CN100347747C - 差动cpp gmr磁头 - Google Patents
差动cpp gmr磁头 Download PDFInfo
- Publication number
- CN100347747C CN100347747C CNB2004100078197A CN200410007819A CN100347747C CN 100347747 C CN100347747 C CN 100347747C CN B2004100078197 A CNB2004100078197 A CN B2004100078197A CN 200410007819 A CN200410007819 A CN 200410007819A CN 100347747 C CN100347747 C CN 100347747C
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- China
- Prior art keywords
- layer
- free
- bolt
- spin
- sensor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005291 magnetic effect Effects 0.000 claims abstract description 71
- 239000010410 layer Substances 0.000 claims description 340
- 230000005294 ferromagnetic effect Effects 0.000 claims description 100
- 239000007787 solid Substances 0.000 claims description 68
- 239000011229 interlayer Substances 0.000 claims description 31
- 230000008878 coupling Effects 0.000 claims description 29
- 238000010168 coupling process Methods 0.000 claims description 29
- 238000005859 coupling reaction Methods 0.000 claims description 29
- 238000009413 insulation Methods 0.000 claims description 23
- 206010023204 Joint dislocation Diseases 0.000 claims description 12
- 239000010948 rhodium Substances 0.000 abstract description 14
- 239000010949 copper Substances 0.000 abstract description 13
- 239000010931 gold Substances 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052721 tungsten Inorganic materials 0.000 abstract description 8
- 239000010937 tungsten Substances 0.000 abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052802 copper Inorganic materials 0.000 abstract description 7
- 229910052715 tantalum Inorganic materials 0.000 abstract description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052703 rhodium Inorganic materials 0.000 abstract description 6
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052737 gold Inorganic materials 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 2
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- 230000005415 magnetization Effects 0.000 description 33
- 230000005290 antiferromagnetic effect Effects 0.000 description 22
- 238000000151 deposition Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 11
- 229910003271 Ni-Fe Inorganic materials 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910020598 Co Fe Inorganic materials 0.000 description 3
- 229910002519 Co-Fe Inorganic materials 0.000 description 3
- 241001061076 Melanonus zugmayeri Species 0.000 description 3
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- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 230000005316 antiferromagnetic exchange Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
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- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3945—Heads comprising more than one sensitive element
- G11B5/3948—Heads comprising more than one sensitive element the sensitive elements being active read-out elements
- G11B5/3951—Heads comprising more than one sensitive element the sensitive elements being active read-out elements the active elements being arranged on several parallel planes
- G11B5/3954—Heads comprising more than one sensitive element the sensitive elements being active read-out elements the active elements being arranged on several parallel planes the active elements transducing on a single track
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
- Thin Magnetic Films (AREA)
- Measuring Magnetic Variables (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/349,552 | 2003-01-23 | ||
| US10/349,552 US6927948B2 (en) | 2003-01-23 | 2003-01-23 | Differential CPP GMR sensor with free layers separated by metal gap layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1551113A CN1551113A (zh) | 2004-12-01 |
| CN100347747C true CN100347747C (zh) | 2007-11-07 |
Family
ID=32735418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100078197A Expired - Fee Related CN100347747C (zh) | 2003-01-23 | 2004-01-29 | 差动cpp gmr磁头 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6927948B2 (https=) |
| JP (1) | JP2004227749A (https=) |
| CN (1) | CN100347747C (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004296000A (ja) * | 2003-03-27 | 2004-10-21 | Hitachi Ltd | 磁気抵抗効果型ヘッド、及びその製造方法 |
| US7477490B2 (en) * | 2004-06-30 | 2009-01-13 | Seagate Technology Llc | Single sensor element that is naturally differentiated |
| US7436632B2 (en) * | 2004-06-30 | 2008-10-14 | Seagate Technology Llc | Differential/dual CPP recording head |
| US7443637B2 (en) * | 2005-07-11 | 2008-10-28 | Hitachi Global Storage Technologies Netherlands B.V. | Giant magnetoresistance sensor with side longitudinal bias stacks and method for forming same |
| US20070153432A1 (en) * | 2005-12-29 | 2007-07-05 | Tdk Corporation | Magnetic head |
| JP2009026400A (ja) * | 2007-07-20 | 2009-02-05 | Hitachi Global Storage Technologies Netherlands Bv | 差動磁気抵抗効果型磁気ヘッド |
| US7881018B2 (en) * | 2007-09-05 | 2011-02-01 | Hitachi Global Storage Technologies Netherlands B.V. | Differential current perpendicular to plane giant magnetoresistive sensor structure having improved robustness against spin torque noise |
| US7577021B2 (en) * | 2007-11-21 | 2009-08-18 | Magic Technologies, Inc. | Spin transfer MRAM device with separated CPP assisted writing |
| JP5027687B2 (ja) * | 2008-02-14 | 2012-09-19 | 株式会社日立製作所 | 磁気記録再生ヘッドおよび磁気記録再生装置 |
| US20090207534A1 (en) * | 2008-02-19 | 2009-08-20 | Tdk Corporation | Magneto-resistance effect element including stack with dual free layer and magnetized shield electrode layers |
| US7913570B2 (en) | 2008-03-08 | 2011-03-29 | Texas Research International, Inc. | Environmental damage sensor |
| US8411392B2 (en) * | 2008-06-24 | 2013-04-02 | Seagate Technology Llc | Magnetic field sensor including multiple magnetoresistive sensing elements for patterned media |
| US7974047B2 (en) * | 2008-09-02 | 2011-07-05 | Hitachi Global Storage Technologies Netherlands, B.V. | Current perpendicular to plane differential magnetoresistance read head design using a current confinement structure proximal to an air bearing surface |
| JP2010140524A (ja) * | 2008-12-09 | 2010-06-24 | Hitachi Global Storage Technologies Netherlands Bv | 差動型磁気抵抗効果ヘッド及び磁気記録再生装置 |
| US8659853B2 (en) * | 2009-09-07 | 2014-02-25 | Agency For Science, Technology And Research | Sensor arrangement |
| US20110216432A1 (en) * | 2010-03-05 | 2011-09-08 | Tdk Corporation | Magnetic head comprising two magnetic field sensing part |
| US9784802B1 (en) | 2012-04-11 | 2017-10-10 | Louisiana Tech Research Corporation | GMR nanowire sensors |
| US10718636B1 (en) | 2012-04-11 | 2020-07-21 | Louisiana Tech Research Corporation | Magneto-resistive sensors |
| US9103654B1 (en) | 2012-04-11 | 2015-08-11 | Louisiana Tech University Research Foundation, A Division Of Louisiana Tech University Foundation, Inc. | GMR nanowire sensors |
| US9542962B2 (en) | 2015-01-23 | 2017-01-10 | HGST Netherlands B.V. | Multi-sensor reader structure having a current path with increased size to reduce noise |
| US9704516B2 (en) * | 2015-11-30 | 2017-07-11 | International Business Machines Corporation | Shorting-resistant current perpendicular to plane sensors |
| US11201280B2 (en) * | 2019-08-23 | 2021-12-14 | Western Digital Technologies, Inc. | Bottom leads chemical mechanical planarization for TMR magnetic sensors |
| US12591026B2 (en) * | 2023-06-13 | 2026-03-31 | Allegro Microsystems, Llc | Tunnel magnetoresistance element to detect out-of-plane changes in a magnetic field intensity of a magnetic field |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1148710A (zh) * | 1995-09-11 | 1997-04-30 | 国际商业机器公司 | 具有锁定层逆平行磁化的旋转阀传感器 |
| US5751521A (en) * | 1996-09-23 | 1998-05-12 | International Business Machines Corporation | Differential spin valve sensor structure |
| CN1336636A (zh) * | 2000-07-31 | 2002-02-20 | 国际商业机器公司 | 带有反向平行耦合的低Hk自由层的巨磁阻传感器 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5155643A (en) | 1990-10-30 | 1992-10-13 | Mars Incorporated | Unshielded horizontal magnetoresistive head and method of fabricating same |
| JP2741837B2 (ja) | 1993-08-06 | 1998-04-22 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 薄膜磁気抵抗ヘッド |
| US5491600A (en) | 1994-05-04 | 1996-02-13 | International Business Machines Corporation | Multi-layer conductor leads in a magnetoresistive head |
| US6195228B1 (en) | 1997-01-06 | 2001-02-27 | Nec Research Institute, Inc. | Thin, horizontal-plane hall sensors for read-heads in magnetic recording |
| US6469873B1 (en) * | 1997-04-25 | 2002-10-22 | Hitachi, Ltd. | Magnetic head and magnetic storage apparatus using the same |
| US6313973B1 (en) | 1998-06-30 | 2001-11-06 | Kabushiki Kaisha Toshiba | Laminated magnetorestrictive element of an exchange coupling film, an antiferromagnetic film and a ferromagnetic film and a magnetic disk drive using same |
| JP3212569B2 (ja) * | 1999-01-27 | 2001-09-25 | アルプス電気株式会社 | デュアルスピンバルブ型薄膜磁気素子及び薄膜磁気ヘッド及びデュアルスピンバルブ型薄膜磁気素子の製造方法 |
| US6449134B1 (en) * | 1999-08-05 | 2002-09-10 | International Business Machines Corporation | Read head with file resettable dual spin valve sensor |
| US6643103B1 (en) * | 2000-01-05 | 2003-11-04 | Seagate Technology Llc | Very high linear resolution CPP differential dual spin valve magnetoresistive head |
| US6417999B1 (en) | 2000-02-04 | 2002-07-09 | Read-Rite Corporation | Magnetoresistive head stabilized structure and method of fabrication thereof |
| US20020101689A1 (en) * | 2000-04-05 | 2002-08-01 | Xuefei Tang | High sensitivity spin valve stacks using oxygen in spacer layer deposition |
| US6680827B2 (en) * | 2000-08-07 | 2004-01-20 | Tdk Corporation | Dual spin valve CPP MR with flux guide between free layers thereof |
| JP3760095B2 (ja) * | 2000-12-14 | 2006-03-29 | 株式会社日立グローバルストレージテクノロジーズ | 2素子型再生センサ、垂直磁気記録再生用薄膜磁気ヘッド及び垂直磁気記録再生装置 |
| US6654209B2 (en) | 2001-01-10 | 2003-11-25 | Seagate Technology Llc | Low resistance lead structure for a low resistance magnetic read head |
| US6693776B2 (en) * | 2001-03-08 | 2004-02-17 | Hitachi Global Storage Technologies Netherlands B.V. | Spin valve sensor with a spin filter and specular reflector layer |
| US6650509B2 (en) * | 2001-03-20 | 2003-11-18 | Hitachi Global Storage Technologies Netherlands B.V. | Dual spin valve sensor with AP pinned layers |
| JP3563375B2 (ja) * | 2001-06-19 | 2004-09-08 | アルプス電気株式会社 | 磁気検出素子及び前記磁気検出素子を用いた薄膜磁気ヘッド |
| US6728078B2 (en) * | 2001-06-20 | 2004-04-27 | Hitachi Global Storage Technologies Netherlands B.V. | High resistance dual antiparallel (AP) pinned spin valve sensor |
-
2003
- 2003-01-23 US US10/349,552 patent/US6927948B2/en not_active Expired - Fee Related
-
2004
- 2004-01-06 JP JP2004000817A patent/JP2004227749A/ja active Pending
- 2004-01-29 CN CNB2004100078197A patent/CN100347747C/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1148710A (zh) * | 1995-09-11 | 1997-04-30 | 国际商业机器公司 | 具有锁定层逆平行磁化的旋转阀传感器 |
| US5751521A (en) * | 1996-09-23 | 1998-05-12 | International Business Machines Corporation | Differential spin valve sensor structure |
| CN1336636A (zh) * | 2000-07-31 | 2002-02-20 | 国际商业机器公司 | 带有反向平行耦合的低Hk自由层的巨磁阻传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004227749A (ja) | 2004-08-12 |
| US6927948B2 (en) | 2005-08-09 |
| CN1551113A (zh) | 2004-12-01 |
| US20040145835A1 (en) | 2004-07-29 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
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