CN105020121B - Sound-driving micropump - Google Patents
Sound-driving micropump Download PDFInfo
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- CN105020121B CN105020121B CN201510442767.4A CN201510442767A CN105020121B CN 105020121 B CN105020121 B CN 105020121B CN 201510442767 A CN201510442767 A CN 201510442767A CN 105020121 B CN105020121 B CN 105020121B
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- ring
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Abstract
The invention discloses a kind of sound-driving micropump.Including pump housing bottom sheet, driving ring, rotor base, rotor, rotor upper piece, the pump housing upper piece and driving base, pump housing bottom sheet is arranged on the bottom of driving ring, pump housing bottom sheet and driving ring are installed along with driving in base, rotor base is arranged on pump housing bottom sheet center, the rotor intracavity at rotor base top is provided with rotor and is sealed by rotor upper piece, and the top cover in driving ring as pump installed by the pump housing upper piece.The present invention adopts high-order Bezier signal to drive piezoelectric patches, using the rotor rotation inside synthesis sound field rotor driven chamber, realizes microfluid flow and controls with the precise control of flow velocity and the two-way flow of microfluid.
Description
Technical field
The present invention relates to a kind of micropump is and in particular to a kind of sound-driving micropump, with ultrasonic as driving source.
Background technology
With the scientific and technical development that deepens continuously, the research field of the mankind has gradually turned to microcosmic generation from macroscopic arts
Boundary.Especially in the ambit such as biological, chemical, medical, people are more likely to probe into the mechanism of macroscopic appearance from microcosmic.
In whole research process, often using the flowing of liquid under minute yardstick as a kind of effective technological means, therefore to can
Effective control micro liquid flow velocity has strong demand with the equipment of flow.Micropump, as the driving source of micro liquid, has
The feature of liquid with precise control flow velocity and flow, already become indispensable experimental facilitiess in these fields.For example, changing
Work field can drive micro liquid to realize the analysis of liquid chemical composition and the accurate configuration of valuable drug with micropump；?
Life science can drive micro liquid to realize separation and the fusion of cell with micropump；Can be with micro- in field of biological pharmacy
Type pump drives micro liquid to realize the conveying of active medicine and the screening of medicine.Moreover, in other fields, micropump is same
Sample also possesses high using value：In microelectronic, the cooling in microelectronics cooling system can be realized with micropump
Liquid conveys；In space industry, the fuel conveying to micro detector can be realized with micropump.Additionally, micropump also has collection
One-tenth degree height, small volume, simple to operate, the advantage such as can be mass, in all trades and professions, all there is great using value.
For micropump, the patent of mandate has at present：The patent of invention of Application No. 200610164016.1 proposes
A kind of mechanical micro-pump based on micromotor driving；Application No. 200610111204.8 and 200810203962.1
Patent of invention proposes a kind of unidirectional runner micropump based on piezoelectric type driving respectively, and the dither using piezoelectric patches causes
Within the chamber pressure change is driving microfluid；The patent of invention of Application No. 200980158664.8 proposes one kind and can process
The Magnetic driving formula micropump of little fluid volume；The patent of invention of Application No. 200980100646.4 and 201010609684.7 is divided
Do not propose the micropump that gas-powered and capillary force drive.As can be seen here, the type of drive of current micropump is mainly micro-
The driving of type motor, piezoelectric type driving, Electromagnetic Drive, gas-powered, capillary force driving etc..
Conventional mechanical micro-pump is a kind of macroscopical pump of scaled down version, inevitably inherits mechanical pump intrinsic
Defect；New piezoelectric type micropump often makes most mechanical work be transformed to heat, and drive efficiency is not very high；Hair
The thin driving micropump of power has special requirement to the property of conveying liquid, is typically only capable to convey wettable type liquid.Additionally,
In existing micropump at present, its driving source and executive item are often directly contact, are unfavorable for manufacturing and designing of micropump,
And itself environment of microfluid in whole runner would generally be affected, such micropump often also can only be used for realizing microfluid simultaneously
One-way flow.
Content of the invention
In order to solve, the existing miniature efficiency of pump is low, universality is poor, easy impact conveys liquid itself environment and cannot realize
The deficiency of microfluid two-way flow, the purpose of the present invention is to propose to a kind of sound-driving micropump, is that a kind of non-contact type is sound-driving
Micropump, sampling high-order Bezier signal drives the piezoelectric patches of annular spread, makes rotor intracavity form specific sound field, rotor driven
Motion, realizes the precise control to microfluid flow, flow velocity and flow direction.
Technical scheme is as follows：
The present invention includes pump housing bottom sheet, driving ring, rotor base, rotor, rotor upper piece, the pump housing upper piece and drives base,
Pump housing bottom sheet is arranged on the bottom of driving ring, and pump housing bottom sheet and driving ring are installed along with driving in base, and rotor base is installed
At pump housing bottom sheet center, the rotor intracavity at rotor base top is provided with rotor and is sealed, on the pump housing by rotor upper piece
Piece installs the top cover in driving ring as pump.
Described pump housing bottom sheet includes lower sheet matrix and the lug of disc, and the symmetrical both sides of lower sheet matrix are equipped with two
Parallel lug, the center of pump housing bottom sheet has the rotor floor seat slot of annular, and rotor base is adhered under the pump housing by marine glue
In rotor floor seat slot in piece；Each lug side is provided with side through hole, rotor floor seat slot be provided with four corresponding with lug side through hole
Areole, each lug side through hole of pump housing bottom sheet is by phase between respective cylindrical flow and rotor base groove sidewall hole
Logical.
Described rotor base comprises rotor base matrix and elastic film, and the rotor chamber of rotor base baseline top is symmetrical
Both sides be provided with elastic film；Rotor cavity wall near each elastic film both sides is equipped with head piece in rotor base, wherein
Head piece and being symmetric of head piece in the rotor base of another elastic film both sides in the rotor base of one elastic film both sides；
It is equipped with the rotor base base bottom lateral wall of elastic film both sides and corresponding areole phase each in described rotor floor seat slot
Head piece under logical rotor base, the rotor of head piece and another elastic film both sides under the rotor base of wherein one elastic film both sides
Under base, head piece is symmetric；Under head piece and rotor base in the rotor base of one elastic film wherein side head piece with another
One elastic film passes through rotor with head piece under head piece in the rotor base of rotor base matrix centrosymmetry side and rotor base
Base intrinsic silicon pipeline all communicates.
Described driving ring comprises to drive ring base, piezoelectric patches, drives ring electrode and snap ring, drives the medial wall of ring base
Circumferentially it is provided with piezoelectric patches uniformly at intervals, drive and be fixed with a circle snap ring, the driving ring of snap ring bottom in the middle of ring base excircle
The cylindrical sidewall spacers of matrix are laid with driving ring electrode, and each drives ring electrode and respective piezoelectric patches to pass through to drive ring base
Internal pipeline is corresponding to be connected；The both sides of driving ring bottom symmetrical are provided with the lug grooves embedding for lug；The centre of lug grooves
Have and drive the locating slot of base location fit.
Described driving base comprises to drive base matrix, drives base electrode, locating piece, the mouth of pipe and communication port, drives
The symmetrical two side of base base bottom is provided with the mouth of pipe embedding installation for pump housing bottom sheet lug, drives base matrix side to set
There is communication port；The centre of driving base matrix inner periphery is provided with the draw-in groove of one annular, and the snap ring of described driving ring embeds draw-in groove
The middle axially position installation realizing driving base and driving ring base；Drive base matrix medial wall be provided with uniformly at intervals with described
The driving base electrode that driving ring driving ring electrode pair should connect, drives base electrode quantity and position distribution and drives ring electrode
Identical, drive base electrode to be all connected to communication port by driving base intrinsic silicon pipeline；Drive the two of the every side of base matrix
Medial wall between the individual mouth of pipe is provided with the locating piece coordinating positioning in embedded driving ring locating slot.
Described rotor is made up of anti-sound rigid organic materials, and rotor main is symmetrical by the curved baffle of two equal arc length
It is formed by fixedly connecting, the height of rotor is highly equal with rotor chamber, curved baffle can cover arbitrary elastic film in rotor base
Head piece in two rotor base of both sides.
Described rotor upper piece is made up of transparent and entrant sound material, and its radius is identical with rotor base exradius.
The described pump housing upper piece is made up of material that is transparent and absorbing sound, and its radius is identical with driving ring base exradius,
One circular hole is had on the pump housing upper piece, circular hole be located at drive ring base inner circle and rotor floor seat slot cylindrical between.
Its exradius of rotor base matrix is identical with pump housing bottom sheet upper rotor part bottom tub exradius.
Preferably piezoelectric patches at least more than 4.
Preferably elastic film is made up of acoustic window material and is bonded on rotor base matrix.
Preferably drive ring base to be made up of sound-absorbing material, drive base matrix to be made up of insulating stiff material, rotor floor
Seat matrix is made up of acoustic window material.
The invention has the beneficial effects as follows：
The present invention is to drive rotor inside rotor chamber using synthesis sound field, belongs to driving source non-contacting with executive item
Micropump, will not change itself environment of microfluid.
The present invention to synthesize sound field using the piezoelectric patches of more than at least 4, and sound field stability is high, achievable rotor high-precision
Degree controllable rotating.
The present invention simultaneously drives piezoelectric patches using high-order Bezier signal, compares conventional sinusoidal signal and drives, its synthetic sound
Field energy is more concentrated, and the driving force that rotor is formed is bigger, can achieve the driving to bigger microfluid flow and higher flow rate.
Apparatus of the present invention can achieve the two-way flow of microfluid, does not have particular/special requirement to use environment and microfluid property,
Practicality is wider.
The present invention such as has small volume, lightweight, low in energy consumption, easy of integrationization, can be mass at the advantage.
Brief description
Fig. 1 is the agent structure schematic diagram of the present invention.
Fig. 2 is the schematic perspective view of pump housing bottom sheet of the present invention.
Fig. 3 is pump housing bottom sheet top view of the present invention.
Fig. 4 is driving ring schematic three dimensional views of the present invention.
Fig. 5 is driving ring side view of the present invention.
Fig. 6 is one of rotor base schematic three dimensional views of the present invention.
Fig. 7 is the two of rotor base schematic three dimensional views of the present invention.
Fig. 8 is rotor base sectional view of the present invention.
Fig. 9 is rotor structure schematic diagram of the present invention.
Figure 10 is chip architecture schematic diagram on rotor of the present invention.
Figure 11 is chip architecture schematic diagram on the pump housing of the present invention.
Figure 12 is the schematic three dimensional views that the present invention drives base.
Figure 13 is the sectional view that the present invention drives base.
Figure 14 is the general assembly schematic diagram after the present invention removes rotor upper piece and the pump housing upper piece.
In figure：Pump housing bottom sheet 1, driving ring 2, rotor base 3, rotor 4, rotor upper piece 5, the pump housing upper piece 6, drive base 7,
Lower sheet matrix 1-1, rotor floor seat slot 1-2, lug 1-3, cylindrical flow 1-4, driving ring base 2-1, piezoelectric patches 2-2, driving
Ring electrode 2-3, locating slot 2-4, two groups of symmetrical lug grooves 2-5, snap ring 2-6, rotor base matrix 3-1, rotor chamber 3-2,
Head piece 3-5, curved baffle 4-1 in head piece 3-4 under elastic film 3-3, rotor base, rotor base, drive base matrix 7-1,
Drive base electrode 7-2, draw-in groove 7-3, locating piece 7-4, two groups of symmetrical mouth of pipe 7-5, communication port 7-6.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment is described in further detail to the present invention.
As shown in figure 1, the present invention includes pump housing bottom sheet 1, driving ring 2, rotor base 3, rotor 4, rotor upper piece 5, the pump housing
Upper piece 6 and drive base 7, pump housing bottom sheet 1 is arranged on the bottom of driving ring 2, and pump housing bottom sheet 1 and driving ring 2 are installed along with driving
In dynamic base 7, rotor base 3 is arranged on pump housing bottom sheet 1 center, is provided with rotor 4 in rotor chamber 3-2 at rotor base 3 top
And sealed by rotor upper piece 5, the top cover in driving ring 2 as pump installed by the pump housing upper piece 6.Rotor 4 is placed on rotor floor
Inside rotor chamber 3-2 of seat 3, rotor upper piece 5 is fixed on above rotor base 3, and the pump housing upper piece 6 is fixed in driving ring 2.
As shown in Figures 2 and 3, pump housing bottom sheet 1 includes the lower sheet matrix 1-1 and lug 1-3 of disc, lower sheet matrix 1-1
Symmetrical both sides are equipped with two parallel lug 1-3, and the center of pump housing bottom sheet 1 has rotor floor seat slot 1-2 of annular, rotor
Base 3 is adhered in rotor floor seat slot 1-2 in pump housing bottom sheet 1 by marine glue；Each lug 1-3 side is provided with side through hole,
Rotor floor seat slot 1-2 is provided with four areoles corresponding with lug 1-3 side through hole, and pump housing bottom sheet 1 each lug 1-3 side through hole leads to
Cross and communicate between respective cylindrical flow and rotor floor seat slot 1-2 areole.
The bottom of rotor base 3 is provided with head piece 3-4 under four rotor base, and rotor base 3 is adhered to pump by marine glue
In rotor floor seat slot 1-2 in body bottom sheet 1, and in bonding process, ensure the center of four cylindrical flow 1-4 in pump housing bottom sheet 1
Axle respectively with rotor base 3 in four rotor base under head piece 3-4 center overlapping of axles, and then ensure from pump housing bottom sheet 1
The liquid that four cylindrical flow flow into or from can smooth head piece under four rotor base, whole rotor base 3 is equal
It is made up of acoustic window material, reduce its impact to synthesis sound field as far as possible.
As shown in Figure 6 to 8, rotor base 3 comprises rotor base matrix 3-1 and elastic film 3-3, rotor base matrix
The both sides that rotor chamber 3-2 at 3-1 top is symmetrical are provided with elastic film 3-3；Rotor chamber 3- near each elastic film 3-3 both sides
2 inwalls are equipped with head piece 3-5 in rotor base, head piece 3-5 and another bullet in the rotor base of wherein one elastic film 3-3 both sides
In the rotor base of property thin film 3-3 both sides, head piece 3-5's is symmetric；The rotor base matrix 3-1 of elastic film 3-3 both sides
Head piece 3-4 under the rotor base being communicated with each corresponding areole in described rotor floor seat slot 1-2 is equipped with bottom outside wall, its
In elastic film 3-3 both sides rotor base under head piece 3-4 and another elastic film 3-3 both sides rotor base under head piece 3-
4 be symmetric；Under head piece 3-5 and rotor base in the one elastic film 3-3 wherein rotor base of side head piece 3-4 with another
One elastic film 3-3 is with head piece under head piece 3-5 in the rotor base of rotor base matrix 3-1 centrosymmetry side and rotor base
3-4 is all communicated by rotor base matrix 3-1 internal pipeline.
As shown in Figure 4 and Figure 5, driving ring 2 comprises to drive ring base 2-1, piezoelectric patches 2-2, drives ring electrode 2-3 and snap ring
2-6, drives the medial wall of ring base 2-1 to be circumferentially provided with piezoelectric patches 2-2 uniformly at intervals, drives in the middle of ring base 2-1 excircle
It is fixed with a circle snap ring 2-6, the cylindrical sidewall spacers of driving ring base 2-1 of snap ring 2-6 bottom are laid with driving ring electrode 2-
3, each drives ring electrode 2-3 to pass through to drive the corresponding connection of the pipeline within ring base 2-1 with respective piezoelectric patches 2-2；Drive
The both sides of ring 2 bottom symmetrical are provided with lug grooves 2-5 embedding for lug 1-3, pump housing bottom sheet 1 pass through its two groups symmetrical
Lug 1-3 is adhered in symmetrical lug grooves 2-5 in two groups of 2 bottom of driving ring, and the lower sheet matrix 1-1 of pump housing bottom sheet 1 is with preventing
So as to form a concave shaped cavity with matrix 2-1 on the matrix 2-1 of glue bonding and driving ring 2；The centre of lug grooves 2-5 has
With the locating slot 2-4 driving base 7 location fit, locating slot 2-4 is opened in the centre of any one lug grooves 2-5 and height is less than
Snap ring 2-6.
As shown in Figure 12 and Figure 13, base 7 is driven to comprise to drive base matrix 7-1, drive base electrode 7-2, locating piece
7-4, mouth of pipe 7-5 and communication port 7-6, drive the two side of base matrix 7-1 bottom symmetrical to be provided with for pump housing bottom sheet 1 lug 1-
The 3 embedded mouth of pipe 7-5 installing, drive base matrix 7-1 side to be provided with communication port 7-6；Drive in base matrix 7-1 inner periphery
Between be provided with the draw-in groove 7-3 of one annular, the snap ring 2-6 of described driving ring 2 embeds and realizes in draw-in groove 7-3 driving base 7 and drive
The axially position of ring base 2-1 is installed；Base matrix 7-1 medial wall is driven to be provided with uniformly at intervals and described driving ring 2 driving ring
Corresponding driving base electrode 7-2 connecting of electrode 2-3, drives base electrode 7-2 quantity and position distribution and drives ring electrode 2-3
Identical, drive base electrode 7-2 to be all connected to communication port 7-6 by driving base matrix 7-1 internal pipeline；Drive base matrix
Medial wall between two mouth of pipe 7-5 of the every side of 7-1 is provided with the locating piece coordinating positioning in embedded driving ring 2 locating slot 2-4
7-4, ensures to drive the drive on base 7 by driving the combination of the locating piece 7-4 on the base 7 and locating slot 2-4 in driving ring 2
Dynamic base electrode 7-2 is corresponded with the electrode slice 2-3 in driving ring 2.
The width of the above-mentioned draw-in groove 7-3 of the present invention is slightly larger than the width of snap ring 2-6 in driving ring 2, the position of locating piece 7-4
And its width corresponding with locating slot 2-4, highly identical with locating slot 2-4, in the size of mouth of pipe 7-5, position and pump housing bottom sheet 1
Lug 1-3 corresponding, all driving base electrode 7-2 are passed through to drive the internal cabling of base matrix 7-1 and communication port 7-6 phase
Even.
As shown in figure 9, rotor 4 is made up of anti-sound rigid organic materials, the main arc gear by two equal arc length of rotor 4
Plate 4-1 is symmetrically formed by fixedly connecting, and the height of rotor 4 is equal with rotor chamber height 3-2, and the arc length of curved baffle 4-1 is more than one
In the rotor base of elastic film 3-3 both sides, the arc length distance between head piece 3-5 is so that curved baffle 4-1 can cover rotor base
Head piece 3-5 in two rotor base of upper arbitrary elastic film 3-3 both sides.
As shown in Figure 10, rotor upper piece 6 is made up of transparent and entrant sound material, its radius and rotor base 3 exradius
Identical.
As shown in figure 11, the pump housing upper piece 7 is made up of material that is transparent and absorbing sound, and its radius is cylindrical with driving ring base 2-1
Radius is identical, and the pump housing upper piece 7 has a circular hole, circular hole be located at drive ring base 2-1 inner circle and rotor floor seat slot 1-2 cylindrical it
Between.
Rotor 4 is placed on inside rotor chamber 3-2 of rotor base 3, and the height of rotor 4 is contour with rotor chamber 3-2, rotor 4
Can rotate freely in rotor chamber 3-2 in the presence of sound field, the two panels elastic film 3-3 in drive rotor base 3 is back and forth
Motion.
Rotor upper piece 5 marine glue is fixed on above rotor base 3, and rotor chamber is carried out with sealing treatment, elastic film 3-3
Surrounding respectively bonding and rotor base matrix 3-1 and rotor upper piece 5, sealing will be realized when elastic film 3-3 moves back and forth
Intracavity volume changes.
The pump housing upper piece 6 is fixed in driving ring 2, can sheet matrix 1-1, drive downwards by the circular hole 6-1 on the pump housing upper piece 6
The groove injection coupling liquid that rotating ring matrix 2-1 and rotor base 3 are formed, it is possible to reduce acoustic attenuation, and then increase rotor and drive
Power.
Drive base 7 to be fixed in driving ring 2 by the combination of draw-in groove 7-3 and snap ring 2-6 in driving ring 2, realize driving
Driving base electrode 7-2 on base 7 is in close contact with the electrode 2-3 in driving ring 2, by driving the locating piece on base 7
Locating slot 2-4 in 7-4 and driving ring 2 to guarantee the order of transducer it is ensured that piezoelectric patches can order or expected as expected
Signal is triggered, the sound field required for being formed, and host computer passes through to drive the communication port 7-6 on base 7 to trigger institute to piezoelectric patches
The high-order Bezier drive signal needing.
The specific implementation process of apparatus of the present invention is as follows：
First, microflow channels and pump housing bottom sheet runner are attached；
2nd, host computer is connected to by data wire on the driving mouth driving base；
3rd, filled by the groove that the circular hole of the pump housing upper piece is formed to pump housing bottom sheet, driving ring base and rotor base
Coupling liquid, so as piezoelectric patches produce sound wave with minimum fading propagation to rotor chamber inside；
4th, the direction of rotation of rotor is determined according to microfluidic flow direction；
5th, the quantity host computer of the direction of rotation according to rotor and piezoelectric patches calculates each piezoelectricity according to certain algorithm
The exponent number of Bezier signal that piece should load, amplitude, original phase information；
6th, set flow velocity and the flow of microfluid, calculate speed and the number of turns of rotor rotation, thus calculate piezoelectric patches driving
The frequency of dynamic signal parameter change；
7th, host computer sends, according to the frequency being calculated, the Bezier signal parameter that each piezoelectric patches should load, and makes synthesis
Rectangle acoustic pressure node towards changing by certain speed, and then rotor driven is pressed certain speed and is rotated corresponding circle
Number, is realized microfluid and is flowed into certain speed or reserve certain flow.
The important technological parameters that the preferred embodiment of the invention can adopt in a device：The lower sheet matrix 1-1 of pump housing bottom sheet 1
Outside diameter 15mm, height 3mm；Four cylindrical flow diameters are 0.1mm；The outside diameter of rotor floor seat slot 1-2 is
4mm, depth is 2mm.Driving ring 2 is made up of the piezoelectric patches 2-2 that 9 mid frequencyes are 2MHz；The length and width of piezoelectric patches 2-2 is respectively
For 4mm, 3mm；The drive signal peak-to-peak value of piezoelectric patches is 80V.The outside diameter of rotor base 3 is straight with rotor floor seat slot 1-2
Footpath phase is all 4mm, and its height is also 4mm；Rotor base upper and lower head piece diameter is 0.1mm.
The a diameter of 2mm of inner circle of rotor chamber 3-2 and height be 1mm.The curved baffle 4-1 outside diameter of rotor 4 is 2mm,
Height is mutually all 1mm with rotor chamber 3-2 height.Pump housing bottom sheet 1 is formed by 3 D-printing with rotor base 3.
The operation principle of the present invention is as follows：
After implementing by above-mentioned concrete operations, final assembling is as shown in figure 14 (for convenience of description rotor upper piece with the pump housing upper piece not
Assembling).The sound wave of corresponding form can be produced after piezoelectric patches load driver signal in space, when simultaneously, multichannel piezoelectric patches is loaded
During drive signal, produced sound wave will be realized sound field synthesis, adjusts every road piezoelectricity according to special algorithm in space overlapping
The drive signal of piece can be obtained by required sound field.
It is 2MHz piezoelectric patches that the present invention uses mid frequency, and the length and width of piezoelectric patches is respectively 4mm, 3mm, drive signal
Voltage peak-to-peak value be 80V, drive signal using Bessel function form so as to the sound field of single node can be synthesized, sound field energy
Amount is more concentrated, and driving force is bigger.Adjust exponent number, amplitude and the initial phase of each road Bezier signal, by host computer with present
Send out LUSHEN number each, triggering piezoelectric patches produces continuous sound wave and simultaneously forms rectangle acoustic pressure node in rotor intracavity, and rotor is in acoustic pressure gradient
In the presence of can keep with rectangle acoustic pressure node towards consistent, when the exponent number of adjustment Bezier signal, amplitude and initial phase, square
Ideophone pressure node leads to acoustic pressure gradient towards also changing towards changing, and the change of acoustic pressure gradient can promote rotor court
Consistent with rectangle acoustic pressure node direction to continuing holding, it is achieved thereby that the rotation of rotor, and then drive the flowing of intracavity liquid.
Taking rotor in Fig. 94 rotate counterclockwise as a example：
During rotor 4 rotate counterclockwise, on rotor 4, the curved baffle 4-1 of both sides first little by little blocks elastic film wherein
Head piece 3-5 in two rotor base of side, then starts to promote the elastic film 3-3 of both sides, elastic film 3-3 is in curved baffle
Gradually expand outwardly under the promotion of 4-1 so that the volume of whole rotor chamber 3-2 becomes larger, intracavity pressure is gradually reduced therewith,
Promote microfluid from the pump housing bottom sheet runner 1-4 on symmetrical wherein both sides is through rotor base head piece 3-4 finally from rotor base
Upper head piece 3-5 flows in rotor chamber 3-2, realizes the inflow of microfluid.With the rotation of rotor 4, elastic film 3-3 will be by arc
Baffle plate 4-1 supports to maximum, and the miniflow scale of construction now sucking in rotor chamber 3-2 reaches maximum.Rotor 4 is rotated further, and arc keeps off
Plate 4-1 gradually blocks head piece 3-5 in two rotor base of elastic film opposite side, subsequently decontrols head piece 3-5 in rotor base.
Gradually leave elastic film 3-3 with curved baffle 4-1, elastic film 3-3 gradually recovers former in the presence of self-recovery power
State, so that the pressure in rotor chamber 3-2 is gradually increased, promotes the rotor base from symmetrical other both sides for the intracavity microfluid upper
Mouth 3-5 finally flows out from pump housing bottom sheet runner 1-4 through head piece 3-4 under rotor base, realizes the outflow of microfluid.
With the consecutive variations of rectangle acoustic pressure node direction, rotor 4 also and then produces continuous rotation, thus realizing miniflow
The inflow of the continuous high-efficient of body, outflow.Can be realized to rotor 4 rotating speed by the drive signal change frequency adjusting piezoelectric patches
Precise control, and then realize the precise control to the microfluid flow velocity flowing into, flowing out.By when the driving of adjustment adjustment piezoelectric patches
Can realize signal function total time rotor 4 is turn-taked several precise controls, and then realize to the microfluid stream flowing into, flow out
The precise control of amount.When the parameter that host computer issues so that the direction synthesizing rectangle acoustic pressure node in sound field is moved in the opposite direction
When, the inflow of microfluid, outflow direction will change, and therefore pass through simply adjustment piezoelectric patches parameter and just can realize to micro-
The precise control of fluid flow direction.
Above-mentioned specific embodiment is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, any modifications and changes that the present invention is made, both fall within the protection model of the present invention
Enclose.
Claims (8)
1. a kind of sound-driving micropump it is characterised in that：Including pump housing bottom sheet（1）, driving ring（2）, rotor base（3）, rotor
（4）, rotor upper piece（5）, the pump housing upper piece（6）With driving base（7）, pump housing bottom sheet（1）It is arranged on driving ring（2）Bottom, pump
Body bottom sheet（1）And driving ring（2）It is installed along with driving base（7）Interior, rotor base（3）It is arranged on pump housing bottom sheet（1）Center,
Rotor base（3）The rotor chamber at top（3-2）Rotor is inside installed（4）And pass through rotor upper piece（5）Seal, the pump housing upper piece
（6）Driving ring is installed（2）On as pump top cover；
Described driving ring（2）Comprise to drive ring base（2-1）, piezoelectric patches（2-2）, drive ring electrode（2-3）And snap ring（2-
6）, drive ring base（2-1）Medial wall be circumferentially provided with piezoelectric patches uniformly at intervals（2-2）, drive ring base（2-1）Excircle
Centre is fixed with a circle snap ring（2-6）, snap ring（2-6）The driving ring base of bottom（2-1）Cylindrical sidewall spacers are laid with drive
Rotating ring electrode（2-3）, each drives ring electrode（2-3）With respective piezoelectric patches（2-2）By driving ring base（2-1）Internal
Pipeline is corresponding to be connected；Driving ring（2）The both sides of bottom symmetrical are provided with for lug（1-3）Embedded lug grooves（2-5）；Lug grooves
（2-5）Centre have and drive base（7）The locating slot of location fit（2-4）；
Sending signal triggers piezoelectric patches（2-2）Produce continuous sound wave and form rectangle acoustic pressure node, rotor in rotor intracavity（4）?
Can keep in the presence of acoustic pressure gradient with rectangle acoustic pressure node towards consistent, when adjusting signal, rectangle acoustic pressure node is towards meeting
Change and lead to acoustic pressure gradient towards also changing, the change of acoustic pressure gradient can promote rotor to keep and rectangle towards continuation
Acoustic pressure node direction is consistent, it is achieved thereby that the rotation of rotor, and then drive the flowing of intracavity liquid.
2. a kind of sound-driving micropump according to claim 1 it is characterised in that：Described pump housing bottom sheet（1）Including circle
The lower sheet matrix of piece shape（1-1）And lug（1-3）, lower sheet matrix（1-1）Symmetrical both sides are equipped with two parallel lugs（1-
3）, pump housing bottom sheet（1）Center have annular rotor floor seat slot（1-2）, rotor base（3）The pump housing is adhered to by marine glue
Bottom sheet（1）In rotor floor seat slot（1-2）On；Each lug（1-3）Side is provided with side through hole, rotor floor seat slot（1-2）It is provided with
Four and lug（1-3）The corresponding areole of side through hole, pump housing bottom sheet（1）Each lug（1-3）Side through hole passes through respective circle
Pipe running system and rotor floor seat slot（1-2）Communicate between areole.
3. a kind of sound-driving micropump according to claim 2 it is characterised in that：Described rotor base（3）Comprise to turn
Sub- base matrix（3-1）And elastic film（3-3）, rotor base matrix（3-1）The rotor chamber at top（3-2）Symmetrical both sides set
Flexible thin film（3-3）；Each elastic film（3-3）Rotor chamber near both sides（3-2）It is upper that inwall is equipped with rotor base
Mouthful（3-5）, wherein one elastic film（3-3）Head piece in the rotor base of both sides（3-5）With another elastic film（3-3）Both sides
Head piece in rotor base（3-5）It is symmetric；Elastic film（3-3）The rotor base matrix of both sides（3-1）Bottom outside wall
On be equipped with and described rotor floor seat slot（1-2）Head piece under the rotor base that upper each corresponding areole communicates（3-4）, wherein one bullet
Property thin film（3-3）Head piece under the rotor base of both sides（3-4）With another elastic film（3-3）Head piece under the rotor base of both sides
（3-4）It is symmetric；One elastic film（3-3）Wherein head piece in the rotor base of side（3-5）With head piece under rotor base
（3-4）With another elastic film（3-3）With rotor base matrix（3-1）Head piece in the rotor base of centrosymmetry side（3-5）
With head piece under rotor base（3-4）By rotor base matrix（3-1）Internal pipeline all communicates.
4. according to the arbitrary described a kind of sound-driving micropump of claims 1 to 3 it is characterised in that：Described driving base（7）
Comprise to drive base matrix（7-1）, drive base electrode（7-2）, locating piece（7-4）, the mouth of pipe（7-5）And communication port（7-6）, drive
Dynamic base matrix（7-1）The two side of bottom symmetrical is provided with for pump housing bottom sheet（1）Lug（1-3）The embedded mouth of pipe installed
（7-5）, drive base matrix（7-1）Side is provided with communication port（7-6）；Drive base matrix（7-1）The centre of inner periphery is provided with
The draw-in groove of annular together（7-3）, described driving ring（2）Snap ring（2-6）Embedded draw-in groove（7-3）Middle realization drives base（7）With
Drive ring base（2-1）Axially position install；Drive base matrix（7-1）Medial wall is provided with and described driving ring uniformly at intervals
（2）Driving ring electrode（2-3）The corresponding driving base electrode connecting（7-2）, drive base electrode（7-2）Quantity and position are divided
Cloth and driving ring electrode（2-3）Identical, drive base electrode（7-2）All by driving base matrix（7-1）Internal pipeline connects
To communication port（7-6）；Drive base matrix（7-1）Two mouths of pipe of every side（7-5）Between medial wall be provided with embedded driving
Ring（2）Locating slot（2-4）The locating piece of middle cooperation positioning（7-4）.
5. according to the arbitrary described a kind of sound-driving micropump of claims 1 to 3 it is characterised in that：Described rotor（4）By anti-
Sound rigid organic materials are constituted, rotor（4）Curved baffle by two equal arc length（4-1）Symmetrically it is formed by fixedly connecting, rotor
（4）Height and rotor chamber height（3-2）Equal, curved baffle（4-1）Arbitrary elastic film in rotor base can be covered（3-3）
Head piece in two rotor base of both sides（3-5）.
6. according to the arbitrary described a kind of sound-driving micropump of claims 1 to 3 it is characterised in that：Described rotor upper piece（5）
It is made up of transparent and entrant sound material, its radius and rotor base（3）Exradius is identical.
7. according to the arbitrary described a kind of sound-driving micropump of claims 1 to 3 it is characterised in that：The described pump housing upper piece（6）
By transparent and absorb sound material make, its radius with drive ring base（2-1）Exradius is identical, the pump housing upper piece（6）On have
One circular hole, circular hole is located at and drives ring base（2-1）Inner circle and rotor floor seat slot（1-2）Between cylindrical.
8. a kind of sound-driving micropump according to claim 1 it is characterised in that：Described piezoelectric patches（2-2）At least 4
Individual.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510442767.4A CN105020121B (en) | 2015-07-24 | 2015-07-24 | Sound-driving micropump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510442767.4A CN105020121B (en) | 2015-07-24 | 2015-07-24 | Sound-driving micropump |
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| Publication Number | Publication Date |
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| CN105020121A CN105020121A (en) | 2015-11-04 |
| CN105020121B true CN105020121B (en) | 2017-03-01 |
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| CN113090488A (en) * | 2021-03-02 | 2021-07-09 | 四川卓滤环保技术有限公司 | Install fast and dismantle measuring pump head |
| CN115263714B (en) * | 2022-08-04 | 2024-02-09 | 浙江大学 | Micropump device for driving micro gear by acoustic surface wave |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19834536C2 (en) * | 1998-07-31 | 2001-06-28 | Daimler Chrysler Ag | Device, microsystem and method for transporting and / or segregating liquids |
| CN100335779C (en) * | 2005-07-15 | 2007-09-05 | 清华大学 | Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow |
| CN100390413C (en) * | 2006-11-10 | 2008-05-28 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
| FR2960922B1 (en) * | 2010-06-08 | 2013-04-19 | Centre Nat Rech Scient | ULTRASONIC PROGRESSIVE WAVE MICRO PUMP FOR LIQUID |
| CN102312822A (en) * | 2011-03-24 | 2012-01-11 | 南京航空航天大学 | Rotary traveling wave valveless piezoelectric driving pump |
| DE102012200501A1 (en) * | 2012-01-13 | 2013-07-18 | Robert Bosch Gmbh | Microdosing pump and method for manufacturing a microdosing pump |
| GB201322103D0 (en) * | 2013-12-13 | 2014-01-29 | The Technology Partnership Plc | Fluid pump |
| CN204921322U (en) * | 2015-07-24 | 2015-12-30 | 浙江大学 | Sound -driving micropump |
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