GB2073999B - Device for use in a glow discharge apparatus - Google Patents

Device for use in a glow discharge apparatus

Info

Publication number
GB2073999B
GB2073999B GB8012334A GB8012334A GB2073999B GB 2073999 B GB2073999 B GB 2073999B GB 8012334 A GB8012334 A GB 8012334A GB 8012334 A GB8012334 A GB 8012334A GB 2073999 B GB2073999 B GB 2073999B
Authority
GB
United Kingdom
Prior art keywords
glow discharge
discharge apparatus
glow
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8012334A
Other languages
English (en)
Other versions
GB2073999A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vmei Lenin
Original Assignee
Vmei Lenin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AT194380A priority Critical patent/AT369927B/de
Priority to SE8002774A priority patent/SE450179B/sv
Application filed by Vmei Lenin filed Critical Vmei Lenin
Priority to GB8012334A priority patent/GB2073999B/en
Priority to CH299380A priority patent/CH657224A5/de
Priority to FR8008830A priority patent/FR2481012A1/fr
Publication of GB2073999A publication Critical patent/GB2073999A/en
Application granted granted Critical
Publication of GB2073999B publication Critical patent/GB2073999B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H01B17/46—Means for providing an external arc-discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Lasers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Insulators (AREA)
GB8012334A 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus Expired GB2073999B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT194380A AT369927B (de) 1980-04-15 1980-04-10 Baugruppe zum schutz elektrischer isolatoren vor einer glimmentladung
SE8002774A SE450179B (sv) 1980-04-15 1980-04-14 Anordning for att skydda elektriska isolatorer mot glimurladdning
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus
CH299380A CH657224A5 (en) 1980-04-15 1980-04-17 Insulator, which is protected against glow discharges, for use in discharge spaces
FR8008830A FR2481012A1 (fr) 1980-04-15 1980-04-18 Module de protection des isolateurs electriques contre les decharges luminescentes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Publications (2)

Publication Number Publication Date
GB2073999A GB2073999A (en) 1981-10-21
GB2073999B true GB2073999B (en) 1983-09-07

Family

ID=10512791

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8012334A Expired GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Country Status (5)

Country Link
AT (1) AT369927B (enExample)
CH (1) CH657224A5 (enExample)
FR (1) FR2481012A1 (enExample)
GB (1) GB2073999B (enExample)
SE (1) SE450179B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908921A1 (en) * 1997-10-10 1999-04-14 European Community Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR825025A (fr) * 1936-11-07 1938-02-22 Dunlop Sa Perfectionnements aux roues de tracteurs ou autre véhicule en vue d'augmenter leur adhérence
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
NL199311A (enExample) * 1954-08-05
FR1268489A (fr) * 1959-05-08 1961-08-04 Berghaus Elektrophysik Anst Organe porteur isolant

Also Published As

Publication number Publication date
GB2073999A (en) 1981-10-21
ATA194380A (de) 1982-06-15
FR2481012A1 (fr) 1981-10-23
FR2481012B1 (enExample) 1985-03-15
CH657224A5 (en) 1986-08-15
AT369927B (de) 1983-02-10
SE8002774L (sv) 1981-10-15
SE450179B (sv) 1987-06-09

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee