CN100438745C - 光学传感器设备 - Google Patents
光学传感器设备 Download PDFInfo
- Publication number
- CN100438745C CN100438745C CNB028117646A CN02811764A CN100438745C CN 100438745 C CN100438745 C CN 100438745C CN B028117646 A CNB028117646 A CN B028117646A CN 02811764 A CN02811764 A CN 02811764A CN 100438745 C CN100438745 C CN 100438745C
- Authority
- CN
- China
- Prior art keywords
- sensing device
- light
- optical sensing
- irradiation part
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 60
- 238000003384 imaging method Methods 0.000 claims abstract description 25
- 230000003595 spectral effect Effects 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 claims description 32
- 238000005286 illumination Methods 0.000 claims description 20
- 230000005855 radiation Effects 0.000 claims description 7
- 230000003760 hair shine Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 42
- 239000000463 material Substances 0.000 abstract description 22
- 238000001228 spectrum Methods 0.000 abstract description 6
- 239000003086 colorant Substances 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 7
- 230000001678 irradiating effect Effects 0.000 description 5
- 239000003550 marker Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
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- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 230000002950 deficient Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
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- 238000012372 quality testing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Landscapes
- Engineering & Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Geophysics And Detection Of Objects (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10128476.4 | 2001-06-12 | ||
DE10128476A DE10128476C2 (de) | 2001-06-12 | 2001-06-12 | Optische Sensorvorrichtung zur visuellen Erfassung von Substraten |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1529997A CN1529997A (zh) | 2004-09-15 |
CN100438745C true CN100438745C (zh) | 2008-11-26 |
Family
ID=7688030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028117646A Expired - Lifetime CN100438745C (zh) | 2001-06-12 | 2002-06-11 | 光学传感器设备 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20040179209A1 (zh) |
EP (1) | EP1396182B1 (zh) |
JP (1) | JP2004529373A (zh) |
KR (1) | KR100914802B1 (zh) |
CN (1) | CN100438745C (zh) |
AT (1) | ATE282945T1 (zh) |
DE (2) | DE10128476C2 (zh) |
WO (1) | WO2002102128A1 (zh) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020173876A1 (en) | 2000-12-15 | 2002-11-21 | Fisher Lance K. | Board align image acquisition device with improved interface |
DE10197043T1 (de) | 2000-12-15 | 2003-11-13 | Cyberoptics Corp | Kamera mit verbessertem Illuminator |
EP1675453A3 (de) | 2004-12-22 | 2007-07-11 | Siemens Aktiengesellschaft | Vorrichtung zum Beleuchten von Objekten, Sensorvorrichtung |
KR100643496B1 (ko) * | 2004-12-23 | 2006-11-10 | 삼성전자주식회사 | 노말 오픈/클로즈 타입 겸용 광센서 보드 |
EP1681912A3 (de) * | 2005-01-17 | 2007-07-18 | Siemens Aktiengesellschaft | Vorrichtung zum homogenen Beleuchten von Objekten |
DE102005005896B4 (de) | 2005-02-09 | 2011-01-13 | Siemens Electronics Assembly Systems Gmbh & Co. Kg | Verwendung einer Beleuchtungsvorrichtung in einem Bestückautomaten |
DE102005035410A1 (de) * | 2005-07-28 | 2007-02-01 | Robert Bosch Gmbh | Vorrichtung zum optischen Erfassen von Stückgütern |
JP4478669B2 (ja) | 2005-08-31 | 2010-06-09 | キヤノン株式会社 | センサおよびそれを用いた記録装置 |
KR101188168B1 (ko) * | 2005-10-25 | 2012-10-05 | 삼성디스플레이 주식회사 | 평판 표시 장치의 제조 시스템 및 이의 제어 방법 |
KR20080075123A (ko) | 2005-11-30 | 2008-08-14 | 가부시키가이샤 니콘 | 관찰장치 |
US20070125863A1 (en) * | 2005-12-05 | 2007-06-07 | Jakoboski Timothy A | System and method for employing infrared illumination for machine vision |
US20070153274A1 (en) * | 2005-12-30 | 2007-07-05 | Asml Netherlands B.V. | Optical metrology system and metrology mark characterization device |
JP4899534B2 (ja) * | 2006-02-28 | 2012-03-21 | ソニー株式会社 | 監視カメラ |
DE102006040728A1 (de) * | 2006-08-31 | 2008-03-13 | Siemens Ag | Verfahren und Vorrichtung zum Herstellen eines elektronischen Moduls |
CN100440929C (zh) * | 2006-11-30 | 2008-12-03 | 华南理工大学 | 一种用于全自动锡膏印刷机的t型双镜头图像采集装置 |
US8016199B2 (en) * | 2006-12-14 | 2011-09-13 | Cognex Corporation | Illumination devices for image acquisition systems |
US7710611B2 (en) * | 2007-02-16 | 2010-05-04 | Illinois Tool Works, Inc. | Single and multi-spectral illumination system and method |
DE102007043609B4 (de) * | 2007-09-13 | 2014-05-28 | Ioss Intelligente Optische Sensoren & Systeme Gmbh | Integrierte Beleuchtungsvorrichtung für einen optischen Codeleser |
DE202008003953U1 (de) * | 2008-03-20 | 2008-07-10 | Pepperl + Fuchs Gmbh | Optischer Sensor |
DE102008016766B4 (de) * | 2008-04-02 | 2016-07-21 | Sick Ag | Sicherheitskamera und Verfahren zur Detektion von Objekten |
DE102008030425A1 (de) * | 2008-06-26 | 2010-01-21 | Siemens Aktiengesellschaft | LED-Beleuchtungssystem für ein elektrisches Prüfsystem |
CN103748669B (zh) * | 2011-08-16 | 2016-08-24 | 应用材料公司 | 用于在腔室内感测基板的方法及设备 |
US10652444B2 (en) | 2012-10-30 | 2020-05-12 | California Institute Of Technology | Multiplexed Fourier ptychography imaging systems and methods |
US9864184B2 (en) | 2012-10-30 | 2018-01-09 | California Institute Of Technology | Embedded pupil function recovery for fourier ptychographic imaging devices |
EP2915180B1 (en) | 2012-10-30 | 2018-12-05 | California Institute of Technology | Fourier ptychographic imaging systems, devices, and methods |
AT513747B1 (de) | 2013-02-28 | 2014-07-15 | Mikroelektronik Ges Mit Beschränkter Haftung Ab | Bestückungsverfahren für Schaltungsträger und Schaltungsträger |
CN105659143B (zh) | 2013-07-31 | 2019-03-22 | 加州理工学院 | 孔径扫描傅立叶重叠关联成像 |
JP2016530567A (ja) * | 2013-08-22 | 2016-09-29 | カリフォルニア インスティチュート オブ テクノロジー | 可変照明フーリエタイコグラフィー撮像装置、システム、及び方法 |
US11468557B2 (en) | 2014-03-13 | 2022-10-11 | California Institute Of Technology | Free orientation fourier camera |
US10162161B2 (en) | 2014-05-13 | 2018-12-25 | California Institute Of Technology | Ptychography imaging systems and methods with convex relaxation |
AU2015369663A1 (en) | 2014-12-22 | 2017-05-11 | California Institute Of Technology | Epi-illumination fourier ptychographic imaging for thick samples |
CN107209362B (zh) | 2015-01-21 | 2020-11-06 | 加州理工学院 | 傅立叶重叠关联断层摄影 |
CN107209123B (zh) | 2015-01-26 | 2020-08-11 | 加州理工学院 | 多孔傅立叶重叠关联和荧光成像 |
JP2018509622A (ja) | 2015-03-13 | 2018-04-05 | カリフォルニア インスティチュート オブ テクノロジー | フーリエタイコグラフィ手法を用いるインコヒーレント撮像システムにおける収差補正 |
US9993149B2 (en) | 2015-03-25 | 2018-06-12 | California Institute Of Technology | Fourier ptychographic retinal imaging methods and systems |
WO2016187591A1 (en) | 2015-05-21 | 2016-11-24 | California Institute Of Technology | Laser-based fourier ptychographic imaging systems and methods |
DE102015013500A1 (de) * | 2015-10-16 | 2017-04-20 | Mühlbauer Gmbh & Co. Kg | Bildgebender Sensor für eine Bauteilhandhabungsvorrichtung |
US10568507B2 (en) | 2016-06-10 | 2020-02-25 | California Institute Of Technology | Pupil ptychography methods and systems |
US11092795B2 (en) | 2016-06-10 | 2021-08-17 | California Institute Of Technology | Systems and methods for coded-aperture-based correction of aberration obtained from Fourier ptychography |
WO2019090149A1 (en) | 2017-11-03 | 2019-05-09 | California Institute Of Technology | Parallel digital imaging acquisition and restoration methods and systems |
US11105898B2 (en) * | 2017-12-29 | 2021-08-31 | Symbol Technologies, Llc | Adaptive illumination system for 3D-time of flight sensor |
CN109506573A (zh) * | 2018-12-17 | 2019-03-22 | 湖北三江航天万山特种车辆有限公司 | 一种利用图像识别方法快速对零部件进行检测的装置 |
JP7441469B2 (ja) * | 2019-05-31 | 2024-03-01 | 株式会社昭和電気研究所 | 外観検査装置 |
EP3748343B1 (en) * | 2019-06-06 | 2022-08-17 | Gebrüder Loepfe AG | Optical sensor device for detecting foreign material in an elongate textile body |
KR102341839B1 (ko) * | 2019-09-09 | 2021-12-21 | 아리아엣지 주식회사 | 증강현실을 위한 데이터 수집 장치 |
JP7427487B2 (ja) * | 2020-03-24 | 2024-02-05 | キヤノン株式会社 | 光学装置、車載システム、および移動装置 |
CN112188747B (zh) * | 2020-10-13 | 2021-09-07 | 合肥泽延微电子有限公司 | 一种集成电路板布线用智能定位系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4003983C1 (en) * | 1990-02-09 | 1991-08-29 | Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De | Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects |
US5298977A (en) * | 1991-10-16 | 1994-03-29 | Matsushita Electric Industrial Co., Ltd. | Visual inspection method for part mounted on printed circuit board |
US5758942A (en) * | 1995-12-18 | 1998-06-02 | Micron Technology, Inc. | Mechanical vision system using selective wavelength and brightness illumination |
US6040895A (en) * | 1997-10-08 | 2000-03-21 | Siemens Aktiengesellschaft | Method and device for controlled illumination of an object for improving identification of an object feature in an image of the object |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61293657A (ja) * | 1985-06-21 | 1986-12-24 | Matsushita Electric Works Ltd | 半田付け外観検査方法 |
US5072127A (en) * | 1987-10-09 | 1991-12-10 | Pressco, Inc. | Engineered video inspecting lighting array |
KR920006031B1 (ko) * | 1988-05-09 | 1992-07-27 | 다떼이시 덴끼 가부시끼 가이샤 | 기판등의 검사장치 및 그 동작방법 |
US5039868A (en) * | 1988-11-24 | 1991-08-13 | Omron Corporation | Method of and apparatus for inspecting printed circuit boards and the like |
US4893223A (en) * | 1989-01-10 | 1990-01-09 | Northern Telecom Limited | Illumination devices for inspection systems |
JPH02231510A (ja) * | 1989-03-02 | 1990-09-13 | Omron Tateisi Electron Co | 基板検査装置 |
JP3072998B2 (ja) * | 1990-04-18 | 2000-08-07 | 株式会社日立製作所 | はんだ付け状態検査方法及びその装置 |
DE4222804A1 (de) * | 1991-07-10 | 1993-04-01 | Raytheon Co | Einrichtung und verfahren zur automatischen visuellen pruefung elektrischer und elektronischer baueinheiten |
JP2969403B2 (ja) * | 1991-12-02 | 1999-11-02 | 株式会社新川 | ボンデイングワイヤ検査装置 |
US5469294A (en) * | 1992-05-01 | 1995-11-21 | Xrl, Inc. | Illumination system for OCR of indicia on a substrate |
US5461417A (en) * | 1993-02-16 | 1995-10-24 | Northeast Robotics, Inc. | Continuous diffuse illumination method and apparatus |
JP3189500B2 (ja) * | 1993-06-25 | 2001-07-16 | 松下電器産業株式会社 | 電子部品の外観検査装置および外観検査方法 |
US5519496A (en) * | 1994-01-07 | 1996-05-21 | Applied Intelligent Systems, Inc. | Illumination system and method for generating an image of an object |
US6122048A (en) * | 1994-08-26 | 2000-09-19 | Pressco Technology Inc. | Integral field lens illumination for video inspection |
ATE197503T1 (de) * | 1997-08-22 | 2000-11-11 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zur automatischen prüfung bewegter oberflächen |
US6243164B1 (en) * | 1998-07-13 | 2001-06-05 | Electro Scientific Industries | Method and system for determining lead coplanarity |
KR100345001B1 (ko) * | 1998-08-27 | 2002-07-19 | 삼성전자 주식회사 | 기판 납땜 검사용 조명 및 광학 장치 |
-
2001
- 2001-06-12 DE DE10128476A patent/DE10128476C2/de not_active Expired - Fee Related
-
2002
- 2002-06-11 KR KR1020037016110A patent/KR100914802B1/ko active IP Right Grant
- 2002-06-11 AT AT02747212T patent/ATE282945T1/de not_active IP Right Cessation
- 2002-06-11 CN CNB028117646A patent/CN100438745C/zh not_active Expired - Lifetime
- 2002-06-11 US US10/480,431 patent/US20040179209A1/en not_active Abandoned
- 2002-06-11 WO PCT/DE2002/002128 patent/WO2002102128A1/de active IP Right Grant
- 2002-06-11 DE DE50201578T patent/DE50201578D1/de not_active Expired - Lifetime
- 2002-06-11 JP JP2003504726A patent/JP2004529373A/ja active Pending
- 2002-06-11 EP EP02747212A patent/EP1396182B1/de not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4003983C1 (en) * | 1990-02-09 | 1991-08-29 | Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De | Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects |
US5298977A (en) * | 1991-10-16 | 1994-03-29 | Matsushita Electric Industrial Co., Ltd. | Visual inspection method for part mounted on printed circuit board |
US5758942A (en) * | 1995-12-18 | 1998-06-02 | Micron Technology, Inc. | Mechanical vision system using selective wavelength and brightness illumination |
US6040895A (en) * | 1997-10-08 | 2000-03-21 | Siemens Aktiengesellschaft | Method and device for controlled illumination of an object for improving identification of an object feature in an image of the object |
Also Published As
Publication number | Publication date |
---|---|
US20040179209A1 (en) | 2004-09-16 |
ATE282945T1 (de) | 2004-12-15 |
KR100914802B1 (ko) | 2009-09-02 |
JP2004529373A (ja) | 2004-09-24 |
DE50201578D1 (de) | 2004-12-23 |
KR20040007669A (ko) | 2004-01-24 |
CN1529997A (zh) | 2004-09-15 |
EP1396182B1 (de) | 2004-11-17 |
DE10128476C2 (de) | 2003-06-12 |
WO2002102128A1 (de) | 2002-12-19 |
EP1396182A1 (de) | 2004-03-10 |
DE10128476A1 (de) | 2003-01-02 |
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SE01 | Entry into force of request for substantive examination | ||
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Owner name: SIEMENS ELECTRONICS ASSEMBLY SYSTEMS LIMITED PARTN Free format text: FORMER OWNER: SIEMENS AG Effective date: 20090925 |
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Effective date of registration: 20090925 Address after: Munich, Germany Patentee after: SIEMENS ELECTRONICS ASSEMBLY SYSTEMS GmbH & Co.KG Address before: Munich, Germany Patentee before: Siemens AG |
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Owner name: ADVANCED ASSEMBLY SYSTEMS GMBH + CO. KG Free format text: FORMER NAME: SIEMENS AG (DE) |
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Address after: Munich, Germany Patentee after: ASM Assembly Systems GmbH & Co. KG Address before: Munich, Germany Patentee before: SIEMENS ELECTRONICS ASSEMBLY SYSTEMS GmbH & Co.KG |
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