CH712906B8 - Spektroskop. - Google Patents

Spektroskop. Download PDF

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Publication number
CH712906B8
CH712906B8 CH00121/18A CH1212018A CH712906B8 CH 712906 B8 CH712906 B8 CH 712906B8 CH 00121/18 A CH00121/18 A CH 00121/18A CH 1212018 A CH1212018 A CH 1212018A CH 712906 B8 CH712906 B8 CH 712906B8
Authority
CH
Switzerland
Prior art keywords
recess
wall part
side wall
viewed
larger
Prior art date
Application number
CH00121/18A
Other languages
English (en)
Other versions
CH712906B1 (de
Inventor
Yokino C/O Hamamatsu Photonics K K Takafumi
Shibayama C/O Hamamatsu Photonics K K Katsumi
Kato C/O Hamamatsu Photonics K K Katsuhiko
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of CH712906B1 publication Critical patent/CH712906B1/de
Publication of CH712906B8 publication Critical patent/CH712906B8/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Measuring Cells (AREA)
  • Optical Filters (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

Ein Spektrometer (1) weist erfindungsgemäss einen Träger (10) mit einem Bodenwandteil (12), in dem eine Vertiefung (14) mit einer konkav gekrümmten inneren Oberfläche (14a) und ein an die Vertiefung angrenzender peripherer Teil (16) vorgesehen sind, und einem Seitenwandteil (13), der an einer Seite angeordnet ist, an der die Vertiefung (14) in Bezug auf den Bodenwandteil (12) offen ist, ein Lichterfassungselement (30), das durch den Seitenwandteil (13) gestützt ist, während es der Vertiefung (14) gegenüberliegt, und einen dispersiven Teil (52), der an der inneren Oberfläche (14a) der Vertiefung (14), angeordnet ist, auf. Eine Länge der Vertiefung (14) in einer zweiten Richtung, in der eine Vielzahl von Gitternuten (52a), die in dem dispersiven Teil (52) enthalten sind, ausgerichtet ist, ist grösser als eine Länge der Vertiefung in einer dritten Richtung orthogonal zu der zweiten Richtung, wenn in einer ersten Richtung betrachtet, in der die Vertiefung (14) und das Lichterfassungselement (30) einander gegenüberliegen. Ein Bereich des peripheren Teils (16) angrenzend an die Vertiefung (14) in der zweiten Richtung ist grösser als ein Bereich des peripheren Teils (16) angrenzend zu der Vertiefung (14) in der dritten Richtung, wenn in der ersten Richtung betrachtet.
CH00121/18A 2015-08-04 2016-08-04 Spektroskop. CH712906B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015153863 2015-08-04
PCT/JP2016/073015 WO2017022839A1 (ja) 2015-08-04 2016-08-04 分光器

Publications (2)

Publication Number Publication Date
CH712906B1 CH712906B1 (de) 2019-07-15
CH712906B8 true CH712906B8 (de) 2019-09-30

Family

ID=57943552

Family Applications (2)

Application Number Title Priority Date Filing Date
CH00121/18A CH712906B8 (de) 2015-08-04 2016-08-04 Spektroskop.
CH01017/18A CH714565B8 (de) 2015-08-04 2016-08-04 Spektrometer.

Family Applications After (1)

Application Number Title Priority Date Filing Date
CH01017/18A CH714565B8 (de) 2015-08-04 2016-08-04 Spektrometer.

Country Status (7)

Country Link
US (4) US10132683B2 (de)
JP (3) JP6113940B1 (de)
KR (2) KR20240113604A (de)
CN (2) CN111537066B (de)
CH (2) CH712906B8 (de)
DE (1) DE112016003516T5 (de)
WO (1) WO2017022839A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
JP6106811B1 (ja) * 2015-08-04 2017-04-05 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
KR102649915B1 (ko) * 2016-06-21 2024-03-22 삼성전자 주식회사 분광 센서 제어 방법 및 이를 지원하는 전자 장치
US10260953B2 (en) * 2016-08-11 2019-04-16 The Boeing Company Applique and method for thermographic inspection
EP3372966B1 (de) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited Tragbarer analysator zur optischen emissionsspektroskopie
DE112019003451T5 (de) * 2018-07-06 2021-03-18 Hamamatsu Photonics K.K. Spektralmodul und Verfahren zum Herstellen von Spektralmodul
JP7170551B2 (ja) * 2019-01-30 2022-11-14 浜松ホトニクス株式会社 分光器
JP7186104B2 (ja) * 2019-01-30 2022-12-08 浜松ホトニクス株式会社 分光器、及び分光器の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU3032700A (en) * 1999-01-08 2000-07-24 Ibsen Micro Structures A/S Spectrometer
EP1041372B1 (de) * 1999-04-01 2006-03-01 Gretag-Macbeth AG Spektrometer
JP2006145501A (ja) * 2004-11-24 2006-06-08 Hamamatsu Photonics Kk 赤外線検出装置
JP2006322841A (ja) * 2005-05-19 2006-11-30 Shimadzu Corp 分光測定方法及び分光光度計
JP5111163B2 (ja) * 2008-03-04 2012-12-26 浜松ホトニクス株式会社 分光器
DE102008019600B4 (de) * 2008-04-18 2021-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Vorrichtung in gestapelter Bauweise und Verfahren zur Herstellung derselben
JP5205242B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器の製造方法
JP2010256670A (ja) 2009-04-27 2010-11-11 Konica Minolta Sensing Inc 回折格子およびそれを用いる分光ユニット、分光計ならびに回折格子の作成方法
JP5669434B2 (ja) * 2009-05-09 2015-02-12 キヤノン株式会社 回折素子及び回折素子の製造方法及びそれを用いた分光器
US8390806B1 (en) * 2009-05-21 2013-03-05 Lockheed Martin Corporation MEMS spectrometer and sensing systems therefrom
JP2011053143A (ja) * 2009-09-03 2011-03-17 Hamamatsu Photonics Kk 分光モジュール
DE102009046831B4 (de) * 2009-11-18 2015-02-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben
JP5718091B2 (ja) 2011-02-23 2015-05-13 浜松ホトニクス株式会社 分光モジュール
JP5767883B2 (ja) * 2011-07-26 2015-08-26 浜松ホトニクス株式会社 分光器
JP6068039B2 (ja) * 2012-08-06 2017-01-25 浜松ホトニクス株式会社 分光器
CN103017905B (zh) * 2012-12-31 2016-04-20 深圳先进技术研究院 集成平面变栅距光栅和微狭缝的微型光谱仪及其制造方法
CN103983354A (zh) * 2014-04-30 2014-08-13 中国科学院长春光学精密机械与物理研究所 双光束分光系统

Also Published As

Publication number Publication date
KR102684132B1 (ko) 2024-07-12
CH714565B1 (de) 2019-07-15
US20190056267A1 (en) 2019-02-21
US10260944B2 (en) 2019-04-16
US10539461B2 (en) 2020-01-21
JPWO2017022839A1 (ja) 2017-08-03
US20200109989A1 (en) 2020-04-09
US20180224330A1 (en) 2018-08-09
KR20240113604A (ko) 2024-07-22
CN111537066A (zh) 2020-08-14
KR20180034391A (ko) 2018-04-04
JP2021113826A (ja) 2021-08-05
US10871397B2 (en) 2020-12-22
CN111537066B (zh) 2024-03-12
CN107923795A (zh) 2018-04-17
JP6113940B1 (ja) 2017-04-12
JP6877198B2 (ja) 2021-05-26
DE112016003516T5 (de) 2018-04-26
CH714565B8 (de) 2019-09-30
WO2017022839A1 (ja) 2017-02-09
US20190250036A1 (en) 2019-08-15
CN107923795B (zh) 2020-06-12
CH712906B1 (de) 2019-07-15
JP2017138320A (ja) 2017-08-10
US10132683B2 (en) 2018-11-20

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