CN100363709C - 激光量测机台扫描精度验证方法 - Google Patents
激光量测机台扫描精度验证方法 Download PDFInfo
- Publication number
- CN100363709C CN100363709C CNB2005100338555A CN200510033855A CN100363709C CN 100363709 C CN100363709 C CN 100363709C CN B2005100338555 A CNB2005100338555 A CN B2005100338555A CN 200510033855 A CN200510033855 A CN 200510033855A CN 100363709 C CN100363709 C CN 100363709C
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- China
- Prior art keywords
- ball
- scanning
- measurement platform
- value
- accuracy
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100338555A CN100363709C (zh) | 2005-03-25 | 2005-03-25 | 激光量测机台扫描精度验证方法 |
US11/308,428 US7397551B2 (en) | 2005-03-25 | 2006-03-24 | Method for verifying scan precision of a laser measurement machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100338555A CN100363709C (zh) | 2005-03-25 | 2005-03-25 | 激光量测机台扫描精度验证方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1837743A CN1837743A (zh) | 2006-09-27 |
CN100363709C true CN100363709C (zh) | 2008-01-23 |
Family
ID=37015210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100338555A Active CN100363709C (zh) | 2005-03-25 | 2005-03-25 | 激光量测机台扫描精度验证方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7397551B2 (zh) |
CN (1) | CN100363709C (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5167779B2 (ja) * | 2007-11-16 | 2013-03-21 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
CN102384836B (zh) * | 2010-09-01 | 2014-01-29 | 中国科学院光电研究院 | 激光多参数实时测量装置 |
CN102735349A (zh) * | 2011-04-08 | 2012-10-17 | 中国科学院光电研究院 | 一种激光多参数测量装置 |
CN108088407B (zh) * | 2017-12-15 | 2020-11-10 | 成都光明光电股份有限公司 | 光学玻璃制品形貌偏差校正方法及系统 |
CN111743569B (zh) * | 2019-03-28 | 2021-07-27 | 无锡声美达医学技术有限公司 | 一种仪器测试方法、装置及设备 |
CN112362015B (zh) * | 2020-06-29 | 2022-06-21 | 泰安晶品新材料科技有限公司 | 一种集成电路封装用bga锡球的检测方法 |
CN113188447B (zh) * | 2021-05-12 | 2022-12-27 | 深圳市国匠数控科技有限公司 | 一种提高高频激光扫描仪精度的办法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1126833A (zh) * | 1994-07-01 | 1996-07-17 | 欧姆龙株式会社 | 检验装置及检验方法 |
JPH0933390A (ja) * | 1995-07-14 | 1997-02-07 | Fuji Xerox Co Ltd | 走査光学系評価装置 |
JPH11351841A (ja) * | 1998-06-09 | 1999-12-24 | Mitsutoyo Corp | 非接触三次元測定方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5465152A (en) * | 1994-06-03 | 1995-11-07 | Robotic Vision Systems, Inc. | Method for coplanarity inspection of package or substrate warpage for ball grid arrays, column arrays, and similar structures |
KR100362479B1 (ko) * | 2000-03-27 | 2002-11-25 | 삼성전자 주식회사 | 레이저 스캐닝 유니트 |
US6724489B2 (en) * | 2000-09-22 | 2004-04-20 | Daniel Freifeld | Three dimensional scanning camera |
JP4803568B2 (ja) * | 2001-03-30 | 2011-10-26 | ルネサスエレクトロニクス株式会社 | 半導体集積回路の検査装置および検査方法 |
CN1841008A (zh) * | 2005-04-01 | 2006-10-04 | 鸿富锦精密工业(深圳)有限公司 | 激光量测机台扫描精度验证方法 |
CN100351608C (zh) * | 2005-04-12 | 2007-11-28 | 鸿富锦精密工业(深圳)有限公司 | 激光量测机台扫描精度验证方法 |
-
2005
- 2005-03-25 CN CNB2005100338555A patent/CN100363709C/zh active Active
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2006
- 2006-03-24 US US11/308,428 patent/US7397551B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1126833A (zh) * | 1994-07-01 | 1996-07-17 | 欧姆龙株式会社 | 检验装置及检验方法 |
JPH0933390A (ja) * | 1995-07-14 | 1997-02-07 | Fuji Xerox Co Ltd | 走査光学系評価装置 |
JPH11351841A (ja) * | 1998-06-09 | 1999-12-24 | Mitsutoyo Corp | 非接触三次元測定方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1837743A (zh) | 2006-09-27 |
US20060215150A1 (en) | 2006-09-28 |
US7397551B2 (en) | 2008-07-08 |
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Effective date of registration: 20170309 Address after: 130102 room E2296, No. 1759 Mingxi Road, high tech Zone, Changchun, Jilin, China Patentee after: CHANGCHUN CHANGGUANG PRECISION INSTRUMENT GROUP CO.,LTD. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: HONG FU JIN PRECISION INDUSTRY (SHENZHEN) Co.,Ltd. Patentee before: HON HAI PRECISION INDUSTRY Co.,Ltd. |
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Effective date of registration: 20181218 Address after: 528200 Tianfu Science and Technology Center, No. 12 Xia Nan Road, Guicheng Street, Nanhai District, Foshan City, Guangdong Province, 2nd floor 201 (Residence declaration) Patentee after: Foshan Changguang Intelligent Manufacturing Research Institute Co.,Ltd. Address before: 130102 room E2296, 1759 Mingxi Road, north new high tech, Changchun, Jilin. Patentee before: CHANGCHUN CHANGGUANG PRECISION INSTRUMENT GROUP CO.,LTD. |
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Effective date of registration: 20230830 Address after: Room C313, 1759 Mingxi Road, Beihu science and Technology Development Zone, Changchun City, Jilin Province, 130000 Patentee after: CHANGCHUN CHANGGUANG PRECISION INSTRUMENT GROUP CO.,LTD. Address before: 528200 Tianfu Science and Technology Center, No. 12 Xia Nan Road, Guicheng Street, Nanhai District, Foshan City, Guangdong Province, 2nd floor 201 (Residence declaration) Patentee before: Foshan Changguang Intelligent Manufacturing Research Institute Co.,Ltd. |
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