CL2016001858A1 - Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado - Google Patents
Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificadoInfo
- Publication number
- CL2016001858A1 CL2016001858A1 CL2016001858A CL2016001858A CL2016001858A1 CL 2016001858 A1 CL2016001858 A1 CL 2016001858A1 CL 2016001858 A CL2016001858 A CL 2016001858A CL 2016001858 A CL2016001858 A CL 2016001858A CL 2016001858 A1 CL2016001858 A1 CL 2016001858A1
- Authority
- CL
- Chile
- Prior art keywords
- cvd
- modified
- deposition
- copper substrate
- chemical vapors
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 5
- 229910052802 copper Inorganic materials 0.000 title abstract 4
- 239000010949 copper Substances 0.000 title abstract 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 2
- 229910021389 graphene Inorganic materials 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- 230000008021 deposition Effects 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
- 239000011521 glass Substances 0.000 abstract 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- General Induction Heating (AREA)
Abstract
Un método y sistema para producir grafeno sobre un substrato de cobre por deposición de vapores químicos (AP-CVD) modificado; que, comprende: - disponer de dos láminas de cobre (40) dispuestas en forma paralela y separadas con un material cerámico (30); - incorporar dichas dos láminas de cobre (40) al interior de una cámara abierta, que está constituido por una cámara cilíndrica de vidrio (10), donde su eje axial se encuentra orientado verticalmente, donde la cámara cilíndrica de vidrio (10) se encue
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CL2016001858A CL2016001858A1 (es) | 2016-07-21 | 2016-07-21 | Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado |
EP17830164.4A EP3489194A4 (en) | 2016-07-21 | 2017-07-18 | METHOD AND SYSTEM FOR PRODUCING GRAPHS ON A COPPER SUBSTRATE BY MODIFIED CHEMICAL VAPOR DEPOSITION (AP-CVD) |
PCT/CL2017/050032 WO2018014143A1 (es) | 2016-07-21 | 2017-07-18 | Método y sistema para producir grafeno sobre un substrato de cobre por deposición de vapores químicos (ap-cvd) modificado |
JP2019524490A JP7039051B2 (ja) | 2016-07-21 | 2017-07-18 | 大気圧での化学蒸着(ap-cvd)により銅基板にグラフェンを製造する改良方法および改良システム |
KR1020197002936A KR102408821B1 (ko) | 2016-07-21 | 2017-07-18 | 변형된 화학적 기상 증착법(ap-cvd)에 의해 구리 기판 상에 그래핀을 생성하기 위한 방법 및 시스템 |
US16/318,193 US11624114B2 (en) | 2016-07-21 | 2017-07-18 | Method and system for producing graphene on a copper substrate by modified chemical vapor deposition (AP-CVD) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CL2016001858A CL2016001858A1 (es) | 2016-07-21 | 2016-07-21 | Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado |
Publications (1)
Publication Number | Publication Date |
---|---|
CL2016001858A1 true CL2016001858A1 (es) | 2017-02-17 |
Family
ID=59858379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CL2016001858A CL2016001858A1 (es) | 2016-07-21 | 2016-07-21 | Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado |
Country Status (6)
Country | Link |
---|---|
US (1) | US11624114B2 (es) |
EP (1) | EP3489194A4 (es) |
JP (1) | JP7039051B2 (es) |
KR (1) | KR102408821B1 (es) |
CL (1) | CL2016001858A1 (es) |
WO (1) | WO2018014143A1 (es) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CL2016001858A1 (es) | 2016-07-21 | 2017-02-17 | Univ Técnica Federico Santa Mar+Ia | Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado |
JP2022549368A (ja) * | 2019-09-30 | 2022-11-24 | ラム リサーチ コーポレーション | リモートプラズマを用いる選択的グラフェン堆積 |
CN115433920B (zh) * | 2021-06-03 | 2024-05-14 | 上海新池能源科技有限公司 | 生长单层石墨烯的工艺方法 |
CN113566044A (zh) * | 2021-07-30 | 2021-10-29 | 重庆大学 | 一种获取连续高温氯气的加热方法 |
CN113699503B (zh) * | 2021-08-31 | 2022-09-09 | 上海交通大学 | 金属表面具有多相复合碳源的石墨烯制备方法及装置 |
CN114459336A (zh) * | 2022-03-04 | 2022-05-10 | 广东粤港澳大湾区国家纳米科技创新研究院 | 石墨烯应变传感器及石墨烯应变传感器的制备方法 |
CN115125524A (zh) * | 2022-07-05 | 2022-09-30 | 常州第六元素半导体有限公司 | 一种分段式卷对卷cvd石墨烯连续生长设备 |
CN115744886B (zh) * | 2022-11-24 | 2024-04-19 | 广东墨睿科技有限公司 | 一种石墨烯生长支架及生长石墨烯的方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4698354B2 (ja) | 2005-09-15 | 2011-06-08 | 株式会社リコー | Cvd装置 |
US20100301212A1 (en) * | 2009-05-18 | 2010-12-02 | The Regents Of The University Of California | Substrate-free gas-phase synthesis of graphene sheets |
KR101912798B1 (ko) | 2011-01-31 | 2018-10-30 | 한화에어로스페이스 주식회사 | 그래핀 합성장치 및 합성방법 |
DE112013000502T5 (de) * | 2012-01-06 | 2015-01-08 | Ut-Battelle, Llc. | Herstellung von Mono- und Multischicht-Graphen hoher Qualität in großem Maßstab durch chemische Abscheidung aus der Gasphase |
GB201215579D0 (en) | 2012-08-31 | 2012-10-17 | Univ Leiden | Thin film formation |
KR20140030977A (ko) | 2012-09-04 | 2014-03-12 | 삼성테크윈 주식회사 | 촉매 금속 지지 장치, 그래핀 다매 합성 장치 및 그래핀 다매 합성 방법. |
US20150140211A1 (en) * | 2013-11-19 | 2015-05-21 | Cvd Equipment Corporation | Scalable 2D-Film CVD Synthesis |
CL2016001858A1 (es) | 2016-07-21 | 2017-02-17 | Univ Técnica Federico Santa Mar+Ia | Método y sistema para producir grafeno sobre un sustrato de cobre por deposición de vapores químicos (ap_cvd) modificado |
-
2016
- 2016-07-21 CL CL2016001858A patent/CL2016001858A1/es unknown
-
2017
- 2017-07-18 US US16/318,193 patent/US11624114B2/en active Active
- 2017-07-18 EP EP17830164.4A patent/EP3489194A4/en active Pending
- 2017-07-18 JP JP2019524490A patent/JP7039051B2/ja active Active
- 2017-07-18 KR KR1020197002936A patent/KR102408821B1/ko active IP Right Grant
- 2017-07-18 WO PCT/CL2017/050032 patent/WO2018014143A1/es unknown
Also Published As
Publication number | Publication date |
---|---|
EP3489194A4 (en) | 2020-04-22 |
US20190233942A1 (en) | 2019-08-01 |
US11624114B2 (en) | 2023-04-11 |
WO2018014143A1 (es) | 2018-01-25 |
JP7039051B2 (ja) | 2022-03-22 |
KR20190032401A (ko) | 2019-03-27 |
JP2019529323A (ja) | 2019-10-17 |
EP3489194A1 (en) | 2019-05-29 |
KR102408821B1 (ko) | 2022-06-14 |
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