CN211012841U - Spectrum confocal measuring system - Google Patents
Spectrum confocal measuring system Download PDFInfo
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- CN211012841U CN211012841U CN201922344191.4U CN201922344191U CN211012841U CN 211012841 U CN211012841 U CN 211012841U CN 201922344191 U CN201922344191 U CN 201922344191U CN 211012841 U CN211012841 U CN 211012841U
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Abstract
The utility model provides a confocal measurement system of spectrum adopts the line source to carry out the confocal measurement of spectrum, uses the dispersion lens group to form images to the line source, once only obtains position information and height information of all points on a confocal line, only need carry out one-dimensional scanning again and just can obtain the position and the height information on whole measured object surface to realize the measurement of quick object surface position and height of high accuracy. And utilized the reversible principle of light path in this embodiment, used coaxial system, let light from the measured object reflection go back to dispersive lens group, focus once more and get into the spectrometer and carry out data analysis, dispersive lens group wherein is by reuse, effectual cost and the system volume that has reduced, consequently the utility model has the characteristics of high efficiency and low cost.
Description
Technical Field
The utility model belongs to the technical field of the high accuracy measurement technique and specifically relates to a confocal measurement system of spectrum.
Background
The principle of the non-contact type spectrum confocal technology is that wavelength information is used for measuring distance, a wide-spectrum polychromatic light (generally white light) emitted by a light source generates dispersion through a dispersion lens group to form monochromatic light with different wavelengths, and a focus of each wavelength corresponds to a distance value. The measuring light irradiates the surface of an object and is reflected back, only monochromatic light meeting confocal conditions can be sensed by a spectrometer through a small hole or a slit, and a distance value is obtained through conversion by calculating the wavelength of a sensed focus. The spectrum confocal measurement technology has high precision, high measurement speed and high real-time property, and can be suitable for different environments, so that the spectrum confocal measurement technology rapidly becomes a hot spot of current research.
The existing detector for detecting the surface profile and the shape of an object adopts a single-point spectrum confocal displacement sensor, and the technical scheme can only obtain the height information of one object point at a time. Scanning in two directions is required to obtain position and height information on the whole surface, so that the sampling efficiency is low, and the measurement accuracy is unstable due to long-time scanning; stray light reflected by the light source from the dispersive lens group can enter the data analysis system, namely, the background noise is stronger, so that the resolution of the system is reduced; therefore, the traditional spectral confocal system has the defects of low signal-to-noise ratio and low sampling efficiency.
Therefore, the prior art is subject to further improvement.
SUMMERY OF THE UTILITY MODEL
In view of the weak point among the above-mentioned prior art, the utility model provides a confocal measurement system of spectrum overcomes the defect that the sampling efficiency that single-point spectrum confocal displacement sensor exists is low among the prior art.
The embodiment discloses a spectral confocal measurement system, which comprises: the system comprises a wide-spectrum line light source, a spectroscope, a dispersion lens group, a filter, a focusing lens group, a line spectrometer and a processor;
the wide-spectrum line light source is used for outputting linear wide-spectrum light beams;
the spectroscope is used for transmitting part of light rays in the linear wide spectrum light beam and outputting a transmitted light beam;
the dispersion lens group is used for receiving the transmitted light beams transmitted by the spectroscope and dispersing the transmitted light beams, and the light with different wavelengths is focused to different heights; when the surface of the measured object is positioned in the dispersion focusing range of the dispersion lens group, the dispersion lens group receives the reflected beam reflected by the surface of the measured object and transmits the reflected beam to the spectroscope;
the spectroscope is also used for receiving the reflected light beam transmitted by the dispersive lens group and reflecting the reflected light beam to the optical filter;
the optical filter is used for receiving the reflected light beam reflected by the spectroscope and filtering out the reflected light beam in a target wavelength range;
the focusing lens group is used for receiving the reflected light beam filtered by the optical filter and focusing the reflected light beam on the line spectrometer;
the line spectrometer is used for receiving the reflected light beam, acquiring the spectral information of the reflected light beam and the position information of different points on the confocal line, and transmitting the acquired spectral information and the position information of the different points on the confocal line to the processor;
and the processor is used for obtaining the position information and the height information of the surface of the measured object according to the spectral information and the position information of different points on the confocal line.
Optionally, the filter is disposed on one side of the beam splitter, and the other side of the beam splitter is disposed with a light absorbing member for absorbing the reflected light incident on the surface thereof.
The light absorbing member serves to absorb light reflected to the surface thereof.
Optionally, the broad spectrum line light source includes a plurality of optical fiber groups, a plurality of optical fiber sub-bunchers connected to one end of each optical fiber group, and an optical fiber main buncher connected to the other end of each optical fiber group, one end of each optical fiber sub-buncher is correspondingly connected to an L ED lamp group, and light emitted by each L ED lamp group is broad spectrum polychromatic light.
Optionally, at least one optical fiber is disposed in each optical fiber group, the optical fibers in each optical fiber group are staggered in the optical fiber total buncher, and the light emitted by the L ED lamps in each L ED lamp group is broad-spectrum polychromatic light.
Optionally, the arrangement of the plurality of optical fibers in each optical fiber group in the optical fiber bundling device is linear arrangement, square array arrangement or circular array.
Optionally, the broad spectral line light source comprises a plurality of line-shaped L ED wafers with phosphor layers coated on the surfaces.
Optionally, the broad spectrum line light source further comprises: a substrate and a cylindrical mirror;
the linear L ED wafer is arranged on the substrate, and the linear L ED wafer excites the light beam emitted by the fluorescent layer to be incident on the cylindrical mirror to form a linear broad spectrum light beam.
Optionally, the broad spectrum line light source is a laser for emitting line-type laser and a fluorescent plate arranged in front of the laser, and the line-type laser emitted by the laser irradiates on the fluorescent plate to obtain a line-type broad spectrum light beam.
Compared with the prior art, the embodiment of the utility model provides a have following advantage:
according to the utility model discloses embodiment provides a measurement system adopts the line source to carry out the confocal measurement of spectrum, has once only obtained the positional information and the height information of all points on a confocal line, only need carry out the position and the height information that whole measured object surface just can be obtained to one-dimensional scanning again to realize the quick profile measurement of high accuracy. And utilized the reversible principle of light path in this embodiment, used coaxial system, let light from the testee reflection back to the dispersive lens group, focus once more and get into the spectrometer and carry out data analysis, dispersive lens group wherein is by reuse, the effectual cost that has reduced, consequently the utility model has the characteristics of high efficiency and low cost.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a spectral confocal measurement system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a spectroscope in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a first embodiment of a linear light source according to an embodiment of the present invention;
FIG. 4a is a schematic diagram of the arrangement of optical fibers in a fiber bundling device matrix in the first embodiment of the linear light source;
FIG. 4b is a schematic view of the first embodiment of the linear light source with the optical fibers arranged in a circular pattern in the fiber bundling device;
FIG. 4c is a schematic view of the linear arrangement of the optical fibers in the fiber bundling device according to the first embodiment of the linear light source;
FIG. 5 is a schematic structural diagram of a second embodiment of a linear light source according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a third embodiment of a linear light source according to an embodiment of the present invention;
fig. 7 is a schematic diagram of an embodiment of the present invention for filtering a reflected beam by an optical filter;
fig. 8 is a schematic diagram of an optical path in the spectral confocal measurement system according to the embodiment of the present invention;
fig. 9 is a flowchart illustrating steps of a spectral confocal measurement method according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The inventor finds that the spectrum confocal technology used in the prior art is all to use the pointolite to realize the measurement of object single point height, and the measurement of realizing a line or a face based on the point needs to spend a large amount of time, therefore measurement of inefficiency, so the utility model provides a spectrum confocal measurement system based on wide spectrum line light source.
The principle of the line spectrum confocal system is shown in fig. 1, and the spectrum confocal measurement system based on the spectrum confocal technology uses a light source to irradiate the surface of a measured object, and a spectrometer and the like to detect the reflected spectrum information and determine the peak wavelength focused on the surface of the object, so as to obtain the axial distance information of the surface of the measured object. Light rays are emitted from a wide-spectrum line light source 1 and enter a dispersion lens group 3 through a spectroscope 2, and the dispersion lens group 3 uses lens combinations made of different materials to enable polychromatic light to be subjected to axial dispersion. The light with different wavelengths is focused on different heights in the axial direction by the dispersion lens group, and monochromatic light confocal lines which are continuous and have different distances from the dispersion lens group to the dispersion lens group are formed on the optical axis, so that the corresponding relation between the wavelength and the axial distance is established.
According to the reversible principle of the light path, the light rays are reflected by the surface of the object to be measured and then return to the dispersion lens group 3, and are reflected by the spectroscope 2 and focused to the filter 4. The light transmitted through the filter 4 enters the line spectrometer after being focused by the focusing lens group. An area array CCD or COMS detector is arranged in the linear spectrometer, and the processor obtains spectral information from the X direction of the area array CCD or COMS detector so as to obtain corresponding height information of a measured object; the processor obtains the position information on the confocal line from the Y direction of the area array CCD or COMS detector. Therefore, the utility model discloses a system once only has obtained position information and the height information of all points on a confocal line, only need carry out the ascending scanning in a side again just can obtain position and height information on the whole object plane to realize high-efficient and profile measurement of high accuracy. The utility model discloses a line scanning measurement both kept traditional point scanning measuring high accuracy characteristics and increased line scanning measuring high efficiency characteristics again.
Example 1
The embodiment discloses a line-structured spectral confocal measurement system, as shown in fig. 1, including: the device comprises a wide spectrum line light source 1, a spectroscope 2, a dispersion lens group 3, a filter 4, a focusing lens group 5, a line spectrometer 6 and a processor connected with the line spectrometer;
the wide-spectrum line light source 1 is used for outputting linear wide-spectrum light beams; the broad spectral line light source emits a linear broad spectral beam.
The spectroscope 2 is used for transmitting part of light rays in the linear wide spectrum light beam and outputting a transmitted light beam; the spectroscope 2 is arranged in front of the wide-spectrum line light source and used for receiving the linear wide-spectrum light beam emitted by the wide-spectrum line light source and transmitting the partial light beam in the linear wide-spectrum light beam.
In specific implementation, the light-emitting spectrum output by the wide-spectrum line light source is adjusted according to the difference of the object to be measured or the difference of the measurement requirements, and the spectroscope is arranged according to the requirement, so that part of linear wide-spectrum light beams are transmitted by the arranged spectroscope and transmitted to the dispersive lens group 3.
The dispersion lens group 3 is used for receiving the transmitted light beams transmitted by the spectroscope 2 and dispersing the transmitted light beams, and the light with different wavelengths is focused to different heights; when the surface of the measured object is located in the dispersion focusing range of the dispersion lens group, the dispersion lens group 3 receives the reflected light beam reflected by the surface of the measured object and transmits the reflected light beam to the spectroscope 2.
The dispersive lens group 3 is arranged between the spectroscope 2 and the object to be measured, and the transmitted light beam transmitted by the spectroscope 2 is focused by the dispersive lens group and then enters the surface of the object to be measured.
The surface of the object to be measured is irradiated by the transmitted light beam to generate a reflected light beam, and the reflected light beam enters the dispersive lens group and the spectroscope due to the principle that the light path is reversible.
Further, the dispersive lens group 3 is composed of a plurality of lenses, disperses the transmitted light beams transmitted by the dispersive lens 2 to form a series of coaxial optical focuses, each optical focus corresponds to light with one wavelength, namely, the dispersive lens group axially disperses the received polychromatic light to focus the light with different wavelengths at different heights in the axial direction, and establishes a corresponding relation between the wavelength and the focal length, and the surface of the object to be measured is positioned on one optical focus of the plurality of optical focuses.
The spectroscope 2 is further used for receiving the light beam transmitted by the dispersive lens group 3 and reflecting the light beam to a filter 4; the reflected light reflected by the surface of the object to be measured passes through the dispersive lens group and then enters the spectroscope 2, and as shown in fig. 2, the beam splitting surface 220 of the spectroscope reflects the reflected light beam, and the reflected light beam emitted from the exit surface 230 is transmitted to the optical filter 4.
Specifically, as shown in fig. 1 and 2, the optical filter 4 is disposed on one side of the beam splitter 2, and the other side of the beam splitter 2 is disposed with a light-absorbing member 210, where the light-absorbing member 210 is used for absorbing the reflected light incident on the surface thereof. The light absorbing member 210 is arranged on the side opposite to the light exit surface reflecting the light beam to the filter 4, i.e. on the side surface opposite to the light exit surface 230. Because the light-absorbing component 210 is arranged on the spectroscope 2, the light reflected to the side of the light-absorbing component 210 is prevented from being reflected to the emergent surface 230 for the second time, stray light in the measuring system is reduced, and the signal-to-noise ratio of the whole measuring system is improved. The light absorbing component can be a light absorbing layer attached to the lens cone or can be an optical element independently.
The optical filter 4 is used for receiving the reflected light beam reflected by the spectroscope 2 and filtering out the reflected light beam in a target wavelength range; the reflected light beam emitted from the beam splitter 2 is transmitted to the optical filter 4 located in front of the emitting surface 230, and the optical filter 4 filters the reflected light beam, so that the reflected light beam at the surface focal point of the object to be measured is input to the focusing lens group 5.
In a specific embodiment, the optical filter 4 may be a slit with a predetermined size or an optical fiber array with a predetermined size. The reflected light beam focused on the surface of the measured object in the target wavelength range is filtered by the optical filter and then focused on the line spectrometer 6 through the focusing lens group 5.
Because the light absorbing component 210 arranged at the side of the spectroscope 2 absorbs the stray light reflected on the surface of the spectroscope, and the filter 4 filters the reflected light which is not focused on the confocal line of the surface of the measured object, the light absorbing component 210 and the filter 4 at the side of the spectroscope 2 greatly improve the signal-to-noise ratio of the system. Under the combined action of the light absorption component and the optical filter on one side of the spectroscope 2, the embodiment can obtain a higher signal-to-noise ratio, and the measurement accuracy of the spectrum confocal system is ensured.
A focusing lens group 5 for receiving the reflected light beam filtered by the filter 4 and focusing the reflected light beam on a line spectrometer 6; the focusing lens group 5 focuses the light beam filtered by the optical filter 4 on the line spectrometer 6, the line spectrometer 6 receives the reflected light beam, acquires the spectral information of the reflected light beam and the position information of different points on a confocal line, and transmits the acquired spectral information and the position information of different points on the confocal line to the processor; and the processor is used for obtaining the position information and the height information of the measured object according to the spectral information and the position information of different points on the confocal line.
The system provided by the present invention will be further described in more detail with reference to fig. 1 to 8.
In this embodiment, three different implementation manners are provided for the wide-spectrum line light source, which specifically include the following:
in a first implementation manner, referring to fig. 3, the broad spectrum line light source includes a plurality of optical fiber groups 330, a total optical fiber bundling device 340 connected to one end of the plurality of optical fiber groups, and an optical fiber bundling device 320 connected to the other end of each optical fiber group, and one end of each optical fiber bundling device 320 is connected to L ED light group 310, wherein the light emitted from the L ED light group is broad spectrum polychromatic light.
In one embodiment, at least one optical fiber can be disposed in each optical fiber group 330 and integrated by the optical fiber splitting/bundling device 320, the other end of the optical fiber splitting/bundling device 320 is connected to L ED lamp groups, and the light beam emitted by L ED lamps in each L ED lamp group is polychromatic light, in this embodiment, as shown in FIG. 3, 20 1W L ED lamp sources are used, L ED lamps are used to emit white light with 400-700 nm, inner 9um optical fibers 20 and 1000 × 200um optical fiber total bundling device 340 are used, the lamp groups connected by each optical fiber splitting/bundling device 320 are divided into two groups, L ED lamp groups in each broad spectrum light source are A, B two groups, each group is arranged on the optical fiber total bundling device 340 through the optical fiber splitting/bundling device 320 and the optical fibers in the optical fiber group 330, A group is arranged in an odd number, L ED lamp spectrum is arranged in a blue color, B group is arranged in an even number, L ED lamp emission spectrum is arranged in a red color, and light emission spectra of L and the final ED lamp light sources are overlapped to emit light with equal energy.
Further, as shown in fig. 4 a-4 c, the optical fibers in each optical fiber group may be arranged in the optical fiber bundling device 320 in a linear arrangement (as shown in fig. 4 c), a square arrangement (as shown in fig. 4 a), a circular arrangement (as shown in fig. 4 b), or the like.
Referring to fig. 3, L ED light sources 310 are coupled into optical fibers of an optical fiber group 330, the other ends of the optical fiber groups 330 are arranged on an optical fiber total bundling device 340, and the optical fiber groups 330 connecting different L ED light sources 310 are arranged in different orders on the optical fiber total bundling device 340. the optical fibers of the optical fiber groups 330 are arranged closely on the optical fiber total bundling device 340, the smaller the single optical fiber is, the denser the optical fiber arrangement on the optical fiber total bundling device 340 is, and the smaller the difference between the light emitting points on the final line light source is.
The spectrum curves and powers of all L ED lamp groups in the implementation mode are different, light emitted by all L ED lamp groups is respectively coupled into corresponding optical fibers, the spectrum curves and powers of all L ED lamp groups can be adjusted, and finally the light is overlapped to form a required linear light source.
When the material of the object to be detected is changed, the intensity of reflected light is different due to different reflectivity of different material surfaces, and when the reflected light is too weak or too strong, the detector has the maximum detection sensitivity on the received light by adjusting the intensity of the light source, on the other hand, because the response of the detector to light changes along with the wavelength, the detection sensitivity of the system to different wavelengths is different, and finally the light emitted by the linear light source has a required energy spectrum curve by adjusting L ED lamp groups.
The utility model discloses can adjust the spectral curve and the power of each L ED lamp group, make the light intensity of ruddiness stronger in the final emergent light, therefore when measuring system uses the range of ruddiness to measure, the red light intensity of reflection is stronger, guarantees the performance of system, and the effective range can not shorten when measuring system uses the range of ruddiness to measure.
The second implementation mode comprises the following steps:
referring to fig. 5, the broad spectrum line light source includes a plurality of linear L ED wafers 530 coated with phosphor layers 540 on their surfaces and electrodes 510 connected to both sides of the linear L ED wafers, L ED wafers 530 coated on a substrate 520, each linear L ED wafer 530 emits light after being connected to the electrodes 510, and different types of linear L ED wafers 530 emit different lights, the phosphor layers on the phosphor layers 540 are excited to emit light when irradiated by light emitted from the linear L ED wafers 530, and the different types of phosphor layers or phosphor layers with different sizes affect the intensity or spectral distribution of the emitted light, the linear 5639 ED wafers 530 are used to excite the phosphor layers 540 to emit linear lights, and the spectral curve of the linear L ED wafers 530 can be adjusted or the types or sizes of the phosphor layers can be adjusted as required to obtain the required linear white light.
Specifically, as shown in fig. 5, the broad spectral line light source further includes a substrate 520, the linear L ED wafers are disposed on the substrate 520, a plurality of linear L ED wafers 530 are aligned on the substrate 520, or a plurality of linear L ED wafers 530 are cut from L ED wafers, and then aligned on the substrate, each linear L ED wafer 530 may be connected in parallel or in series, the linear L ED wafers 530 connected in series or in parallel emit linear light after being powered on, the emitted linear broad spectral light beam irradiates the phosphor layer 540, and the linear L ED wafer 530 excites the phosphor layer 540 to emit a light beam to be incident on the cylindrical mirror to form a linear broad spectral light beam, the phosphor layer coated on the surface of the linear L ED wafer may be one or more layers.
Because the divergence angle of the light emitted by the fluorescent powder layer 540 is large, the outer diameter of the dispersion lens group is large when the dispersion lens group is directly used in the measurement system, and in order to ensure the energy utilization rate of the measurement system and reduce the volume of the dispersion lens group, the light emitted by the luminous part of the linear light source can be shaped, the divergence angle is reduced, and the volume of the dispersion lens group is smaller. In one embodiment, a cylindrical mirror is used to shape the line-shaped light emitted from the phosphor layer 540 such that its divergence angle is reduced, for example: the divergence angle of the incident light is 60 deg., and after shaping, the divergence angle is 10 deg., which is not much different from the divergence angle of the optical fiber. After shaping, the line light source becomes a line-type wide-spectrum light source with strong luminous intensity and small divergence angle, and can be used in the spectrum confocal measurement system in the embodiment to more accurately obtain the height information and the position information of the surface of the measured object.
The third implementation mode comprises the following steps:
as shown in fig. 6, the broad spectral line light source includes: the laser device comprises a laser 620 emitting linear laser and a fluorescent plate 610 arranged in front of the laser, wherein the linear laser emitted by the laser 620 irradiates the fluorescent plate 610 to obtain a linear wide-spectrum light beam.
Specifically, the laser emitted by the laser is linear laser or the light emitted by the laser is modulated into linear laser by an optical device, and the fluorescent plate is: phosphor/ceramic hybrid board.
Further, the linear laser is a monochromatic light, and the monochromatic linear light source is used for exciting the fluorescent powder to emit light; the fluorescent powder/ceramic mixed plate is formed by mixing and sintering fluorescent powder and ceramic powder. After the monochromatic light source irradiates the plate, a multicolor broad spectrum light source is emitted.
The phosphor emits light when irradiated with light. The fluorescent powder/ceramic mixed plate is irradiated by a monochromatic line light source, the fluorescent powder can emit light after being subjected to light radiation, and a wide spectral line light source meeting the requirement is emitted by adjusting the type and the particle size of the fluorescent powder.
Exciting the fluorescent powder to emit wide-spectrum linear light by using linear blue light or violet light with the line length of 70mm and the line width of 50 mu m, wherein the type of the fluorescent powder is yellow fluorescentYAG light: ce3+And red phosphor Ca2si5N8：Eu2+A mixture of (a).
Linear blue laser is used for exciting the fluorescent powder, and the fluorescent powder is made of yellow fluorescent powder YAG: ce3+The light source emitted by the LED is low in 600nm distribution, lacks of a spectrum of a red part, is a wide-spectrum light source with high color temperature, and is poor in color rendering property. In the presence of yellow fluorescent powder YAG: ce3+Middle doped pure nitride red phosphor Ca2si5N8：Eu2+The red part spectrum can be effectively supplemented to obtain a uniform wide-spectrum line light source, and the color temperature is low and the color rendering property is good.
The blue light is used for excitation, and yellow, red and green fluorescent powder is added according to the requirement in practical application to adjust the linear light source spectrum curve emitted by the fluorescent powder. The size of the phosphor particles mainly affects the luminous efficiency, and the phosphor particles used are spheroidal with the size of 5-20 μm.
The utility model discloses well spectroscope 2 places behind wide spectrum line source 1, before dispersion lens group 3, the wide spectrum beam of line type that wide spectrum line source 1 launches passes through behind spectroscope 2, 50% sees through, incides dispersion lens group 3, combines fig. 2 to show, in a realization, paints the extinction material on the side relative with the play plain noodles that sends the reflected beam to the filter, forms light-absorbing component 210, uses light-absorbing component 210 to eliminate the stray light that reflects to this face.
The dispersive lens group 3 uses a combination of two or more optical lenses made of different materials to focus incident light, and may be a spherical lens or an aspherical lens. The chromatic dispersion lens group uses optical lens combinations of different materials to enable the polychromatic light to generate axial chromatic dispersion and focus light with different wavelengths at different heights, so that the corresponding relation between the wavelengths and the focal lengths is established.
In particular, as shown in fig. 7, since the optical characteristics of the dispersive lens group 3 depend on the wavelength, a series of continuously distributed focused spots of different wavelengths corresponding to different focal depths, so-called color coding, are formed on the optical axis. The utility model discloses a dispersion lens group 3's optical lens both available spherical lens also can use aspherical lens. The designed dispersive lens group 3 can meet the requirement that the performance in the full field of view range is within the diffraction limit, thereby ensuring that the measurement resolution of the spectrum confocal system to all points on the confocal line meets the requirement.
When the object to be measured is placed in the color coding section, based on the principle that the light path is reversible, the reflected light beam will pass through the dispersive lens group 3 again in the direction opposite to the incident light beam, and then reach the filter 4 after being reflected by the spectroscope 2.
Furthermore, the optical filter 4 plays a crucial role in the structure, the optical filter 4 can filter stray light on a non-focusing layer, and only light focused on the surface of a measured object can reach the line spectrometer 6 through the optical filter 4, so that the influence of the stray light on the imaging quality is greatly reduced, and the signal-to-noise ratio of the system is greatly improved. Therefore the utility model discloses a confocal system of spectrum has outstanding spatial resolution, is insensitive to stray light on every side moreover.
Combine fig. 8 to show, shine the measured object light on the surface, the light that reflects out is in proper order after dispersion lens group 3 and spectroscope 2, incides in the light filter 4, light filter 4 adopts the slit, and the slit can the filtering stray light, and slit size very big degree has influenced the system signal to noise ratio of the confocal system of spectrum, the utility model discloses an optimal design uses 1000X 20 um's slit according to the imaging performance of dispersion lens group and light source size integrated decision.
The line spectrometer is internally provided with an area array CCD or COMS detector, and the processor obtains spectral information from the X direction of the area array CCD or COMS detector so as to obtain corresponding height information of a measured object; the processor obtains the position information on the confocal line from the Y direction of the area array CCD or COMS detector. Therefore, the utility model discloses once only obtained the positional information and the height information of all points on a confocal line, only need carry out the position and the height information that the whole measured object surface just can be obtained to one-dimensional scanning again to realize the quick profile measurement of high accuracy.
The processor selected in this embodiment simultaneously obtains wavelength information (i.e., height information) in the X direction and position information in the Y direction, and obtains position information of the object to be measured by the wavelength information in the X direction and the position information in the Y direction.
The utility model provides a confocal measurement system of spectrum is a system that has high accuracy, and object profile is measured to the high efficiency. By utilizing the spectrum confocal principle, the line measurement of the height and the position of the surface of the object is realized. By utilizing the reversible principle of the light path and adopting a coaxial optical system, the cost is effectively reduced. The embodiment can be applied to the fields of nondestructive measurement, precision measurement and the like.
Example 2
On the basis of the above system, the present embodiment further discloses a spectral confocal measurement method, as shown in fig. 9, the measurement method includes:
step S1, outputting linear wide spectrum light beam by using the wide spectrum line light source;
step S2, separating a transmission beam from the linear broad spectrum beam by using a spectroscope;
step S3, receiving the transmitted light beam transmitted by the spectroscope through a dispersion lens group, dispersing the transmitted light beam, and focusing the light with different wavelengths to different heights; when the surface of the measured object is positioned in the dispersion focusing range of the dispersion lens group, the dispersion lens group receives the reflected beam reflected by the surface of the measured object and transmits the reflected beam to the spectroscope;
step S4, after the reflected light beam passes through the spectroscope for several times, reflecting the reflected light beam to the optical filter, filtering the reflected light beam in the target wavelength range by using the optical filter, and focusing the reflected light beam on the line spectrometer by using the focusing lens group;
step S5, receiving the reflected light beam by the line spectrometer, acquiring the spectral information of the reflected light beam and the position information of different points on a confocal line, and transmitting the acquired spectral information and the position information of different points on the confocal line to a processor;
and step S6, obtaining the position information and the height information of the measured object by the processor according to the spectral information and the position information of different points on the confocal line.
Compared with the prior art, the embodiment of the utility model provides a have following advantage:
1. the utility model discloses the line source adopts the L ED banks that a plurality of groups spectral curve and power are different, the light that L ED banks sent is got into optic fibre by the coupling, optic fibre closely arranges and forms a fine rule on optic fibre total buncher, form the line source, the spectral curve and the power of each L ED banks can be adjusted, the line type light source that final stack formed needs, when measuring certain special materials, if the reflectivity is very low, the reflectivity is very high, to materials such as the light reflectivity nonconformity of different wavelengths, the spectral curve and the power of each L ED banks of this light source adjustable, make the system can carry out the measurement of high accuracy and high sensitivity to the measured object, reduced because the influence of the characteristic of measured object itself to whole measurement system precision.
2. The single-point spectrum confocal system measurement in the prior art is changed into the linear spectrum confocal system measurement, the position information and the height information of all points on one confocal line are obtained at one time, and the position information and the height information of the surface of the whole object to be measured can be obtained only by one-dimensional scanning, so that the high-precision rapid object surface profile measurement is realized.
By utilizing the reversible principle of an optical path and using a coaxial system, light rays are reflected back to the dispersive lens group 3 from a measured object and are focused again to enter the spectrometer for data analysis. So that one dispersive lens group 3 is used twice, and the cost is effectively reduced. Therefore, the utility model has the characteristics of high accuracy, high sensitivity, high efficiency, low cost, etc.
3. A light-absorbing part is arranged on one side of the spectroscope, and the light-absorbing part is used for absorbing the received light, so that stray light of the measuring system is reduced; and the light filter filters the reflected light which is not focused on the confocal line, so that the background noise is reduced, and the signal-to-noise ratio of the system is improved.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. The invention is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is only limited by the appended claims
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (8)
1. A spectroscopic confocal measurement system, comprising: the system comprises a wide-spectrum line light source, a spectroscope, a dispersion lens group, a filter, a focusing lens group, a line spectrometer and a processor;
the wide-spectrum line light source is used for outputting linear wide-spectrum light beams;
the spectroscope is used for transmitting part of light rays in the linear wide spectrum light beam and outputting a transmitted light beam;
the dispersion lens group is used for receiving the transmitted light beams transmitted by the spectroscope and dispersing the transmitted light beams, and the light with different wavelengths is focused to different heights; when the surface of the measured object is positioned in the dispersion focusing range of the dispersion lens group, the dispersion lens group receives the reflected beam reflected by the surface of the measured object and transmits the reflected beam to the spectroscope;
the spectroscope is also used for receiving the reflected light beam transmitted by the dispersive lens group and reflecting the reflected light beam to the optical filter;
the optical filter is used for receiving the reflected light beam reflected by the spectroscope and filtering out the reflected light beam in a target wavelength range;
the focusing lens group is used for receiving the reflected light beam filtered by the optical filter and focusing the reflected light beam on the line spectrometer;
the line spectrometer is used for receiving the reflected light beam, acquiring the spectral information of the reflected light beam and the position information of different points on the confocal line, and transmitting the acquired spectral information and the position information of the different points on the confocal line to the processor;
and the processor is used for obtaining the position information and the height information of the measured object according to the spectral information and the position information of different points on the confocal line.
2. The spectroscopic confocal measurement system of claim 1 wherein the filter is disposed on one side of the beam splitter and the other side of the beam splitter is provided with a light absorbing member for absorbing reflected light incident on its surface.
3. The confocal measurement system for spectrum light according to claim 1 or 2, wherein the broad spectrum line light source comprises a plurality of optical fiber groups, an optical fiber total buncher connected to one end of the optical fiber groups, and optical fiber sub bunchers correspondingly connected to the other ends of the optical fiber groups, one end of each optical fiber sub buncher is correspondingly connected with an L ED lamp group, and the light emitted by each L ED lamp group is broad spectrum polychromatic light.
4. The spectroscopic confocal measurement system of claim 3, wherein at least one optical fiber is disposed within each optical fiber group, the optical fibers in each optical fiber group are staggered in the optical fiber total buncher, and the light emitted by the L ED lamps in each L ED lamp group is a broad-spectrum polychromatic light.
5. The spectroscopic confocal measurement system of claim 4, wherein the plurality of optical fibers in each optical fiber group are arranged in the optical fiber bundling device in a linear arrangement, a square array arrangement or a circular array arrangement.
6. The spectroscopic confocal measurement system of claim 1, wherein the broad spectral line light source comprises a linear L ED wafer with phosphor layers coated on multiple surfaces.
7. The spectroscopic confocal measurement system of claim 6, wherein the broad-spectrum line light source further comprises: a substrate and a cylindrical mirror;
the linear L ED wafer is disposed on the substrate, and the linear L ED wafer excites the light beam emitted by the phosphor layer to be incident on the cylindrical mirror, so as to form a linear broad spectrum light beam.
8. The spectroscopic confocal measurement system of claim 1, wherein the broad-spectrum line light source is a line laser and a phosphor plate disposed in front of the laser, the line laser emitted by the laser being directed onto the phosphor plate to produce a line-shaped broad-spectrum light beam.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113281343A (en) * | 2021-05-31 | 2021-08-20 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
| WO2022048311A1 (en) * | 2020-09-02 | 2022-03-10 | Oppo广东移动通信有限公司 | Distance measuring apparatus, distance measuring method, camera and electronic device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022048311A1 (en) * | 2020-09-02 | 2022-03-10 | Oppo广东移动通信有限公司 | Distance measuring apparatus, distance measuring method, camera and electronic device |
| EP4194897A4 (en) * | 2020-09-02 | 2024-01-24 | Guangdong Oppo Mobile Telecommunications Corp., Ltd. | Distance measuring apparatus, distance measuring method, camera and electronic device |
| CN113281343A (en) * | 2021-05-31 | 2021-08-20 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
| CN113281343B (en) * | 2021-05-31 | 2022-12-27 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
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