DE3773147D1 - Kapazitiver weggeber. - Google Patents

Kapazitiver weggeber.

Info

Publication number
DE3773147D1
DE3773147D1 DE8787810569T DE3773147T DE3773147D1 DE 3773147 D1 DE3773147 D1 DE 3773147D1 DE 8787810569 T DE8787810569 T DE 8787810569T DE 3773147 T DE3773147 T DE 3773147T DE 3773147 D1 DE3773147 D1 DE 3773147D1
Authority
DE
Germany
Prior art keywords
leader
capacitive
capacitive leader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787810569T
Other languages
English (en)
Inventor
Hans Ulrich Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE3773147D1 publication Critical patent/DE3773147D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE8787810569T 1986-11-13 1987-10-05 Kapazitiver weggeber. Expired - Lifetime DE3773147D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH4535/86A CH670306A5 (de) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
DE3773147D1 true DE3773147D1 (de) 1991-10-24

Family

ID=4277906

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787810569T Expired - Lifetime DE3773147D1 (de) 1986-11-13 1987-10-05 Kapazitiver weggeber.

Country Status (6)

Country Link
US (1) US4841225A (de)
EP (1) EP0271436B1 (de)
JP (1) JPS63135817A (de)
CN (1) CN1011263B (de)
CH (1) CH670306A5 (de)
DE (1) DE3773147D1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051975A (en) * 1988-02-15 1991-09-24 Mitsubishi Denki Kabushiki Kaisha Optical recording and/or reproducing apparatus having a temperature adjusting device
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US4958115A (en) * 1988-11-28 1990-09-18 At&T Bell Laboratories Capacitively commutated brushless DC servomotors
US5130660A (en) * 1991-04-02 1992-07-14 International Business Machines Corporation Miniature electronic device aligner using capacitance techniques
US5174159A (en) * 1991-06-21 1992-12-29 University Of Utah Research Foundation Linear displacement and strain measuring apparatus
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
US5237307A (en) * 1991-11-27 1993-08-17 The United States Of America As Represented By The United States Department Of Energy Non-contact tamper sensing by electronic means
EP0635277B1 (de) * 1993-06-30 2001-11-21 Hamilton Company, Inc. Manuelle Abgabehilfe für eine Injektionsspritze
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
IL112218A0 (en) * 1995-01-02 1995-03-30 Netzer Yishay A method and apparatus for measuring linear displacements
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder
CH690931A5 (fr) * 1996-07-02 2001-02-28 Sylvac S A Instrument pour mesurer des longueurs ou des angles.
US6137403A (en) * 1998-12-10 2000-10-24 Phoenix Controls Corporation Sash sensor and method of sensing a sash using an array of multiplexed elements
CN1064754C (zh) * 1998-12-18 2001-04-18 赵飙 改进型电容性位移传感器
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
DE10160835B4 (de) * 2001-12-06 2011-02-17 Anton Rodi Anordnung zur Interpolation eines Messsignals
US7142500B2 (en) * 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
US8516886B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric X-Axis gyroscope
US9464922B2 (en) * 2012-11-19 2016-10-11 Behr-Hella Thermocontrol Gmbh Capacitive sensor for detecting a relative movement of two adjacent bodies
CN104215165B (zh) * 2013-05-31 2017-02-08 浙江师范大学 一种一维位移精密测量方法
US9714846B2 (en) 2013-12-31 2017-07-25 Chicago Dial Indicator Company Displacement measuring device with capacitive sensing
JP6611467B2 (ja) 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
KR101701318B1 (ko) * 2015-06-16 2017-02-01 하이윈 마이크로시스템 코포레이션 평면 위치 측정 장치의 정전용량 감지 유닛
JP6862668B2 (ja) * 2016-03-25 2021-04-21 ヤマハ株式会社 基板及び位置検出装置
JP6790409B2 (ja) * 2016-03-25 2020-11-25 ヤマハ株式会社 位置検出装置及び位置検出方法
DE102019118693A1 (de) * 2019-07-10 2021-01-14 Ewellix AB Positionssensorik, Verfahren zur Positionsermittlung und Linearaktuator

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH539837A (de) * 1972-03-22 1973-07-31 Ulrich Meyer Hans Kapazitive Längenmesseinrichtung
CH614042A5 (de) * 1977-04-20 1979-10-31 Hans Ulrich Meyer
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
DE3020411C2 (de) * 1980-05-27 1983-09-22 Hans Ulrich St.Sulpice Waadt Meyer Vorrichtung zum Messen der Verschiebung zweier Körper
CH651136A5 (de) * 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output

Also Published As

Publication number Publication date
CN1011263B (zh) 1991-01-16
EP0271436B1 (de) 1991-09-18
EP0271436A1 (de) 1988-06-15
CN87107060A (zh) 1988-05-25
US4841225A (en) 1989-06-20
JPS63135817A (ja) 1988-06-08
CH670306A5 (de) 1989-05-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee