CH518006A - Method for manufacturing a semiconductor device with adjacent regions of different thickness, semiconductor device manufactured according to the method and using the same for converting mechanical forces into electrical signals - Google Patents
Method for manufacturing a semiconductor device with adjacent regions of different thickness, semiconductor device manufactured according to the method and using the same for converting mechanical forces into electrical signalsInfo
- Publication number
- CH518006A CH518006A CH1758969A CH1758969A CH518006A CH 518006 A CH518006 A CH 518006A CH 1758969 A CH1758969 A CH 1758969A CH 1758969 A CH1758969 A CH 1758969A CH 518006 A CH518006 A CH 518006A
- Authority
- CH
- Switzerland
- Prior art keywords
- semiconductor device
- manufacturing
- electrical signals
- manufactured according
- same
- Prior art date
Links
- 238000000034 method Methods 0.000 title 2
- 239000004065 semiconductor Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R21/00—Variable-resistance transducers
- H04R21/02—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/16—Mounting or tensioning of diaphragms or cones
- H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
- H04R7/22—Clamping rim of diaphragm or cone against seating
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Signal Processing (AREA)
- Acoustics & Sound (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Multimedia (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6817089A NL162254B (en) | 1968-11-29 | 1968-11-29 | SEMI-CONDUCTOR DEVICE FOR CONVERSION OF MECHANICAL VOLTAGES INTO ELECTRICAL SIGNALS AND METHOD OF MANUFACTURING THIS. |
Publications (1)
Publication Number | Publication Date |
---|---|
CH518006A true CH518006A (en) | 1972-01-15 |
Family
ID=19805282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1758969A CH518006A (en) | 1968-11-29 | 1969-11-26 | Method for manufacturing a semiconductor device with adjacent regions of different thickness, semiconductor device manufactured according to the method and using the same for converting mechanical forces into electrical signals |
Country Status (10)
Country | Link |
---|---|
AT (1) | AT316894B (en) |
BE (1) | BE742331A (en) |
BR (1) | BR6914557D0 (en) |
CH (1) | CH518006A (en) |
DE (1) | DE1959527C3 (en) |
ES (2) | ES373779A1 (en) |
FR (1) | FR2024961A1 (en) |
GB (1) | GB1295650A (en) |
NL (1) | NL162254B (en) |
SE (2) | SE384437B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4071838A (en) | 1976-02-09 | 1978-01-31 | Diax Corporation | Solid state force transducer and method of making same |
US4191057A (en) * | 1978-06-28 | 1980-03-04 | Gould Inc. | Inversion layer sprain gauge |
DE2841312C2 (en) * | 1978-09-22 | 1985-06-05 | Robert Bosch Gmbh, 7000 Stuttgart | Monolithic semiconductor pressure sensor and process for its manufacture |
JPS5550668A (en) * | 1978-10-06 | 1980-04-12 | Hitachi Ltd | Semiconductor pressure converter |
IT1212404B (en) * | 1979-02-22 | 1989-11-22 | Rca Corp | METHOD OF A SINGLE ATTACK FOR THE FORMATION OF A MESA PRESENTING A MULTIPLE WALL. |
DE3874884T2 (en) * | 1988-04-21 | 1993-04-29 | Marelli Autronica | ELECTRICAL FORCE AND / OR DEFLECTION SENSOR, ESPECIALLY FOR USE AS A PRESSURE SENSOR. |
US4904978A (en) * | 1988-04-29 | 1990-02-27 | Solartron Electronics, Inc. | Mechanical sensor for high temperature environments |
JP2719448B2 (en) * | 1991-01-24 | 1998-02-25 | 三菱電機株式会社 | Semiconductor pressure detector |
WO2006023753A2 (en) * | 2004-08-20 | 2006-03-02 | Semitool, Inc. | System for thinning a semiconductor workpiece |
CN113555346B (en) * | 2020-08-21 | 2023-05-23 | 友达光电股份有限公司 | Circuit board and method for measuring strain amount of circuit board |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3270554A (en) * | 1961-01-04 | 1966-09-06 | Bell Telephone Labor Inc | Diffused layer transducers |
US3277698A (en) * | 1963-11-15 | 1966-10-11 | Bell Telephone Labor Inc | Stress sensing semiconductive devices |
NL153947B (en) * | 1967-02-25 | 1977-07-15 | Philips Nv | PROCEDURE FOR MANUFACTURING SEMICONDUCTOR DEVICES, USING A SELECTIVE ELECTROLYTIC ETCHING PROCESS AND OBTAINING SEMI-CONDUCTOR DEVICE BY APPLICATION OF THE PROCESS. |
BE711537A (en) * | 1968-03-01 | 1968-09-02 |
-
1968
- 1968-11-29 NL NL6817089A patent/NL162254B/en not_active IP Right Cessation
-
1969
- 1969-11-21 ES ES373779A patent/ES373779A1/en not_active Expired
- 1969-11-26 GB GB1295650D patent/GB1295650A/en not_active Expired
- 1969-11-26 AT AT1103969A patent/AT316894B/en not_active IP Right Cessation
- 1969-11-26 BR BR21455769A patent/BR6914557D0/en unknown
- 1969-11-26 CH CH1758969A patent/CH518006A/en not_active IP Right Cessation
- 1969-11-26 SE SE223173A patent/SE384437B/en unknown
- 1969-11-26 SE SE1625669A patent/SE363700B/xx unknown
- 1969-11-27 DE DE19691959527 patent/DE1959527C3/en not_active Expired
- 1969-11-27 BE BE742331D patent/BE742331A/xx not_active IP Right Cessation
- 1969-12-01 FR FR6941355A patent/FR2024961A1/fr not_active Withdrawn
-
1972
- 1972-03-16 ES ES400839A patent/ES400839A1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
BE742331A (en) | 1970-05-27 |
SE363700B (en) | 1974-01-28 |
SE384437B (en) | 1976-05-03 |
DE1959527A1 (en) | 1970-06-11 |
NL162254B (en) | 1979-11-15 |
DE1959527B2 (en) | 1981-03-19 |
ES373779A1 (en) | 1972-05-16 |
FR2024961A1 (en) | 1970-09-04 |
AT316894B (en) | 1974-07-25 |
DE1959527C3 (en) | 1981-12-10 |
GB1295650A (en) | 1972-11-08 |
NL6817089A (en) | 1970-06-02 |
BR6914557D0 (en) | 1973-01-02 |
ES400839A1 (en) | 1975-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |