CH620545A5 - Method of manufacturing electrical resistors from a metal foil or film, application to obtaining thermoelectrical probes or strain gauges - Google Patents
Method of manufacturing electrical resistors from a metal foil or film, application to obtaining thermoelectrical probes or strain gauges Download PDFInfo
- Publication number
- CH620545A5 CH620545A5 CH701677A CH701677A CH620545A5 CH 620545 A5 CH620545 A5 CH 620545A5 CH 701677 A CH701677 A CH 701677A CH 701677 A CH701677 A CH 701677A CH 620545 A5 CH620545 A5 CH 620545A5
- Authority
- CH
- Switzerland
- Prior art keywords
- sheet
- mask
- metal
- ion beam
- alloy
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 48
- 239000002184 metal Substances 0.000 title claims description 48
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000000523 sample Substances 0.000 title claims description 14
- 239000011888 foil Substances 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 53
- 238000010884 ion-beam technique Methods 0.000 claims description 28
- 229910045601 alloy Inorganic materials 0.000 claims description 20
- 239000000956 alloy Substances 0.000 claims description 20
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- 230000003628 erosive effect Effects 0.000 claims description 13
- 150000002500 ions Chemical class 0.000 claims description 13
- 239000010408 film Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 5
- 230000008030 elimination Effects 0.000 claims description 4
- 238000003379 elimination reaction Methods 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910001260 Pt alloy Inorganic materials 0.000 claims description 3
- 229910001080 W alloy Inorganic materials 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- -1 argon ions Chemical class 0.000 claims description 2
- 239000000788 chromium alloy Substances 0.000 claims description 2
- 238000012886 linear function Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910000599 Cr alloy Inorganic materials 0.000 claims 1
- 238000005530 etching Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XTHPWXDJESJLNJ-UHFFFAOYSA-N sulfurochloridic acid Chemical compound OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
- H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
- H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/07—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by resistor foil bonding, e.g. cladding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7617269A FR2354617A1 (fr) | 1976-06-08 | 1976-06-08 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| FR7636052A FR2372499A2 (fr) | 1976-11-30 | 1976-11-30 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH620545A5 true CH620545A5 (en) | 1980-11-28 |
Family
ID=26219476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH701677A CH620545A5 (en) | 1976-06-08 | 1977-06-07 | Method of manufacturing electrical resistors from a metal foil or film, application to obtaining thermoelectrical probes or strain gauges |
Country Status (15)
| Country | Link |
|---|---|
| JP (1) | JPS5314400A (enExample) |
| AT (1) | AT353893B (enExample) |
| BE (1) | BE855171A (enExample) |
| CA (1) | CA1085062A (enExample) |
| CH (1) | CH620545A5 (enExample) |
| DD (1) | DD134469A5 (enExample) |
| DE (1) | DE2724679B2 (enExample) |
| DK (1) | DK144348C (enExample) |
| ES (1) | ES459573A1 (enExample) |
| GB (1) | GB1578830A (enExample) |
| IL (1) | IL52246A0 (enExample) |
| IT (1) | IT1078455B (enExample) |
| NL (1) | NL168075C (enExample) |
| NO (1) | NO146586C (enExample) |
| SE (1) | SE414557B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0016263B1 (de) * | 1979-03-21 | 1983-07-06 | BBC Brown Boveri AG | Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung |
| US4498071A (en) * | 1982-09-30 | 1985-02-05 | Dale Electronics, Inc. | High resistance film resistor |
| DE19909042A1 (de) * | 1999-03-02 | 2000-09-07 | Hbm Waegetechnik Gmbh | Dehnungsmeßstreifen für Meßgrößenaufnehmer |
| US10247619B2 (en) * | 2015-05-01 | 2019-04-02 | Vishay Measurements Group, Inc. | Resistance temperature detector with medium temperature coefficient and high linearity |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48104062A (enExample) * | 1972-02-17 | 1973-12-26 |
-
1977
- 1977-05-27 BE BE178024A patent/BE855171A/xx not_active IP Right Cessation
- 1977-05-30 GB GB22833/77A patent/GB1578830A/en not_active Expired
- 1977-06-01 DE DE2724679A patent/DE2724679B2/de not_active Ceased
- 1977-06-01 SE SE7706399A patent/SE414557B/xx not_active IP Right Cessation
- 1977-06-01 AT AT386477A patent/AT353893B/de not_active IP Right Cessation
- 1977-06-01 NO NO771916A patent/NO146586C/no unknown
- 1977-06-03 IT IT49714/77A patent/IT1078455B/it active
- 1977-06-03 IL IL52246A patent/IL52246A0/xx not_active IP Right Cessation
- 1977-06-07 CH CH701677A patent/CH620545A5/fr not_active IP Right Cessation
- 1977-06-07 ES ES459573A patent/ES459573A1/es not_active Expired
- 1977-06-07 CA CA279,987A patent/CA1085062A/en not_active Expired
- 1977-06-07 DK DK250577A patent/DK144348C/da not_active IP Right Cessation
- 1977-06-07 JP JP6633977A patent/JPS5314400A/ja active Granted
- 1977-06-07 NL NL7706265A patent/NL168075C/xx not_active IP Right Cessation
- 1977-06-07 DD DD77199348A patent/DD134469A5/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DK250577A (da) | 1977-12-09 |
| DE2724679A1 (de) | 1977-12-15 |
| SE7706399L (sv) | 1977-12-09 |
| DK144348B (da) | 1982-02-22 |
| DK144348C (da) | 1982-07-19 |
| ES459573A1 (es) | 1978-11-16 |
| IL52246A0 (en) | 1977-08-31 |
| DE2724679B2 (de) | 1980-02-07 |
| BE855171A (fr) | 1977-11-28 |
| NO146586C (no) | 1982-10-27 |
| NL168075C (nl) | 1982-02-16 |
| DD134469A5 (de) | 1979-02-28 |
| JPS5735564B2 (enExample) | 1982-07-29 |
| SE414557B (sv) | 1980-08-04 |
| GB1578830A (en) | 1980-11-12 |
| IT1078455B (it) | 1985-05-08 |
| NL168075B (nl) | 1981-09-16 |
| NO771916L (no) | 1977-12-09 |
| NO146586B (no) | 1982-07-19 |
| NL7706265A (nl) | 1977-12-12 |
| JPS5314400A (en) | 1978-02-08 |
| AT353893B (de) | 1979-12-10 |
| ATA386477A (de) | 1979-05-15 |
| CA1085062A (en) | 1980-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |