CN100335779C - Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow - Google Patents
Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow Download PDFInfo
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- CN100335779C CN100335779C CNB2005100121971A CN200510012197A CN100335779C CN 100335779 C CN100335779 C CN 100335779C CN B2005100121971 A CNB2005100121971 A CN B2005100121971A CN 200510012197 A CN200510012197 A CN 200510012197A CN 100335779 C CN100335779 C CN 100335779C
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Abstract
The present invention relates to the technical field of fluid pumps in precise machines. The present invention is characterized in that the fluid pump of the present invention comprises a pump body, an upper pump cover, a lower pump cover, an upper annular piezoelectric ceramic ring sheet, a lower upper annular piezoelectric ceramic ring sheet, an inflow port and an outflow port, wherein the upper side and the lower side of the circumferential edge of the pump body are respectively provided with a groove, wherein a plurality of through holes are arranged between the grooves; the upper pump cover and the lower pump cover seals the grooves, so that the grooves form liquid flow passages; the front side of the upper annular piezoelectric ceramic ring sheet and the front side of the lower upper annular piezoelectric ceramic ring sheet are respectively attached to the upper side and the lower side of the pump body, and the difference between the circumferential space of the upper annular piezoelectric ceramic ring sheet and the circumferential space of the lower upper annular piezoelectric ceramic ring sheet is one fourth of the circumferential wavelength; when the fluid pump of the present invention operates, travelling wave fluctuations are formed in the upper groove and the lower groove; the inflow port and the outflow port are respectively arranged on the same side or different sides of the piezoelectric ceramic pump; link stoppers are clamped in the grooves between the inflow port and the outflow port so as to ensure that the fluid flows in from the inflow port and flows out from the outflow port. The flow direction of the fluid is controlled by a phase difference of +/-90 degrees by externally two paths of electrical excitation; the flow rate, the flow speed and the back pressure of the fluid are regulated by the amplitude, the frequency, the phase, etc. by the applied signal. The present invention has the advantages of low sealing requirement, high reliability.
Description
Technical field
The invention belongs to fluid pump technical field in the precision optical machinery, specially refer to concrete structure design, making method and the method for driving of the piezoelectric ceramic pump of novel utilization row ripple driving.
Technical background
In background technique, being out of shape around song of the most employing of the piezoelectric pump of traditional sense piezoelectric constant lower mode causes the variation of pump cavity volume, and the liquid in the cavity is produced squeezing action and forms flowing of liquid.Its working principle has determined that piezoelectric pump is had than higher design, assembly and use requirements.As: require the sealing of pump chamber very high, avoid that bubble is arranged in the cavity, the existence of bubble directly has influence on the effect that pumps of piezoelectric pump, even is easy to just cause the piezoelectric pump can't proper functioning.Most piezoelectric pumps all needed the pump priming process before work, promptly first with full of liquid in the piezoelectric pump pump chamber under vacuum environment, and then powered up work.Most piezoelectric pumps adopt in the gateway one-way valve structures, and by one-way valve tens opening and closing each second, the control fluid constantly pumps into and outlet is pumped from inlet.But the mechanical type one-way valve speed of response of this frequent reciprocating action is slow, easily cause wearing and tearing, and use the suspended matter precipitation accumulation easily in pump chamber or in the one-way valve in the fluid for a long time, especially precipitation is piled up at the easier dead angle of causing of the fluid that viscosity is bigger, cause pump performance to descend, reliability reduces.Some piezoelectric pump pump housing materials adopts conducting metal, will consider also on the structural design that high pressure insulating material such as polyester fluorine carries out isolating seal.At present, the driver frequency of nearly all fluid pump is below hundreds of Hz, and particularly the pump below the frequency of okperation 50Hz is more common.And the means of conventional piezoelectric pump duty control are more single, and the basic input voltage of adjusting piezoelectric constant that relies on is realized.
Summary of the invention
For overcoming the problems that above conventional piezoelectric pump exists, the present invention proposes a kind of piezoelectric ceramic pump of novel concept, and the capable wave-wave that this pump utilizes piezoelectric constant to be inspired in pump housing chamber is moving, and the fluid that relies on acoustic radiation force to drive different viscosities produces and flows.Can control fluid flow direction by the phase difference that adds electric excitation, fluid flow and flow velocity can pass through multiple modes such as the voltage of signals that powers up, frequency, phase difference to be regulated.
The invention is characterized in that this row ripple drives piezoelectric ceramic pump and contains:
(1) pump housing, one side has circumferential groove at this pump housing excircle upside, and the cross section of this groove is rectangular;
(2) pump cover, this pump cover are connected on the upper-end surface of the described pump housing, and described groove is formed sealing;
(3) inflow port and go out head piece is fixed on the described pump cover, communicates with described groove respectively; In this inflow port with go out on one section short groove of girth between the head piece to be provided with one in order to form the baffle piece that the single direction fluid flows;
(4) piezoelectric constant ring plate, this ring plate just between be divided into 2n+1 electrode district, n is that described piezoelectric ceramic pump is along the node number on the pump housing circumferencial direction, make the ultrasonic vibration that along the circumferential direction to form n wavelength in described groove be λ, the polarised direction of described each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite; The reverse side of described ring plate is divided into three cube electrode districts, wherein the wavelength in first electrode district and this ring plate front be an electrode district of λ/4 on the same space position, and other two cube electrodes districts are symmetrical distribution with respect to described first electrode district; The lower end surface conductive adhesive of the front of described ring plate and the described pump housing;
Under working condition, the front of described piezoelectric constant ring plate or the pump housing connect the ground wire of power supply, and the electrode district of two symmetrical distributions connects sine and cosine signal successively respectively on this ring plate reverse side, first electrode district on this ring plate reverse side connect feedback signal line realize this piezoelectric ceramic pump to frequency of okperation from motion tracking; The ripple direction of then going when two electrode districts separating of symmetry on this ring plate connect the two-way cosine signal of power supply and sinusoidal signal successively respectively is opposite, make reverse fluid flow, the frequency of described power supply adopts the natural resonance frequency of piezoelectric ceramic pump, perhaps adjusts in natural resonance frequency ± 1KHz scope.
The invention is characterized in that this row ripple drives piezoelectric ceramic pump and contains:
(1) pump housing has a circumferential groove at least on the excircle of this pump housing, the cross section of this groove is rectangular;
(2) pump cover has one at least, and this pump cover is connected on the upper-end surface of the described pump housing, is called pump cover, and described groove is formed sealing;
(3) inflow port and go out head piece is fixed on the described pump cover, communicates with described groove respectively, is provided with one in order to form the mobile baffle piece of single direction fluid on described inflow port one section groove short with going out girth between the head piece;
(4) piezoelectric constant ring plate has two, and described ring plate lays respectively on upper and lower two inner side surfaces of the described pump housing, the front of these two ring plates respectively with upper and lower two inner side surface conductive adhesives of the described pump housing; The electrode district of even five equilibrium is all adopted in the front of described each piezoelectric ceramic, the quantity of cutting apart of electrode district is n, n=2,3,4,5 ... n be described piezoelectric ceramic pump along the node number on the pump housing circumferencial direction, make in described groove to form n the ultrasonic vibration that wavelength is λ along pump housing circumferencial direction; The reverse side of described piezoelectric constant ring plate is one and does not cut apart and unified electrode district; The polarised direction of described each electrode district is along the thickness direction of described piezoelectric constant ring plate, and direction is alternately opposite; Described upper and lower two piezoelectric constant ring plates differ λ/4 each other on the circumferencial direction spatial position, described λ is the circumference of two electrode districts, also are each hyperacoustic vibration wavelengths;
The front of described upper and lower two piezoelectric constant ring plates or the ground that the pump housing connects power supply when work, and the reverse side of described two piezoelectric constant ring plates connects the two-way sinusoidal signal and the cosine signal of power supply respectively; When described two-way sinusoidal signal fluid reversing in the then described piezoelectric ceramic pump when being connected with described two piezoelectric constant ring plate reverse side again after cosine signal is exchanged flows, the frequency of described power supply adopts the natural resonance frequency of piezoelectric ceramic pump, perhaps adjusts in natural resonance frequency ± 1KHz scope.
With traditional piezoelectric pump relatively, the piezoelectric fluid pump of row ripple driving has the advantage of highly significant.
1, the fluid pump present, that unique practicable bidirectional fluid drives has extraordinary industrial prospect.
2, the transmission of fluid drives by the row ripple, and pump chamber produced but not change in the conventional piezoelectric pump, and the influence of cavitation convection cell pump characteristics is little, and is not high to the pump chamber sealing requirements.
3, majority needed pump priming could move before the conventional piezoelectric pump used, and capable ripple pump does not need pump priming, and to open the pump conditional request not high to concrete.
4, can adopt continuous electric excitation to cause the working method of continuous-flow on the mobile macroscopic view of fluid, also can adopt electric excitation intermittently to cause the mode of fluid intermittent flow or one one TRANSFER BY PULSATING FLOW.The piezoelectric pump flow can be regulated between the hundreds of ml/min in tens mul/min.
5, easy to operate, the transmission direction of fluid can be controlled by the phase difference of driving power two-way alternating signal, and phase difference 90 degree or-90 degree can cause the forward and reverse motion of fluid respectively, and it is mobile that promptly sin and cos two paths of signals are exchanged the commutation that just can produce fluid.The flow of fluid can come real-time regulated by frequency, voltage magnitude, the phase place of power supply two-way drive signal.
6, conventional pump adopts one-way valve to control fluid flow direction more, and the control of row ripple pump direction is regulated by circuit supply phase in-migration, has saved the one-way valve structures of import and export, has reduced mechanical wear, has increased the reliability of device.
7, going the ripple pump all has pump stream effect under a plurality of vibrational modes and driver frequency, and promptly piezoelectric pump all can pump fluid under a plurality of higher order resonances frequencies.Usually, the frequency of okperation of pump is greater than 1kHz.When the boundary dimension of pump during less than 100mm, its frequency of okperation is generally greater than 20kHz.As seen, the flexible design ability of piezoelectric pump is more intense according to actual needs.
8, the cavity of pump part and power supply altogether, the pump housing need not to adopt the isolation layer High-Voltage Insulation, and is safe and reliable, effective.
Find in the experiment that 9, the movement direction of the large-sized suspended matter of part is opposite with fluid flow direction in the pump chamber, pump chamber is expert under the wave excitation, and the large scale suspended particulate is had the reverse filtration effect, this main with go the wave surface microcosmic mechanism of action relation arranged.
10, because fluid flow to rely on is that the fluctuation of row ripple causes that therefore, the size of cavity, shape and position are very flexible from design point of view, adopt structural design mode flexibly according to concrete application.
This row wave pressure electric pump can be used for Bioexperiment research, fine chemistry industry, and medical administration needs the micro fluid of accurately control to supply with in the energy system, satisfy the requirement of in many occasions Micro-volume liquid being carried.
Description of drawings
Fig. 1 drives piezoelectric ceramic pump embodiment one general structure erection drawing for the present invention's row ripple.
Fig. 2 drives piezoelectric ceramic pump embodiment one three-dimensional exploded view for the present invention's row ripple.
Fig. 3 drives piezoelectric ceramic pump embodiment one pump body structure figure for the present invention's row ripple.
Fig. 4 drives piezoelectric ceramic pump embodiment one piezoelectric constant ring plate schematic representation for the present invention's row ripple: 4a represents the front of piezoelectric constant ring plate, and 4b represents the reverse side of piezoelectric constant ring plate.
Fig. 5 drives piezoelectric ceramic pump embodiment one fundamental diagram for the present invention's row ripple: the direction that → expression row ripple is propagated.
Fig. 6 drives piezoelectric ceramic pump embodiment one pump housing photo for the present invention's row ripple.
Fig. 7 drives piezoelectric ceramic pump embodiment two general structure erection drawing for the present invention's row ripple.
Fig. 8 drives piezoelectric ceramic pump embodiment two pump cover structural drawing for the present invention's row ripple.
Fig. 9 drives piezoelectric ceramic pump embodiment three general structure erection drawing for the present invention's row ripple.
Figure 10 drives piezoelectric ceramic pump embodiment three pump body structure figure for the present invention's row ripple.
Figure 11 drives piezoelectric ceramic pump embodiment four general structure erection drawing for the present invention's row ripple.
Figure 12 drives piezoelectric ceramic pump embodiment four piezoelectric constant ring plate schematic representation for the present invention's row ripple: 12a represents the front of piezoelectric constant ring plate, 12b represents the reverse side of piezoelectric constant ring plate, 112 (113) expressions 112 or 113,1121 (1131) expressions, 1121 or 1131,1122 (1132) expressions 1122 or 1132.
Figure 13 drives piezoelectric ceramic pump embodiment four piezoelectric constant ring plate surface electrode silk-screen printing figure for the present invention's row ripple: 13a represents the silk-screen printing figure in piezoelectric constant ring plate front, and 13b represents the silk-screen printing figure of piezoelectric constant ring plate reverse side.
Figure 14 drives piezoelectric ceramic pump embodiment four pump body structure figure for the present invention's row ripple.
Figure 15 drives piezoelectric ceramic pump embodiment five general structure erection drawing for the present invention's row ripple.
Figure 16 drives piezoelectric ceramic pump embodiment five pump body structure figure for the present invention's row ripple.
Figure 17 drives piezoelectric ceramic pump embodiment six general structure erection drawing for the present invention's row ripple.
Figure 18 drives piezoelectric ceramic pump embodiment six pump body structure figure for the present invention's row ripple.
Figure 19 drives piezoelectric ceramic pump embodiment seven general structure erection drawing for the present invention's row ripple.
Figure 20 drives piezoelectric ceramic pump embodiment eight general structure erection drawing for the present invention's row ripple.
Figure 21 drives piezoelectric ceramic pump embodiment eight pump body structure figure for the present invention's row ripple.
Figure 22 drives each embodiment's of piezoelectric ceramic pump means of fixation schematic representation for the present invention's row ripple.
Embodiment
One of capable ripple driving fluid piezoelectric pump typical structure that the present invention proposes is to be connected the pump housing by having inflow port with the pump cover that goes out head piece, and its pump housing bottom is stained with the piezoelectric constant ring plate, is provided with the baffle piece in the groove of the pump housing.It is characterized in that: have the groove of circle distribution pump housing excircle upside one side, trench cross-section is rectangular, and one side is stained with the piezoelectric constant ring plate at pump housing excircle downside.The piezoelectric constant ring plate is a single-layer sheet, and the front of piezoelectric constant ring plate can be divided into 2n+1 electrode district, and n is the node number that piezoelectric pump is along the circumferential direction gone up, n=1,2,3 ...The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite.The reverse side of piezoelectric constant ring plate is divided into three cube electrode districts all the time.
Two of the capable ripple driving fluid piezoelectric pump typical structure that the present invention proposes is to be connected the pump housing by the last pump cover that has inflow port with the following pump cover that goes out head piece, and its pump housing top and bottom respectively are stained with a slice piezoelectric constant ring plate, are provided with the baffle piece in groove.It is characterized in that: the groove that has symmetrical circle distribution at pump housing excircle upper and lower sides, trench cross-section is rectangular, between last lower groove, have a plurality of equally distributed through holes, to go up lower groove is communicated with, respectively be stained with one deck piezoelectric constant ring plate at pump housing upper and lower sides, and piezoelectric ceramic is distributed in the inboard of groove.Described piezoelectric constant ring plate is a single-layer sheet, and its positive electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate 13, and direction is alternately opposite.Two piezoelectric constant ring plates differ λ/4 in the circumferencial direction spatial position each other up and down, and wherein λ is two electrode district circumferences.
The drive waveforms of the driving power of piezoelectric pump of the present invention is AC sine waveform or square-wave waveform, drives the natural resonance frequency that wave frequency adopts piezoelectric pump, also can be near resonant frequency ± the 1kHz scope in adjustment.Piezoelectric pump can be in its eigentone (2,0), (3,0), (4,0) ... n 〉=2 time work is counted in (n, 0), node, and resonant frequency of operation＞1kHz.When the boundary dimension of pump during less than 100mm, its frequency of okperation is generally selected the situation greater than 20kHz for use.
The general diameter dimensional range of described piezoelectric pump can be between 5mm-100mm, and the thickness size usual range of piezoelectric ceramic is between the 50 μ m-1.2mm.
What the present invention proposed realizes that the mobile capable ripple driving piezoelectric ceramic pump of forward and reverse fluid reaches accompanying drawing in conjunction with the embodiments and is described in detail as follows.The groove 121 of circle distribution, trench cross-section is rectangular, and three end faces of rectangle rely on the pump housing 12, and the upper-end surface relies on pump cover 11 to seal.One side is stained with piezoelectric constant ring plate 13 at the pump housing 12 excircle downsides.Described inflow port 14 and go out head piece 15 and stick with glue and connect the same side that is fixed on pump cover 11, and inflow port 14 and go out head piece 15 can be according to application requirements in circumferential position setting arbitrarily.Baffle piece 16 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 16 is stuck in and plays fluid choked flow effect in the groove 121, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Pump cover 11 adopts the belt edge convexes to be the structure of " recessed " shape, adopts glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics, with the pump housing 12 usefulness epoxy glues or AB is gluing connects.The pump housing 12 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.
Described piezoelectric constant ring plate 13 is single-layer sheet, and the front of piezoelectric constant ring plate 13 can be divided into 2n+1 electrode district, and n is the node number that piezoelectric pump is along the circumferential direction gone up, n=1,2,3 ...Present embodiment n=5 promptly along the circumferential direction can form the ultrasonic vibration of 5 wavelength X in piezoelectric pump groove 121, wherein electrode district 41,42,43,44 accounts for a wavelength X respectively, and electrode district 45 accounts for λ/4, and electrode district 46 accounts for λ 3/4.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate 13, and direction is alternately opposite.The reverse side of piezoelectric constant ring plate 13 is divided into three cube electrode districts all the time, and the electrode district 45 in electrode district 49 and piezoelectric constant ring plate 13 fronts is on the same space position, and other two cube electrodes district 47 and 48 is symmetrical distribution with respect to electrode district 49.
The lower end surface of the front of described piezoelectric constant ring plate 13 and the pump housing 12 epoxies glue or AB glue or conductive adhesive, the front of piezoelectric constant ring plate 13 or the pump housing 12 connect power supply ground during work, two-way sin and cos signal that electrode district 47 that the reverse side of piezoelectric constant ring plate 13 is symmetrically distributed and electrode district 48 connect power supply respectively, electrode district 49 connect feedback signal line realize piezoelectric pump to frequency of okperation from motion tracking.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment two:
The present invention has designed the embodiment two that capable ripple drives piezoelectric ceramic pump, shown in Fig. 7-8.Capable in the present embodiment ripple driving fluid piezoelectric pump is connected the pump housing 72 by having inflow port 74 with the pump cover 71 that goes out head piece 75, and its pump housing 72 bottoms are stained with piezoelectric constant ring plate 73, are provided with baffle piece 76 in groove 721.It is characterized in that: have the groove 721 of circle distribution the pump housing 72 excircle upsides one side, trench cross-section is rectangular, and three end faces of rectangle rely on the pump housing 72, and the upper-end surface relies on pump cover 71 to seal.One side is stained with piezoelectric constant ring plate 73 at the pump housing 72 excircle downsides.Described inflow port 74 and go out head piece 75 and stick with glue and connect the same side that is fixed on pump cover 71, and inflow port 74 and go out head piece 75 can be according to application requirements in circumferential position setting arbitrarily.Baffle piece 76 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 76 is stuck in and plays fluid choked flow effect in the groove 721, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Pump cover 71 adopts circular flat structure shown in Figure 8, adopts glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics, with the pump housing 72 usefulness epoxy glues or AB is gluing connects.The pump housing 72 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.
Described piezoelectric constant ring plate 73 is single-layer sheet, and the front of piezoelectric constant ring plate 73 can be divided into 2n+1 electrode district, and n is the node number that piezoelectric pump is along the circumferential direction gone up, n=1,2,3 ...The electrode dividing method that present embodiment piezoelectric constant ring plate 73 positive and negatives are concrete, polarization mode is with the bonding way of the pump housing 72 with to power up mode identical with introducing among the embodiment one.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment three:
The present invention has designed the embodiment three that capable ripple drives piezoelectric ceramic pump, shown in Fig. 9-10.Capable in the present embodiment ripple driving fluid piezoelectric pump is connected the pump housing 92 by having inflow port 94 with the pump cover 91 that goes out head piece 95, and its pump housing 92 bottoms are stained with piezoelectric constant ring plate 93, are provided with baffle piece 96 in groove 921.It is characterized in that: have the groove 921 of circle distribution the pump housing 92 excircle upsides one side, trench cross-section is rectangular, and two end faces of rectangle rely on the pump housings 92, and two other end face relies on pump cover 91 to seal.One side is stained with piezoelectric constant ring plate 93 at the pump housing 92 excircle downsides.Described inflow port 94 and go out head piece 95 and stick with glue and connect the same side that is fixed on pump cover 91, and inflow port 94 and go out head piece 95 can be according to application requirements in circumferential position setting arbitrarily.Baffle piece 96 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 96 is stuck in and plays fluid choked flow effect in the groove 921, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Pump cover 91 adopts the belt edge convexes to be the structure of " recessed " shape, adopts glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics, with the pump housing 92 usefulness epoxy glues or AB is gluing connects.The pump housing 92 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.
Described piezoelectric constant ring plate 93 is single-layer sheet, and the front of piezoelectric constant ring plate 93 can be divided into 2n+1 electrode district, and n is the node number that piezoelectric pump is along the circumferential direction gone up, n=1,2,3 ...The electrode dividing method that present embodiment piezoelectric constant ring plate 93 positive and negatives are concrete, polarization mode is with the bonding way of the pump housing 92 with to power up mode identical with introducing among the embodiment one.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment four:
The present invention has designed the embodiment four that capable ripple drives piezoelectric ceramic pump, shown in Figure 11-14.Capable in the present embodiment ripple driving fluid piezoelectric pump, be connected the pump housing 116 by having inflow port 114 with the pump cover 111 that goes out head piece 115, respectively be bonded with a slice piezoelectric constant ring plate 112 and 113 at the pump housing 116 inner side step upper and lower sides, have groove 1161 in the outside of the pump housing 116, be provided with baffle piece 117 in the groove 1161.It is characterized in that: lean on pump cover 111 1 sides to have the groove 1161 of circle distribution at the pump housing 116 excircle upsides, trench cross-section is rectangular, and rectangle groove relies on pump cover 111 to seal.Described inflow port 114 and go out head piece 115 and stick with glue and connect the same side that is fixed on pump cover 111, and inflow port 114 and go out head piece 115 can be according to application requirements in circumferential position setting arbitrarily.Described baffle piece 117 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 117 is stuck in and plays fluid choked flow effect in the groove 1161, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Described pump cover 111 adopts flat circle structure, adopts glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics to make, with the pump housing 116 usefulness epoxy glues or AB is gluing connects.The described pump housing 116 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.
Described piezoelectric constant ring plate 112 and 113 is single-layer sheet, and its positive 1121 and 1131 electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side 1122 and 1132 adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate 112 and 113, and direction is alternately opposite.Piezoelectric constant ring plate 112 and 113 circumferencial direction spatial position each other differs λ/4, and wherein λ is two electrode district circumferences.
Described piezoelectric constant ring plate 112 and 113 front 1121 and 1131 are bonding with the pump housing 116 usefulness epoxy glues respectively, and the electrodes exposed of reverse side 1122 and 1132 outside, link to each other with the input lead of the driving power of piezoelectric pump, and reverse side 1122 and 1132 electrode are connected the sin and the cos signal of power supply respectively.The pump housing 116 connects power supply ground.
Described piezoelectric constant ring plate 112 and 113 surface electrode silk-screen printing figure see Figure 13, and for the expansion that prevents past the outer edge after the electrode printing with flow, generally the size of silk screen figure is slightly different with the size of ceramic plate.Silk screen figure China and foreign countries diameter dimension is than Figure 12 ceramic plate outer diameter undersized, and generally both differences are controlled at 0.2-0.5mm, and present embodiment is got 0.5mm.Inner diameter size is more bigger than Figure 12 ceramic plate inner diameter size among the silk screen figure, and generally both differences are controlled at 0.2-0.5mm, and present embodiment is got 0.5mm.The size of space among the silk screen figure between the electrode district is more bigger than the size of space between Figure 12 ceramic plate electrode district, and generally both differences are controlled at 0.2-0.5mm, and present embodiment is got 0.2mm.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment five:
The present invention has designed the embodiment five that capable ripple drives piezoelectric ceramic pump, shown in Figure 15-16.Capable in the present embodiment ripple driving fluid piezoelectric pump, be connected the pump housing 157 by having inflow port 155 with the last pump cover 151 that goes out head piece 156, respectively be bonded with a slice piezoelectric constant ring plate 152 and 154 at the pump housing 157 inner side step upper and lower sides, excircle upper and lower sides at the pump housing 157 respectively has a circular groove 1571 and 1572, is provided with baffle piece 158 in the groove 1571 and 1572.It is characterized in that: groove 1571 and 1572 cross sections are rectangular, and pump cover 151 is gone up in groove dependence and following pump cover 153 seals.Described inflow port 155 and go out head piece 156 and stick with glue and connect the same side that is fixed on pump cover 151, perhaps descend the homonymy of pump cover 153, perhaps respectively on last pump cover 151 and following pump cover 153, and inflow port 155 and go out head piece 156 can be according to application requirements in any circumferential position setting.Described baffle piece 158 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 158 is stuck in and plays fluid choked flow effect in groove 1571 and 1572, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Describedly go up pump cover 151 and following pump cover 153 adopts flat circle structure, employing glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics are made, with the pump housing 157 usefulness epoxy glues or AB is gluing connects.The described pump housing 157 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.Fluid in the described groove 1571 and 1572 is communicated with by two through holes 1573 on the pump housing 157 and 1574, and piezoelectric pump assembles latter two through hole 1573 and 1574 and is communicated with respectively with inflow port 155 and goes out head piece 156 at same circumferential position.
Described piezoelectric constant ring plate 152 and 154 is single-layer sheet, and its positive electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite.Piezoelectric constant ring plate 152 and 154 circumferencial direction spatial position each other differs λ/4, and wherein λ is two electrode district circumferences.Concrete structure and embodiment's four described same contents.
Described piezoelectric constant ring plate 152 and 154 front are bonding with the pump housing 157 usefulness epoxy glues respectively, and the reverse side electrodes exposed outside, link to each other with the input lead of the driving power of piezoelectric pump, and the reverse side electrode connects the sin and the cos signal of power supply respectively, the pump housing 157 connects power supply ground.Particular content and embodiment's four described same contents.
Described piezoelectric constant ring plate 152 and 154 surface electrode silk-screen printing figure and embodiment's four described same contents.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment six:
The present invention has designed the embodiment six that capable ripple drives piezoelectric ceramic pump, shown in Figure 17-18.Capable in the present embodiment ripple driving fluid piezoelectric pump, be connected the pump housing 177 by having inflow port 175 with the last pump cover 171 that goes out head piece 176, respectively be bonded with a slice piezoelectric constant ring plate 172 and 174 at the pump housing 177 inner side step upper and lower sides, excircle upper and lower sides at the pump housing 177 respectively has a circular groove 1771 and 1772, is provided with baffle piece 178 in the groove 1771 and 1772.It is characterized in that: groove 1771 and 1772 cross sections are rectangular, and groove 1771 and 1772 dependence are gone up pump cover 171 and sealed with following pump cover 173.Described inflow port 175 and go out head piece 176 and stick with glue and connect the same side that is fixed on pump cover 171, perhaps descend the homonymy of pump cover 173, perhaps be separately fixed on pump cover 171 and the following pump cover 173, and inflow port 175 and go out head piece 176 can be according to application requirements in any circumferential position setting.Described baffle piece 178 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 178 is stuck in and plays fluid choked flow effect in groove 1771 and 1772, avoids circulation of fluid to flow, and forms the single direction fluid and flows.The described pump cover 171 of going up adopts flat circle structure, following pump cover 173 adopts outward edge that " recessed " shape structure of step is arranged, adopt glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics to make, last pump cover 171 and following pump cover 173 are bonding up and down with the pump housing 177 usefulness epoxy glues or AB glue respectively.The described pump housing 177 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.Fluid in the described groove 1771 and 1772 is communicated with by two through holes 1773 on the pump housing 177 and 1774, and piezoelectric pump assembles latter two through hole 1773 and 1774 and is communicated with respectively with inflow port 175 and goes out head piece 176 at same circumferential position.
Described piezoelectric constant ring plate 172 and 174 is single-layer sheet, and its positive electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite.Piezoelectric constant ring plate 172 and 174 circumferencial direction spatial position each other differs λ/4, and wherein λ is two electrode district circumferences.Concrete structure and embodiment's four described same contents.
Described piezoelectric constant ring plate 172 and 174 front are bonding with the pump housing 177 usefulness epoxy glues respectively, and the reverse side electrodes exposed outside, link to each other with the input lead of the driving power of piezoelectric pump, and the reverse side electrode connects the sin and the cos signal of power supply respectively, the pump housing 177 connects power supply ground.Particular content and embodiment's four described same contents.
Described piezoelectric constant ring plate 172 and 174 surface electrode silk-screen printing figure and embodiment's four described same contents.Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment seven:
The present invention has designed the embodiment seven that capable ripple drives piezoelectric ceramic pump, as shown in figure 19.Capable in the present embodiment ripple driving fluid piezoelectric pump, be connected the pump housing 197 by having inflow port 195 with the last pump cover 191 that goes out head piece 196, respectively be bonded with a slice piezoelectric constant ring plate 192 and 194 at the pump housing 197 inner side step upper and lower sides, excircle upper and lower sides at the pump housing 197 respectively has a circular groove 1971 and 1972, is provided with baffle piece 198 in the groove 1971 and 1972.It is characterized in that: groove 1971 and 1972 cross sections are rectangular, and groove 1971 and 1972 dependence are gone up pump cover 191 and sealed with following pump cover 193.Described inflow port 195 and go out head piece 196 and stick with glue and connect the same side that is fixed on pump cover 191, perhaps descend the homonymy of pump cover 193, perhaps be separately fixed on pump cover 191 and the following pump cover 193, and inflow port 195 and go out head piece 196 can be according to application requirements in any circumferential position setting.Described baffle piece 198 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 198 is stuck in and plays fluid choked flow effect in groove 1971 and 1972, avoids circulation of fluid to flow, and forms the single direction fluid and flows.The described pump cover 191 of going up adopts flat circle structure, following pump cover 193 adopt outward edges have step " recessed " shape structure and and the pump housing 197 between leave the gap and allow fluid communication in lower groove 1971 and 1972, adopt glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics to make, last pump cover 191 and following pump cover 193 are bonding up and down with the pump housing 197 usefulness epoxy glues or AB glue respectively.The described pump housing 197 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.Fluid in the described groove 1971 and 1972 is communicated with by two through holes 1973 on the pump housing 197 and 1974, and piezoelectric pump assembles latter two through hole 1973 and 1974 and is communicated with respectively with inflow port 195 and goes out head piece 196 at same circumferential position.
Described piezoelectric constant ring plate 192 and 194 is single-layer sheet, and its positive electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite.Piezoelectric constant ring plate 192 and 194 circumferencial direction spatial position each other differs λ/4, and wherein λ is two electrode district circumferences.Concrete structure and embodiment's four described same contents.
Described piezoelectric constant ring plate 192 and 194 front are bonding with the pump housing 197 usefulness epoxy glues respectively, and the reverse side electrodes exposed outside, link to each other with the input lead of the driving power of piezoelectric pump, and the reverse side electrode connects the sin and the cos signal of power supply respectively, the pump housing 197 connects power supply ground.Particular content and embodiment's four described same contents.
Described piezoelectric constant ring plate 192 and 194 surface electrode silk-screen printing figure and embodiment's four described same contents.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Embodiment eight:
The present invention has designed the embodiment eight that capable ripple drives piezoelectric ceramic pump, shown in Figure 20-21.Capable in the present embodiment ripple driving fluid piezoelectric pump, be connected the pump housing 207 by the last pump cover 201 that has inflow port 205 with the following pump cover 203 that goes out head piece 206, respectively be bonded with a slice piezoelectric constant ring plate 202 and 204 at the pump housing 207 inner side step upper and lower sides, excircle upper and lower sides at the pump housing 207 respectively has a circular groove 2072 and 2073, is provided with baffle piece 208 in the groove 2072 and 2073.It is characterized in that: groove 2072 and 2073 cross sections are rectangular, and groove 2072 and 2073 dependence are gone up pump cover 201 and sealed with following pump cover 203.Described inflow port 205 and go out head piece 206 and stick with glue and connect the same side that is fixed on pump cover 201, perhaps descend the homonymy of pump cover 203, perhaps resemble present embodiment and be separately fixed on pump cover 201 and the following pump cover 203, and inflow port 205 and go out head piece 206 can be according to application requirements in any circumferential position setting.Described baffle piece 208 adopts flexible materials such as rubber, nylon or engineering plastics to make, and baffle piece 208 is stuck in and plays fluid choked flow effect in groove 2072 and 2073, avoids circulation of fluid to flow, and forms the single direction fluid and flows.Described pump cover 201 and the following pump cover 203 employing annulus flat structures of going up, adopt glass fibre reinforced plastics or low-density lightweight materials such as nylon or engineering plastics to make, last pump cover 201 and following pump cover 203 are bonding up and down with the pump housing 207 usefulness epoxy glues or AB glue respectively.The described pump housing 207 adopts copper or Cuprum alloy or aluminium or aluminum alloy or stainless metallic material, and pump housing thickness size is stepped change along radial direction.Fluid in the described groove 2072 and 2073 is communicated with by the some uniform through hole on the pump housing 207 2071, and after the piezoelectric pump assembling wherein two through holes and inflow port 205 with go out head piece 206 at same circumferential position.
Described piezoelectric constant ring plate 202 and 204 is single-layer sheet, and its positive electrode surface that adopts even five equilibrium, electrode surface cut apart quantity 2n, n=2,3,4,5 ..., reverse side adopts not to be cut apart and unified electrode district.The polarised direction of each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite.Piezoelectric constant ring plate 202 and 204 circumferencial direction spatial position each other differs λ/4, and wherein λ is two electrode district circumferences.Concrete structure and embodiment's four described same contents.
Described piezoelectric constant ring plate 202 and 204 front are bonding with the pump housing 207 usefulness epoxy glues respectively, and the reverse side electrodes exposed outside, link to each other with the input lead of the driving power of piezoelectric pump, and the reverse side electrode connects the sin and the cos signal of power supply respectively, the pump housing 207 connects power supply ground.Particular content and embodiment's four described same contents.
Described piezoelectric constant ring plate 202 and 204 surface electrode silk-screen printing figure and embodiment's four described same contents.
Concentrate in the middle of described means of fixation such as Figure 22 adopt and have some through holes 221, by screw or bolt tight mode.Perhaps adopt the inward flange of intermediate hole to have some through holes 222, by screw or bolt tight mode.Perhaps utilize intermediate hole 223, add in a fixed manner by threaded stem and nut.
Claims (18)
1, can realize that the capable ripple that forward and reverse fluid flows drives piezoelectric ceramic pump, it is characterized in that this row ripple drives piezoelectric ceramic pump and contains:
(1) pump housing, one side has circumferential groove at this pump housing excircle upside, and the cross section of this groove is rectangular;
(2) pump cover, this pump cover are connected on the upper-end surface of the described pump housing, and described groove is formed sealing;
(3) inflow port and go out head piece is fixed on the described pump cover, communicates with described groove respectively; In this inflow port with go out on one section short groove of girth between the head piece to be provided with one in order to form the baffle piece that the single direction fluid flows;
(4) piezoelectric constant ring plate, this ring plate just between be divided into 2n+1 electrode district, n is that described piezoelectric ceramic pump is along the node number on the pump housing circumferencial direction, make the ultrasonic vibration that along the circumferential direction to form n wavelength in described groove be λ, the polarised direction of described each electrode district is along the thickness direction of piezoelectric constant ring plate, and direction is alternately opposite; The reverse side of described ring plate is divided into three cube electrode districts, wherein the wavelength in first electrode district and this ring plate front be an electrode district of λ/4 on the same space position, and other two cube electrodes districts are symmetrical distribution with respect to described first electrode district; The lower end surface conductive adhesive of the front of described ring plate and the described pump housing;
Under working condition, the front of described piezoelectric constant ring plate or the pump housing connect the ground wire of power supply, and the electrode district of two symmetrical distributions connects sine and cosine signal successively respectively on this ring plate reverse side, first electrode district on this ring plate reverse side connect feedback signal line realize this piezoelectric ceramic pump to frequency of okperation from motion tracking; The ripple direction of then going when two electrode districts separating of symmetry on this ring plate connect the two-way cosine signal of power supply and sinusoidal signal successively respectively is opposite, make reverse fluid flow, the frequency of described power supply adopts the natural resonance frequency of piezoelectric ceramic pump, perhaps adjusts in natural resonance frequency ± 1KHz scope.
2. can realize that the capable ripple driving piezoelectric ceramic pump that forward and reverse fluid flows is characterized in that this row ripple drives piezoelectric ceramic pump and contains:
(1) pump housing has a circumferential groove at least on the excircle of this pump housing, the cross section of this groove is rectangular;
(2) pump cover has one at least, and this pump cover is connected on the upper-end surface of the described pump housing, is called pump cover, and described groove is formed sealing;
(3) inflow port and go out head piece is fixed on the described pump cover, communicates with described groove respectively, is provided with one in order to form the mobile baffle piece of single direction fluid on described inflow port one section groove short with going out girth between the head piece;
(4) piezoelectric constant ring plate has two, and described ring plate lays respectively on upper and lower two inner side surfaces of the described pump housing, the front of these two ring plates respectively with upper and lower two inner side surface conductive adhesives of the described pump housing; The electrode district of even five equilibrium is all adopted in the front of described each piezoelectric ceramic, the quantity of cutting apart of electrode district is n, n=2,3,4,5 ... n be described piezoelectric ceramic pump along the node number on the pump housing circumferencial direction, make in described groove to form n the ultrasonic vibration that wavelength is λ along pump housing circumferencial direction; The reverse side of described piezoelectric constant ring plate is one and does not cut apart and unified electrode district; The polarised direction of described each electrode district is along the thickness direction of described piezoelectric constant ring plate, and direction is alternately opposite; Described upper and lower two piezoelectric constant ring plates differ λ/4 each other on the circumferencial direction spatial position, described λ is the circumference of two electrode districts, also are each hyperacoustic vibration wavelengths;
The front of described upper and lower two piezoelectric constant ring plates or the ground that the pump housing connects power supply when work, and the reverse side of described two piezoelectric constant ring plates connects the two-way sinusoidal signal and the cosine signal of power supply respectively; When described two-way sinusoidal signal fluid reversing in the then described piezoelectric ceramic pump when being connected with described two piezoelectric constant ring plate reverse side again after cosine signal is exchanged flows, the frequency of described power supply adopts the natural resonance frequency of piezoelectric ceramic pump, perhaps adjusts in natural resonance frequency ± 1KHz scope.
3. drive piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2, it is characterized in that: described piezoelectric ceramic pump is in its eigentone (2,0), (3,0), (4,0) ... (n, 0), node is counted n 〉=2 time work, and resonant frequency of operation＞1KHz.
4. drive piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2, it is characterized in that: described power supply is a square-wave waveform.
5. the capable ripple of realizing that forward and reverse fluid flows according to claim 2 drives piezoelectric ceramic pump, it is characterized in that: on the described piezoelectric ceramic pump pump housing, the groove that it is rectangle that downside respectively has a cross section, in this inflow port with go out on one section short groove of girth between the head piece to be respectively equipped with one in order to form the baffle piece that the single direction fluid flows, described inflow port and go out head piece all with described on, following two grooves are connected, and on, also be connected between following two grooves, and the groove of downside is by a following pump cover sealing by a plurality of through holes of opening on the pump housing.
6. the capable ripple of realizing that forward and reverse fluid flows according to claim 5 drives piezoelectric ceramic pump and it is characterized in that: described inflow port with go out head piece and all open a side of pump cover on described.
7. the capable ripple of realizing that forward and reverse fluid flows according to claim 5 drives piezoelectric ceramic pump, and it is characterized in that: described inflow port is opened on last pump cover, open descending on the pump cover and go out head piece, and inflow port with go out the side that head piece all is positioned at the pump housing.
8. the capable ripple of realizing that forward and reverse fluid flows according to claim 5 drives piezoelectric ceramic pump, it is characterized in that: there is a downward boss at the described pump cover edge of going up, and also there is a boss that makes progress at the pump cover edge down, and described upper and lower two boss form sealing from the outside to described two grooves opening in the upper and lower side of the pump housing.
9. the capable ripple of realizing that forward and reverse fluid flows according to claim 5 drives piezoelectric ceramic pump, it is characterized in that: there is a downward boss at the described pump cover edge of going up, and also there is a boss that makes progress at the pump cover edge down, and two boss interconnect, a gap is arranged between the periphery of two boss and the described pump housing, make that two groove outsides of splitting in the upper and lower side of the pump housing are sealed, simultaneously, also be communicated with described two grooves.
10. drive piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2, it is characterized in that: concentrate to have some through holes the mode of tightly living with screw or bolt in the middle of the means of fixation of the described pump housing and pump cover adopts.
11. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: the inward flange of the means of fixation employing intermediate hole of the described pump housing and pump cover has some through holes, the mode of tightly living with screw and bolt.
12. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: the means of fixation of the described pump housing and pump cover adopts intermediate hole, the mode of tightly living by screw or bolt again.
13. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: described piezoelectric constant ring plate is a single-layer sheet.
14. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: the described pump housing adopts any material in copper, Cuprum alloy, aluminium, aluminum alloy, the stainless steel.
15. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: the thickness size of the described pump housing is stepped change along radial direction.
16. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: any in described pump cover employing glass fibre reinforced plastics, nylon, the engineering plastics.
17. driving piezoelectric ceramic pump according to the described capable ripple of realizing that forward and reverse fluid flows of any one claim in claim 1 or 2 is characterized in that: described baffle piece adopts any making in rubber, nylon, the plastics.
18. driving piezoelectric ceramic pump according to the described capable ripple of realizing that the clockwise and anticlockwise fluid flows of any one claim in claim 1 or 2 is characterized in that: described electric excitation adopts continuously or the mode in gap, make fluid continuous-flow or intermittent flow, cause described piezoelectric constant pump duty between the hundreds of ml/min, to be regulated in tens mul/min.
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| CNB2005100121971A CN100335779C (en) | 2005-07-15 | 2005-07-15 | Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow |
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| CNB2005100121971A CN100335779C (en) | 2005-07-15 | 2005-07-15 | Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow |
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| CN100390413C (en) * | 2006-11-10 | 2008-05-28 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
| CN102141031B (en) * | 2011-02-17 | 2013-07-31 | 华南农业大学 | In-plane modal circumferential traveling wave thin piezoelectric peristaltic pump |
| CN102312822A (en) * | 2011-03-24 | 2012-01-11 | 南京航空航天大学 | Rotary traveling wave valveless piezoelectric driving pump |
| CN104009668A (en) * | 2014-06-04 | 2014-08-27 | 天津大学 | Power tuning excitation device |
| CN105020121B (en) * | 2015-07-24 | 2017-03-01 | 浙江大学 | Sound-driving micropump |
| CN110425149A (en) * | 2019-07-29 | 2019-11-08 | 南京航空航天大学 | A kind of two-stage sandwich traveling wave piezoelectricity centrifugal pump and its driving method |
| CN110985333B (en) * | 2019-12-03 | 2022-03-22 | 广州大学 | Reversible micropump based on electrowetting phenomenon |
| CN117970648B (en) * | 2024-03-28 | 2024-06-04 | 成都理工大学工程技术学院 | Wear comfortable MR intelligence glasses |
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