JPS58731A - Electrostatic capacity type pressure sensor - Google Patents

Electrostatic capacity type pressure sensor

Info

Publication number
JPS58731A
JPS58731A JP9949881A JP9949881A JPS58731A JP S58731 A JPS58731 A JP S58731A JP 9949881 A JP9949881 A JP 9949881A JP 9949881 A JP9949881 A JP 9949881A JP S58731 A JPS58731 A JP S58731A
Authority
JP
Japan
Prior art keywords
capsule
forming
pressure sensor
capacity
type pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9949881A
Other languages
Japanese (ja)
Other versions
JPS6412329B2 (en
Inventor
Toru Ishida
Osamu Makino
Seiji Oikawa
Jun Yasuda
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Priority to JP9949881A priority Critical patent/JPS6412329B2/ja
Publication of JPS58731A publication Critical patent/JPS58731A/en
Publication of JPS6412329B2 publication Critical patent/JPS6412329B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

PURPOSE:To reduce floating capacity, and also to elevate both adjustment and a mass-production property, by forming an electrode on a surface where a substrate and a diaphragm are opposed to each other, storing it in a metallic case holding its airtightness, and forming a capsule part. CONSTITUTION:A capsule part 1 is formed byproviding thin film electrodes 13 which are both opposed to one surface of an alumina substrate 11 and one surface of an alumina substrate 12 forming a diaphragm, printing glass layers 14, joining together and seal-sticking them between said surfaces, subsequently, covering them with an aluminum case 2 through a silicone rubber ring 3, and caulking them mechanically. After that, it is incorporated in a housing 21 together with a circuit part 22 for converting the capacity to voltage, by which an electrostatic capacity type pressure sensor is formed. Accordingly, since the capsule part 1 is cased in advance, its floating capacity can be reduced, also durability of its structure is elevated, and its adjustment and mass production can be executed easily.
JP9949881A 1981-06-25 1981-06-25 Expired JPS6412329B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS6412329B2 (en) 1981-06-25 1981-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS6412329B2 (en) 1981-06-25 1981-06-25

Publications (2)

Publication Number Publication Date
JPS58731A true JPS58731A (en) 1983-01-05
JPS6412329B2 JPS6412329B2 (en) 1989-02-28

Family

ID=14248948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9949881A Expired JPS6412329B2 (en) 1981-06-25 1981-06-25

Country Status (1)

Country Link
JP (1) JPS6412329B2 (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (en) * 1985-10-11 1987-04-18
JPS62170538U (en) * 1986-04-18 1987-10-29
JPS6319527A (en) * 1986-05-05 1988-01-27 Texas Instruments Inc Pressure sensor with capacitive pressure transducer
JPS63228038A (en) * 1985-11-26 1988-09-22 Nippon Denso Co Ltd Semiconductor pressure transducer
US4896676A (en) * 1986-06-11 1990-01-30 Signal Technology Co., Ltd. Blood pressure measuring unit
JPH02190731A (en) * 1988-12-08 1990-07-26 Texas Instr Inc <Ti> High pressure package for pressure converter
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
JP2001133479A (en) * 2000-09-21 2001-05-18 Mitsubishi Electric Corp Inertia force sensor and method of manufacturing the same
WO2002018896A1 (en) * 2000-09-01 2002-03-07 Endress + Hauser Gmbh + Co. Kg Pressure measuring cell
JP2007502416A (en) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク Capacitive sensor
JP2010197057A (en) * 2009-02-23 2010-09-09 Kyocera Corp Base substance for pressure detection device and the pressure detection device
WO2014086512A1 (en) * 2012-12-03 2014-06-12 Robert Bosch Gmbh Pressure sensor module

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118283A (en) * 1978-01-23 1979-09-13 Motorola Inc Electromechanical pressure transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118283A (en) * 1978-01-23 1979-09-13 Motorola Inc Electromechanical pressure transducer

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (en) * 1985-10-11 1987-04-18
JPH0435778Y2 (en) * 1985-10-11 1992-08-25
JPS63228038A (en) * 1985-11-26 1988-09-22 Nippon Denso Co Ltd Semiconductor pressure transducer
JPS62170538U (en) * 1986-04-18 1987-10-29
JPS6319527A (en) * 1986-05-05 1988-01-27 Texas Instruments Inc Pressure sensor with capacitive pressure transducer
US4896676A (en) * 1986-06-11 1990-01-30 Signal Technology Co., Ltd. Blood pressure measuring unit
JPH02190731A (en) * 1988-12-08 1990-07-26 Texas Instr Inc <Ti> High pressure package for pressure converter
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
WO2002018896A1 (en) * 2000-09-01 2002-03-07 Endress + Hauser Gmbh + Co. Kg Pressure measuring cell
JP2001133479A (en) * 2000-09-21 2001-05-18 Mitsubishi Electric Corp Inertia force sensor and method of manufacturing the same
JP2007502416A (en) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク Capacitive sensor
JP2010197057A (en) * 2009-02-23 2010-09-09 Kyocera Corp Base substance for pressure detection device and the pressure detection device
WO2014086512A1 (en) * 2012-12-03 2014-06-12 Robert Bosch Gmbh Pressure sensor module
US9664579B2 (en) 2012-12-03 2017-05-30 Robert Bosch Gmbh Pressure sensor module

Also Published As

Publication number Publication date
JPS6412329B2 (en) 1989-02-28

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