AU2003245449A1 - Method for rapid activation or preconditioning of porous gas purification substrates - Google Patents

Method for rapid activation or preconditioning of porous gas purification substrates

Info

Publication number
AU2003245449A1
AU2003245449A1 AU2003245449A AU2003245449A AU2003245449A1 AU 2003245449 A1 AU2003245449 A1 AU 2003245449A1 AU 2003245449 A AU2003245449 A AU 2003245449A AU 2003245449 A AU2003245449 A AU 2003245449A AU 2003245449 A1 AU2003245449 A1 AU 2003245449A1
Authority
AU
Australia
Prior art keywords
preconditioning
gas purification
porous gas
rapid activation
purification substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003245449A
Other languages
English (en)
Inventor
Daniel Alvarez Jr.
Joshua T. Cook
Jeffrey J. Spiegelman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Aeronex Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aeronex Inc filed Critical Aeronex Inc
Publication of AU2003245449A1 publication Critical patent/AU2003245449A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28054—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J20/28057—Surface area, e.g. B.E.T specific surface area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/345—Regenerating or reactivating using a particular desorbing compound or mixture
    • B01J20/3458—Regenerating or reactivating using a particular desorbing compound or mixture in the gas phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/3491—Regenerating or reactivating by pressure treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Of Gases By Adsorption (AREA)
AU2003245449A 2002-06-14 2003-06-11 Method for rapid activation or preconditioning of porous gas purification substrates Abandoned AU2003245449A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/173,335 US6638341B1 (en) 2002-06-14 2002-06-14 Method for rapid activation or preconditioning of porous gas purification substrates
US10/173,335 2002-06-14
PCT/US2003/018432 WO2003105995A1 (en) 2002-06-14 2003-06-11 Method for rapid activation or preconditioning of porous gas purification substrates

Publications (1)

Publication Number Publication Date
AU2003245449A1 true AU2003245449A1 (en) 2003-12-31

Family

ID=29250091

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003245449A Abandoned AU2003245449A1 (en) 2002-06-14 2003-06-11 Method for rapid activation or preconditioning of porous gas purification substrates

Country Status (6)

Country Link
US (2) US6638341B1 (enExample)
EP (1) EP1549414A4 (enExample)
JP (1) JP2005529730A (enExample)
CN (1) CN100340321C (enExample)
AU (1) AU2003245449A1 (enExample)
WO (1) WO2003105995A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6638341B1 (en) * 2002-06-14 2003-10-28 Aeronex, Inc. Method for rapid activation or preconditioning of porous gas purification substrates
US20050229947A1 (en) * 2002-06-14 2005-10-20 Mykrolis Corporation Methods of inserting or removing a species from a substrate
US6913654B2 (en) * 2003-06-02 2005-07-05 Mykrolis Corporation Method for the removal of airborne molecular contaminants using water gas mixtures
US7384149B2 (en) * 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
US20060285091A1 (en) * 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
EP2128890B1 (en) * 2004-02-05 2012-10-17 Entegris, Inc. Purging of a wafer conveyance container
KR20080034492A (ko) * 2005-08-03 2008-04-21 엔테그리스, 아이엔씨. 이송 용기
JP7209004B2 (ja) 2018-03-28 2023-01-19 フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド ルテニウムバリアの化学機械研磨スラリー
FR3087670B1 (fr) * 2018-10-26 2020-10-23 Air Liquide Procede de conditionnement d'un recipient comprenant un materiau granulaire
CN111912939A (zh) * 2020-07-30 2020-11-10 上海化工研究院有限公司 一种用于高效评价烯烃净化剂性能的评价装置及评价方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US596823A (en) * 1898-01-04 Webster davis
JPS61157328A (ja) * 1984-12-28 1986-07-17 Hitachi Zosen Corp 乾式ドロマイト法による排ガスの浄化方法
JPS6291408A (ja) * 1985-10-16 1987-04-25 Mitsubishi Heavy Ind Ltd 酸素含有窒素ガスの脱酸素方法
US5013335A (en) * 1987-06-30 1991-05-07 Uop Process for sequestering ammonia and the odor associated therewith
US5160512A (en) * 1992-01-13 1992-11-03 Cleveland State University Gas separation process
JPH0787889B2 (ja) * 1992-02-08 1995-09-27 大同ほくさん株式会社 混合ガスの分離方法およびそれに用いる装置
US5968232A (en) * 1993-03-08 1999-10-19 Whitlock; David R. Method for ammonia production
US5470377A (en) * 1993-03-08 1995-11-28 Whitlock; David R. Separation of solutes in gaseous solvents
US5540757A (en) * 1995-05-15 1996-07-30 Jordan Holding Company Method for preconditioning adsorbent
JP4355834B2 (ja) * 1999-08-20 2009-11-04 独立行政法人 日本原子力研究開発機構 ガス成分の分離除去または回収する方法および装置
US6221132B1 (en) 1999-10-14 2001-04-24 Air Products And Chemicals, Inc. Vacuum preparation of hydrogen halide drier
US6638341B1 (en) * 2002-06-14 2003-10-28 Aeronex, Inc. Method for rapid activation or preconditioning of porous gas purification substrates

Also Published As

Publication number Publication date
EP1549414A4 (en) 2006-01-18
US6638341B1 (en) 2003-10-28
US6869463B2 (en) 2005-03-22
WO2003105995A1 (en) 2003-12-24
CN100340321C (zh) 2007-10-03
CN1662291A (zh) 2005-08-31
JP2005529730A (ja) 2005-10-06
EP1549414A1 (en) 2005-07-06
US20040159234A1 (en) 2004-08-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase