CN100428402C - 从箔片分离半导体芯片的方法和用于安装半导体芯片的设备 - Google Patents
从箔片分离半导体芯片的方法和用于安装半导体芯片的设备 Download PDFInfo
- Publication number
- CN100428402C CN100428402C CNB2005100649785A CN200510064978A CN100428402C CN 100428402 C CN100428402 C CN 100428402C CN B2005100649785 A CNB2005100649785 A CN B2005100649785A CN 200510064978 A CN200510064978 A CN 200510064978A CN 100428402 C CN100428402 C CN 100428402C
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- Prior art keywords
- semiconductor chip
- paillon foil
- chip
- plane
- ejector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
Description
Claims (16)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04101498 | 2004-04-13 | ||
EP04101498.6 | 2004-04-13 | ||
EP04103054.5 | 2004-06-29 | ||
EP04106169.8 | 2004-11-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1716523A CN1716523A (zh) | 2006-01-04 |
CN100428402C true CN100428402C (zh) | 2008-10-22 |
Family
ID=34929272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100649785A Expired - Fee Related CN100428402C (zh) | 2004-04-13 | 2005-04-13 | 从箔片分离半导体芯片的方法和用于安装半导体芯片的设备 |
Country Status (1)
Country | Link |
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CN (1) | CN100428402C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101740349A (zh) * | 2008-11-05 | 2010-06-16 | Esec公司 | 芯片分离器 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102044404B (zh) * | 2009-10-12 | 2015-12-09 | 桑迪士克科技公司 | 用于使经切分的半导体裸片与裸片贴胶带分离的系统 |
JP2015065367A (ja) * | 2013-09-26 | 2015-04-09 | 株式会社テセック | 剥離装置およびピックアップシステム |
CN107032114B (zh) * | 2016-02-04 | 2023-04-14 | 苏州沃特维自动化系统有限公司 | 一种掰片装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4778326A (en) * | 1983-05-24 | 1988-10-18 | Vichem Corporation | Method and means for handling semiconductor and similar electronic devices |
US4921564A (en) * | 1988-05-23 | 1990-05-01 | Semiconductor Equipment Corp. | Method and apparatus for removing circuit chips from wafer handling tape |
US5966903A (en) * | 1998-05-27 | 1999-10-19 | Lucent Technologies Inc. | High speed flip-chip dispensing |
US6561743B1 (en) * | 1999-11-09 | 2003-05-13 | Nec Machinery Corporation | Pellet picking method and pellet picking apparatus |
-
2005
- 2005-04-13 CN CNB2005100649785A patent/CN100428402C/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4778326A (en) * | 1983-05-24 | 1988-10-18 | Vichem Corporation | Method and means for handling semiconductor and similar electronic devices |
US4921564A (en) * | 1988-05-23 | 1990-05-01 | Semiconductor Equipment Corp. | Method and apparatus for removing circuit chips from wafer handling tape |
US5966903A (en) * | 1998-05-27 | 1999-10-19 | Lucent Technologies Inc. | High speed flip-chip dispensing |
US6561743B1 (en) * | 1999-11-09 | 2003-05-13 | Nec Machinery Corporation | Pellet picking method and pellet picking apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101740349A (zh) * | 2008-11-05 | 2010-06-16 | Esec公司 | 芯片分离器 |
CN101740349B (zh) * | 2008-11-05 | 2013-09-25 | Esec公司 | 芯片分离器 |
Also Published As
Publication number | Publication date |
---|---|
CN1716523A (zh) | 2006-01-04 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: UNAXIS SCHWEITZER LIMITED Free format text: FORMER OWNER: YOU LI XUN INTERNATIONAL TRADE CO., LTD. Effective date: 20090410 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: OERLIKON SEAL EQUIPMENT CO., LTD., STEINHAUSEN Free format text: FORMER NAME: UNAXIS SCHWEITZER LIMITED |
|
CP03 | Change of name, title or address |
Address after: Swiss Camden Patentee after: ESEC Trading S.A. Address before: Swiss Camden Patentee before: Unaxis Shi Weiss Co.,Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20090410 Address after: Swiss Camden Patentee after: Unaxis Shi Weiss Co.,Ltd. Address before: Swiss Camden Patentee before: Unaxis International Trading Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081022 Termination date: 20150413 |
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EXPY | Termination of patent right or utility model |