CN104179782B - Based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives - Google Patents
Based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives Download PDFInfo
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Abstract
Based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives, comprise the submissive enlarger of stacked series-parallel connection, stack piezoelectric ceramic and film Micropump; Wherein, radial direction is inputted displacement and is converted to axial output displacement by described enlarger, it carries out structural bond at central axis place and assembles after stacking consistency from top to bottom by the radial pattern that multiple shape and structure is identical submissive enlarger monolithic in parallel by the series connection of output movement characteristic; Stacking piezoelectric ceramic is fixed on described enlarger, produces the input of high frequency radial deformational displacement after energising to described enlarger; Film Micropump is adhered to the bottom of described enlarger, and bottom is provided with the deep gouge type adsorbent chamber of adsorbing wall; Described enlarger converts the high frequency radial deformational displacement stacking piezoelectric ceramic input to axial output displacement, and drives the work of film Micropump, makes the gas directional flow in adsorbent chamber produce stable negative pressure.Volume of the present invention is little, lightweight, center of gravity is low, noiseless, High Frequency Dynamic are stablized, and is suitable as the adsorbent equipment of climbing robot.
Description
Technical field
The present invention relates to a kind of microadsorption device that can be used in sufficient formula climbing robot, be specifically related to a kind of valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure, belong to MEMS and specialized robot technical field.
Background technique
Along with the fast development of Present Mechanical Engineering technology, MEMS technology achieves low cost, highi degree of accuracy, the exploitation of micro-nano-scale product in enormous quantities and production, has promoted the fast development of the high technology industries such as medical treatment, chemical computation, computer electronics largely.Microfluidic system is one of representative of MEMS application, the fields such as biochemistry detection, drug injector, temperature control device, accurate electromechanics are widely used in, its core parts are miniflow pump, the working principle of miniflow pump relies on external energy field, as thermal field, magnetic field, electric field, cause the change of pump chamber volume thus propelling fluid orientation movement.
Parallel connection compliant mechanism, it is the advanced subject of traditional mechanism design science, relying on elastic properties of materials deformation to carry out parallel structure improvement on the basis of the compliant mechanism realizing small movements and export, the advantages such as it has without reaction, without rubbing, without assembly error, need not lubricate, bearing capacity is strong, kinematic accuracy is high, resolved motion control is simple.
Climbing robot is the class robot that in specialized robot, the market demand is the most urgent, can be applied to the industrial task such as large oil tank welding, large-scale wall hydro-peening and flaw detection.The adsorbing mechanism of climbing robot adopts the forms such as negative pressure, electrostatic, electromagnetism usually, wherein negative pressure adsorption equipment is widely adopted because of advantages such as its applicable operation wall scope is wide, stable working state, but all there is the shortcomings such as volume size is large, effect is low, noise is large again.
Publication number is the patent of CN103603793A, utilize the mode of electric field controls magnetostrictive rod axial motion to drive Micropump, although kinematic accuracy is relatively high, its organization volume size is large, center of gravity is too high, is not suitable for use in the executive component of Micro Wall-climbing Robot vacuum system.Publication number is the patent of CN103511230A, adopt the form of the stacking series connection of two-chamber to realize Micropump, but its encapsulation manufacture difficulty is comparatively large, activates deformation of thin membrane amount larger by the impact of pre-tight stress when size and encapsulation, cause working efficiency unstable, be not suitable for Multi-legged Wall-climbing Robots system.For the transmission with compressible gas, above two patents still can not provide enough pumping capacities for it, cannot meet the adsorption entails of sucker.The patent of publication number CN103523105A, adopt crawler belt and sucker integrated mode to perform and climb wall task, its traditional powerful vacuum generating means noise is comparatively large, and caterpillar drive complex structure, heavier mass, motivational drive power requirements is comparatively large, is not suitable for being applied to Micro Wall-climbing Robot.
Summary of the invention
The object of the invention is to overcome traditional vacuum pump volume large, center of gravity is high, action noise is large, the shortcomings such as energy consumption is high, a kind of valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure is provided, utilization stacks piezoelectric ceramic large bearing capacity and parallel connection compliant mechanism is stressed greatly, the feature of high stability, by parallel flexible hinge drive mechanism, the radial displacement of input is converted to the axial displacement of output, driving valve free pump works, produce enough adsorption forcies, it is little that the present invention has volume, quality is light, center of gravity is low, control accuracy is high, noiseless, energy consumption is low, easy encapsulation and without the need to the advantage such as external gas source or motor, realize vacuum Micropump and the integrated target of sucker simultaneously.
The technological scheme that the present invention solves its technical problem is:
Based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives, it is characterized in that: described sucker comprises the submissive enlarger of stacked series-parallel connection, stacks piezoelectric ceramic and film Micropump;
Radial direction is inputted displacement and is converted to axial output displacement by the submissive enlarger of described stacked series-parallel connection, the submissive enlarger of this stacked series-parallel connection is disc, internal functional architecture is that radial pattern is symmetrical, adopt MEMS technology processing and fabricating, the submissive enlarger of described stacked series-parallel connection adopts laminated structure, after stacking consistency from top to bottom by the radial pattern that multiple shape and structure is identical submissive enlarger monolithic in parallel by the series connection of output movement characteristic, carry out structural bond at central axis place and assemble;
The described piezoelectric ceramic that stacks is fixedly bonded on the submissive enlarger of described stacked series-parallel connection, produces the input of high frequency radial deformational displacement after energising to the submissive enlarger of described stacked series-parallel connection;
Described film Micropump is adhered to the bottom of the submissive enlarger of described stacked series-parallel connection, and bottom is provided with the deep gouge type adsorbent chamber of adsorbing wall;
The submissive enlarger of described stacked series-parallel connection converts the described high frequency radial deformational displacement stacking piezoelectric ceramic input to axial output displacement, be transferred to described film Micropump and drive this film Micropump work, making the gas directional flow in described deep gouge type adsorbent chamber produce stable negative pressure.
As further improvement, described radial pattern submissive enlarger monolithic in parallel is the rotational symmetric integrated compliant mechanism of disc central shaft, and it comprises interconnective support frame, deformational displacement input part, flexible hinge transmission branch chain and deformational displacement carry-out part successively; Described support frame is provided with clamping part and vent, and described deformational displacement input part and described support frame are flexibly connected by spring plate group, is provided with hollow part between this deformational displacement input part and support frame; Described flexible hinge transmission branch chain is parallel with one another and radial direction can be inputted displacement and be converted to axial output displacement, its two ends are connected with described deformational displacement input part and deformational displacement carry-out part respectively, each flexible hinge transmission branch chain is connected with described deformational displacement input part by four single axial symmetric flexible hinges, is connected with described deformational displacement carry-out part by two asymmetric flexible hinges of single shaft; Described deformational displacement carry-out part is positioned at the central axis place of described radial pattern submissive enlarger monolithic in parallel and produces axial deformation output displacement, the deformational displacement carry-out part of each radial pattern submissive enlarger monolithic in parallel is mutual bonding integral up and down, and its axial deformation output displacement is consistent with the axial output displacement of the submissive enlarger of described stacked series-parallel connection.
As further improvement, described single axial symmetric flexible hinge transmission radial displacement, the axis of the submissive enlarger of the parallel described stacked series-parallel connection of its rotatingshaft; Radial direction is inputted displacement and is converted to axial output displacement by the asymmetric flexible hinge of described single shaft, the axis of the submissive enlarger of the parallel described stacked series-parallel connection of its rotatingshaft.
As further improvement, described deformational displacement input part is a rigidity matter block, and be respectively equipped with space gap between described flexible hinge transmission branch chain and described deformational displacement carry-out part, the position of the clamping part of described support frame and this deformational displacement input part diametrically, described in stack piezoelectric ceramic and be clamped on the described hollow part between described clamping part with deformational displacement input part by the elasticity preload pressure that described spring plate group produces and fitted tightly with this deformational displacement input part by bonding.
As further improvement, the two bottom sides of described clamping part is provided with U-type groove.
As further improvement, by the PMMA film being positioned at upper strata and the Micropump chamber sucker substrate being positioned at lower floor, stacking and adhering and sealing assembles described film Micropump; Be set up in the lateral deviation of described PMMA film and be provided with and the eccentric through-hole that communicate corresponding with described vent position, the upper plane of this PMMA film is fitted with the deformational displacement carry-out part of the described stacked series-parallel connection submissive enlarger bottom bottom and the lower end surface of support frame and bonding; The top of described Micropump chamber sucker substrate is provided with the position circular deep gouge corresponding with described eccentric through-hole, and the opposite side of this Micropump chamber sucker substrate and the symmetrical position of this circular deep gouge are provided with the through hole penetrating described Micropump chamber sucker substrate; Between this through hole and described circular deep gouge, be provided with the pump chamber of deep gouge type, the side of this pump chamber is communicated with described circular deep gouge by an entrance taper deep gouge, and opposite side is communicated with described through hole by an outlet taper deep gouge; Described deep gouge type adsorbent chamber is arranged at the bottom of described Micropump chamber sucker substrate, and communicates with described through hole, and the bottom surface of the Micropump chamber sucker substrate of this deep gouge type adsorbent chamber periphery is sucker suction surface of contact.
As further improvement, the cross section of described entrance taper deep gouge and outlet taper deep gouge is rectangle, and the maximum cross-section place of this entrance taper deep gouge is connected with described circular deep gouge, and the maximum cross-section place of described outlet taper deep gouge is connected with described pump chamber.
As further improvement, described deep gouge type adsorbent chamber and the shape of described pump chamber are circle and concentric, and the radius of this deep gouge type adsorbent chamber is greater than the radius of this pump chamber.
As further improvement, the surface vapor deposition spray on polymer thin polymer film of described radial pattern submissive enlarger monolithic in parallel, described sucker suction surface of contact spray on polymer organosilicon.
As further improvement, described two opposite flanks stacking piezoelectric ceramic are welded with plain conductor.
Compared with prior art, invention achieves following beneficial effect:
{ monocrystalline silicon thin film of 111} lattice direction processes through MEMS technology the submissive enlarger employing of stacked series-parallel connection of the present invention, have good each to colleague's characteristic of material mechanics, without fatigue failure, after macromolecule polymeric material process is carried out on surface, lattice imperfection obviously improves, Fracture Probability reduces, and can complete little degree of the disturbing vibration action of high frequency.Piezoelectric ceramic deformational displacement amplifies by the submissive enlarger of stacked series-parallel connection, and without the need to external gas source, thus volume is little, quality is light, center of gravity is low, noiseless, energy consumption are low; To adopt Structure Glue face to contact bonding with substrate, do not need screw to assemble, and do not need lubrication, encapsulate simple and easy, do not increase additional mass and volume; PMMA film has more suitable shear strength, good rigidity, high frequency little degree of disturbing vibration noiseless; By integrated to film Micropump microchannel, pump chamber and sucker on single crystal silicon wafer, this film micro-pump structure is compact, and hardness is high; Sucker suction surface of contact surface vapor deposition macromolecular material, can adapt to multiple wall and ensure sucker suction chamber sealing effect; Main body of the present invention is disc, is easy to assemble with microrobot foot mechanism.
In a word, the present invention has the advantages such as volume is little, lightweight, center of gravity is low, noiseless, high frequency dynamic performance stable, life-span long, easy assembling, stable negative pressure can be produced, be suitable as the adsorbent equipment of Micro Wall-climbing Robot, structural parameter can be applicable to other microfluidic system after optimizing further.
Accompanying drawing explanation
Fig. 1 is stereogram of the present invention.
Fig. 2 is the sectional view of Fig. 1.
Fig. 3 is the partial enlarged drawing at A place in Fig. 2.
Fig. 4 is the partial enlarged drawing at B place in Fig. 2.
Fig. 5 is the plan view of film Micropump of the present invention.
Fig. 6 is the plan view of radial pattern of the present invention submissive enlarger monolithic in parallel.
Fig. 7 is the plan view of Fig. 6.
Fig. 8 is the plan view of Micropump chamber of the present invention sucker substrate.
Fig. 9 is the worm's eye view of Fig. 8.
Wherein,
The submissive enlarger of 1 stacked series-parallel connection, 10 space gaps, 11 flexible hinge transmission branch chain, the asymmetric flexible hinge of 12 single shaft, the asymmetric flexible hinge of 13 single shaft, 14 deformational displacement input parts, 15 deformational displacement carry-out parts, 16 support frames, 161 vents, 17 clamping parts, 171U type groove, 172 hollow parts, 18 spring plate group, 19 single axial symmetric flexible hinges, 2 stack piezoelectric ceramic, 3PMMA film, 31 eccentric through-holes, 4 Micropump chamber sucker substrates, 41 deep gouge type adsorbent chamber, 42 through holes, 43 circular deep gouges, 44 entrance taper deep gouges, 45 outlet taper deep gouges, 46 pump chambers, 47 sucker suction surface of contact, 5 radial patterns submissive enlarger monolithic in parallel.
Embodiment
Elaborate to embodiments of the invention below in conjunction with accompanying drawing, the present embodiment is implemented premised on technical solution of the present invention, give detailed mode of execution and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Incorporated by reference to consulting Fig. 1 and Fig. 2, illustrate the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure, it comprises the submissive enlarger 1 of stacked series-parallel connection, stacks piezoelectric ceramic 2 and film Micropump.Radial direction can be inputted displacement and be converted to axial output displacement by the submissive enlarger of described stacked series-parallel connection 1, in the present embodiment, the submissive enlarger 1 of this stacked series-parallel connection is disc, internal functional architecture is that center radiation type is symmetrical, it adopts { the single crystal silicon wafer material of 111} lattice direction, through MEMS technology processing and fabricating, this material has good isotropic characteristic of material mechanics.The described piezoelectric ceramic 2 that stacks is fixedly bonded on the submissive enlarger 1 of described stacked series-parallel connection, produces the input of high frequency radial deformational displacement after energising to the submissive enlarger 1 of described stacked series-parallel connection.Described film Micropump is adhered to the bottom of the submissive enlarger 1 of described stacked series-parallel connection, and bottom is provided with the deep gouge type adsorbent chamber 41 (see Fig. 2) of adsorbing wall; This film Micropump comprises PMMA film 3 and Micropump chamber sucker substrate 4.
The submissive enlarger of described stacked series-parallel connection 1 stacks the high frequency radial deformational displacement that piezoelectric ceramic 2 inputs convert axial output displacement to by described, be transferred to described PMMA film 3 and drive the work of described film Micropump, make the gas directional flow in described deep gouge type adsorbent chamber 41, thus produce enough stable negative-pressure adsorption power in this deep gouge type adsorbent chamber 41.
Refer to Fig. 2, the submissive enlarger 1 of described stacked series-parallel connection adopts laminated structure, after stacking consistency from top to bottom by the radial pattern that multiple shape and structure is identical submissive enlarger monolithic 5 in parallel by the series connection of output movement characteristic, carry out structural bond at geometric centre axes place and assemble.In the present embodiment, the epoxy construction adhesive glue of use has good anti-shearing force and anti-impact force advantage, is applicable to the structural bond of single crystal silicon, macromolecular material.
Described radial pattern submissive enlarger monolithic 5 in parallel is the rotational symmetric integrated compliant mechanisms of disc central shaft, adopts brittle material single crystal silicon to make, radial direction can be inputted displacement and convert axial output displacement to.In the present embodiment, vapor deposition spraying treatmen is carried out on the surface of described radial pattern submissive enlarger monolithic 5 in parallel, scribble high molecular polymer Parylene N-type film, thus effectively can repair the lattice imperfection on monocrystal silicon structure surface, ensure the insulating property of body structure surface.
Incorporated by reference to consulting Fig. 6 and Fig. 7, described radial pattern submissive enlarger monolithic 5 in parallel comprises interconnective support frame 16, three deformational displacement input parts 14, three groups of flexible hinge transmission branch chain 11 and deformational displacement carry-out part 15 successively.
Described support frame 16 is provided with clamping part 17 and vent 161.Described clamping part 17 is positioned at the inner side of described support frame 16, and position and described deformational displacement input part 14 are diametrically; Described vent 161 is arranged on the support frame 16 of the lateral deviation position of described radial pattern submissive enlarger monolithic 5 in parallel, what be used as described film Micropump goes out vent hole, and as the reference object of radial pattern submissive enlarger monolithic 5 stacked alignment in parallel during assembling.
Described three deformational displacement input parts 14 are rigidity matter block, flexibly connect respectively by six groups of spring plate group 18 with described support frame 16; Be provided with hollow part 172 between this deformational displacement input part 14 and described support frame 16, and and be respectively equipped with space gap 10 between described flexible hinge transmission branch chain 11 and described deformational displacement carry-out part 15.
Refer to Fig. 2 again, the described elasticity preload pressure stacking piezoelectric ceramic 2 and produce by described spring plate group 18, be clamped on the hollow part 172 between the clamping part 17 of described support frame 16 and deformational displacement input part 14, and fitted tightly with this deformational displacement input part 14 by bonding, after powered up the input of high frequency radial deformational displacement is produced to the submissive enlarger 1 of described stacked series-parallel connection.In the present embodiment, the square piezoelectricity fold stack driver that described stacking piezoelectric ceramic 2 is made for PZT material, has that bearing capacity is large, response frequency high.The two bottom sides of described clamping part 17 is provided with U-type groove 171, can effectively avoid the edge stress of brittle material PZT concentrate and fracture failure occurs.
Described two opposite flanks stacking piezoelectric ceramic 2 are welded with plain conductor, this plain conductor lead-in wire direction is parallel to the axial direction of the submissive enlarger 1 of described stacked series-parallel connection, described hollow part 172 is provided with enough spaces, avoids structure and solder joint to interfere.
Described deformational displacement carry-out part 15 is positioned at the central axis place of described radial pattern submissive enlarger monolithic 5 in parallel, and shape approximation, in disc rigid body, produces axial deformation output displacement; The deformational displacement carry-out part about 15 of each radial pattern submissive enlarger monolithic 5 in parallel is mutual bonding integral, and its axial deformation output displacement is consistent with the axial output displacement of the submissive enlarger of described stacked series-parallel connection 1.
Incorporated by reference to consulting Fig. 6 and Fig. 7, described three groups of flexible hinge transmission branch chain 11 are parallel with one another and have symmetrical structure, radial direction can be inputted displacement and be converted to axial output displacement.The two ends of described flexible hinge transmission branch chain 11 are connected with described deformational displacement input part 14 and deformational displacement carry-out part 15 respectively.In the present embodiment, each deformational displacement input part 14 is connected with two flexible hinge transmission branch chain 11 respectively; One end of each flexible hinge transmission branch chain 11 is connected by the deformational displacement input part 14 that four single axial symmetric flexible hinges 19 are adjacent with both sides respectively, and the other end passes through two asymmetric flexible hinges of single shaft 12 and is connected with described deformational displacement carry-out part 15 with 13.
Described single axial symmetric flexible hinge 19 realizes radial displacement transmission agency, the axis of the submissive enlarger 1 of the parallel described stacked series-parallel connection of its rotatingshaft; Radial direction is inputted displacement and is converted to axial output displacement by the asymmetric flexible hinge of described single shaft 12 and 13, the axis of the submissive enlarger 1 of the parallel described stacked series-parallel connection of its rotatingshaft.
Incorporated by reference to consulting Fig. 5, described film Micropump is stacking and adopt Structure Glue adhering and sealing to assemble with the Micropump chamber sucker substrate 4 being positioned at lower floor by the PMMA film 3 being positioned at upper strata.
Incorporated by reference to consulting Fig. 3, be set up in the lateral deviation of described PMMA film 3 and be provided with an eccentric through-hole 31 corresponding with described vent 161 position, this eccentric through-hole 31 communicates with this vent 161.Refer to Fig. 2, the upper plane of described PMMA film 3 is fitted with the deformational displacement carry-out part 15 of the described stacked series-parallel connection submissive enlarger 1 bottom bottom and the lower end surface of support frame 16 and bonding.
Refer to Fig. 3, the top of described Micropump chamber sucker substrate 4 is provided with position and the circular deep gouge 43 that communicate corresponding with the eccentric through-hole 31 of described PMMA film 3, refer to Fig. 4, on the opposite side of this Micropump chamber sucker substrate 4 and the symmetrical position of this circular deep gouge 43, be provided with the through hole 42 penetrating described Micropump chamber sucker substrate 4; Described circular deep gouge 43 is alignd with eccentric through-hole 31, seal bonding described PMMA film 3 and be namely assembled into film Micropump with Micropump chamber sucker substrate 4, this film Micropump and the submissive enlarger of described stacked series-parallel connection 1 stacking with reference to the aligned in position of described vent 161.Refer to Fig. 8, be provided with the pump chamber 46 of deep gouge type between described through hole 42 and described circular deep gouge 43, the side of this pump chamber 46 is communicated with described circular deep gouge 43 by an entrance taper deep gouge 44, and opposite side is communicated with described through hole 42 by an outlet taper deep gouge 45.The cross section of described entrance taper deep gouge 44 and outlet taper deep gouge 45 is rectangle, and the maximum cross-section place of this entrance taper deep gouge 44 is connected with described circular deep gouge 43, and the maximum cross-section place of described outlet taper deep gouge 45 is connected with described pump chamber 46.Be positioned at the circular deep gouge 43 on the upside of Micropump chamber sucker substrate 4 equally, entrance taper deep gouge 44, outlet taper deep gouge 45 are identical with the degree of depth of pump chamber 46; When entrance taper deep gouge 44 and outlet taper deep gouge 45 are after described PMMA film 3 seals, namely form the conical pipeline of rectangular cross-section size variation, under the driving of film Micropump, control gas produce one-way flow, thus produce vacuum effect.
Incorporated by reference to consulting Fig. 4, Fig. 5 and Fig. 9, described deep gouge type adsorbent chamber 41 is arranged at the bottom of described Micropump chamber sucker substrate 4, and communicate with described through hole 42, the shape of this deep gouge type adsorbent chamber 41 and described pump chamber 46 is circle and concentric, and the radius of this deep gouge type adsorbent chamber 41 is greater than the radius of this pump chamber 46.The bottom surface of the Micropump chamber sucker substrate 4 of described deep gouge type adsorbent chamber 41 periphery is sucker suction surface of contact 47, in the present embodiment, this sucker suction surface of contact 47 spray on polymer organosilicon, has good elasticity, can produce good sealing effect when described valve free pump sucker suction wall.
Described Micropump chamber sucker substrate 4 adopts MEMS technology to process, and minute yardstick precision is high, one-body molded, is integrated with pump chamber 46 and micro channel and the deep gouge type adsorbent chamber 41 of film Micropump simultaneously.
Working principle of the present invention is, when valve free pump sucker is placed on adsorbed target, first malleation Ac is passed into stacking piezoelectric ceramic 2, stack piezoelectric ceramic 2 and the input of high frequency radial deformational displacement is produced to the submissive enlarger 1 of stacked series-parallel connection, flexible hinge transmission branch chain 11 through parallel connection converts the miniature deformation stacking piezoelectric ceramic 2 to axial displacement and exports, PMMA film 3 is driven to vibrate, and then the volume of change pump chamber 46 is to produce fluid motion, through entrance taper deep gouge 44 and the one-way commutation effect exporting taper deep gouge 45, extract the gas in deep gouge type adsorbent chamber 41, for sucker provides enough large negative pressure.Stop to stacking piezoelectric ceramic 2 power after, film Micropump quits work at once, and the negative pressure in deep gouge type adsorbent chamber 41 disappears immediately.Because sucker size is less, quality light, compact structure, center of gravity yardstick are little, and the present invention has higher duty ratio.Sucker suction surface of contact 47 scribbles has flexible organic silicon coating, therefore stronger to the adaptive capacity of adsorption plane.
The advantages such as the present invention has that volume is little, center of gravity is low, high frequency dynamic performance is stable, absorption carriage is simpler than high, noise free, package structure, be easy to be combined with microrobot foot mechanism simultaneously, thus provide a kind of efficient, stable microadsorption device for Micro Wall-climbing Robot.The described valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure not only can be used as the adsorbing mechanism of climbing robot, and can be applicable to the accurate microflow control technique application apparatus of other high frequency.
Above specific embodiments of the invention are described.It should be pointed out that to those skilled in the art, without departing from the principles and spirit of the present invention, done any amendment, equivalent replacement, modification and improvement, all should belong to protection scope of the present invention.
Claims (10)
1., based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives, it is characterized in that: described sucker comprises the submissive enlarger of stacked series-parallel connection, stacks piezoelectric ceramic and film Micropump;
Radial direction is inputted displacement and is converted to axial output displacement by the submissive enlarger of described stacked series-parallel connection, the submissive enlarger of this stacked series-parallel connection is disc, internal functional architecture is that radial pattern is symmetrical, adopt MEMS technology processing and fabricating, the submissive enlarger of described stacked series-parallel connection adopts laminated structure, after stacking consistency from top to bottom by the radial pattern that multiple shape and structure is identical submissive enlarger monolithic in parallel by the series connection of output movement characteristic, carry out structural bond at central axis place and assemble;
The described piezoelectric ceramic that stacks is fixedly bonded on the submissive enlarger of described stacked series-parallel connection, produces the input of high frequency radial deformational displacement after energising to the submissive enlarger of described stacked series-parallel connection;
Described film Micropump is adhered to the bottom of the submissive enlarger of described stacked series-parallel connection, and bottom is provided with the deep gouge type adsorbent chamber of adsorbing wall;
The submissive enlarger of described stacked series-parallel connection converts the described high frequency radial deformational displacement stacking piezoelectric ceramic input to axial output displacement, be transferred to described film Micropump and drive this film Micropump work, making the gas directional flow in described deep gouge type adsorbent chamber produce stable negative pressure.
2. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 1, it is characterized in that: described radial pattern submissive enlarger monolithic in parallel is the rotational symmetric integrated compliant mechanism of disc central shaft, and it comprises interconnective support frame, deformational displacement input part, flexible hinge transmission branch chain and deformational displacement carry-out part successively; Described support frame is provided with clamping part and vent, and described deformational displacement input part and described support frame are flexibly connected by spring plate group, is provided with hollow part between this deformational displacement input part and support frame; Described flexible hinge transmission branch chain is parallel with one another and radial direction can be inputted displacement and be converted to axial output displacement, its two ends are connected with described deformational displacement input part and deformational displacement carry-out part respectively, each flexible hinge transmission branch chain is connected with described deformational displacement input part by four single axial symmetric flexible hinges, is connected with described deformational displacement carry-out part by two asymmetric flexible hinges of single shaft; Described deformational displacement carry-out part is positioned at the central axis place of described radial pattern submissive enlarger monolithic in parallel and produces axial deformation output displacement, the deformational displacement carry-out part of each radial pattern submissive enlarger monolithic in parallel is mutual bonding integral up and down, and its axial deformation output displacement is consistent with the axial output displacement of the submissive enlarger of described stacked series-parallel connection.
3. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 2, is characterized in that: described single axial symmetric flexible hinge transmission radial displacement, the axis of the submissive enlarger of the parallel described stacked series-parallel connection of its rotatingshaft; Radial direction is inputted displacement and is converted to axial output displacement by the asymmetric flexible hinge of described single shaft, the axis of the submissive enlarger of the parallel described stacked series-parallel connection of its rotatingshaft.
4. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 2, it is characterized in that: described deformational displacement input part is a rigidity matter block, and be respectively equipped with space gap between described flexible hinge transmission branch chain and described deformational displacement carry-out part, the position of the clamping part of described support frame and this deformational displacement input part are diametrically, the described piezoelectric ceramic that stacks is clamped on the described hollow part between described clamping part with deformational displacement input part by the elasticity preload pressure that described spring plate group produces and is fitted tightly with this deformational displacement input part by bonding.
5. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 2, is characterized in that: the two bottom sides of described clamping part is provided with U-type groove.
6. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 2, is characterized in that: by the PMMA film being positioned at upper strata, stacking and adhering and sealing assembles described film Micropump with the Micropump chamber sucker substrate being positioned at lower floor; Be set up in the lateral deviation of described PMMA film and be provided with and the eccentric through-hole that communicate corresponding with described vent position, the upper plane of this PMMA film is fitted with the deformational displacement carry-out part of the described stacked series-parallel connection submissive enlarger bottom bottom and the lower end surface of support frame and bonding simultaneously respectively; The top of described Micropump chamber sucker substrate is provided with the position circular deep gouge corresponding with described eccentric through-hole, and the opposite side of this Micropump chamber sucker substrate and the symmetrical position of this circular deep gouge are provided with the through hole penetrating described Micropump chamber sucker substrate; Between this through hole and described circular deep gouge, be provided with the pump chamber of deep gouge type, the side of this pump chamber is communicated with described circular deep gouge by an entrance taper deep gouge, and opposite side is communicated with described through hole by an outlet taper deep gouge; Described deep gouge type adsorbent chamber is arranged at the bottom of described Micropump chamber sucker substrate, and communicates with described through hole, and the bottom surface of the Micropump chamber sucker substrate of this deep gouge type adsorbent chamber periphery is sucker suction surface of contact.
7. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 6, it is characterized in that: the cross section of described entrance taper deep gouge and outlet taper deep gouge is rectangle, the maximum cross-section place of this entrance taper deep gouge is connected with described circular deep gouge, and the maximum cross-section place of described outlet taper deep gouge is connected with described pump chamber.
8. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 6, it is characterized in that: described deep gouge type adsorbent chamber and the shape of described pump chamber are circle and concentric, the radius of this deep gouge type adsorbent chamber is greater than the radius of this pump chamber.
9. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 6, it is characterized in that: the surface vapor deposition spray on polymer thin polymer film of described radial pattern submissive enlarger monolithic in parallel, described sucker suction surface of contact spray on polymer organosilicon.
10. the valve free pump sucker driven based on stacked radial pattern series-parallel connection compliant structure according to claim 1, is characterized in that: described two opposite flanks stacking piezoelectric ceramic are welded with plain conductor.
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| CN201410406645.5A CN104179782B (en) | 2014-08-18 | 2014-08-18 | Based on the valve free pump sucker that stacked radial pattern series-parallel connection compliant structure drives |
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| CN105042025A (en) * | 2015-05-09 | 2015-11-11 | 陈学福 | Friction type automobile differential mechanism |
| CN109821112B (en) * | 2019-03-01 | 2021-03-02 | 浙江师范大学 | Piezoelectric stack driving type liquid medicine injection device |
| EP3722625A1 (en) | 2019-04-08 | 2020-10-14 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Configurable adhesive device and method |
| CN110253612B (en) * | 2019-07-10 | 2022-02-25 | 重庆大学 | Soft electrostatic chuck |
| CN114247047B (en) * | 2021-12-17 | 2023-05-23 | 广东工业大学 | Minimally invasive skin coloring device based on piezoelectric driving compliant mechanism |
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| JPH09177752A (en) * | 1995-12-27 | 1997-07-11 | Mitsubishi Heavy Ind Ltd | Simple attachment/detachment suction cup mechanism |
| DE202005021586U1 (en) * | 2005-02-18 | 2008-10-02 | Alfred Kärcher Gmbh & Co. Kg | fastening device |
| CN202585637U (en) * | 2012-03-21 | 2012-12-05 | 上海素朴智能设备制造有限公司 | Counterweight balance disk rotary type storage battery plate group lamination assembly mechanism |
| CN103603793A (en) * | 2013-11-01 | 2014-02-26 | 安徽理工大学 | High-precision high-frequency micropump based on super-magnetostriction converter |
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