CN100346943C - 在真空中搬运平直板的装置 - Google Patents

在真空中搬运平直板的装置 Download PDF

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Publication number
CN100346943C
CN100346943C CNB038066831A CN03806683A CN100346943C CN 100346943 C CN100346943 C CN 100346943C CN B038066831 A CNB038066831 A CN B038066831A CN 03806683 A CN03806683 A CN 03806683A CN 100346943 C CN100346943 C CN 100346943C
Authority
CN
China
Prior art keywords
vacuum chamber
linear motion
assembly
end effector
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB038066831A
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English (en)
Chinese (zh)
Other versions
CN1643177A (zh
Inventor
丹尼斯·P·普尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of CN1643177A publication Critical patent/CN1643177A/zh
Application granted granted Critical
Publication of CN100346943C publication Critical patent/CN100346943C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CNB038066831A 2002-03-22 2003-02-21 在真空中搬运平直板的装置 Expired - Lifetime CN100346943C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/104,846 US6779962B2 (en) 2002-03-22 2002-03-22 Device for handling flat panels in a vacuum
US10/104,846 2002-03-22

Publications (2)

Publication Number Publication Date
CN1643177A CN1643177A (zh) 2005-07-20
CN100346943C true CN100346943C (zh) 2007-11-07

Family

ID=28040712

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038066831A Expired - Lifetime CN100346943C (zh) 2002-03-22 2003-02-21 在真空中搬运平直板的装置

Country Status (8)

Country Link
US (1) US6779962B2 (https=)
EP (1) EP1513962A4 (https=)
JP (1) JP2005521268A (https=)
KR (1) KR100738592B1 (https=)
CN (1) CN100346943C (https=)
AU (1) AU2003219828A1 (https=)
TW (1) TWI251288B (https=)
WO (1) WO2003084043A2 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050223837A1 (en) * 2003-11-10 2005-10-13 Blueshift Technologies, Inc. Methods and systems for driving robotic components of a semiconductor handling system
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US9099506B2 (en) * 2005-03-30 2015-08-04 Brooks Automation, Inc. Transfer chamber between workstations
US20060251499A1 (en) * 2005-05-09 2006-11-09 Lunday Andrew P Linear substrate delivery system with intermediate carousel
US20070048451A1 (en) * 2005-08-26 2007-03-01 Applied Materials, Inc. Substrate movement and process chamber scheduling
US7432184B2 (en) * 2005-08-26 2008-10-07 Applied Materials, Inc. Integrated PVD system using designated PVD chambers
NL1036794A1 (nl) * 2008-04-25 2009-10-27 Asml Netherlands Bv Robot for in-vacuum use.
KR20090130559A (ko) * 2008-06-16 2009-12-24 삼성모바일디스플레이주식회사 이송 장치 및 이를 구비하는 유기물 증착 장치
CN103237634B (zh) * 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
RU2481057C1 (ru) * 2011-12-20 2013-05-10 Юрий Иванович Русанов Устройство горизонтального возвратно-поступательного разворота аппаратов диагностики после подъема многофункциональной диагностико-хирургической робототехнической системы для операционного стола с возможностью информационно-компьютерного управления им. ю.и. русанова
US10363665B2 (en) * 2012-07-10 2019-07-30 Persimmon Technologies Corporation Linear robot arm with multiple end effectors
US9293317B2 (en) * 2012-09-12 2016-03-22 Lam Research Corporation Method and system related to semiconductor processing equipment
US10134621B2 (en) 2013-12-17 2018-11-20 Brooks Automation, Inc. Substrate transport apparatus
ES2926698T3 (es) * 2015-03-30 2022-10-27 Azenta Inc Sistema de almacenamiento criogénico automatizado
GB201900478D0 (en) 2019-01-14 2019-02-27 Rolls Royce Plc Turbomachine
JP6677366B1 (ja) * 2019-03-12 2020-04-08 日本精工株式会社 ワークチェンジャ、ワーク搬送装置、加工装置、及び、リング軸受の製造方法、機械の製造方法、車両の製造方法
US12046499B2 (en) 2020-02-05 2024-07-23 Brooks Automation Us, Llc Substrate processing apparatus
CN113043253B (zh) * 2021-02-08 2022-05-17 珞石（北京）科技有限公司 单驱动直线运动机器人
CN114014018B (zh) * 2021-11-16 2023-05-26 仪晟科学仪器(嘉兴)有限公司 一种超高真空样品传递装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820109A (en) * 1986-04-11 1989-04-11 Ampex Corporation Bidirectional transfer mechanism
US5354380A (en) * 1993-02-02 1994-10-11 Leybold Aktiengesellschaft Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus
US6177129B1 (en) * 1997-07-08 2001-01-23 Balzers Aktiengesellschaft Process for handling workpieces and apparatus therefor
US6318951B1 (en) * 1999-07-09 2001-11-20 Semitool, Inc. Robots for microelectronic workpiece handling

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4787813A (en) * 1987-08-26 1988-11-29 Watkins-Johnson Company Industrial robot for use in clean room environment
US5102373A (en) * 1989-12-01 1992-04-07 Martinsound Technologies, Inc. Automated fader system
US5135349A (en) * 1990-05-17 1992-08-04 Cybeq Systems, Inc. Robotic handling system
JPH07115120A (ja) * 1993-10-18 1995-05-02 Hitachi Ltd 基板搬送装置およびその方法
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
JPH09267289A (ja) * 1996-03-29 1997-10-14 Mitsubishi Electric Corp 産業用ロボット
US6585478B1 (en) * 2000-11-07 2003-07-01 Asm America, Inc. Semiconductor handling robot with improved paddle-type end effector
KR20190000980A (ko) * 2017-06-26 2019-01-04 이동원 퍼스널 헬스케어 시스템

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820109A (en) * 1986-04-11 1989-04-11 Ampex Corporation Bidirectional transfer mechanism
US5354380A (en) * 1993-02-02 1994-10-11 Leybold Aktiengesellschaft Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus
US6177129B1 (en) * 1997-07-08 2001-01-23 Balzers Aktiengesellschaft Process for handling workpieces and apparatus therefor
US6318951B1 (en) * 1999-07-09 2001-11-20 Semitool, Inc. Robots for microelectronic workpiece handling

Also Published As

Publication number Publication date
TW200305968A (en) 2003-11-01
US20030180126A1 (en) 2003-09-25
EP1513962A2 (en) 2005-03-16
WO2003084043A3 (en) 2004-12-29
WO2003084043A2 (en) 2003-10-09
AU2003219828A8 (en) 2003-10-13
AU2003219828A1 (en) 2003-10-13
JP2005521268A (ja) 2005-07-14
CN1643177A (zh) 2005-07-20
KR100738592B1 (ko) 2007-07-11
US6779962B2 (en) 2004-08-24
TWI251288B (en) 2006-03-11
KR20040099259A (ko) 2004-11-26
EP1513962A4 (en) 2008-05-14

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