CN100405044C - Optical structure of vacuum ultraviolet and fluorescence spectrum instrument - Google Patents
Optical structure of vacuum ultraviolet and fluorescence spectrum instrument Download PDFInfo
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- CN100405044C CN100405044C CNB2005100165062A CN200510016506A CN100405044C CN 100405044 C CN100405044 C CN 100405044C CN B2005100165062 A CNB2005100165062 A CN B2005100165062A CN 200510016506 A CN200510016506 A CN 200510016506A CN 100405044 C CN100405044 C CN 100405044C
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Abstract
The present invention relates to an optical structure of a vacuum ultraviolet excitation and fluorescence spectrometer, which is composed of a deuterium lamp light source 1, a front reflector 2, a first incidence slit 3, a first grating 4, a first emergence slit 5, a rear reflector 6, a sample 7, a reflector 8, a window 9, a second incidence slit 10, a second grating 11, a second emergence slit 12 and a photoelectric detector 13, wherein the front reflector 2, the first incidence slit 3, the first grating 4 and the first emergence slit 5 are arranged in a vacuum ultraviolet monochromator; the second incidence slit 10, the second grating 11, the second emergence slit 12 and the photoelectric detector 13 are arranged in a visible monochromator. Due to the adoption of the deuterium lamp light source and the vacuum ultraviolet monochromator, the present invention can generate a continual excitation spectrum from 115 nm to 300 nm. For improving the light energy utilization rate, the present invention also utilizes the three reflectors for optical transmission; continually excited vacuum ultraviolet light can be acquired, and the energy loss of a system is greatly reduced. The reflectors and the visible monochromator are adopted to form a detecting part of the system, realize the detection of the continual excitation spectrum of an excitation source and the fluorescence spectrum of the excited sample, and calculate parameters, such as relative brightness, color coordinates, etc., according to requirements. The present invention is formed into products, and can be used in practice.
Description
Technical field:
The invention belongs to spectral measurement instrument technical field, it relates to a kind of optical system of vacuum ultraviolet-excited and fluorescence spectrophotometer.
Background technology:
For adapting to domestic research needs, Changchun ray machine institute has successively been developed the vacuum ultraviolet fluorescence spectrophotometer by the Hangzhou University and the Ministry of Information Industry 55, shown in Figure 1 comprising nineteen ninety: grating 1-1, vacuum ultraviolet monochromator 1-2, hollow cathode light source 1-3, go into to stitch 1-4, go out to stitch 1-5, sample chamber 1-6, visible spectrophotometer 1-7.This spectrometer adopts vacuum ultraviolet hollow cathode light source to do vacuum ultraviolet light source, can produce very strong singlet radiation at 120nm, 145.9nm and 175.5nm.The end of the nineties, Zhejiang University adopted gas-discharge tube to do vacuum ultraviolet-excited source cooperation optical filter at the stronger singlet of 145.5nm place generation.Along with the development (PDP) of domestic plasma flat display technique, carry out fluorescent spectroscopy with singlet line as excitaton source and far can not satisfy the demand.
Existing fluorescence spectrophotometer all adopts the light source of single wavelength to do excitaton source, as vacuum ultraviolet hollow cathode light source, can produce very strong singlet radiation at 120nm, 145.9nm and 175.5nm; Gas-discharge tube is done vacuum ultraviolet-excited source and is cooperated optical filter to produce stronger singlet at the 145.5nm place.And make light source with the 30W deuterium lamp, though can realize that by the VUV monochromator continuous spectrum does excitaton source, exist the shortcoming of energy shortage.Use powerful deuterium lamp, overheated meeting brings a series of problems to system during work.
Summary of the invention:
When carrying out fluorescent spectroscopy with the successive line of deuterium lamp as excitaton source in order to solve background technology, capacity usage ratio is low, carry out the problem that fluorescent spectroscopy far can not be satisfied the demand with singlet line as excitaton source, the purpose of this invention is to provide a kind ofly obtain continuous agitation spectrum, the fluorescence spectrum after may detect the continuous agitation spectrum of excitaton source and sample and being excited, draw the optical system of the isoparametric vacuum ultraviolet-excited and fluorescence spectrophotometer of relative brightness and chromaticity coordinates as required.
The present invention is placed with the deuterium lamp light source along direction of beam propagation, comprises in the vacuum ultraviolet monochromator: mirror in front, first entrance slit, first grating and first exit slit; Comprise in rearmounted catoptron, sample, catoptron, window, the visible monochromator: second entrance slit, second grating, second exit slit and photodetector, mirror in front image in deuterium lamp light source on first entrance slit of vacuum ultraviolet monochromator at 1: 1; Carry out chromatic dispersion and converge at first exit slit through first grating again, the emergent light that makes first exit slit is a diverging light, diverging light converges the formation exciting light through rearmounted catoptron, excitation light irradiation produces the fluorescence of diffuse reflection visible waveband on sample, catoptron converges at the visible light of sample stimulated emission on second entrance slit by the vacuum system window, forms that dispersed light enters second exit slit and is surveyed fluorescence spectrum after obtaining sample and being excited by photodetector through second grating again.
Good effect of the present invention: because the present invention adopts deuterium lamp light source and vacuum ultraviolet monochromator to produce the continuous agitation spectrum of 115nm-300nm; The present invention also utilizes three catoptrons to make optical delivery, when obtaining vacuum ultraviolet continuous agitation light, has significantly reduced the energy loss of system, has improved the utilization factor of luminous energy.Adopt the probe portion of catoptron and visible monochromator construction system, realized the detection of the fluorescence spectrum after the continuous agitation spectrum of excitaton source and sample are excited, and calculated parameters such as relative brightness and chromaticity coordinates as required.The present invention has formed product, comes into operation.
Description of drawings:
Fig. 1 is a background technology fluorescence spectrophotometer principle schematic.
Fig. 2 is a vacuum ultraviolet-excited and fluorescence spectrophotometer optical system synoptic diagram of the present invention.
Embodiment:
Embodiments of the invention are as shown in Figure 2:
The present invention comprises mirror in front 2, first entrance slit 3, first grating 4 and first exit slit 5 by deuterium lamp light source 1 in the vacuum ultraviolet monochromator; Comprise second entrance slit 10, second grating 11, second exit slit 12, photodetector 13 compositions in rearmounted catoptron 6, sample 7, catoptron 8, window 9, the visible monochromator.
Because under the vacuum system state, first exit slit 5 of sample chamber and vacuum ultraviolet monochromator is difficult for closely installing, and for avoiding the diverging light energy loss, adopts rearmounted catoptron 6 that the light of vacuum ultraviolet monochromator outgoing is converged on the sample 7; Sample 7 is under excitation light irradiation, produce irreflexive visible light (fluorescence), catoptron 8 converges at the visible light of sample 7 stimulated emission on second entrance slit of visible monochromator by vacuum system window 9, the measurement of fluorescence spectrum after visible monochromator scanning probe realization sample is excited again.Native system focuses on through mirror in front 2, rearmounted catoptron 6, catoptron 8, can reduce energy loss, improves signal intensity.During design, mirror in front 2 relative apertures should be slightly larger than the relative aperture of vacuum ultraviolet monochromator, so that on the light beam that deuterium lamp light source 1 sends first grating 4 that projects vacuum ultraviolet monochromator as much as possible, the radius-of-curvature of mirror in front 2, rearmounted catoptron 6, catoptron 8 may be selected to be 200mm, bore 50mm.
The concrete form of mirror in front 2: the bore angle of mirror in front 2 should be near the angle of divergence more preferably greater than deuterium lamp light source 1, the focal length of mirror in front 2 is decided on the distance of mirror in front and deuterium lamp light source 1, and mirror in front 2 surfaces are coated with the Al+MgF of vacuum ultraviolet high reflectance
2Reflectance coating, and be higher than 80% at vacuum ultraviolet wave band reflectivity.
The concrete form of rearmounted catoptron 6: the relative aperture of rearmounted catoptron 6 is greater than the relative aperture of vacuum ultraviolet monochromator, rearmounted catoptron 6 focal lengths are decided on the rearmounted catoptron 6 and the distance of sample, and rearmounted catoptron 6 surfaces are coated with the Al+MgF of vacuum ultraviolet high reflectance
2Reflectance coating, and be higher than 80% at vacuum ultraviolet wave band reflectivity.
The concrete form of catoptron 8: the relative aperture of catoptron 8 should be equal to or less than the relative aperture of visible monochromator, should try one's best greatly but look visible monochromator situation, because sample 7 sends is diffused light, the bore of catoptron 8 greatly then harvest energy is many.Plating reflectivity in catoptron 8 surface are greater than 95% reflectance coating.
What deuterium lamp light source 1 adopted is the Britain V03 of Cathoden company type deuterium lamp, this light source light spectrum scope 115nm-400nm, power 30W, working current 300mA, the about 70V of operating voltage, trigger voltage 500V.The long-term attenuation rate 0.03%/h of radiation of light source.
What vacuum ultraviolet monochromator adopted is the VM-502 type 0.2m vacuum monochromator of U.S. Acton company.It is made up of first entrance slit 3, inlet vacuum separation valve, first grating 4, first exit slit 5 and outlet vacuum separation valve etc.The vacuum ultraviolet monochromator relative aperture is f/4.5, and spectral range is 30nm-550nm, and when first entrance slit 3 adopted the seam of 0.1mm wide, the spectral resolution of vacuum ultraviolet monochromator was 0.42nm, and wavelength accuracy is ± 0.1nm that wavelength repeatability is ± 0.005nm.First grating 4 adopts concave grating, and its incisure density is 1200g/mm, and by high-accuracy sinusoidal grating drive mechanism first grating 4.
As seen monochromator by second entrance slit 10, second grating 11, second exit slit 12, form.As seen the relative aperture f/3 of monochromator, service band 300nm-780nm, spectral resolution is 0.5nm (entrance slit wide be 0.1mm, high during for 5mm), wavelength accuracy ± 0.2nm, wavelength repeatability ± 0.2nm.
Second grating 11 adopts concave grating, and by sinusoidal grating drive mechanism second grating 11, the concave grating incisure density is 1200g/mm, R=200mm.
Photodetector 13 adopts the photomultiplier of R928 model.
Through verification experimental verification, this system capacity satisfies test request, thereby has realized the purpose that the fluorescence spectrum after the continuous agitation spectrum of excitaton source and sample are excited is surveyed in same system simultaneously.
Claims (4)
1. the optical system of a vacuum ultraviolet-excited and fluorescence spectrophotometer, comprise: deuterium lamp light source (1), first entrance slit (3), first grating (4), first exit slit (5), sample (7), window (9), second entrance slit 10, second grating (11), second exit slit (12), photodetector (13), it is characterized in that also including: mirror in front (2), rearmounted catoptron (6), catoptron (8), mirror in front (2) image in deuterium lamp light source (1) on first entrance slit (3) of vacuum ultraviolet monochromator at 1: 1; Carry out chromatic dispersion and converge at first exit slit (5) through first grating (4) again, the emergent light that makes first exit slit (5) is a diverging light, diverging light converges the formation exciting light through rearmounted catoptron (6), excitation light irradiation is gone up the fluorescence that produces the diffuse reflection visible waveband at sample (7), catoptron (8) converges at the visible light of sample (7) stimulated emission on second entrance slit (10) by vacuum system window (9), forms that dispersed light enters second exit slit (12) and is surveyed the fluorescence spectrum that obtains after sample (7) is excited by photodetector (13) through second grating (11) again.
2. according to the optical system of the described a kind of vacuum ultraviolet-excited and fluorescence spectrophotometer of claim 1, it is characterized in that: the bore angle of mirror in front (2) is greater than the angle of divergence of deuterium lamp light source (1), the focal length of mirror in front (2) is decided on the distance of mirror in front (2) and deuterium lamp light source (1), and mirror in front (2) surface is coated with the vacuum ultraviolet reflectivity greater than 80% Al+MgF
2Reflectance coating.
3. according to the optical system of the described a kind of vacuum ultraviolet-excited and fluorescence spectrophotometer of claim 1, it is characterized in that: the relative aperture of rearmounted catoptron (6) is greater than the relative aperture of vacuum ultraviolet monochromator, the focal length of rearmounted catoptron (6) is decided on the rearmounted catoptron (6) and the distance of sample (7), and rearmounted catoptron (6) surface is coated with the vacuum ultraviolet reflectivity greater than 80% Al+MgF
2Reflectance coating.
4. according to the optical system of the described a kind of vacuum ultraviolet-excited and fluorescence spectrophotometer of claim 1, it is characterized in that: the relative aperture of catoptron (8) should be equal to or less than the relative aperture of visible monochromator, and catoptron (8) surface plating reflectivity is greater than 95% reflectance coating.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100165062A CN100405044C (en) | 2005-01-05 | 2005-01-05 | Optical structure of vacuum ultraviolet and fluorescence spectrum instrument |
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| CNB2005100165062A CN100405044C (en) | 2005-01-05 | 2005-01-05 | Optical structure of vacuum ultraviolet and fluorescence spectrum instrument |
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| CN100405044C true CN100405044C (en) | 2008-07-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101308059B (en) * | 2008-07-08 | 2010-06-09 | 中国科学院长春光学精密机械与物理研究所 | Ultraviolet optics instrument resolution tester |
| CN107966892B (en) * | 2016-10-20 | 2020-06-02 | 京东方科技集团股份有限公司 | Holographic display device and control method thereof |
| CN107831086A (en) * | 2017-11-22 | 2018-03-23 | 华南理工大学 | A kind of simulation space environment multifunction friction wear experimental rig and method |
| CN109164078A (en) * | 2018-09-20 | 2019-01-08 | 苏州赛德福科学仪器有限公司 | A kind of phosphor collection device of fluorescence detector |
| CN113063752B (en) * | 2019-12-30 | 2023-09-29 | 北京普析通用仪器有限责任公司 | Double-beam-splitting near infrared spectrometer based on supercontinuum laser |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1222674A (en) * | 1998-01-07 | 1999-07-14 | 中国科学院大连化学物理研究所 | Ultraviolet Raman spectrometer |
| CN2391184Y (en) * | 1999-09-29 | 2000-08-09 | 深圳大学师范学院 | Vacuum ultraviolet space-time resolution spectral instrument |
| CN2449213Y (en) * | 2000-10-19 | 2001-09-19 | 中国科学院长春光学精密机械与物理研究所 | Ultravacuum slit for vacuum ultraviolet optical instrument |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1222674A (en) * | 1998-01-07 | 1999-07-14 | 中国科学院大连化学物理研究所 | Ultraviolet Raman spectrometer |
| CN2391184Y (en) * | 1999-09-29 | 2000-08-09 | 深圳大学师范学院 | Vacuum ultraviolet space-time resolution spectral instrument |
| CN2449213Y (en) * | 2000-10-19 | 2001-09-19 | 中国科学院长春光学精密机械与物理研究所 | Ultravacuum slit for vacuum ultraviolet optical instrument |
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