CN100401032C - Barometric pressure sensor - Google Patents
Barometric pressure sensor Download PDFInfo
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- CN100401032C CN100401032C CNB038100673A CN03810067A CN100401032C CN 100401032 C CN100401032 C CN 100401032C CN B038100673 A CNB038100673 A CN B038100673A CN 03810067 A CN03810067 A CN 03810067A CN 100401032 C CN100401032 C CN 100401032C
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
- G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
A barometric pressure sensor (100) including a base layer (102), a sensor layer (110) and a reference layer (120). The base layer has a passageway (104) between a pressure inlet (106) and a mounting face (108). The sensor layer is bonded by an insulating bond (114) to the mounting face and includes a conductive diaphragm (116). The reference layer is mounted on the sensor layer to form a reference vacuum cavity (122). The reference layer includes a conducting surface (124) facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.
Description
Technical field
The present invention relates to a kind of baroceptor, more particularly, relate to a kind of to be used for the baroceptor of industrial gage pressure transmitter.
Background technology
In industrial transmitter applications, the capacity type sensor typically is used for sensing pressure.Can make high precision and capacitive sensor repeatably.In the table meter forwarder of the difference of calculating pressure based on two absolute pressure sensor outputs electronically, the precision of sensor and repeatable to avoiding introducing error particular importance in subtraction process.Barometric pressure range is quite limited, typically is the 0.9-1.1 atmospheric pressure, and expectation uses the absolute sensor of relatively low cost to be used for sensing air pressure.Yet, have been found that low-cost absolute pressure sensor does not usually have precision and repeatability in the handling of fluids sensor.These low-cost sensors can be introduced unfavorable error in electronic subtraction process.
Thus, needing now can be with the baroceptor of low cost preparation, and this sensor has high repeatable in the air pressure range that limits.
Summary of the invention
According to an aspect of the present invention, it provides a kind of pressure transducer, comprising:
Basic unit, it is around being suitable for receiving the inlet of pressure and the passage between the installation surface in the basic unit;
Sensor layer, it has the first surface that is bonded to installation surface by the insulation adhesive layer, and described sensor layer comprises the conductive diaphragm with channel alignment;
Reference layer, it is assemblied in the reference vacuum cavity of aiming at conductive diaphragm with formation on the sensor layer, and described reference layer comprises towards the conductive diaphragm of crossing over reference vacuum cavity to form the conduction surfaces of pressure sensing capacitor; And
Described sensor layer further comprises first insulation course on the second surface of being positioned at around described conductive diaphragm, and described reference layer further comprises second insulation course that is bonded to described first insulation course.
According to a further aspect in the invention, it provides a kind of gage pressure transmitter that comprises baroceptor, and this baroceptor comprises:
Basic unit, it is around being suitable for receiving the inlet of pressure and the passage between the installation surface in the basic unit;
Sensor layer, it has the first surface that is bonded to installation surface by the insulation adhesive layer, and described sensor layer comprises the conductive diaphragm with channel alignment; And
Reference layer, it is assemblied in the reference vacuum cavity of aiming at conductive diaphragm with formation on the sensor layer, and described reference layer comprises towards the conductive diaphragm of crossing over reference vacuum cavity to form the conduction surfaces of pressure sensing capacitor; And
Described sensor layer further comprises first insulation course on the second surface of being positioned at around described conductive diaphragm, and described reference layer further comprises second insulation course that is bonded to described first insulation course.
Based on the commentary of reading of describing in detail below and relevant drawings, embody of the present invention these and will become clear with various other features and advantage.
Description of drawings
Fig. 1 shows the cross-sectional view of first embodiment of capacitive absolute pressure sensor.
Fig. 2 shows the cross-sectional view of second embodiment of capacitive absolute pressure sensor.
Fig. 3 shows the detailed cross-sectional view of first barrier film of capacitive absolute pressure sensor.
Fig. 4 shows the detailed cross-sectional view of second barrier film of capacitive absolute pressure sensor.
Fig. 5 shows the detailed cross-sectional view of the 3rd barrier film of capacitive absolute pressure sensor.
Fig. 6 shows the mask of the upper face that is used for sensor layer shown in Figure 5.
Fig. 7 shows the mask of the lower surface that is used for sensor layer shown in Figure 5.
Fig. 8 shows the mask of the upper face that is used for reference layer shown in Figure 5.
Fig. 9 shows the mask of the lower surface that is used for reference layer shown in Figure 5.
Figure 10 shows the part broken away view of gage pressure transmitter.
Figure 11 shows the calcspar of gage pressure transmitter.
Embodiment
Gage pressure transmitter (gage pressure transimitter) is generally used for measuring the quantity that is stored in the liquid in the Sheng liquid device.Gage pressure transmitter comprises the electronic circuit of the forwarder output of indicating gauge pressure, or in other words, poor between the hydraulic pressure of sensing and the atmospheric pressure of sensing.Gage pressure transmitter has the processing pressure inlet that is connected to the opening that closes on Sheng liquid device bottom.Gage pressure transmitter also has atmospheric connection or opens at the outlet of atmosphere.Use known formula to export the fluid level that to calculate during containing the liquid device from the gauge pressure of forwarder.
Use is coupled to the difference pressure transducer of handling pressure and atmospheric pressure can construct gage pressure transmitter.Alternately, can use two absolute pressure sensor, utilize absolute pressure sensor and atmospheric another absolute pressure sensor of sensing of a sensing hydraulic.When using two absolute pressure sensor, based on two sensor outputs, the circuit electronics in forwarder calculates pressure difference (gauge pressure).
In industrial transmitter applications, the capacitive character type sensor typically is used for sensing pressure.Capacitive sensor can be made has high precision and repeatability.Calculating in the table meter forwarder of pressure difference based on two absolute pressure sensor output electronics, the repeatability of sensor is important especially for avoiding introducing error in subtraction process.Barometric pressure range is quite limited, typically is the 0.9-1.1 atmospheric pressure, and expectation uses the absolute sensor of relatively low cost to be used for sensing air pressure.Yet, have been found that low-cost absolute pressure sensor does not usually have the repeatability in the handling of fluids sensor.These low-cost sensors can be introduced unfavorable error in electronic subtraction process.
As following described in Fig. 1-11, its provide a kind of can be with the baroceptor of low cost preparation, and this sensor has high repeatable in limited barometric pressure range.The known treatment of selecting (being also referred to as microsystem technology (MST)) of use microstructure preparation is the preparation in quantity baroceptor easily, such as mask method, doping, etching, thin film deposition or the like.These known processing comprise the multiple processing of coming according to the preparation transformation of integrated circuit.
Fig. 1 shows by multilayer and forms also the pressure transducer 100 of preparation in quantity easily.Pressure transducer 100 comprises basic unit 102, and it is around the path 10 4 between the installed surface 108 in inlet 106 and the basic unit.Inlet 106 is suitable for being bonded to the table meter forwarder enclosure surface of pressing the hole (as shown in figure 10) of P from table meter forwarder chamber atmosphere outside around providing.
Pressure transducer 100 also comprises sensor layer 110, and it has the first surface 112 that is bonded to installed surface 108 by insulation adhesive layer 114.Sensor layer 110 comprises with path 10 4 to be aimed to receive the conductive diaphragm 116 of pressure P.
Pressure transducer 100 comprises reference layer 120, and it is installed on the sensor layer 110 to form the reference vacuum cavity 122 of aiming at conductive diaphragm 116.Reference layer 120 comprises conductive surface 124, its towards the conductive diaphragm 116 of crossing over reference vacuum cavity 122 to form pressure sensing capacitor.Reference layer 120 is fully thick so that reference layer basically can be owing to the atmospheric variation around sensor 100 bending or deflection.Reference layer 120 preferably includes table top 121, and it is slightly outstanding and towards conductive diaphragm 116.Table top 121 has the height of selecting, so that desirable space to be provided between the condenser armature in vacuum cavity 122.The height that can select table top 121 is to proofread and correct the thickness of binding layer 126,130.Except table top 121, perhaps, can on sensor layer 110, be equipped with second table top 123 so that the spatial control of capacitor to be provided as the substituting of table top 121.
First electricity is arranged on the sensor 110 in conjunction with liner 132.Electrically contact and be electrically connected to sensor layer 110 in conjunction with liner 132, and provide like this to the connection of the flat board or the pole plate of pressure sensing capacitor.Second electricity electrically contacts in conjunction with liner 134 and is electrically connected to the conduction surfaces 124 that passes on the reference layer 120, and provides like this to another flat board of pressure sensing capacitor or the connection of pole plate.
In preferably being provided with, sensor layer 110 is included in the shelf part 111 on the side of extending above reference layer 120, and at least one electricity is arranged on the shelf part in conjunction with liner 132.The configuration of shelf part 111 provides the access that makes things convenient for that is used for johning knot zygonema 133, and allows in conjunction with liner 132 away from conductive diaphragm 116, transmits thereby reduce from joint line 133 to conductive diaphragm 116 stress.
In preferred disposition, sensor layer 110 further comprises the second channel 136 that extends to insulation adhesive layer 114 from reference vacuum cavity 122.After reference layer 120 and sensor layer 110 combine, in a vacuum basic unit 102 is bonded to sensor layer 110 then.Insulation adhesive layer or fused layers 114 sealing second channels 136 are to provide permanent vacuum in reference vacuum cavity 122.Second channel 136 is laser drill preferably.
Can prepare pressure transducer 100 economically to be used for baroceptor as opereating specification with about 0.9-1.1 standard atmospheric pressure.
Fig. 2 shows and pressure sensing shown in Figure 1 100 similar pressure transducers 150, yet, pressure transducer 150 be included as by anodic bond 180 anodes be bonded to the reference layer 170 of the insulating glass of sensor layer 160.
In Fig. 2, basic unit 152 is around inlet 156 that receives pressure P and the passage 154 between the installation surface 158 in the basic unit 152.
First electricity is deposited on the conductive layer 189 of the conduction surfaces 174 that is connected to second flat board that forms pressure transducer or electrode in conjunction with liner 184.First electricity is arranged at insulated channel 185 on the sensor layer 160 in conjunction with liner 184 and conductive layer 189.Conductive layer 189 electrically contacts by metal bridge 187 and conduction surfaces 174.
Second electricity is arranged on the sensor layer 160 in conjunction with liner 182, and is connected to the flat board of formation pressure transducer capacitor or the conductive diaphragm 166 of electrode like this.Second electricity electrically contacts in conjunction with liner 182 and sensor layer 160.
Preferably form in conjunction with liner 182,184 by aluminium.Insulated channel 185 is preferably formed by pyrolytic oxide.Metal bridge 187, conductive layer 189 and conduction surfaces 174 are all preferably formed by nichrome.Sensor layer 160 comprises the shelf part 161 that surpasses reference layer 170 extensions, and electricity is arranged on the shelf part 161 in conjunction with liner 182,184.
Fig. 3-4 shows in detail the cross-sectional view such as two different embodiment of the conductive diaphragm 116 of the capacitive absolute pressure sensor of the pressure transducer of describing 100 in Fig. 1.Fig. 3-4 does not have not proportionally, but its vertical scale with amplification is with the concrete feature of better description.In addition, Fig. 3-4 shows the conductive diaphragm 116 in the overpressure conditions process.Overpressure conditions is the environment that wherein pressure P has surpassed the standard measurement frame of pressure transducer.Under overpressure conditions, conductive diaphragm 116 is from its standard flat shape (by a dotted line 194,196 describe) deflection, and static relatively, and the conduction surfaces 124 by reference layer 120 is to its support.In Fig. 3-4, on membrane surface, form oxide layer 190.In addition, in Fig. 4, on conduction surfaces 124, form additional oxide layer 192.Oxide layer 190,192 preventions conduction surfaces 124 in the overpressure conditions process is short-circuited to conductive diaphragm 116.In the overvoltage process, support conductive diaphragm 116, thereby it can not broken, and oxide layer 190,192 short circuits of prevention in the overpressure conditions process.
Fig. 5-9 shows and the pressure transducer 100 similar pressure transducers of describing in Fig. 1 200, yet pressure transducer 200 comprises the feature that some are additional.Particularly, comprise the groove 201 that is used to reduce rest capacitance.Can comprise that additional mask insulation course 203 is to provide the performance of the enhancing extreme above temperature.The passage (Fig. 6) that can add the blind alley shape in the reference layer 120 between reference vacuum cavity 122 and the second channel 136 is to reduce the motion from the remains of laser drill.
Fig. 5 shows by multilayer and forms and use baroceptor 200 such as the known treatment of selecting (being also referred to as microsystem technology (the MST)) preparation in quantity easily of the microstructure of masking method, doping, etching, thin film deposition or the like preparation.The pressure transducer of describing in Fig. 5 200 is similar with the pressure transducer of describing in Fig. 1 100.The reference number that among Fig. 5 use identical with the reference number that uses in Fig. 1 represented identical or similar feature.
In Fig. 5, pressure transducer 200 comprises a plurality of grooves 201 (also describing with 372,374,376,378) in Fig. 9.
In a preferred embodiment, shelter second insulation course 130 forming the shape of mask, and reference layer 120 also comprises the three insulation insulation course 203 relative with second insulation course 130.The 3rd insulation course 203 is sheltered the mask shape substantially the same with second insulation course 130.The 3rd insulation course 203 is aimed at second insulation course 130.Work as temperature change, first and second insulation courses 203,130 expand with the expansion ratio of the material of main part that is different from reference layer 120.The difference of expansivity is created in the stress in the reference layer 120, yet, be tending towards offsetting from two essentially identical layer 203,130 stress.The feature of the mask with substantially the same mask shape is described in further detail below in conjunction with Fig. 8-9.
In a further advantageous embodiment, on sensor layer 110, be equipped with thin oxide layer 217.Oxide layer 217 is similar with the oxide layer of describing in Fig. 3-4 190, and has stoped the short circuit in the overvoltage process.
Fig. 6-9 shows the various masks that are used for the preparation sensor 200 described at Fig. 5.Be included among Fig. 5 with reference to L (left side) and R (right side) left side and right side in order to indication sensor 200.Be included in correspondence among Fig. 6-9 with reference to L and R in order to the orientation of indication with respect to the various masks of the sensor among Fig. 5 200.The mask of describing in Fig. 6-9 provides the additional detail in shape of various features shown in Figure 5.The mask of describing in Fig. 6-9 is used to prepare a sensor.It will be apparent to those skilled in the art that utilization a plurality of other sensors on wafer can the preparation in quantity sensor, and then to its cutting.Under the situation of preparation in quantity, in enough greatly with the regular array on the mask of finishing entire wafer, be typically repeated in the single mask of describing among Fig. 6-9.
Fig. 6 shows the mask 300 of the second surface 128 (upper face) that is used for sensor layer shown in Figure 5 110.Mask 300 comprises the zone 302 that is generally rectangle, and this rectangular area provides the correspondingly configured surface of exposing (not oxidation) silicon.On this exposed silicon zone 302, deposit first electricity subsequently in conjunction with liner 132.Mask 300 also comprise cover on the conductive diaphragm 116 and also define with the zone 304 cul-de-sac region of adjoining 306 zone 304.Cul-de-sac region 306 provides the open approach between second channel 136 and the reference vacuum cavity 122.Mask 300 comprises the irregular shaped region 308 that defines first insulation course 126, and this first insulation course is around conductive diaphragm zone 304 and cul-de-sac region 306.
Fig. 7 shows the mask 320 of the lower surface that is used for sensor layer shown in Figure 5 110.Mask 320 comprises zone 322, its define anisotropic etching in (100) directional crystal surface of silicon to form the zone of barrier film 116.Mask 320 also comprises the zone 324 of left side oxidation and defines the positioned area 326 that is used for second channel 136, is typically laser drill.
Fig. 8 shows the mask 340 of the upper face that is used for reference layer shown in Figure 5 120.Mask 340 comprises the zone 342 that defines mask insulation course 203.Mask 340 also comprises has determined to limit the zone 344 of second electricity in conjunction with the boundary line in the zone 346 of liner 134.
Fig. 9 shows the mask 360 of the lower surface that is used for reference layer shown in Figure 5 120.Mask 360 comprises the zone 362,364,366 that defines the anisotropic etching groove.These anisotropic etching grooves provide and have been used for the line 368 that stress is concentrated, thereby can freely cut the sensor 200 of preparation in quantity from the wafer of a plurality of sensors easily.In Fig. 5, the fractionation part of reference layer 120 is described with dotted line.
In a preferred embodiment, cul-de-sac region 387 comprises the turning 388 of at least 90 degree as described.
Figure 10 shows the part broken away view of the gage pressure transmitter 400 that comprises baroceptor 402.Usually as described above in conjunction with Fig. 1-9 structure baroceptor 402.Gauge pressure transducer 400 comprises shell 404, the baroceptor 402 that its encapsulation connects by the lead 406 to the printed circuit board (PCB) 408 that comprises change-over circuit.Below in conjunction with the change-over circuit on the more detailed description printed circuit board (PCB) 408 of Figure 11.
Change-over circuit on the printed circuit board (PCB) 408 produces the electricity output of representing gauge pressure on the lead 414.Lead 414 is connected to the terminal box 415 that also is used as sealed feed-through.Shell 404 is to have the two compartment shells that make the partition wall 416 that electronics compartment 418 separates with field wire compartment 420.By corresponding threaded housing 430,432 each compartment 418,420 of sealing.Cable 422 connects terminal box 415 to the process control system (not shown) in remote position.The output of configuration electronics sends to be used for long distance, also become telemetry, and typically, be output as the form of standard at terminal box 415 places, such as the 4-20mA industrial treatment control system that is provided for showing counting whole excitations (energization) of forwarder 400.This 4-20mA industrial treatment control system can be included in the standard industry form, such as the superposed signal in the Hart agreement.Alternately, the output at terminal box 415 places can be positioned at industrial standard fieldbus form, such as Foudation Fieldbus, Profibus or the like.
Figure 11 shows the schematic block diagrams of the gage pressure transmitter 400 in Figure 10.Handling pressure transducer 410 is connected in the converter circuit 452 along the lead 412 to sigma delta (sigma delta) circuit 450.Baroceptor 402 is connected in the converter circuit 452 along the lead 412 to sigma delta circuit 450.
Sigma delta circuit 450 provides representative along the digital signal to the processing pressure that is not compensated of the line 454 of handling pressure compensating circuit 456.Sigma delta circuit 450 provides representative along the atmospheric digital signal that is not compensated to the line 458 of atmospheric pressure compensating circuit 460.Handling pressure compensating circuit 456 provides the output of the pressure of compensation deals to the line 466 of Difference Calculation circuit 468.Atmospheric pressure compensating circuit 460 provides the output that compensates air pressure to the line 470 of Difference Calculation circuit 468.Difference Calculation circuit 468 calculates compensation deals pressure and has compensated poor between the air pressure, and it is the accurate indication of gauge pressure 414.The compensation of implementing by circuit 456,460 comprises gain calibration and linearity correction.
In a preferred embodiment, change-over circuit also comprises the temperature sensor 475 that is connected to sigma delta circuit 450.In the preferred embodiment, sigma delta circuit 450 provides the output of the temperature of representing two compensating circuits 456,460.Compensating circuit 456,460 is compensates additionally then.
In preferred disposition, as the part realization compensating circuit 456,460 and the Difference Calculation circuit 468 of the embedding microprocessor system in gage pressure transmitter 400.
Sigma delta circuit 450 is simulating to digital conversion circuit of sigma delta type preferably.Converter circuit 452 compensation is from the reading of handling pressure transducer and the compensation reading from baroceptor, and by deducting the atmospheric pressure reading that has compensated and calculate difference from handling pressure readings.
Although the present invention has been described with reference to preferred embodiment, those skilled in the art recognize and can change form and details, as long as it does not break away from the spirit and scope of the present invention.
Claims (24)
1. pressure transducer comprises:
Basic unit, it is around being suitable for receiving the inlet of pressure and the passage between the installation surface in the basic unit;
Sensor layer, it has the first surface that is bonded to installation surface by the insulation adhesive layer, and described sensor layer comprises the conductive diaphragm with channel alignment;
Reference layer, it is assemblied in the reference vacuum cavity of aiming at conductive diaphragm with formation on the sensor layer, and described reference layer comprises towards the conductive diaphragm of crossing over reference vacuum cavity to form the conduction surfaces of pressure sensing capacitor; And
Described sensor layer further comprises first insulation course on the second surface of being positioned at around described conductive diaphragm, and described reference layer further comprises second insulation course that is bonded to described first insulation course.
2. according to the pressure transducer of claim 1, it is characterized in that described insulation adhesive layer comprises glass frit layer.
3. according to the pressure transducer of claim 1, it is characterized in that described conductive diaphragm comprises oxide layer.
4. according to the pressure transducer of claim 3, it is characterized in that conduction surfaces supports oxide layer under overpressure conditions.
5. according to the pressure transducer of claim 1, it is characterized in that:
Shelter second insulation course forming the mask shape, and reference layer also comprises three insulation course relative with second insulation course, shelter the 3rd insulation course with the mask shape identical in fact with second insulation course.
6. according to the pressure transducer of claim 1, it is characterized in that:
Reference layer and sensor layer comprise silicon, and first and second insulation courses comprise silicon dioxide, and with its melted join together.
7. according to the pressure transducer of claim 1, it is characterized in that:
Reference layer comprises pyroceram, and the pyroceram anode be bonded to sensor layer.
8. according to the pressure transducer of claim 1, comprise that further first electricity that is arranged on the sensor layer and is connected to pressure sensing capacitor is in conjunction with liner.
9. pressure transducer according to Claim 8 comprises that further second electricity that is connected to pressure sensing capacitor is in conjunction with liner.
10. according to the pressure transducer of claim 9, it is characterized in that:
First electricity electrically contacts in conjunction with liner and sensor layer, and second electricity is arranged on the pyrolytic oxide insulated channel on the sensor layer in conjunction with liner, and this second electricity electrically contacts in conjunction with liner and conduction surfaces.
11. the pressure transducer according to claim 1 is characterized in that:
Sensor layer further comprises the second channel that extends to the insulation adhesive layer from reference vacuum cavity.
12. the pressure transducer according to claim 11 is characterized in that, second channel is a laser drill.
13. the pressure transducer according to claim 12 is characterized in that: the shaping reference vacuum cavity is to comprise the blind alley that is directed to laser drill.
14. the pressure transducer according to claim 13 is characterized in that, described blind alley comprises the turning of at least 90 degree.
15. the pressure transducer according to claim 1 is characterized in that, described reference layer comprises at least one groove of facing sensing device layer.
16. the pressure transducer according to claim 1 is characterized in that, described reference layer comprises the table top towards conductive diaphragm.
17. the pressure transducer according to claim 1 is characterized in that:
Sensor layer comprises the shelf part that surpasses the reference layer extension, and at least one electricity is set in conjunction with liner on described shelf part.
18. the pressure transducer according to claim 1 is characterized in that, described pressure transducer is to have the baroceptor of the atmospheric opereating specification of 0.9-1.1 at least.
19. a gage pressure transmitter that comprises baroceptor, this baroceptor comprises:
Basic unit, it is around being suitable for receiving the inlet of pressure and the passage between the installation surface in the basic unit;
Sensor layer, it has the first surface that is bonded to installation surface by the insulation adhesive layer, and described sensor layer comprises the conductive diaphragm with channel alignment; And
Reference layer, it is assemblied in the reference vacuum cavity of aiming at conductive diaphragm with formation on the sensor layer, and described reference layer comprises towards the conductive diaphragm of crossing over reference vacuum cavity to form the conduction surfaces of pressure sensing capacitor; And
Described sensor layer further comprises first insulation course on the second surface of being positioned at around described conductive diaphragm, and described reference layer further comprises second insulation course that is bonded to described first insulation course.
20. the gage pressure transmitter according to claim 19 further comprises:
The forwarder shell, described forwarder shell has the atmospheric pressure oral area that is incorporated into inlet.
21. the gage pressure transmitter according to claim 20 further comprises:
Be arranged at the special teflon connector of porous in the atmospheric pressure oral area.
22. the gage pressure transmitter according to claim 19 further comprises:
Handle pressure transducer; And
Be connected to the change-over circuit of handling pressure transducer and baroceptor, poor between described change-over circuit computing pressure and the atmospheric pressure.
23. the gage pressure transmitter according to claim 22 is characterized in that, converter circuit comprises the sigma delta analog-to-digital converter.
24. the gage pressure transmitter according to claim 22 is characterized in that:
Converter circuit compensation from the reading of handling pressure transducer and compensation from the reading of baroceptor and by deducting the atmospheric pressure reading that compensated to calculate difference from handling pressure readings
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/139,892 | 2002-05-06 | ||
| US10/139,892 US6647794B1 (en) | 2002-05-06 | 2002-05-06 | Absolute pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1650155A CN1650155A (en) | 2005-08-03 |
| CN100401032C true CN100401032C (en) | 2008-07-09 |
Family
ID=29269613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038100673A Expired - Fee Related CN100401032C (en) | 2002-05-06 | 2003-04-29 | Barometric pressure sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6647794B1 (en) |
| JP (1) | JP4726481B2 (en) |
| CN (1) | CN100401032C (en) |
| AU (1) | AU2003243175A1 (en) |
| DE (1) | DE10392622T5 (en) |
| WO (1) | WO2003095963A2 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2003095963A2 (en) | 2003-11-20 |
| CN1650155A (en) | 2005-08-03 |
| JP4726481B2 (en) | 2011-07-20 |
| US20030205089A1 (en) | 2003-11-06 |
| DE10392622T5 (en) | 2005-05-25 |
| WO2003095963A3 (en) | 2004-04-01 |
| AU2003243175A1 (en) | 2003-11-11 |
| US6647794B1 (en) | 2003-11-18 |
| JP2005524848A (en) | 2005-08-18 |
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