JPS6031645U - Capacitive pressure sensor - Google Patents
Capacitive pressure sensorInfo
- Publication number
- JPS6031645U JPS6031645U JP12413383U JP12413383U JPS6031645U JP S6031645 U JPS6031645 U JP S6031645U JP 12413383 U JP12413383 U JP 12413383U JP 12413383 U JP12413383 U JP 12413383U JP S6031645 U JPS6031645 U JP S6031645U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- electrode
- main body
- body substrate
- capacitive pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来より一般に使用されている従来例の構成説
明図、第２図は本考案の一実施例の構成説明図である。
１・・・本体基板、１６．１２・・・凹部、１１１・・
・移動電極、２・・・保護カバー、２１・・・固定電極
、３・・・カバー。FIG. 1 is an explanatory diagram of the configuration of a conventional example that has been generally used, and FIG. 2 is an explanatory diagram of the configuration of an embodiment of the present invention. 1...Main board, 16.12...Recess, 111...
- Moving electrode, 2...protective cover, 21...fixed electrode, 3...cover.
Claims (1)
と、該移動電極を覆って設けられ前記本体基板に接合さ
れた保護カバーと、該保護カバーに前記移動電極に対向
して設けられ該移動電極と、静電容量電極を構成する固
定電極とを具備する静電容量膨圧カセンサにおいて、 前記固定電極を囲み前記保護カバーに設けられた応力絶
縁機構を具備したことを特徴とする静電容量膨圧カセン
サ。[Claims for Utility Model Registration] A main body substrate, a moving electrode provided on one side of the main body substrate, a protective cover provided to cover the moving electrode and joined to the main body substrate, and a A capacitive turgor pressure sensor that is provided opposite to a movable electrode and includes a fixed electrode constituting a capacitance electrode and a stress insulating mechanism that surrounds the fixed electrode and is provided on the protective cover. A capacitive turgor pressure sensor characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12413383U JPS6031645U (en) | 1983-08-10 | 1983-08-10 | Capacitive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12413383U JPS6031645U (en) | 1983-08-10 | 1983-08-10 | Capacitive pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6031645U true JPS6031645U (en) | 1985-03-04 |
Family
ID=30283091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12413383U Pending JPS6031645U (en) | 1983-08-10 | 1983-08-10 | Capacitive pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6031645U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005524848A (en) * | 2002-05-06 | 2005-08-18 | ローズマウント インコーポレイテッド | Barometric pressure sensor |
| JP2013533974A (en) * | 2010-07-01 | 2013-08-29 | エム ケー エス インストルメンツ インコーポレーテッド | Capacitance sensor improvements |
-
1983
- 1983-08-10 JP JP12413383U patent/JPS6031645U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005524848A (en) * | 2002-05-06 | 2005-08-18 | ローズマウント インコーポレイテッド | Barometric pressure sensor |
| JP2013533974A (en) * | 2010-07-01 | 2013-08-29 | エム ケー エス インストルメンツ インコーポレーテッド | Capacitance sensor improvements |
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