CH502000A - Verfahren zum Herstellen einer monolithischen Halbleiteranordnung - Google Patents
Verfahren zum Herstellen einer monolithischen HalbleiteranordnungInfo
- Publication number
- CH502000A CH502000A CH168269A CH168269A CH502000A CH 502000 A CH502000 A CH 502000A CH 168269 A CH168269 A CH 168269A CH 168269 A CH168269 A CH 168269A CH 502000 A CH502000 A CH 502000A
- Authority
- CH
- Switzerland
- Prior art keywords
- manufacturing
- semiconductor device
- monolithic semiconductor
- monolithic
- semiconductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
- H10D84/401—Combinations of FETs or IGBTs with BJTs
- H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
- H10D84/406—Combinations of FETs or IGBTs with vertical BJTs and with one or more of diodes, resistors or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/765—Making of isolation regions between components by field effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Bipolar Integrated Circuits (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70316568A | 1968-02-05 | 1968-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH502000A true CH502000A (de) | 1971-01-15 |
Family
ID=24824294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH168269A CH502000A (de) | 1968-02-05 | 1969-02-04 | Verfahren zum Herstellen einer monolithischen Halbleiteranordnung |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE726353A (pm) |
| CH (1) | CH502000A (pm) |
| DE (1) | DE1904503B2 (pm) |
| ES (1) | ES363184A1 (pm) |
| FR (1) | FR1600658A (pm) |
| IL (1) | IL31355A (pm) |
| NL (1) | NL6901819A (pm) |
-
1968
- 1968-12-31 IL IL31355A patent/IL31355A/xx unknown
- 1968-12-31 BE BE726353D patent/BE726353A/xx unknown
- 1968-12-31 FR FR1600658D patent/FR1600658A/fr not_active Expired
-
1969
- 1969-01-23 ES ES363184A patent/ES363184A1/es not_active Expired
- 1969-01-30 DE DE19691904503 patent/DE1904503B2/de active Pending
- 1969-02-04 CH CH168269A patent/CH502000A/de not_active IP Right Cessation
- 1969-02-05 NL NL6901819A patent/NL6901819A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR1600658A (pm) | 1970-07-27 |
| BE726353A (pm) | 1969-05-29 |
| DE1904503A1 (de) | 1969-11-27 |
| NL6901819A (pm) | 1969-08-07 |
| DE1904503B2 (de) | 1971-06-03 |
| IL31355A (en) | 1971-11-29 |
| IL31355A0 (en) | 1969-02-27 |
| ES363184A1 (es) | 1970-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |