JPS62170538U - - Google Patents
Info
- Publication number
- JPS62170538U JPS62170538U JP5756986U JP5756986U JPS62170538U JP S62170538 U JPS62170538 U JP S62170538U JP 5756986 U JP5756986 U JP 5756986U JP 5756986 U JP5756986 U JP 5756986U JP S62170538 U JPS62170538 U JP S62170538U
- Authority
- JP
- Japan
- Prior art keywords
- movable electrode
- electrode
- fixed
- insulator
- water pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Description
第1図は本考案の水圧センサの例の構成を示す
断面図である。第2図は従来の空気圧センサの断
面図、第3図は静電容量型センサと結合される検
知出力回路の例の構成図である。
FIG. 1 is a sectional view showing the configuration of an example of the water pressure sensor of the present invention. FIG. 2 is a sectional view of a conventional air pressure sensor, and FIG. 3 is a configuration diagram of an example of a detection output circuit coupled to a capacitance type sensor.
Claims (1)
フラムと、該ダイヤフラムに対し絶縁体を介して
固着された可動電極と、該可動電極に対向しかつ
平行に設けられ別途に絶縁体を介して支持された
固定電極と、該可動電極と該固定電極とからそれ
ぞれ直接に引き出された1対の出力線と、該可動
電極と該固定電極とを包囲するように設けたシー
ルド手段とを備えてなる静電容量型の水圧センサ
。 A diaphragm that generates displacement corresponding to the introduced water pressure, a movable electrode fixed to the diaphragm via an insulator, and a movable electrode provided opposite and parallel to the movable electrode and separately supported via an insulator. An electrostatic device comprising a fixed electrode, a pair of output lines drawn directly from the movable electrode and the fixed electrode, and shielding means provided to surround the movable electrode and the fixed electrode. Capacitive water pressure sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5756986U JPS62170538U (en) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5756986U JPS62170538U (en) | 1986-04-18 | 1986-04-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62170538U true JPS62170538U (en) | 1987-10-29 |
Family
ID=30887395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5756986U Pending JPS62170538U (en) | 1986-04-18 | 1986-04-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62170538U (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921077B1 (en) * | 1969-06-17 | 1974-05-29 | ||
JPS54118283A (en) * | 1978-01-23 | 1979-09-13 | Motorola Inc | Electromechanical pressure transducer |
JPS58731A (en) * | 1981-06-25 | 1983-01-05 | Matsushita Electric Ind Co Ltd | Electrostatic capacity type pressure sensor |
JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |
JPS6024428A (en) * | 1983-07-21 | 1985-02-07 | Kinseki Kk | Pressure sensor |
-
1986
- 1986-04-18 JP JP5756986U patent/JPS62170538U/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921077B1 (en) * | 1969-06-17 | 1974-05-29 | ||
JPS54118283A (en) * | 1978-01-23 | 1979-09-13 | Motorola Inc | Electromechanical pressure transducer |
JPS58731A (en) * | 1981-06-25 | 1983-01-05 | Matsushita Electric Ind Co Ltd | Electrostatic capacity type pressure sensor |
JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |
JPS6024428A (en) * | 1983-07-21 | 1985-02-07 | Kinseki Kk | Pressure sensor |
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