CH670306A5 - - Google Patents

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Publication number
CH670306A5
CH670306A5 CH4535/86A CH453586A CH670306A5 CH 670306 A5 CH670306 A5 CH 670306A5 CH 4535/86 A CH4535/86 A CH 4535/86A CH 453586 A CH453586 A CH 453586A CH 670306 A5 CH670306 A5 CH 670306A5
Authority
CH
Switzerland
Prior art keywords
electrodes
signals
signal
cursor
displacement
Prior art date
Application number
CH4535/86A
Other languages
English (en)
French (fr)
Inventor
Hans Ulrich Meyer
Original Assignee
Hans Ulrich Meyer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hans Ulrich Meyer filed Critical Hans Ulrich Meyer
Priority to CH4535/86A priority Critical patent/CH670306A5/fr
Priority to US07/102,042 priority patent/US4841225A/en
Priority to DE8787810569T priority patent/DE3773147D1/de
Priority to EP87810569A priority patent/EP0271436B1/fr
Priority to CN87107060.XA priority patent/CN1011263B/zh
Priority to JP62285676A priority patent/JPS63135817A/ja
Publication of CH670306A5 publication Critical patent/CH670306A5/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CH4535/86A 1986-11-13 1986-11-13 CH670306A5 (US07927381-20110419-C00020.png)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH4535/86A CH670306A5 (US07927381-20110419-C00020.png) 1986-11-13 1986-11-13
US07/102,042 US4841225A (en) 1986-11-13 1987-09-28 Capacitive sensor for measuring a displacement
DE8787810569T DE3773147D1 (de) 1986-11-13 1987-10-05 Kapazitiver weggeber.
EP87810569A EP0271436B1 (fr) 1986-11-13 1987-10-05 Capteur capacitif pour la mesure d'un déplacement
CN87107060.XA CN1011263B (zh) 1986-11-13 1987-10-17 测量位移的电容性传感器
JP62285676A JPS63135817A (ja) 1986-11-13 1987-11-13 変位測定用静電容量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH4535/86A CH670306A5 (US07927381-20110419-C00020.png) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
CH670306A5 true CH670306A5 (US07927381-20110419-C00020.png) 1989-05-31

Family

ID=4277906

Family Applications (1)

Application Number Title Priority Date Filing Date
CH4535/86A CH670306A5 (US07927381-20110419-C00020.png) 1986-11-13 1986-11-13

Country Status (6)

Country Link
US (1) US4841225A (US07927381-20110419-C00020.png)
EP (1) EP0271436B1 (US07927381-20110419-C00020.png)
JP (1) JPS63135817A (US07927381-20110419-C00020.png)
CN (1) CN1011263B (US07927381-20110419-C00020.png)
CH (1) CH670306A5 (US07927381-20110419-C00020.png)
DE (1) DE3773147D1 (US07927381-20110419-C00020.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0519335A2 (en) * 1991-06-21 1992-12-23 University Of Utah Research Foundation Linear displacement and strain measuring apparatus

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051975A (en) * 1988-02-15 1991-09-24 Mitsubishi Denki Kabushiki Kaisha Optical recording and/or reproducing apparatus having a temperature adjusting device
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US4958115A (en) * 1988-11-28 1990-09-18 At&T Bell Laboratories Capacitively commutated brushless DC servomotors
US5130660A (en) * 1991-04-02 1992-07-14 International Business Machines Corporation Miniature electronic device aligner using capacitance techniques
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
US5237307A (en) * 1991-11-27 1993-08-17 The United States Of America As Represented By The United States Department Of Energy Non-contact tamper sensing by electronic means
DE69429136D1 (de) * 1993-06-30 2002-01-03 Hamilton Co Manuelle Abgabehilfe für eine Injektionsspritze
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
IL112218A0 (en) * 1995-01-02 1995-03-30 Netzer Yishay A method and apparatus for measuring linear displacements
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder
CH690931A5 (fr) * 1996-07-02 2001-02-28 Sylvac S A Instrument pour mesurer des longueurs ou des angles.
US6137403A (en) * 1998-12-10 2000-10-24 Phoenix Controls Corporation Sash sensor and method of sensing a sash using an array of multiplexed elements
CN1064754C (zh) * 1998-12-18 2001-04-18 赵飙 改进型电容性位移传感器
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
DE10160835B4 (de) * 2001-12-06 2011-02-17 Anton Rodi Anordnung zur Interpolation eines Messsignals
US7142500B2 (en) * 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
US8516886B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric X-Axis gyroscope
WO2014076295A2 (de) * 2012-11-19 2014-05-22 Behr-Hella Thermocontrol Gmbh Kapazitiver sensor zur erfassung einer relativbewegung zweier benachbarter körper
CN104215165B (zh) * 2013-05-31 2017-02-08 浙江师范大学 一种一维位移精密测量方法
US9714846B2 (en) 2013-12-31 2017-07-25 Chicago Dial Indicator Company Displacement measuring device with capacitive sensing
JP6611467B2 (ja) 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
KR101701318B1 (ko) * 2015-06-16 2017-02-01 하이윈 마이크로시스템 코포레이션 평면 위치 측정 장치의 정전용량 감지 유닛
JP6790409B2 (ja) * 2016-03-25 2020-11-25 ヤマハ株式会社 位置検出装置及び位置検出方法
JP6862668B2 (ja) * 2016-03-25 2021-04-21 ヤマハ株式会社 基板及び位置検出装置
DE102019118693A1 (de) * 2019-07-10 2021-01-14 Ewellix AB Positionssensorik, Verfahren zur Positionsermittlung und Linearaktuator

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH539837A (de) * 1972-03-22 1973-07-31 Ulrich Meyer Hans Kapazitive Längenmesseinrichtung
CH614042A5 (US07927381-20110419-C00020.png) * 1977-04-20 1979-10-31 Hans Ulrich Meyer
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
DE3020411C2 (de) * 1980-05-27 1983-09-22 Hans Ulrich St.Sulpice Waadt Meyer Vorrichtung zum Messen der Verschiebung zweier Körper
CH651136A5 (de) * 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0519335A2 (en) * 1991-06-21 1992-12-23 University Of Utah Research Foundation Linear displacement and strain measuring apparatus
EP0519335A3 (en) * 1991-06-21 1993-07-21 University Of Utah Research Foundation Linear displacement and strain measuring apparatus

Also Published As

Publication number Publication date
JPS63135817A (ja) 1988-06-08
EP0271436B1 (fr) 1991-09-18
DE3773147D1 (de) 1991-10-24
CN1011263B (zh) 1991-01-16
US4841225A (en) 1989-06-20
CN87107060A (zh) 1988-05-25
EP0271436A1 (fr) 1988-06-15

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