CH652236A5 - Roentgenstrahllithografiegeraet sowie verfahren zu dessen betrieb. - Google Patents

Roentgenstrahllithografiegeraet sowie verfahren zu dessen betrieb. Download PDF

Info

Publication number
CH652236A5
CH652236A5 CH296/79A CH29679A CH652236A5 CH 652236 A5 CH652236 A5 CH 652236A5 CH 296/79 A CH296/79 A CH 296/79A CH 29679 A CH29679 A CH 29679A CH 652236 A5 CH652236 A5 CH 652236A5
Authority
CH
Switzerland
Prior art keywords
resist
target
development
developed
ray
Prior art date
Application number
CH296/79A
Other languages
German (de)
English (en)
Inventor
William Derek Buckley
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of CH652236A5 publication Critical patent/CH652236A5/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/167—X-ray
    • Y10S430/168—X-ray exposure process

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Radiography Using Non-Light Waves (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • X-Ray Techniques (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CH296/79A 1978-01-16 1979-01-12 Roentgenstrahllithografiegeraet sowie verfahren zu dessen betrieb. CH652236A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,541 US4215192A (en) 1978-01-16 1978-01-16 X-ray lithography apparatus and method of use

Publications (1)

Publication Number Publication Date
CH652236A5 true CH652236A5 (de) 1985-10-31

Family

ID=25353753

Family Applications (1)

Application Number Title Priority Date Filing Date
CH296/79A CH652236A5 (de) 1978-01-16 1979-01-12 Roentgenstrahllithografiegeraet sowie verfahren zu dessen betrieb.

Country Status (8)

Country Link
US (1) US4215192A (US06534493-20030318-C00288.png)
JP (1) JPS54103346A (US06534493-20030318-C00288.png)
CA (1) CA1118914A (US06534493-20030318-C00288.png)
CH (1) CH652236A5 (US06534493-20030318-C00288.png)
DE (1) DE2854693A1 (US06534493-20030318-C00288.png)
FR (1) FR2414791A1 (US06534493-20030318-C00288.png)
GB (2) GB2073901A (US06534493-20030318-C00288.png)
IT (1) IT1114336B (US06534493-20030318-C00288.png)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342917A (en) * 1978-01-16 1982-08-03 The Perkin-Elmer Corporation X-ray lithography apparatus and method of use
US4388728A (en) * 1978-11-20 1983-06-14 The Machlett Laboratories, Incorporated Soft X-ray lithography system
US4357364A (en) * 1981-04-27 1982-11-02 Rockwell International Corporation High rate resist polymerization method
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
JPS58111318A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 現像方法
US4439870A (en) * 1981-12-28 1984-03-27 Bell Telephone Laboratories, Incorporated X-Ray source and method of making same
US4493097A (en) * 1982-08-30 1985-01-08 The Perkin-Elmer Corporation Electron gun assembly
US4665541A (en) * 1983-06-06 1987-05-12 The University Of Rochester X-ray lithography
DE3330806A1 (de) 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
EP0141041B1 (de) * 1983-08-26 1990-01-03 feinfocus Verwaltungs GmbH & Co. KG Röntgenlithographiegerät
US4534047A (en) * 1984-01-06 1985-08-06 The Perkin-Elmer Corporation Mask ring assembly for X-ray lithography
US4610020A (en) * 1984-01-06 1986-09-02 The Perkin-Elmer Corporation X-ray mask ring and apparatus for making same
US4539695A (en) * 1984-01-06 1985-09-03 The Perkin-Elmer Corporation X-Ray lithography system
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
US5821035A (en) * 1996-03-06 1998-10-13 Sony Corporation Resist developing apparatus and resist developing method
JP3702108B2 (ja) * 1998-10-07 2005-10-05 株式会社東芝 レジストパターン形成方法
EP3696845A1 (en) * 2019-02-12 2020-08-19 Malvern Panalytical B.V. X-ray tube and x-ray analysis system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743842A (en) * 1972-01-14 1973-07-03 Massachusetts Inst Technology Soft x-ray lithographic apparatus and process
US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
CA984887A (en) * 1973-01-03 1976-03-02 Machlett Laboratories X-ray tube anode target
DE2346719C3 (de) * 1973-09-17 1980-01-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Mehrschichtige Bestrahlungsmaske für die Röntgenstrahl-Fotolithografie
US4035522A (en) * 1974-07-19 1977-07-12 International Business Machines Corporation X-ray lithography mask
US4061829A (en) * 1976-04-26 1977-12-06 Bell Telephone Laboratories, Incorporated Negative resist for X-ray and electron beam lithography and method of using same

Also Published As

Publication number Publication date
JPS54103346A (en) 1979-08-14
FR2414791B1 (US06534493-20030318-C00288.png) 1984-11-09
CA1118914A (en) 1982-02-23
IT7947655A0 (it) 1979-01-16
GB2012452A (en) 1979-07-25
US4215192A (en) 1980-07-29
FR2414791A1 (fr) 1979-08-10
GB2073901A (en) 1981-10-21
DE2854693A1 (de) 1979-07-19
GB2012452B (en) 1983-01-06
IT1114336B (it) 1986-01-27

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