CN100340321C - 快速活化或预处理多孔气体净化基质的方法 - Google Patents

快速活化或预处理多孔气体净化基质的方法 Download PDF

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Publication number
CN100340321C
CN100340321C CNB03813800XA CN03813800A CN100340321C CN 100340321 C CN100340321 C CN 100340321C CN B03813800X A CNB03813800X A CN B03813800XA CN 03813800 A CN03813800 A CN 03813800A CN 100340321 C CN100340321 C CN 100340321C
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China
Prior art keywords
gas
pretreatment
container
activation
pressure
Prior art date
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Expired - Lifetime
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CNB03813800XA
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English (en)
Chinese (zh)
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CN1662291A (zh
Inventor
杰弗里·J.·施皮格尔曼
小丹尼尔·阿尔瓦雷斯
乔舒亚·T.·库克
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Entegris Inc
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Mykrolis Corp
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Publication of CN1662291A publication Critical patent/CN1662291A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28054—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J20/28057—Surface area, e.g. B.E.T specific surface area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/345—Regenerating or reactivating using a particular desorbing compound or mixture
    • B01J20/3458—Regenerating or reactivating using a particular desorbing compound or mixture in the gas phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/3491—Regenerating or reactivating by pressure treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Of Gases By Adsorption (AREA)
CNB03813800XA 2002-06-14 2003-06-11 快速活化或预处理多孔气体净化基质的方法 Expired - Lifetime CN100340321C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/173,335 US6638341B1 (en) 2002-06-14 2002-06-14 Method for rapid activation or preconditioning of porous gas purification substrates
US10/173,335 2002-06-14

Publications (2)

Publication Number Publication Date
CN1662291A CN1662291A (zh) 2005-08-31
CN100340321C true CN100340321C (zh) 2007-10-03

Family

ID=29250091

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB03813800XA Expired - Lifetime CN100340321C (zh) 2002-06-14 2003-06-11 快速活化或预处理多孔气体净化基质的方法

Country Status (6)

Country Link
US (2) US6638341B1 (enExample)
EP (1) EP1549414A4 (enExample)
JP (1) JP2005529730A (enExample)
CN (1) CN100340321C (enExample)
AU (1) AU2003245449A1 (enExample)
WO (1) WO2003105995A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6638341B1 (en) * 2002-06-14 2003-10-28 Aeronex, Inc. Method for rapid activation or preconditioning of porous gas purification substrates
US20050229947A1 (en) * 2002-06-14 2005-10-20 Mykrolis Corporation Methods of inserting or removing a species from a substrate
US6913654B2 (en) * 2003-06-02 2005-07-05 Mykrolis Corporation Method for the removal of airborne molecular contaminants using water gas mixtures
US7384149B2 (en) * 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
US20060285091A1 (en) * 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
EP2128890B1 (en) * 2004-02-05 2012-10-17 Entegris, Inc. Purging of a wafer conveyance container
KR20080034492A (ko) * 2005-08-03 2008-04-21 엔테그리스, 아이엔씨. 이송 용기
JP7209004B2 (ja) 2018-03-28 2023-01-19 フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド ルテニウムバリアの化学機械研磨スラリー
FR3087670B1 (fr) * 2018-10-26 2020-10-23 Air Liquide Procede de conditionnement d'un recipient comprenant un materiau granulaire
CN111912939A (zh) * 2020-07-30 2020-11-10 上海化工研究院有限公司 一种用于高效评价烯烃净化剂性能的评价装置及评价方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106271B (zh) * 1984-12-28 1988-02-24 日立造船株式会社 净化废气的方法及系统
US5013335A (en) * 1987-06-30 1991-05-07 Uop Process for sequestering ammonia and the odor associated therewith
US5160512A (en) * 1992-01-13 1992-11-03 Cleveland State University Gas separation process
US5540757A (en) * 1995-05-15 1996-07-30 Jordan Holding Company Method for preconditioning adsorbent
US5676737A (en) * 1993-03-08 1997-10-14 Whitlock; David R. Method for separating solutes in gaseous solvents
CN1038908C (zh) * 1992-02-08 1998-07-01 大同酸素株式会社 分离空气的方法和设备
US5968232A (en) * 1993-03-08 1999-10-19 Whitlock; David R. Method for ammonia production
US6221132B1 (en) * 1999-10-14 2001-04-24 Air Products And Chemicals, Inc. Vacuum preparation of hydrogen halide drier

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US596823A (en) * 1898-01-04 Webster davis
JPS6291408A (ja) * 1985-10-16 1987-04-25 Mitsubishi Heavy Ind Ltd 酸素含有窒素ガスの脱酸素方法
JP4355834B2 (ja) * 1999-08-20 2009-11-04 独立行政法人 日本原子力研究開発機構 ガス成分の分離除去または回収する方法および装置
US6638341B1 (en) * 2002-06-14 2003-10-28 Aeronex, Inc. Method for rapid activation or preconditioning of porous gas purification substrates

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106271B (zh) * 1984-12-28 1988-02-24 日立造船株式会社 净化废气的方法及系统
US5013335A (en) * 1987-06-30 1991-05-07 Uop Process for sequestering ammonia and the odor associated therewith
US5160512A (en) * 1992-01-13 1992-11-03 Cleveland State University Gas separation process
CN1038908C (zh) * 1992-02-08 1998-07-01 大同酸素株式会社 分离空气的方法和设备
US5676737A (en) * 1993-03-08 1997-10-14 Whitlock; David R. Method for separating solutes in gaseous solvents
US5968232A (en) * 1993-03-08 1999-10-19 Whitlock; David R. Method for ammonia production
US5540757A (en) * 1995-05-15 1996-07-30 Jordan Holding Company Method for preconditioning adsorbent
US6221132B1 (en) * 1999-10-14 2001-04-24 Air Products And Chemicals, Inc. Vacuum preparation of hydrogen halide drier

Also Published As

Publication number Publication date
EP1549414A4 (en) 2006-01-18
US6638341B1 (en) 2003-10-28
US6869463B2 (en) 2005-03-22
WO2003105995A1 (en) 2003-12-24
AU2003245449A1 (en) 2003-12-31
CN1662291A (zh) 2005-08-31
JP2005529730A (ja) 2005-10-06
EP1549414A1 (en) 2005-07-06
US20040159234A1 (en) 2004-08-19

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CP02 Change in the address of a patent holder

Address after: Massachusetts USA

Patentee after: MYKROLIS Corp.

Address before: Minnesota, USA

Patentee before: MYKROLIS Corp.

CX01 Expiry of patent term

Granted publication date: 20071003

CX01 Expiry of patent term