CN100336586C - 液体等离子体发生装置、液体中等离子体发生方法以及由液体中等离子体分解有害物质的方法 - Google Patents
液体等离子体发生装置、液体中等离子体发生方法以及由液体中等离子体分解有害物质的方法 Download PDFInfo
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- CN100336586C CN100336586C CNB038074613A CN03807461A CN100336586C CN 100336586 C CN100336586 C CN 100336586C CN B038074613 A CNB038074613 A CN B038074613A CN 03807461 A CN03807461 A CN 03807461A CN 100336586 C CN100336586 C CN 100336586C
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Abstract
Description
Claims (16)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP98193/2002 | 2002-04-01 | ||
JP2002098193A JP3624238B2 (ja) | 2002-04-01 | 2002-04-01 | プラズマを発生させる方法およびプラズマ発生装置 |
JP313979/2002 | 2002-10-29 | ||
JP2002313979A JP3624239B2 (ja) | 2002-10-29 | 2002-10-29 | 液中プラズマ発生装置、薄膜形成方法およびシリコンカーバイト膜 |
Publications (2)
Publication Number | Publication Date |
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CN1642632A CN1642632A (zh) | 2005-07-20 |
CN100336586C true CN100336586C (zh) | 2007-09-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB038074613A Expired - Lifetime CN100336586C (zh) | 2002-04-01 | 2003-03-31 | 液体等离子体发生装置、液体中等离子体发生方法以及由液体中等离子体分解有害物质的方法 |
Country Status (6)
Country | Link |
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US (1) | US7067204B2 (zh) |
EP (1) | EP1504813A4 (zh) |
KR (1) | KR100709923B1 (zh) |
CN (1) | CN100336586C (zh) |
AU (1) | AU2003221072A1 (zh) |
WO (1) | WO2003086615A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US8527620B2 (en) * | 2003-03-06 | 2013-09-03 | International Business Machines Corporation | E-business competitive measurements |
TWI405608B (zh) * | 2005-03-25 | 2013-08-21 | Mitsubishi Rayon Co | 表面處理方法以及被表面處理的物品 |
WO2006107002A1 (ja) * | 2005-03-30 | 2006-10-12 | Kabushiki Kaisha Toyota Jidoshokki | 非晶質炭素膜の製造方法 |
JP5023705B2 (ja) * | 2007-01-10 | 2012-09-12 | 東京エレクトロン株式会社 | 半導体装置の製造方法、半導体製造装置及び記憶媒体 |
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- 2003-03-31 US US10/507,919 patent/US7067204B2/en not_active Expired - Lifetime
- 2003-03-31 AU AU2003221072A patent/AU2003221072A1/en not_active Abandoned
- 2003-03-31 EP EP03715684A patent/EP1504813A4/en not_active Withdrawn
- 2003-03-31 KR KR1020047015057A patent/KR100709923B1/ko active IP Right Grant
- 2003-03-31 CN CNB038074613A patent/CN100336586C/zh not_active Expired - Lifetime
- 2003-03-31 WO PCT/JP2003/004139 patent/WO2003086615A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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US7067204B2 (en) | 2006-06-27 |
EP1504813A4 (en) | 2008-06-18 |
WO2003086615A1 (fr) | 2003-10-23 |
KR20040104540A (ko) | 2004-12-10 |
EP1504813A1 (en) | 2005-02-09 |
CN1642632A (zh) | 2005-07-20 |
KR100709923B1 (ko) | 2007-04-24 |
AU2003221072A1 (en) | 2003-10-27 |
US20050227115A1 (en) | 2005-10-13 |
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