CH657224A5 - Insulator, which is protected against glow discharges, for use in discharge spaces - Google Patents
Insulator, which is protected against glow discharges, for use in discharge spaces Download PDFInfo
- Publication number
- CH657224A5 CH657224A5 CH299380A CH299380A CH657224A5 CH 657224 A5 CH657224 A5 CH 657224A5 CH 299380 A CH299380 A CH 299380A CH 299380 A CH299380 A CH 299380A CH 657224 A5 CH657224 A5 CH 657224A5
- Authority
- CH
- Switzerland
- Prior art keywords
- cathode
- insulator
- insulating body
- elements
- anode
- Prior art date
Links
- 239000012212 insulator Substances 0.000 title claims 17
- 239000004020 conductor Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 230000015556 catabolic process Effects 0.000 claims 3
- 238000001311 chemical methods and process Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000615 nonconductor Substances 0.000 claims 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B17/00—Insulators or insulating bodies characterised by their form
- H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B17/00—Insulators or insulating bodies characterised by their form
- H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
- H01B17/46—Means for providing an external arc-discharge path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Lasers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Emergency Protection Circuit Devices (AREA)
- Electron Sources, Ion Sources (AREA)
- Insulators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8012334A GB2073999B (en) | 1980-04-15 | 1980-04-15 | Device for use in a glow discharge apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH657224A5 true CH657224A5 (en) | 1986-08-15 |
Family
ID=10512791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH299380A CH657224A5 (en) | 1980-04-15 | 1980-04-17 | Insulator, which is protected against glow discharges, for use in discharge spaces |
Country Status (5)
| Country | Link |
|---|---|
| AT (1) | AT369927B (enExample) |
| CH (1) | CH657224A5 (enExample) |
| FR (1) | FR2481012A1 (enExample) |
| GB (1) | GB2073999B (enExample) |
| SE (1) | SE450179B (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0908921A1 (en) * | 1997-10-10 | 1999-04-14 | European Community | Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR825025A (fr) * | 1936-11-07 | 1938-02-22 | Dunlop Sa | Perfectionnements aux roues de tracteurs ou autre véhicule en vue d'augmenter leur adhérence |
| US2906911A (en) * | 1953-05-28 | 1959-09-29 | Berghaus Elektrophysik Anst | Leading-in insulators for electric glow discharge receptacles |
| NL199311A (enExample) * | 1954-08-05 | |||
| FR1268489A (fr) * | 1959-05-08 | 1961-08-04 | Berghaus Elektrophysik Anst | Organe porteur isolant |
-
1980
- 1980-04-10 AT AT194380A patent/AT369927B/de not_active IP Right Cessation
- 1980-04-14 SE SE8002774A patent/SE450179B/sv not_active IP Right Cessation
- 1980-04-15 GB GB8012334A patent/GB2073999B/en not_active Expired
- 1980-04-17 CH CH299380A patent/CH657224A5/de not_active IP Right Cessation
- 1980-04-18 FR FR8008830A patent/FR2481012A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2073999A (en) | 1981-10-21 |
| ATA194380A (de) | 1982-06-15 |
| FR2481012A1 (fr) | 1981-10-23 |
| FR2481012B1 (enExample) | 1985-03-15 |
| AT369927B (de) | 1983-02-10 |
| SE8002774L (sv) | 1981-10-15 |
| GB2073999B (en) | 1983-09-07 |
| SE450179B (sv) | 1987-06-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |