CH505462A - Ionen-Getter-Vakuumpumpe - Google Patents
Ionen-Getter-VakuumpumpeInfo
- Publication number
- CH505462A CH505462A CH1207368A CH1207368A CH505462A CH 505462 A CH505462 A CH 505462A CH 1207368 A CH1207368 A CH 1207368A CH 1207368 A CH1207368 A CH 1207368A CH 505462 A CH505462 A CH 505462A
- Authority
- CH
- Switzerland
- Prior art keywords
- cathode
- discharge
- anode
- channel
- pump according
- Prior art date
Links
- 150000002500 ions Chemical class 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 20
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims 7
- 239000010406 cathode material Substances 0.000 description 18
- 238000005086 pumping Methods 0.000 description 18
- 229910052756 noble gas Inorganic materials 0.000 description 11
- 238000000889 atomisation Methods 0.000 description 8
- 150000002835 noble gases Chemical class 0.000 description 7
- 238000009304 pastoral farming Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 102000006391 Ion Pumps Human genes 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66263567A | 1967-08-23 | 1967-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH505462A true CH505462A (de) | 1971-03-31 |
Family
ID=24658515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1207368A CH505462A (de) | 1967-08-23 | 1968-08-12 | Ionen-Getter-Vakuumpumpe |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3460745A (enExample) |
| CH (1) | CH505462A (enExample) |
| DE (1) | DE1764782A1 (enExample) |
| FR (1) | FR1585970A (enExample) |
| GB (1) | GB1191223A (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3942546A (en) * | 1972-10-27 | 1976-03-09 | Continental Oil Company | Corrosion monitoring and composition-analytical apparatus |
| US4097195A (en) * | 1975-02-12 | 1978-06-27 | Varian Associates, Inc. | High vacuum pump |
| US4687417A (en) * | 1985-12-19 | 1987-08-18 | Hughes Aircraft Company | High voltage feedthrough for ion pump |
| US5655886A (en) * | 1995-06-06 | 1997-08-12 | Color Planar Displays, Inc. | Vacuum maintenance device for high vacuum chambers |
| US6004104A (en) * | 1997-07-14 | 1999-12-21 | Duniway Stockroom Corp. | Cathode structure for sputter ion pump |
| US6220821B1 (en) * | 1999-05-20 | 2001-04-24 | Kernco, Incorporated | Ion pump having protective mask components overlying the cathode elements |
| US20040062659A1 (en) * | 2002-07-12 | 2004-04-01 | Sinha Mahadeva P. | Ion pump with combined housing and cathode |
| DE102009040356A1 (de) | 2009-09-05 | 2011-03-17 | Schmidt, Linda | Elktrodenanordnung für eine Ionengetterpumpe |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| US9960025B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Cold-matter system having ion pump integrated with channel cell |
| US20150311048A1 (en) * | 2014-04-24 | 2015-10-29 | Honeywell International Inc. | Micro hybrid differential/triode ion pump |
| US10665437B2 (en) * | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10262845B2 (en) | 2015-02-10 | 2019-04-16 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10550829B2 (en) * | 2016-09-08 | 2020-02-04 | Edwards Vacuum Llc | Ion trajectory manipulation architecture in an ion pump |
| US10629417B1 (en) * | 2016-12-01 | 2020-04-21 | ColdQuanta, Inc. | Sputter ion pump with penning-trap current sensor |
| GB2627493A (en) * | 2023-02-24 | 2024-08-28 | Edwards Vacuum Llc | Ion pump and method of assembly |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2993638A (en) * | 1957-07-24 | 1961-07-25 | Varian Associates | Electrical vacuum pump apparatus and method |
| DE1228750B (de) * | 1961-04-01 | 1966-11-17 | Leybolds Nachfolger E | Zerstaeubungs-Ionengetterpumpe |
-
1967
- 1967-08-23 US US662635A patent/US3460745A/en not_active Expired - Lifetime
-
1968
- 1968-08-06 DE DE19681764782 patent/DE1764782A1/de active Pending
- 1968-08-12 CH CH1207368A patent/CH505462A/de not_active IP Right Cessation
- 1968-08-19 FR FR1585970D patent/FR1585970A/fr not_active Expired
- 1968-08-20 GB GB39741/68A patent/GB1191223A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1764782A1 (de) | 1971-11-11 |
| GB1191223A (en) | 1970-05-13 |
| FR1585970A (enExample) | 1970-02-06 |
| US3460745A (en) | 1969-08-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |