CH620793A5 - - Google Patents

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Publication number
CH620793A5
CH620793A5 CH1251377A CH1251377A CH620793A5 CH 620793 A5 CH620793 A5 CH 620793A5 CH 1251377 A CH1251377 A CH 1251377A CH 1251377 A CH1251377 A CH 1251377A CH 620793 A5 CH620793 A5 CH 620793A5
Authority
CH
Switzerland
Prior art keywords
layers
resonator
temperature
layer
resonator according
Prior art date
Application number
CH1251377A
Other languages
German (de)
English (en)
Inventor
Ewald Dr Benes
Dieter Dr Hammer
Original Assignee
List Hans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by List Hans filed Critical List Hans
Publication of CH620793A5 publication Critical patent/CH620793A5/de

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/54Control of the diagnostic device
    • A61B8/546Control of the diagnostic device involving monitoring or regulation of device temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02086Means for compensation or elimination of undesirable effects
    • H03H9/02094Means for compensation or elimination of undesirable effects of adherence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02827Elastic parameters, strength or force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Animal Behavior & Ethology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CH1251377A 1976-10-19 1977-10-13 CH620793A5 (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT778276A AT353506B (de) 1976-10-19 1976-10-19 Piezoelektrischer resonator

Publications (1)

Publication Number Publication Date
CH620793A5 true CH620793A5 (cs) 1980-12-15

Family

ID=3599428

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1251377A CH620793A5 (cs) 1976-10-19 1977-10-13

Country Status (6)

Country Link
US (1) US4166967A (cs)
JP (1) JPS5350991A (cs)
AT (1) AT353506B (cs)
CH (1) CH620793A5 (cs)
DE (1) DE2746712C3 (cs)
GB (1) GB1577692A (cs)

Families Citing this family (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383194A (en) * 1979-05-01 1983-05-10 Toray Industries, Inc. Electro-acoustic transducer element
US4448546A (en) * 1980-11-28 1984-05-15 Novex, Inc. Digital temperature sensor
AT369900B (de) * 1981-05-20 1983-02-10 List Hans Messwertaufnehmer mit piezoelektrischem sensorelement
US4427913A (en) 1981-06-01 1984-01-24 The United States Of America As Represented By The Secretary Of The Army Acoustic diffractometer
JPS5974498U (ja) * 1982-11-10 1984-05-21 株式会社山武 空調用挿入形温度センサの構造
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
FR2551611B1 (fr) * 1983-08-31 1986-10-24 Labo Electronique Physique Nouvelle structure de transducteur ultrasonore et appareil d'examen de milieux par echographie ultrasonore comprenant une telle structure
DE3430161A1 (de) * 1984-08-16 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Poroese anpassungsschicht in einem ultraschallapplikator
NL8501908A (nl) * 1985-07-03 1987-02-02 Tno Tastsensor.
JPS62258597A (ja) * 1986-04-25 1987-11-11 Yokogawa Medical Syst Ltd 超音波トランスデユ−サ
US4961347A (en) * 1987-11-25 1990-10-09 Ishikawajima-Harima Heavy Industries Co., Ltd. Probe for ultrasonic flaw detectors
DE3920663A1 (de) * 1989-06-23 1991-01-10 Siemens Ag Breitstrahlender ultraschallwandler
DE59010738D1 (de) * 1990-04-09 1997-08-21 Siemens Ag Frequenzselektiver Ultraschall-Schichtwandler
US5268610A (en) * 1991-12-30 1993-12-07 Xerox Corporation Acoustic ink printer
US5373268A (en) * 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
US5335209A (en) * 1993-05-06 1994-08-02 Westinghouse Electric Corp. Acoustic sensor and projector module having an active baffle structure
US5422533A (en) * 1994-03-09 1995-06-06 The United States Of America As Represented By The Secretary Of The Army Piezoelectric resonator
US5864261A (en) * 1994-05-23 1999-01-26 Iowa State University Research Foundation Multiple layer acoustical structures for thin-film resonator based circuits and systems
US5598051A (en) * 1994-11-21 1997-01-28 General Electric Company Bilayer ultrasonic transducer having reduced total electrical impedance
US5629906A (en) * 1995-02-15 1997-05-13 Hewlett-Packard Company Ultrasonic transducer
US5630949A (en) * 1995-06-01 1997-05-20 Tfr Technologies, Inc. Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency
US5596239A (en) * 1995-06-29 1997-01-21 Motorola, Inc. Enhanced quality factor resonator
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US5696423A (en) * 1995-06-29 1997-12-09 Motorola, Inc. Temperature compenated resonator and method
US6135971A (en) * 1995-11-09 2000-10-24 Brigham And Women's Hospital Apparatus for deposition of ultrasound energy in body tissue
WO1998001297A1 (en) * 1996-07-09 1998-01-15 Panex Corporation Quartz construction
WO1998016956A1 (en) * 1996-10-17 1998-04-23 Nokia Mobile Phones Limited Method for fabricating fbars on glass substrates
US5873154A (en) * 1996-10-17 1999-02-23 Nokia Mobile Phones Limited Method for fabricating a resonator having an acoustic mirror
US5872493A (en) * 1997-03-13 1999-02-16 Nokia Mobile Phones, Ltd. Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
US6049159A (en) * 1997-10-06 2000-04-11 Albatros Technologies, Inc. Wideband acoustic transducer
US6050943A (en) 1997-10-14 2000-04-18 Guided Therapy Systems, Inc. Imaging, therapy, and temperature monitoring ultrasonic system
US6081171A (en) * 1998-04-08 2000-06-27 Nokia Mobile Phones Limited Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response
US5936150A (en) * 1998-04-13 1999-08-10 Rockwell Science Center, Llc Thin film resonant chemical sensor with resonant acoustic isolator
AU1128600A (en) 1998-11-20 2000-06-13 Joie P. Jones Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound
DE19928176A1 (de) * 1999-06-19 2001-01-04 Bosch Gmbh Robert Piezoaktor
US6307302B1 (en) * 1999-07-23 2001-10-23 Measurement Specialities, Inc. Ultrasonic transducer having impedance matching layer
US6452310B1 (en) * 2000-01-18 2002-09-17 Texas Instruments Incorporated Thin film resonator and method
US6441703B1 (en) * 2000-01-18 2002-08-27 Texas Instruments Incorporated Multiple frequency acoustic reflector array and monolithic cover for resonators and method
US7914453B2 (en) 2000-12-28 2011-03-29 Ardent Sound, Inc. Visual imaging system for ultrasonic probe
US6509813B2 (en) * 2001-01-16 2003-01-21 Nokia Mobile Phones Ltd. Bulk acoustic wave resonator with a conductive mirror
DE50202232D1 (de) * 2001-07-30 2005-03-17 Infineon Technologies Ag Piezoelektrische resonatorvorrichtung mit akustischem reflektor
US7092659B2 (en) 2003-12-31 2006-08-15 Samsung Electronics Co., Ltd. Discharge methods and systems in electrophotography
US7824348B2 (en) 2004-09-16 2010-11-02 Guided Therapy Systems, L.L.C. System and method for variable depth ultrasound treatment
US9011336B2 (en) * 2004-09-16 2015-04-21 Guided Therapy Systems, Llc Method and system for combined energy therapy profile
US7393325B2 (en) 2004-09-16 2008-07-01 Guided Therapy Systems, L.L.C. Method and system for ultrasound treatment with a multi-directional transducer
US10864385B2 (en) 2004-09-24 2020-12-15 Guided Therapy Systems, Llc Rejuvenating skin by heating tissue for cosmetic treatment of the face and body
US20120165848A1 (en) 2010-08-02 2012-06-28 Guided Therapy Systems, Llc System and method for treating cartilage
US7530958B2 (en) * 2004-09-24 2009-05-12 Guided Therapy Systems, Inc. Method and system for combined ultrasound treatment
US8535228B2 (en) 2004-10-06 2013-09-17 Guided Therapy Systems, Llc Method and system for noninvasive face lifts and deep tissue tightening
US8444562B2 (en) 2004-10-06 2013-05-21 Guided Therapy Systems, Llc System and method for treating muscle, tendon, ligament and cartilage tissue
US11883688B2 (en) 2004-10-06 2024-01-30 Guided Therapy Systems, Llc Energy based fat reduction
JP2008522642A (ja) 2004-10-06 2008-07-03 ガイデッド セラピー システムズ, エル.エル.シー. 美容強化のための方法およびシステム
US9827449B2 (en) 2004-10-06 2017-11-28 Guided Therapy Systems, L.L.C. Systems for treating skin laxity
US20060111744A1 (en) 2004-10-13 2006-05-25 Guided Therapy Systems, L.L.C. Method and system for treatment of sweat glands
JP5094402B2 (ja) 2004-10-06 2012-12-12 ガイデッド セラピー システムズ, エル.エル.シー. 超音波組織処理ための方法およびシステム
US11235179B2 (en) 2004-10-06 2022-02-01 Guided Therapy Systems, Llc Energy based skin gland treatment
US7758524B2 (en) 2004-10-06 2010-07-20 Guided Therapy Systems, L.L.C. Method and system for ultra-high frequency ultrasound treatment
US7530356B2 (en) * 2004-10-06 2009-05-12 Guided Therapy Systems, Inc. Method and system for noninvasive mastopexy
US8690779B2 (en) 2004-10-06 2014-04-08 Guided Therapy Systems, Llc Noninvasive aesthetic treatment for tightening tissue
US9694212B2 (en) 2004-10-06 2017-07-04 Guided Therapy Systems, Llc Method and system for ultrasound treatment of skin
US8133180B2 (en) 2004-10-06 2012-03-13 Guided Therapy Systems, L.L.C. Method and system for treating cellulite
US11724133B2 (en) 2004-10-07 2023-08-15 Guided Therapy Systems, Llc Ultrasound probe for treatment of skin
US11207548B2 (en) 2004-10-07 2021-12-28 Guided Therapy Systems, L.L.C. Ultrasound probe for treating skin laxity
WO2006100457A1 (en) * 2005-03-22 2006-09-28 Aviza Technology Limited A method of forming a bragg reflector stack
WO2006116480A2 (en) 2005-04-25 2006-11-02 Guided Therapy Systems, L.L.C. Method and system for enhancing computer peripheral saftey
US7701117B2 (en) * 2005-06-30 2010-04-20 Panasonic Corporation Acoustic resonator and filter
US7859170B2 (en) * 2005-08-08 2010-12-28 Koninklijke Philips Electronics N.V. Wide-bandwidth matrix transducer with polyethylene third matching layer
CN101238506A (zh) * 2005-08-08 2008-08-06 皇家飞利浦电子股份有限公司 具有聚乙烯第三匹配层的宽带矩阵换能器
US8270251B2 (en) 2005-12-05 2012-09-18 Xact Downhole Telemetry Inc. Acoustic isolator
DE102006023165B4 (de) * 2006-05-17 2008-02-14 Infineon Technologies Ag Verfahren zur Herstellung eines akustischen Spiegels aus alternierend angeordneten Schichten hoher und niedriger akustischer Impedanz
US9566454B2 (en) * 2006-09-18 2017-02-14 Guided Therapy Systems, Llc Method and sysem for non-ablative acne treatment and prevention
US20150174388A1 (en) 2007-05-07 2015-06-25 Guided Therapy Systems, Llc Methods and Systems for Ultrasound Assisted Delivery of a Medicant to Tissue
JP2010526589A (ja) 2007-05-07 2010-08-05 ガイデッド セラピー システムズ, エル.エル.シー. 音響エネルギーを使用してメディカントを調節するための方法およびシステム
FR2919050B1 (fr) * 2007-07-20 2012-03-23 Centre Nat Rech Scient Jauge de contrainte de type structure resonante acoustique et capteur d'au moins un parametre physique utilisant une telle jauge de contrainte.
KR20110091832A (ko) 2008-06-06 2011-08-12 얼테라, 인크 조직 이미징 및 치료 시스템
US12102473B2 (en) 2008-06-06 2024-10-01 Ulthera, Inc. Systems for ultrasound treatment
CA2748362A1 (en) 2008-12-24 2010-07-01 Michael H. Slayton Methods and systems for fat reduction and/or cellulite treatment
US8715186B2 (en) 2009-11-24 2014-05-06 Guided Therapy Systems, Llc Methods and systems for generating thermal bubbles for improved ultrasound imaging and therapy
US9504446B2 (en) 2010-08-02 2016-11-29 Guided Therapy Systems, Llc Systems and methods for coupling an ultrasound source to tissue
US8857438B2 (en) 2010-11-08 2014-10-14 Ulthera, Inc. Devices and methods for acoustic shielding
AT511330B1 (de) 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics Sensor für die messung von druck und/oder kraft
US20130012816A1 (en) 2011-07-10 2013-01-10 Guided Therapy Systems, Llc Methods and systems for controlling acoustic energy deposition into a medium
WO2013012641A1 (en) 2011-07-11 2013-01-24 Guided Therapy Systems, Llc Systems and methods for coupling an ultrasound source to tissue
US9263663B2 (en) 2012-04-13 2016-02-16 Ardent Sound, Inc. Method of making thick film transducer arrays
US9510802B2 (en) 2012-09-21 2016-12-06 Guided Therapy Systems, Llc Reflective ultrasound technology for dermatological treatments
CN104027893B (zh) 2013-03-08 2021-08-31 奥赛拉公司 用于多焦点超声治疗的装置和方法
WO2014146022A2 (en) 2013-03-15 2014-09-18 Guided Therapy Systems Llc Ultrasound treatment device and methods of use
WO2015160708A1 (en) 2014-04-18 2015-10-22 Ulthera, Inc. Band transducer ultrasound therapy
CN104568239B (zh) * 2014-12-09 2017-11-21 太原航空仪表有限公司 一种9mm压电激励小型振动筒压力传感器
CN107580721B (zh) * 2015-05-11 2021-02-19 测量专业股份有限公司 用于具有金属保护结构的超声波换能器的阻抗匹配层
ES2939604T3 (es) 2016-01-18 2023-04-25 Ulthera Inc Dispositivo de ultrasonidos compacto que tiene una matriz de ultrasonidos anular conectada eléctricamente de manera periférica a una placa de circuito impreso flexible
PL3981466T3 (pl) 2016-08-16 2023-11-20 Ulthera, Inc. Układy i sposoby dla ultradźwiękowych zabiegów kosmetycznych na skórze
TWI797235B (zh) 2018-01-26 2023-04-01 美商奧賽拉公司 用於多個維度中的同時多聚焦超音治療的系統和方法
US11944849B2 (en) 2018-02-20 2024-04-02 Ulthera, Inc. Systems and methods for combined cosmetic treatment of cellulite with ultrasound
US12377293B2 (en) 2019-07-15 2025-08-05 Ulthera, Inc. Systems and methods for measuring elasticity with imaging of ultrasound multi-focus shearwaves in multiple dimensions
US11725966B2 (en) * 2020-09-18 2023-08-15 Rosemount Inc. Multi-stage irreversible sensor coupling
US20240225859A1 (en) * 2023-01-10 2024-07-11 Kamil Podhola Bionic limb system
JP2025115838A (ja) * 2024-01-26 2025-08-07 株式会社D‐process バルク弾性波デバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2434255A (en) * 1948-01-13 Temperature compensated wave
US2430013A (en) * 1942-06-10 1947-11-04 Rca Corp Impedance matching means for mechanical waves
US3362501A (en) * 1966-09-15 1968-01-09 Magnaflux Corp Acoustic transmission section
US4016530A (en) * 1975-06-02 1977-04-05 Goll Jeffrey H Broadband electroacoustic converter
US3979565A (en) * 1975-08-11 1976-09-07 Westinghouse Electric Corporation Metal enclosed transducer assembly

Also Published As

Publication number Publication date
JPS5350991A (en) 1978-05-09
ATA778276A (de) 1979-04-15
DE2746712B2 (de) 1979-05-17
GB1577692A (en) 1980-10-29
DE2746712C3 (de) 1980-01-31
DE2746712A1 (de) 1978-04-20
US4166967A (en) 1979-09-04
AT353506B (de) 1979-11-26
JPS6217407B2 (cs) 1987-04-17

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