CN100367481C - 长引线低弧度大面积薄型集成电路塑封生产方法 - Google Patents

长引线低弧度大面积薄型集成电路塑封生产方法 Download PDF

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CN100367481C
CN100367481C CNB2005100426880A CN200510042688A CN100367481C CN 100367481 C CN100367481 C CN 100367481C CN B2005100426880 A CNB2005100426880 A CN B2005100426880A CN 200510042688 A CN200510042688 A CN 200510042688A CN 100367481 C CN100367481 C CN 100367481C
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integrated circuit
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CN1873937A (zh
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何文海
慕蔚
周朝峰
常琨
孟永刚
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Guangdong Shaohua Technology Co ltd
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Tianshui Huatian Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
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    • H01L2224/73251Location after the connecting process on different surfaces
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Abstract

本发明公开了一种长引线低弧度大面积薄型集成电路塑封生产方法,以解决现有集成电路封装中存在的引线短、弧度高、密度低、厚度高、体积大等问题。此方法包括A、材料准备;a1.将环氧模塑料从5℃以下的冷库中移出,在室温下回温16~24小时,进行材料的稳定性准备;环氧模塑料选自SIMITOMO公司的6600系列、NITTO公司的8000系列、华威公司7000系列、NITTO公司的7470系列(环保型)和华威公司800系列(环保型)环氧模塑料;a2.已压焊后(引线框架上带芯片和焊线)的半成品采用环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%;B、塑封工艺方法控制;C、试封;D、正式封装;E、后固化。本发明体积小,重量轻,密度高,厚度薄。

Description

长引线低弧度大面积薄型集成电路塑封生产方法
技术领域
本发明涉及一种集成电路领域封装制造方法,具体的说是一种长引线低弧度大面积薄型塑封方法。
背景技术
目前通用工艺生产的DIP(Dual-In-Line Pakage)双列直插形式封装,绝大多数中小规模集成电路(IC)均采用这种封装形式。其引脚数一般不超过100个,引脚之间间距2.54mm,塑封体厚度在3.5mm以上,适合于PCB(印刷电路板)上穿孔焊接。其特点,操作方便,封装面积与芯片面积比值(DIP42:13.80*52.25/3*3=80∶1)较大,故体积也大。
SOP(Small Outline Pakage)小外形封装和SSOP(Shrunk Outline Pakage)缩小型小外型封装,适用绝大多数中小规模集成电路,采用这两种封装形式,必须使用SMD(表面安装设备技术),引脚数在100以内。SOP封装,引脚之间间距1.27mm,SSOP封装引脚之间间距为0.635mm、0.65mm、0.8mm、1.0mm,两种封装厚度均在2.0mm之内。其特点适用于SMD表面技术在PCB电路板上安装布线,封装面积与芯片面积比值(SSOP28∶10.2*5.3/2*2=13∶1)比同样引脚的DIP小,故体积也小。
此两种方法在封装中存在引线短、弧度高、密度低、厚度高、体积大的问题,无法适应大规模集成电路的生产。
发明内容
本发明的目的是提供一种长引线、低弧度、高密度、大面积薄型集成电路生产方法,以解决现有集成电路封装中存在的引线短、弧度高、密度低、厚度高、体积大等问题。
本发明方法包括以下步骤:
A、材料准备;
a1.将塑封料从5℃以下的冷库中移出,在室温下回温16~24小时,进行材料的稳定性准备;塑封料选自SIMITOMO公司的6600系列、NITTO公司的8000系列、华威公司7000系列、NITTO公司的7470系列(环保型)、华威公司800系列(环保型)环氧模塑料;
a2.已压焊后(引线框架上带芯片和焊线)的半成品采用环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%;
B、塑封工艺方法控制;
b1、塑封料回温;b2上料;b3、加塑封料;b4合模,合模压力为90~110kgf/cm2;b5、加压注塑,注塑压力为38~45kgf/cm2;注塑速度为7~14Sec;b6、预固化,预固化时间为80~150Sec;b7、开模,模具温度为160℃~185℃;b8、下料;
C、试封,进行首件检验:
(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;
(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象;
D、正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象;
E、按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化5±1小时;然后从175~30℃的温度降温40分钟。
本发明是LQFP(Low Pprofile Quad Fflat Pakage)塑料扁平四边引线封装,引脚数在100以上,引线细,引脚间距小(0.50、0.40),厚度薄(1.40mm),体积小(LQFP100L/128L塑封体:14×14×1.4),重量轻,密度高。一般大规模或超大规模集成电路采用这种封装形式。其特点,适用于SMD表面安装技术在PCB电路板上安装布线,产品适用于高频,操作方便,可靠性高,封装面积与芯片面积的相对比较小(LQFP128L:14*14/7*7=4∶1),封装工艺难度大,尤其压焊(金丝球焊)、塑封。
本发明优点在于:1.采用大面积超薄型塑封工艺制成超大规模薄型塑封集成电路半成品,其性质符合GB/T12750-II和JEDEC的相关标准;2.采用大面积超薄型塑封工艺制成超大规模薄型塑封集成电路半成品其质量通过JEDEC相关标准的检测,符合大规模集成电路的质量要求。
附图说明
图1是本发明的塑封工艺流程图;
图2是本发明的固化温度曲线图;
图3是本发明塑封产品剖面图。
具体实施方式
下面的实施可以使本专业技术人员更全面地理解本发明,但不以任何方式限制发明。
实施例1:LQFP100L塑料封装
如图3所示,芯片2(厚度0.25~0.28mm)通过导电胶3(厚度0.025mm)与框架载体4(厚度0.127mm)相连,通过金丝1(弧高0.15mm)与框架内引脚5(距载体底面0.297mm,为IC的电源、信号通道)相连;塑封体(厚度1.40±0.10mm)根据设计把芯片2、金丝1和框架内引脚5完全包封起来。其代表产品LQFP100L,即[Low Pprofile Quad Fflat Pakage]塑料扁平四边引线封装,它是大面积薄型塑封,其塑封体尺寸为14.0mm*14.0mm*1.4mm,LQFP100L共压125根线,线多、密度大、引线间距小LQFP100L e=0.50;而且弧线较长(7mm)塑封体厚度仅为1.40mm。
把EME-6600HG(SIMITOMO公司的6600系列)环氧模塑料从5℃以下的冷库中移出,在室温下回温16小时,进行材料的稳定性准备;已压焊后引线框架上带芯片和焊线的半成品,采用EME6600HG环氧模塑料把芯片2和金线1部分完全包封起来,并确保金丝变形率控制在<5%。
塑封工艺方法控制:b1、塑封料回温;、b2、上料;b3、加塑封料;b4、合模,合模压力为90kgf/cm2;b5、加压注塑,注塑压力为38kgf/cm2;注塑速度为7Sec;b6、预固化,预固化时间为80Sec;b7、开模,模具温度为165℃;b8、下料。
试封,进行首件检验:(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象。正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象。按图2特殊的固化温度曲线固化:按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化4小时;然后从175~30℃的温度降温40分钟。
质量检验及考核:
1.对已塑封好的产品按检验规范进行抽样;
2.X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;
3.10倍显微镜下观察塑封体质量,应无气孔、沙眼和包封未满现象;
4、C-SAM超声波扫描机对塑封好的产品进行扫描检测,芯片上、金线上和框架载体4正反面应无离层,塑封体内无空洞。
5.可靠性验证:
①温湿度贮存试验:85℃±2℃,85%RH±5%RH,240h;
②温度冲击试验:
Figure C20051004268800061
③高温水蒸气压试验:温度121℃,100%RH,气压205KPa,168h;
④高温贮存试验:温度150℃(-0,+10)℃,240h;
无失效产品,符合GB/T12750-II和JEDEC相关标准。
实施例2:LQFP128L塑料封装
如图3所示,芯片2(厚度0.25~0.28mm)通过导电胶3(厚度0.025mm)与框架载体4(厚度0.127mm)相连,通过金丝1(弧高0.15mm)与框架内引脚5(距载体底面0.297mm,为IC的电源、信号通道)相连;塑封体(厚度1.40±0.10mm)根据设计把芯片2、金丝1和框架内引脚5完全包封起来。其代表产品LQFP128L,它是大面积薄型塑封,其塑封体尺寸为14.0mm*14.0mm*1.4mm,LQFP128L压151根线,线多、密度大、引线间距小,LQFP128L e=0.40,而且弧线较长(7mm)塑封体厚度仅为1.40mm。
把MP-8000CH4(NITTO公司的8000系列)环氧模塑料从5℃以下的冷库中移出,在室温下回温24小时,进行材料的稳定性准备;已压焊后(引线框架上带芯片和焊线)的半成品采用MP-8000CH4环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%。
塑封工艺方法控制:b1、塑封料回温;b2、上料;b3、加塑封料;b4、合模,合模压力为110kgf/cm2;b5、加压注塑,注塑压力为45kgf/cm2;注塑速度为14Sec;b6、预固化,预固化时间为150Sec;b7、开模,模具温度为185℃;b8、下料。
试封,进行首件检验:(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象。正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象。按图2特殊的固化温度曲线固化:按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化6小时;然后从175~30℃的温度降温40分钟。
质量检验及考核:同实施例1。
实施例3:LQFP128L塑料封装
如图3所示,芯片2(厚度0.25~0.28mm)通过导电胶3(厚度0.025mm)与框架载体4(厚度0.127mm)相连,通过金丝1(弧高0.15mm)与框架内引脚5(距载体底面0.297mm,为IC的电源、信号通道)相连;塑封体(厚度1.40±0.10mm)根据设计把芯片2、金丝1和框架内引脚5完全包封起来。其代表产品LQFP128L,它是大面积薄型塑封,其塑封体尺寸为14.0mm*14.0mm*1.4mm,LQFP128L压151根线,线多、密度大、引线间距小,LQFP128L e=0.40,而且弧线较长(7mm)塑封体厚度仅为1.40mm。
把KL-7000(华威公司7000系列)环氧模塑料从5℃以下的冷库中移出,在室温下回温24小时,进行材料的稳定性准备;已压焊后引线框架上带芯片和焊线的半成品,采用KL-7000环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%。
塑封工艺方法控制:b1、塑封料回温;b2、上料;b3、加塑封料;b4、合模,合模压力为100kgf/cm2;b5、加压注塑,注塑压力为42kgf/cm2;注塑速度为12Sec;b6、预固化,预固化时间为130Sec;b7、开模,模具温度为175℃;b8、下料。试封,进行首件检验:(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;
(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象。正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象。按图2特殊的固化温度曲线固化:按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化6小时;然后从175~30℃的温度降温40分钟。
质量检验及考核:同实施例1。
实施例4:LQFP128L塑料封装
如图3所示,芯片2(厚度0.25~0.28mm)通过导电胶3(厚度0.025mm)与框架载体4(厚度0.127mm)相连,通过金丝1(弧高0.15mm)与框架内引脚5(距载体底面0.297mm,为IC的电源、信号通道)相连;塑封体(厚度1.40±0.10mm)根据设计把芯片2、金丝1和框架内引脚5完全包封起来。其代表产品LQFP128L,它是大面积薄型塑封,其塑封体尺寸为14.0mm*14.0mm*1.4mm,LQFP128L压151根线,线多、密度大、引线间距小,LQFP128L e=0.40,而且弧线较长(7mm)塑封体厚度仅为1.40mm。
把GE7470(NITTO公司的7470系列)环氧模塑料从5℃以下的冷库中移出,在室温下回温24小时,进行材料的稳定性准备;已压焊后引线框架上带芯片和焊线的半成品,采用环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%。
塑封工艺方法控制:b1、塑封料回温;b2、上料;b3、加塑封料;b4、合模,合模压力为110kgf/cm2;b5、加压注塑,注塑压力为45kgf/cm2;注塑速度为14Sec;b6、预固化,预固化时间为150Sec;b7、开模,模具温度为160℃;b8、下料。
试封,进行首件检验:(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象。正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象。按图2特殊的固化温度曲线固化:按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化6小时;然后从175~30℃的温度降温40分钟。
质量检验及考核:
1.对已塑封好的产品按检验规范进行抽样;
2.X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;
3.10倍显微镜下观察塑料封体质量,应气孔、沙眼和包封未满现象;
4.C-SAM超声波扫描机对塑封好的产品进行扫描检测,芯片上、金线上和载体正反面应无离层,塑封体内无空洞。
5.可靠性验证
①温湿度贮存试验:85℃±2℃,85%RH±5%RH,1000h;
②温度冲击试验:
Figure C20051004268800081
③高温水蒸气压试验:温度121℃,100%RH,气压205KPa,168h;
④高温贮存试验:温度150℃(-0,+10)℃,1000h;
无失效产品,符合GB/T12750-II和JEDEC相关标准,达到了LEVE2以上水平。
实施例5:LQFP128L塑料封装
与实施例4不同之处在于塑封料采用KL-G800(华威公司800系列)。

Claims (1)

1.一种长引线低弧度大面积薄型集成电路塑封生产方法,其特征在于:它包括以下步骤:
A、材料准备;
a1.将塑封料从5℃以下的冷库中移出,在室温下回温16~24小时,进行材料的稳定性准备;塑封料选自SIMITOMO公司的6600系列、NITTO公司的8000系列、华威公司7000系列、NITTO公司的7470系列环保型、华威公司800系列环保型环氧模塑料中任意一种;
a2.已压焊后引线框架上带芯片和焊线的半成品采用环氧模塑料把芯片和金线部分完全包封起来,并确保金丝变形率控制在<5%;
B、塑封工艺方法控制;
b1、塑封料回温;b2、上料;b3、加塑封料;b4合模,合模压力为90~110kgf/cm2;b5、加压注塑,注塑压力为38~45kgf/cm2;注塑速度为7~14Sec;b6、预固化,预固化时间为80~150Sec;b7、开模,模具温度为160℃~185℃;b8、下料;
C、试封,进行首件检验:
(1)X-Ray透视机透视,检查塑封后金线变形情况,金线变形率<5%;
(2)10倍显微镜下观察塑封体外观质量,应无气孔、沙眼和包封未满现象;
D、正式封装并确保塑封后的半成品无气孔、沙眼和包封未满现象;
E、按30~175℃温度升温30分钟,在175℃±5℃的条件下,固化5±1小时;然后从175~30℃的温度降温40分钟。
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