GB1578830A - Method of manufacturing electric resistors from metal sheets or films and the resistors obtained thereby - Google Patents
Method of manufacturing electric resistors from metal sheets or films and the resistors obtained thereby Download PDFInfo
- Publication number
- GB1578830A GB1578830A GB22833/77A GB2283377A GB1578830A GB 1578830 A GB1578830 A GB 1578830A GB 22833/77 A GB22833/77 A GB 22833/77A GB 2283377 A GB2283377 A GB 2283377A GB 1578830 A GB1578830 A GB 1578830A
- Authority
- GB
- United Kingdom
- Prior art keywords
- sheet
- metal
- mask
- alloy
- engraved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 62
- 239000002184 metal Substances 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 66
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 28
- 239000000523 sample Substances 0.000 claims abstract description 23
- 229910045601 alloy Inorganic materials 0.000 claims description 26
- 239000000956 alloy Substances 0.000 claims description 26
- 150000002500 ions Chemical class 0.000 claims description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 13
- 230000003628 erosive effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims description 6
- 229910001080 W alloy Inorganic materials 0.000 claims description 5
- -1 orthoquinone diazide derivatives Chemical class 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- ZONODCCBXBRQEZ-UHFFFAOYSA-N platinum tungsten Chemical compound [W].[Pt] ZONODCCBXBRQEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910000599 Cr alloy Inorganic materials 0.000 claims description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 3
- 239000000788 chromium alloy Substances 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 238000012886 linear function Methods 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 239000003153 chemical reaction reagent Substances 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 229910001260 Pt alloy Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000011888 foil Substances 0.000 abstract 5
- 239000010408 film Substances 0.000 description 17
- 238000003754 machining Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XTHPWXDJESJLNJ-UHFFFAOYSA-N sulfurochloridic acid Chemical compound OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
- H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
- H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/07—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by resistor foil bonding, e.g. cladding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7617269A FR2354617A1 (fr) | 1976-06-08 | 1976-06-08 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| FR7636052A FR2372499A2 (fr) | 1976-11-30 | 1976-11-30 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1578830A true GB1578830A (en) | 1980-11-12 |
Family
ID=26219476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB22833/77A Expired GB1578830A (en) | 1976-06-08 | 1977-05-30 | Method of manufacturing electric resistors from metal sheets or films and the resistors obtained thereby |
Country Status (15)
| Country | Link |
|---|---|
| JP (1) | JPS5314400A (enExample) |
| AT (1) | AT353893B (enExample) |
| BE (1) | BE855171A (enExample) |
| CA (1) | CA1085062A (enExample) |
| CH (1) | CH620545A5 (enExample) |
| DD (1) | DD134469A5 (enExample) |
| DE (1) | DE2724679B2 (enExample) |
| DK (1) | DK144348C (enExample) |
| ES (1) | ES459573A1 (enExample) |
| GB (1) | GB1578830A (enExample) |
| IL (1) | IL52246A0 (enExample) |
| IT (1) | IT1078455B (enExample) |
| NL (1) | NL168075C (enExample) |
| NO (1) | NO146586C (enExample) |
| SE (1) | SE414557B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016178938A1 (en) * | 2015-05-01 | 2016-11-10 | Vishay Measurements Group, Inc. | Resistance temperature detector with medium temperature coefficient and high linearity |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0016263B1 (de) * | 1979-03-21 | 1983-07-06 | BBC Brown Boveri AG | Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung |
| US4498071A (en) * | 1982-09-30 | 1985-02-05 | Dale Electronics, Inc. | High resistance film resistor |
| DE19909042A1 (de) * | 1999-03-02 | 2000-09-07 | Hbm Waegetechnik Gmbh | Dehnungsmeßstreifen für Meßgrößenaufnehmer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48104062A (enExample) * | 1972-02-17 | 1973-12-26 |
-
1977
- 1977-05-27 BE BE178024A patent/BE855171A/xx not_active IP Right Cessation
- 1977-05-30 GB GB22833/77A patent/GB1578830A/en not_active Expired
- 1977-06-01 DE DE2724679A patent/DE2724679B2/de not_active Ceased
- 1977-06-01 SE SE7706399A patent/SE414557B/xx not_active IP Right Cessation
- 1977-06-01 AT AT386477A patent/AT353893B/de not_active IP Right Cessation
- 1977-06-01 NO NO771916A patent/NO146586C/no unknown
- 1977-06-03 IT IT49714/77A patent/IT1078455B/it active
- 1977-06-03 IL IL52246A patent/IL52246A0/xx not_active IP Right Cessation
- 1977-06-07 CH CH701677A patent/CH620545A5/fr not_active IP Right Cessation
- 1977-06-07 ES ES459573A patent/ES459573A1/es not_active Expired
- 1977-06-07 CA CA279,987A patent/CA1085062A/en not_active Expired
- 1977-06-07 DK DK250577A patent/DK144348C/da not_active IP Right Cessation
- 1977-06-07 JP JP6633977A patent/JPS5314400A/ja active Granted
- 1977-06-07 NL NL7706265A patent/NL168075C/xx not_active IP Right Cessation
- 1977-06-07 DD DD77199348A patent/DD134469A5/xx not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016178938A1 (en) * | 2015-05-01 | 2016-11-10 | Vishay Measurements Group, Inc. | Resistance temperature detector with medium temperature coefficient and high linearity |
| CN107667277A (zh) * | 2015-05-01 | 2018-02-06 | 韦谢伊测量集团公司 | 具有中等温度系数和高线性度的电阻温度检测器 |
| US10247619B2 (en) | 2015-05-01 | 2019-04-02 | Vishay Measurements Group, Inc. | Resistance temperature detector with medium temperature coefficient and high linearity |
| EP3734245A1 (en) * | 2015-05-01 | 2020-11-04 | Vishay Measurements Group, Inc. | Resistance temperature detector with medium temperature coefficient and high linearity |
Also Published As
| Publication number | Publication date |
|---|---|
| DK250577A (da) | 1977-12-09 |
| DE2724679A1 (de) | 1977-12-15 |
| SE7706399L (sv) | 1977-12-09 |
| DK144348B (da) | 1982-02-22 |
| DK144348C (da) | 1982-07-19 |
| ES459573A1 (es) | 1978-11-16 |
| IL52246A0 (en) | 1977-08-31 |
| DE2724679B2 (de) | 1980-02-07 |
| BE855171A (fr) | 1977-11-28 |
| NO146586C (no) | 1982-10-27 |
| NL168075C (nl) | 1982-02-16 |
| DD134469A5 (de) | 1979-02-28 |
| CH620545A5 (en) | 1980-11-28 |
| JPS5735564B2 (enExample) | 1982-07-29 |
| SE414557B (sv) | 1980-08-04 |
| IT1078455B (it) | 1985-05-08 |
| NL168075B (nl) | 1981-09-16 |
| NO771916L (no) | 1977-12-09 |
| NO146586B (no) | 1982-07-19 |
| NL7706265A (nl) | 1977-12-12 |
| JPS5314400A (en) | 1978-02-08 |
| AT353893B (de) | 1979-12-10 |
| ATA386477A (de) | 1979-05-15 |
| CA1085062A (en) | 1980-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19930530 |