CN100383949C - 一种半导体晶片加工的传输平台 - Google Patents
一种半导体晶片加工的传输平台 Download PDFInfo
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- CN100383949C CN100383949C CNB2005101306496A CN200510130649A CN100383949C CN 100383949 C CN100383949 C CN 100383949C CN B2005101306496 A CNB2005101306496 A CN B2005101306496A CN 200510130649 A CN200510130649 A CN 200510130649A CN 100383949 C CN100383949 C CN 100383949C
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CNB2005101306496A CN100383949C (zh) | 2005-12-16 | 2005-12-16 | 一种半导体晶片加工的传输平台 |
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CNB2005101306496A CN100383949C (zh) | 2005-12-16 | 2005-12-16 | 一种半导体晶片加工的传输平台 |
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CN1845306A CN1845306A (zh) | 2006-10-11 |
CN100383949C true CN100383949C (zh) | 2008-04-23 |
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Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100810488B1 (ko) * | 2006-11-15 | 2008-03-07 | 주식회사 로보스타 | 더블암형 로봇 |
JP2010539583A (ja) * | 2007-09-14 | 2010-12-16 | ハンミ セミコンダクター カンパニー リミテッド | メモリーカード加工装置 |
EP2141739A3 (en) | 2008-06-30 | 2011-01-12 | Intevac, Inc. | System and method for substrate transport |
US9157145B2 (en) | 2008-07-29 | 2015-10-13 | Intevac, Inc. | Processing tool with combined sputter and evaporation deposition sources |
CN101702404B (zh) * | 2009-11-05 | 2011-05-11 | 上海微电子装备有限公司 | 一种硅片交接装置及其硅片交接方法 |
CN102560406B (zh) * | 2010-12-24 | 2013-10-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pvd设备及采用该pvd设备进行晶片处理的方法 |
CN102897522B (zh) * | 2012-10-22 | 2015-12-09 | 大同齿轮(昆山)有限公司 | 输送及加工高效配合的加工装置 |
CN103400789B (zh) * | 2013-08-01 | 2018-01-26 | 上海集成电路研发中心有限公司 | 设备平台系统及其晶圆传输方法 |
US9818633B2 (en) * | 2014-10-17 | 2017-11-14 | Lam Research Corporation | Equipment front end module for transferring wafers and method of transferring wafers |
CN105388866A (zh) * | 2015-11-17 | 2016-03-09 | 合肥芯福传感器技术有限公司 | 用于ic芯片或mems器件的全流程生产工作站 |
CN105977123B (zh) * | 2016-06-29 | 2018-07-24 | 中国电子科技集团公司第四十八研究所 | 一种SiC注入机传片系统及其传片方法 |
TWI664690B (zh) * | 2018-04-16 | 2019-07-01 | 漢民科技股份有限公司 | 具有自動傳送系統的磊晶製程系統和其自動傳送方法 |
CN109742041B (zh) * | 2019-01-07 | 2020-11-24 | 成都中电熊猫显示科技有限公司 | 基板传送的控制方法及设备 |
CN111952139B (zh) * | 2019-05-16 | 2023-11-14 | 北京北方华创微电子装备有限公司 | 半导体制造设备及半导体制造方法 |
CN113745131B (zh) * | 2021-08-31 | 2024-01-16 | 顾赢速科技(合肥)有限公司 | 多层外延工艺及其线性平台设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN87107754A (zh) * | 1986-11-12 | 1988-08-17 | 赫罗斯·阿姆希尔公司 | 可大批量传送半导体衬底用的全罩式装载器具(舟) |
JP2001338954A (ja) * | 2000-05-30 | 2001-12-07 | Mitsumi Electric Co Ltd | 半導体ウェハ処理システム及び半導体ウェハ処理方法 |
JP2005303954A (ja) * | 2004-04-16 | 2005-10-27 | Matsushita Electric Ind Co Ltd | 送信システム半導体集積回路装置 |
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2005
- 2005-12-16 CN CNB2005101306496A patent/CN100383949C/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN87107754A (zh) * | 1986-11-12 | 1988-08-17 | 赫罗斯·阿姆希尔公司 | 可大批量传送半导体衬底用的全罩式装载器具(舟) |
JP2001338954A (ja) * | 2000-05-30 | 2001-12-07 | Mitsumi Electric Co Ltd | 半導体ウェハ処理システム及び半導体ウェハ処理方法 |
JP2005303954A (ja) * | 2004-04-16 | 2005-10-27 | Matsushita Electric Ind Co Ltd | 送信システム半導体集積回路装置 |
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CN1845306A (zh) | 2006-10-11 |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |