closely contacts with semi-finished product device 250.Open laser oscillator 220 so that laser is shone on the membrane donator apparatus 241.Then, transferable layer is transferred on the semi-finished product device 250 from membrane donator apparatus 241.
Fig. 3 represents the schematic exploded view of LITI equipment 200.Chamber 210 is shown in broken lines.In an illustrated embodiment, laser oscillator 220, connecting frame 230 and substrate support part 260 align orthogonally.In the LITI processing procedure, semi-finished product device 250 is placed on the substrate support part 260, and membrane donator apparatus 241 is placed on the semi-finished product device 250.In another embodiment, above-mentioned parts can have different arrangements, for example, can have opposite structure.In certain embodiments, the substrate support part can be constructed to fix from the top semi-finished product device.Substrate support part also can be known as the substrate fixture in this.
In the embodiment shown, laser oscillator 220 is placed on the mid portion at the top of chamber 210, on connecting frame 230, but is not limited thereto.Laser oscillator 220 is constructed to laser beam is shone on the membrane donator apparatus 241.Figure 11 represents an embodiment of laser oscillator 220.Shown laser oscillator 220 can be a CW ND:YAG laser instrument (1604nm).Laser oscillator 220 has two galvanometer scanners 221,222.Laser oscillator 220 also has scanning lens 223 and cylindrical lens 224.Those skilled in the art should understand that and be suitable for various types of laser oscillators that membrane donator apparatus provides laser.
In an illustrated embodiment, connecting frame 230 is placed on the substrate support part 260, but is not limited to this.Connecting frame 230 is connected to the crown center part of chamber 210 movingly by delivery unit 231.Connecting frame 230 has the contact plate 232 that is configured to provide gravity above membrane donator apparatus 241.Contact plate 232 is formed with pattern, comes out and other parts are blocked with the some parts with following membrane donator apparatus 241.For the described part of exposed film donator apparatus 241, contact plate 232 comprises a plurality of openings 233.These openings 233 make laser beam can be directly to reach the described part of membrane donator apparatus 241.This structure makes the some parts of transferable layer transfer on the semi-finished product device 250, and this will be in following detailed description.In a particular embodiment, LITI equipment can not possess connecting frame.
In the embodiment shown, substrate support part 260 is placed on the bottom of effect chamber 210, but is not limited thereto.Shown in substrate support part 260 have the recess 263 that is used to hold semi-finished product device 250.Substrate support part 260 is support membrane donator apparatus 241 also.In addition, substrate support part 260 holds substrate lifter 265 and membrane donator apparatus lifter 266 in the bottom.Substrate support part 260 has through hole 261 and 262, substrate lifter 265 and membrane donator apparatus lifter 266 by described through hole 261 and 262 along movement in vertical direction.
In the LITI processing procedure, semi-finished product device 250 is placed on the substrate support part 260.Term " semi-finished product device " refers to have any device that utilizes LITI to handle to form the surface of organic material.Usually, this device is the electronic installation that part is made.In one embodiment, semi-finished product device 250 is organic light emitting apparatus that part is made.Semi-finished product device 250 comprises the surface that transferable layer will be transferred to.
In the LITI processing procedure, membrane donator apparatus 241 is placed on the semi-finished product device 250.In one embodiment, membrane donator apparatus 241 comprises substrate, light-heat conversion layer and transferable layer, and this will further describe afterwards.Shown membrane donator apparatus 241 also comprises the membrane donator apparatus carriage 240 around membrane donator apparatus 241.Membrane donator apparatus carriage 240 is as the framework of the shape that keeps membrane donator apparatus 241.In the LITI processing procedure, transfer layer is arranged to the described surface in the face of semi-finished product device 241.
The LITI equipment 200 of Fig. 3 utilizes magnetic force that tight contact between membrane donator apparatus 241 and the semi-finished product device 250 is provided.Magnetic force makes described device 241 and 250 keep closely contacting, and does not have the air gap or bubble basically between described device 241 and 250.
In one embodiment, can produce magnetic force by two or more magnetic materials are separated.In an embodiment, magnetic material is formed in two assemblies that separate of LITI system, the described surface that transferable layer and transferable layer will be transferred to is between above-mentioned two assemblies, that is, assembly is positioned on the transferable layer and another assembly is positioned under the described surface.Here, term " assembly " refers to the parts and the device of use in LITI handles, and it comprises semi-finished product device 250, membrane donator apparatus 241, connecting frame 230 and substrate support part 260.In an embodiment, magnet or magnetic material are formed in following two assemblies of LITI system, but are not limited to this: 1) semi-finished product device 250 and membrane donator apparatus 241; 2) semi-finished product device 250 and connecting frame 230; 3) substrate support part 260 and membrane donator apparatus 241; Perhaps 4) substrate support part 260 and connecting frame 230.
Selectively, magnetic material can be arranged among combination wherein a kind of of following assembly of LITI system: 5) substrate support part 260, semi-finished product device 250 and connecting frame 230; 6) substrate support part 260, semi-finished product device 250 and membrane donator apparatus 241; 7) substrate support part 260, membrane donator apparatus 241 and connecting frame 230; Perhaps 8) semi-finished product device 250, membrane donator apparatus 241 and connecting frame 230.In another embodiment, magnetic material can be arranged in the combination of another kind of assembly, 9) in substrate support part 260, semi-finished product device 250 and the membrane donator apparatus 241.Those skilled in the art should understand that design based on LITI equipment can be arranged on the magnetic material in specific other assembly.
Magnetic material in described a pair of assembly is constructed to attract each other, and makes membrane donator apparatus 241 and semi-finished product device 250 be formed on the tight contact between the surface that transferable layer and this layer will be transferred to.Term used herein " magnetic material " refers to magnet or can be by the material of magnetic attraction.If not indicated otherwise, " magnet " refers generally to permanent magnet or electromagnet.But term used herein " can by the material of magnetic attraction " refers to not be magnet the material that can be attracted by magnet.In certain embodiments, one of them comprised magnet of described two LITI assemblies, and another can comprise and not be magnet but can be by the material of magnetic attraction.In other embodiments, described two LITI assemblies all comprise magnet.In a particular embodiment, also can comprise can be by the material of magnetic attraction for the assembly that comprises magnet.In all embodiment, described assembly comprises the magnetic material of the amount that can produce enough magnetic force, so that the tight contact between membrane donator apparatus 241 and the semi-finished product device 250 to be provided.
Different with suction, magnetic force can produce in vacuum environment.Therefore, in certain embodiments, the LITI processing can utilize the contact that is caused by magnetic between membrane donator apparatus 241 and semi-finished product device 250 to carry out in a vacuum and need not destroy vacuum.In addition, in a further embodiment, magnetic force systems can use to improve LITI with the suction system and handle.Magnet or can by the position of the material of magnetic attraction in each assembly and the structure will be described in further detail following.
In one embodiment, the magnetic material under transferable layer is disposed in the semi-finished product device 250.Fig. 4 A and Fig. 4 B represent the cutaway view of the embodiment of semi-finished product device 400A and 400B.Shown semi-finished product device 400A and 400B are the organic light emitting apparatus (OLED) that part is made.Each of semi-finished product device 400A and 400B comprises substrate 401, cushion 402, thin film transistor (TFT) 440, passivation layer 409, electrode 420 and pixel partition wall 430.Thin film transistor (TFT) 440 comprises insulating barrier 403 and 404, semiconductor layer 405, source electrode 406, drain electrode 407 and grid 408.Pixel partition wall 430 be formed on the passivation layer 409 and the part of electrode 420 on, the major part of the top surface of electrode 420 is come out.Electrode 420 will be as the negative electrode or the anode of Organic Light Emitting Diode.Transferable layer will be formed on the top surface of exposure of electrode 420.
In Fig. 4 A, magnetosphere 401a is attached on the basal surface of substrate 401.In another embodiment shown in Fig. 4 B, magnetosphere 401b is set between substrate 401 and the cushion 402.Magnetosphere 401a and 401b comprise the magnetic material in following detailed description.In one embodiment, the thickness of magnetosphere 401a and 401b is about 5000
And between about 1 μ m.
In a particular embodiment, based on Design of device, the semi-finished product device can comprise the magnetic material in any assembly that is built under the electrode 420, for example, be built in substrate 401, cushion 402, insulating barrier 403 and 404 and/or passivation layer 409 in.Under any circumstance, the semi-finished product device comprises the magnetic material of q.s, makes to form closely contact between membrane donator apparatus and semi-finished product device.
In another embodiment, the semi-finished product device can be included in the magnetic material band in its specific region.Fig. 4 C represents the vertical view of the embodiment of semi-finished product device 400C.Shown device is the organic light emitting apparatus 400C that part is made.Described device 400C comprises viewing area 460, data driver 530, scanner driver 540 and power connector 510 and 520.Viewing area 460 comprises a plurality of pixels 470 of matrix form.Shown device 400C comprises magnetic material band 450a and 450b.In the embodiment shown, described band 450a is disposed in the neighboring area of 460 outsides, viewing area.In addition, described band 450b is formed in the viewing area 460.Shown in the band 450b parallel to each other basically.In other embodiments, the magnetic material band is formed in the pixel region, rather than is formed in the neighboring area.Those skilled in the art should understand that various other structures of the band that can be used for providing magnetic force.
In one embodiment, magnetic material can be the magnet that comprises permanent magnet or electromagnet.Permanent magnet can be alnico magnet, ferrimagnet, rare earth element magnet, rubber magnet or plastic magnet.Permanent magnet can be any form of selecting in slave plate shape, sheet shape, piece shape, rod and the particle shape.In one embodiment, permanent magnet can be nano level magnet particle, plate, sheet, piece or bar.Can utilize spin coated, electron beam deposition or jet deposition this nano-scale particle to be deposited on the surface of assembly of semi-finished product device.In a further embodiment, described plate, sheet, piece, bar and particle can be greater than nanoscale size.
Permanent magnet can be evenly distributed among magnetosphere 401a or the 401b substantially.In another embodiment, magnetosphere 401a or 401b can have the permanent magnet part in the zone that only transferable layer will be transferred thereon.In another embodiment, magnetosphere can be the single plate that is formed by permanent magnet.
In another embodiment, magnetic material can be an electromagnet.Electromagnet can have at least a form of selecting from solenoid (solenoid) and ringed line (toroid).The solenoid finger-type becomes the coil of straight tube shape.The ringed line finger-type circularizes the coil of body.Usually, ringed line is that the solenoid bending makes two ends join to form.In certain embodiments, solenoid or ringed line can be included in the paramagnetic material in the coil or the core of ferromagnetic material (for example, iron).Because electromagnet needs electric current to magnetize, electromagnet is wired to external power source.In one embodiment, the non-display area of semi-finished product device can comprise one or more electrodes of the specified portions that is electrically connected to electromagnet.Electrode is constructed to from the external power source received power.In addition, electrode is wired to electromagnet.In an embodiment, electrode can be formed on the outer surface of the device that comprises electromagnet and fuselage, thereby is electrically connected to external power source.In a further embodiment, electrode can be projected into the described outside that comprises the device or the fuselage of electromagnet.The finished product electronic installation of making from described semi-finished product device, electrode can be non-active and be embedded in the dielectric material.Similar to permanent magnet, based on the semi-finished product Design of device, electromagnet can distribute substantially equably or distribute unevenly.
In another embodiment, magnetic material can be can be by the material of magnetic attraction rather than magnet.Can be comprised Fe, Ni, Cr, Fe by the examples of material of magnetic attraction
2O
3, Fe
3O
4, CoFe
2O
4, MnFeO
4, two or more the mixture in their alloy and the above-mentioned material, but be not limited thereto.Can also be comprised plastics magnetic material and ceramic magnet material by other example of the material of magnetic attraction.Similar with permanent magnet, can be any form of selecting in slave plate shape, sheet shape, piece shape, rod and the particle shape by the material of magnetic attraction.The size of these shapes can be a nano-scale particle or bigger.Can be evenly distributed in the magnetosphere 410 by the material of magnetic attraction.In a further embodiment, have in can the zone that only transferable layer will be transferred thereon can be by the material part of magnetic attraction for magnetosphere 410.In another embodiment, magnetosphere can be by the single plate that can be formed by the material of magnetic attraction.
In another embodiment, the magnetic material under transferable layer can be arranged in the substrate support part.Fig. 5 A and Fig. 5 B represent to comprise an embodiment of the substrate support part 260 of magnetic material.Shown substrate support part 260 comprises electromagnet 264 in the zone 263 (being indicated by dotted line) that is being used for holding under the recess of semi-finished product device.Shown electromagnet 264 aligns in vertical direction.But according to the design of substrate support part, electromagnet can be arranged to various other structures.For the semi-finished product device, electromagnet also can have above-mentioned different shape and structure.In a particular embodiment, for the semi-finished product device, magnetic material can be an above-mentioned permanent magnet or can be by the material of magnetic attraction.
In one embodiment, the magnetic material on transferable layer can be disposed in the membrane donator apparatus, and Fig. 6 A to Fig. 6 C is the phantom according to the membrane donator apparatus 600A to 600C of embodiment.Each of membrane donator apparatus 600A to 600C comprise substrate 601, cover light-heat conversion layer 602 above the substrate 601, cover intermediate layer 603 on light-heat conversion layer 602 and the transferable layer 604 on intermediate layer 603.Selectively, membrane donator apparatus can be included in the cushion (not shown) between intermediate layer 603 and the transferable layer 604.
Light-heat conversion layer 602 is constructed to absorb laser and converts it into heat.Described conversion coating 602 comprises light absorbent.Light absorbent can have about 0.1 to about 0.4 optical density.Light absorbent can have metal, metal oxide and/or organic material.The example of metal/metal oxide comprises the oxide of aluminium, silver, chromium, tungsten, tin, nickel, titanium, cobalt, zinc, gold, copper, molybdenum, lead and above-mentioned metal, but is not limited thereto.Organic material can comprise photosynthetic material.The example of organic material comprises the polymer of being made by (methyl) acrylate monomer or oligomer, the polymer of making by acrylic (methyl) acrylate oligomer, ester (methyl) acrylate oligomer, epoxy (methyl) acrylate oligomer, polyurethane (methyl) acrylate oligomer or the like for example, the perhaps polymer of making by two or more mixture of above-mentioned substance.In addition, conversion coating 602 also can comprise other additive, for example carbon black, graphite or IR dyes (infrared dye).
The thickness of light-heat conversion layer 602 can change according to light absorbent and manufacture method.For example, when using vacuum deposition method, laser beam sedimentation or gunite, the thickness of conversion coating can be about 100
To about 5000
In another embodiment, when using extrusion coating method, gravure coating process, whirl coating and knife coating, the thickness of conversion coating is that about 0.1 μ m is between about 0.2 μ m.
The cushion (not shown) is used to improve the transfer performance of transferable layer 604.Cushion can comprise one or more in metal oxide, metal sulfide, nonmetal inorganic compound and the organic material.The example of inorganic compound comprises A1, Au.Organic material comprises polyimides.
With reference to Fig. 6 A, light-heat conversion layer 602 comprises magnetic material.For example, light-heat conversion layer 602 can comprise permanent magnet and/or electromagnet.In other embodiments, can comprise can be by the material of magnetic attraction for conversion coating 602.For the semi-finished product device, magnetic material can have aforesaid various structure.In other embodiments, magnetic material can be built in substrate 601 or the intermediate layer 603.In a particular embodiment, magnetic material can be built among in substrate 601, light-heat conversion layer 602 and the intermediate layer 603 two at least.In other embodiments, magnetic material can only be built in one or more specific part of layer in 601 to 603, rather than in whole layer.For example, comprise magnetic material below the one or more only transfer layer on will being transferred to the semi-finished product device parts in the layer 601 to 603.
With reference to Fig. 6 B and Fig. 6 C, membrane donator apparatus 600B and 600C comprise magnetosphere 605.Magnetosphere 605 comprises magnetic material, for example permanent magnet, electromagnet and/or can be by the material of magnetic attraction.For the semi-finished product device, magnetic material can have aforesaid various structure.
In Fig. 6 B, membrane donator apparatus 600B comprises the magnetosphere 605 between substrate 601 and the light-heat conversion layer 602.In Fig. 6 C, membrane donator apparatus 600C comprises the magnetosphere 605 between light-heat conversion layer 602 and the intermediate layer 603.In another embodiment, membrane donator apparatus can comprise the magnetosphere between intermediate layer 603 and transferable layer 604.In another embodiment, membrane donator apparatus can be included in the magnetosphere 605 on the basal surface of substrate 601, and it is in the face of light-heat conversion layer 602.In a particular embodiment, membrane donator apparatus can have the two or more magnetospheres between continuous two-layer in layer 601 to 604.In certain embodiments, magnetic material also can be built in in substrate 601, light-heat conversion layer 602 and the intermediate layer 603 at least one.Those skilled in the art should understand that magnetospheric structure and combination can change according to the design of membrane donator apparatus.
In another embodiment, the magnetic material on the transferable layer can be disposed in the connecting frame.Fig. 7 represents an embodiment of connecting frame 230.Shown connecting frame 230 comprises the magnetic material that is built in the frame.For the semi-finished product device, described magnetic material can be aforesaid permanent magnet or electromagnet.In another embodiment, magnetic material can be can be by the material of magnetic attraction, as mentioned above.
In a particular embodiment, connecting frame 230 can comprise the magnetosphere of separation.For the semi-finished product device, magnetosphere comprises above-mentioned magnetic material.Magnetosphere can be attached at least one of the top surface of connecting frame 230 and basal surface.In another embodiment, magnetosphere can be built in the connecting frame 230.In these embodiments, described layer is formed with pattern, to have the opening corresponding opening with connecting frame.The opening of connecting frame and described layer allows laser beam to shine directly on the some parts of membrane donator apparatus 241.This structure allows optionally transferable film to be transferred on the semi-finished product device 250.In another embodiment, connecting frame itself can be formed by magnetic material.In all the foregoing descriptions, connecting frame comprises the magnetic material of q.s, so that magnetic force to be provided membrane donator apparatus is pressed to the semi-finished product device.
Provide tight contact between membrane donator apparatus and the semi-finished product device according to laser induced thermal imaging (LITI) the processing and utilizing magnetic force of embodiment.Fig. 8 is the flow chart of an embodiment of expression LITI processing.
At first, in step 810, semi-finished product device 250 is placed on the substrate support part 260.In this step, semi-finished product device 250 is by any suitable travel mechanism, and for example robot mechanism is moved.Then, in step 820, membrane donator apparatus 241 is placed on the semi-finished product device 250.At first, membrane donator apparatus 241 and semi-finished product device 250 vertical alignments, the transferable aspect of membrane donator apparatus 241 is downward.Then, membrane donator apparatus 241 is moved down on the semi-finished product device 250.At least a portion of transferable layer contacts with semi-finished product device 250.Similar with step 810, membrane donator apparatus 241 can be moved by travel mechanism.
In step 830, provide magnetic force so that membrane donator apparatus 241 is pressed to semi-finished product device 250.Magnetic force can produce by the magnetic material that is set at aforesaid two LITI assemblies, one of them assembly above the transferable layer and another assembly below surface that described transferable layer will be transferred to.In certain embodiments, in described two LITI assemblies can comprise magnet and another can comprise be not magnet can be by the material of magnetic attraction.In other embodiments, described two LITI assemblies all comprise magnet.Magnet can comprise permanent magnet and/or electromagnet.Comprise among the embodiment of electromagnet at magnet, can produce magnetic force at any time according to the needs that LITI handles.In a particular embodiment, also can comprise can be by the material of magnetic attraction for the assembly that comprises magnet.
In this step, magnetic force is pushed membrane donator apparatus 241 to semi-finished product device 250, and this makes transferable layer more closely contact the surface that described transferable layer will be transferred to.In this processing procedure, can be from removing all between membrane donator apparatus 241 and the semi-finished product device 250 or at least some the air gaps and bubble.This step is convenient to transferable layer and is transferred on the semi-finished product device 250.
In step 840, laser is irradiated on the membrane donator apparatus 241.Laser provides transfers to necessary energy on the semi-finished product device 250 with transferable layer.In this step, open laser oscillator 220 so that laser is shone on the top surface of membrane donator apparatus 241.Have among the embodiment of connecting frame 230 of opening in use, laser passes the top surface that described opening arrives membrane donator apparatus 241.Laser is directed to the zone of the selection of membrane donator apparatus 241 in this process.Laser passes light-heat conversion layer that substrate arrives membrane donator apparatus 241.Light-heat conversion layer changes into heat energy with luminous energy, produces heat.Heat is transferred on the part of selection of transferable layer.In this process, the described part of transferable layer breaks away from and is transferred on the semi-finished product device 250 from membrane donator apparatus 241.In not using another embodiment of connecting frame, laser is optionally shone on the specific part of top surface of membrane donator apparatus 241.
Then, in step 850, membrane donator apparatus 241 is removed from semi-finished product device 250, stays the some parts of transferable layer on the top surface of semi-finished product device 250.Can use the travel mechanism identical to remove membrane donator apparatus 241 with the travel mechanism in the step 820.
With reference to Fig. 9 A to Fig. 9 F, semi-finished product device 250 is directed into and shifts in the chamber 900.Semi-finished product device 250 is placed on the end effectors 910 that shifts the robotic arm 920 in the chamber 900.Then, semi-finished product device 250 is sent in the LITI chamber 210, shown in Fig. 9 B.Then, semi-finished product device 250 is placed on the substrate support part 260, shown in Fig. 9 C.
Next, membrane donator apparatus 241 is placed on the end effectors 910, shown in Fig. 9 C.Then, membrane donator apparatus 241 is directed into LITI chamber 210, shown in Fig. 9 D.Membrane donator apparatus 241 and semi-finished product device 250 vertical alignments.Then, membrane donator apparatus 241 is moved down on the semi-finished product device 250, shown in Fig. 9 E.End effectors 910 is withdrawn from from LITI chamber 210 then.Then, gate 930 is closed so that the reaction chamber of sealing to be provided.In one embodiment, in these step process, in whole transfer chamber and LITI chamber, can keep vacuum environment.
Selectively, connecting frame can be arranged on the membrane donator apparatus.In Fig. 9 F, connecting frame 230 moves down on membrane donator apparatus 241.Connecting frame 230 provides gravity on membrane donator apparatus 241.Connecting frame 230 is convenient to produce closely contact between membrane donator apparatus 241 and semi-finished product device 250.In another embodiment, can omit connecting frame.
Next, provide magnetic force so that closely contact between semi-finished product device and the membrane donator apparatus.Can produce magnetic force by the magnetic material that is arranged among two of LITI apparatus assembly, in the assembly one is positioned under the transferable layer and another is positioned on the transferable layer, as mentioned above.It should be appreciated by those skilled in the art that the design based on LITI equipment, magnetic material can be arranged in other specific assembly.In all the foregoing descriptions, the magnetic force that applies between semi-finished product device and membrane donator apparatus is enough strong, so that do not contact with having airspace and bubble between the two.Position and structure for the magnetic material of LITI equipment have more than been described.
Figure 10 A to Figure 10 D is how the transferable layer of expression transfers to the cutaway view on the semi-finished product device.Shown semi-finished product device is the organic light emitting apparatus 400 that part is made.In an illustrated embodiment, magnetic material is set in semi-finished product device and the membrane donator apparatus.In other embodiments, magnetic material can be arranged in other assembly of LITI equipment, as mentioned above.
With reference to Figure 10 A, semi-finished product device 400 comprises thin film transistor (TFT) (TFT) structure 411, magnetosphere 410, electrode 420 and pixel separate layer 430.The part 412 of electrode 420 is exposed by pixel separate layer 430.On the part 412 that is exposed, will form organic layer, will become better understood in this description afterwards.
Then, shown in Figure 10 B, membrane donator apparatus 600 is placed on the semi-finished product device 400.With reference to Fig. 6 B, as mentioned above, membrane donator apparatus 600 comprises substrate 601, magnetosphere 605, light-heat conversion layer 602, intermediate layer 603 and transferable layer 604.Transferable layer 604 contacts at least in part with the top surface of pixel separate layer 430, shown in Figure 10 B.In this step, between membrane donator apparatus 600 and semi-finished product device 400, apply magnetic force.
Then, laser is irradiated on the part of selection of membrane donator apparatus 600.The part of described selection is positioned on the exposed portions 412 of electrode 420.Laser passes substrate and magnetosphere 605, and arrives light-heat conversion layer 602.Light-heat conversion layer 602 changes into heat energy with luminous energy, produces heat.Described heat is passed on the transferable layer 604 by intermediate layer 603.
Then, because receive heat, the part of transferable layer 604 is peeled off from membrane donator apparatus 600, and contacts with the exposed portions 412 of electrode 420, shown in Figure 10 C.In an illustrated embodiment, light-heat conversion layer 602, intermediate layer 603 and the part of transferable layer 604 are separated from magnetosphere 605.In a further embodiment, have only transferable layer 604 to separate from membrane donator apparatus 600.
Then, shown in Figure 10 D, membrane donator apparatus 600 is removed from semi-finished product device 400.After this step, transferable layer only some 604a is stayed on the semi-finished product device 400.
In aforesaid embodiment, use magnetic force provides the tight contact between membrane donator apparatus and the semi-finished product device.With bleed differently, do not need air pressure in this LITI of the being configured in chamber.Therefore, LITI handles and can carry out under vacuum environment.Because the processing before or after LITI handles is all carried out under vacuum environment, thereby in whole process, LITI handles and can not break the execution of vacuum environment ground.Deposition processes from the deposition processes of hole injection layer (HIL) to the second electrode lay (cathode layer) all keeps vacuum environment.In addition, LITI handles the impurity reduced between donor membrane and the semi-finished product device or the generation in space.This has improved life-span, income and the reliability of finished product electronic installation.
Though shown and described various embodiment of the present invention, but those skilled in the art should understand that, under the situation that does not break away from principle of the present invention and spirit, can make various changes to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (20)
1, a kind of equipment that is used for laser induced thermal imaging, described equipment comprises:
Lasing light emitter;
The substrate support part comprises the surface in the face of lasing light emitter, and described substrate support part is constructed to hold on described surface and will be used for the device of laser induced thermal imaging, and described substrate support part comprises magnet.
2, equipment as claimed in claim 1, wherein, the substrate support part comprises the magnetosphere with magnet.
3, equipment as claimed in claim 2, wherein, magnetosphere also comprises namagnetic substance and a plurality of magnets that are blended in the namagnetic substance.
4, equipment as claimed in claim 2, wherein, magnetosphere is arranged to parallel with the described surface of substrate support part.
5, equipment as claimed in claim 1, wherein, magnet comprises permanent magnet or electromagnet.
6, equipment as claimed in claim 5, wherein, electromagnet is electrically connected to external power source, and is constructed to optionally be energized.
7, equipment as claimed in claim 1, wherein, magnet comprises one or more forms of selecting from the group that comprises plate, sheet, piece, bar and particle.
8, equipment as claimed in claim 1, wherein, the substrate support part also comprises nonmagnetic portion.
9, equipment as claimed in claim 1 also comprises:
The semi-finished product device comprises and accept the surface, and described semi-finished product device is placed on the described surface of substrate support part;
Membrane donator apparatus comprise transferable layer, and described membrane donator apparatus is placed on the described acceptance surface of semi-finished product device.
10, equipment as claimed in claim 9, also comprise the connecting frame between lasing light emitter and substrate support part, described connecting frame is removable between the primary importance and the second place with respect to the substrate support part, primary importance and substrate support part are at a distance of first distance, the second place and substrate support part are at a distance of second distance, second distance is greater than first distance, connecting frame is configured to make membrane donator apparatus press to the semi-finished product device at the primary importance place, and connecting frame comprises from permanent magnet, at least a magnetic material of selecting in electromagnet and the group that can be formed by the material of magnetic attraction.
11, equipment as claimed in claim 10, wherein, the semi-finished product device does not comprise permanent magnet or electromagnet.
12, equipment as claimed in claim 9, wherein, semi-finished product device and membrane donator apparatus are arranged such that described acceptance surface and transferable layer contact with each other.
13, equipment as claimed in claim 12 wherein, does not have bubble between described acceptance surface and transferable layer.
14, equipment as claimed in claim 9, wherein, membrane donator apparatus also comprises the magnetic material of selecting from permanent magnet, electromagnet and the group that can be formed by the material of magnetic attraction.
15, a kind of method of using the described device fabrication electronic installation of claim 9, described method comprises:
Semi-finished product electronics device is placed on the described surface of substrate support part, described semi-finished product device comprises the acceptance surface in the face of lasing light emitter;
Membrane donator apparatus is placed on the acceptance surface of described semi-finished product device, described membrane donator apparatus comprises in the face of the first surface of lasing light emitter and the second surface of faces substrate support member;
The acceptance surface of described semi-finished product device is contacted with the second surface of membrane donator apparatus;
Make described membrane donator apparatus press to described semi-finished product device.
16, method as claimed in claim 15 also comprises laser beam is shone step on the membrane donator apparatus.
17, method as claimed in claim 15, wherein, described method is performed under vacuum environment.
18, method as claimed in claim 15, wherein, described magnet comprises electromagnet, and the step of press mold donator apparatus comprises the described electromagnet of activation.
19, method as claimed in claim 15, wherein, membrane donator apparatus comprises magnet or can be by the material of magnetic attraction, and the step of press mold donator apparatus comprises the magnet that makes magnet and membrane donator apparatus or can be interacted by the magnetism of material ground of magnetic attraction.
20, method as claimed in claim 19, wherein, the connecting frame that provides between membrane donator apparatus and lasing light emitter also is provided the step of press mold donator apparatus, described connecting frame comprises magnet or can be by the material of magnetic attraction, and the step of press mold donator apparatus comprises the magnet that makes magnet and connecting frame or can be interacted by the magnetism of material ground of magnetic attraction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050080348A KR100700829B1 (en) | 2005-08-30 | 2005-08-30 | Laser Induced Thermal Imaging Apparatus and Method using the same |
| KR1020050080348 | 2005-08-30 | ||
| KR1020050109822 | 2005-11-16 |
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| Publication Number | Publication Date |
|---|---|
| CN1923529A CN1923529A (en) | 2007-03-07 |
| CN100542827C true CN100542827C (en) | 2009-09-23 |
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| CNB2006101219863A Expired - Fee Related CN100542827C (en) | 2005-08-30 | 2006-08-30 | Laser induced thermal imaging apparatus and use it to make the method for electronic installation |
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| KR101182168B1 (en) * | 2010-06-30 | 2012-09-12 | 에이피시스템 주식회사 | Laser induced thermal imaging device for absorbing impaction |
| KR102001226B1 (en) * | 2012-11-12 | 2019-07-25 | 삼성디스플레이 주식회사 | Laser induced thermal imaging apparatus and laser induced thermal imaging method |
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| US6688365B2 (en) | 2001-12-19 | 2004-02-10 | Eastman Kodak Company | Method for transferring of organic material from a donor to form a layer in an OLED device |
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