CH491207A - Maskenloses Aufdampfverfahren - Google Patents
Maskenloses AufdampfverfahrenInfo
- Publication number
- CH491207A CH491207A CH763568A CH763568A CH491207A CH 491207 A CH491207 A CH 491207A CH 763568 A CH763568 A CH 763568A CH 763568 A CH763568 A CH 763568A CH 491207 A CH491207 A CH 491207A
- Authority
- CH
- Switzerland
- Prior art keywords
- maskless
- vapor deposition
- deposition process
- vapor
- maskless vapor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Electric Cables (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64201367A | 1967-05-29 | 1967-05-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH491207A true CH491207A (de) | 1970-05-31 |
Family
ID=24574805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH763568A CH491207A (de) | 1967-05-29 | 1968-05-22 | Maskenloses Aufdampfverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US3516855A (de) |
CH (1) | CH491207A (de) |
DE (1) | DE1765417A1 (de) |
FR (1) | FR1558881A (de) |
GB (1) | GB1209266A (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1800193A1 (de) * | 1968-10-01 | 1970-05-14 | Telefunken Patent | Verfahren zum Herstellen von Kontakten |
US4042006A (en) * | 1973-01-05 | 1977-08-16 | Siemens Aktiengesellschaft | Pyrolytic process for producing a band-shaped metal layer on a substrate |
FR2218652B1 (de) * | 1973-02-20 | 1976-09-10 | Thomson Csf | |
US3908183A (en) * | 1973-03-14 | 1975-09-23 | California Linear Circuits Inc | Combined ion implantation and kinetic transport deposition process |
US4024029A (en) * | 1974-10-17 | 1977-05-17 | National Research Development Corporation | Electrodeposition |
US4144066A (en) * | 1977-11-30 | 1979-03-13 | Ppg Industries, Inc. | Electron bombardment method for making stained glass photomasks |
DE2843990A1 (de) * | 1978-10-09 | 1980-04-24 | Siemens Ag | Verfahren zur erzeugung von strukturen auf halbleiteroberflaechen und/oder ionenimplantation in halbleiterkoerpern |
US4401686A (en) * | 1982-02-08 | 1983-08-30 | Raymond Iannetta | Printed circuit and method of forming same |
US4656314A (en) * | 1982-02-08 | 1987-04-07 | Industrial Science Associates | Printed circuit |
FR2537777A1 (fr) * | 1982-12-10 | 1984-06-15 | Commissariat Energie Atomique | Procede et dispositif d'implantation de particules dans un solide |
US4731539A (en) * | 1983-05-26 | 1988-03-15 | Plaur Corporation | Method and apparatus for introducing normally solid material into substrate surfaces |
US4520268A (en) * | 1983-05-26 | 1985-05-28 | Pauline Y. Lau | Method and apparatus for introducing normally solid materials into substrate surfaces |
JPS60182726A (ja) * | 1984-02-29 | 1985-09-18 | Seiko Instr & Electronics Ltd | パタ−ン膜形成方法 |
US4930439A (en) * | 1984-06-26 | 1990-06-05 | Seiko Instruments Inc. | Mask-repairing device |
US4876984A (en) * | 1987-06-12 | 1989-10-31 | Ricoh Company, Ltd. | Apparatus for forming a thin film |
GB8728399D0 (en) * | 1987-12-04 | 1988-01-13 | Secretary Trade Ind Brit | Deposition of materials to substrates |
GB2251631B (en) * | 1990-12-19 | 1994-10-12 | Mitsubishi Electric Corp | Thin-film forming apparatus |
US20070122997A1 (en) | 1998-02-19 | 2007-05-31 | Silicon Genesis Corporation | Controlled process and resulting device |
US6162705A (en) | 1997-05-12 | 2000-12-19 | Silicon Genesis Corporation | Controlled cleavage process and resulting device using beta annealing |
US6033974A (en) | 1997-05-12 | 2000-03-07 | Silicon Genesis Corporation | Method for controlled cleaving process |
US6027988A (en) * | 1997-05-28 | 2000-02-22 | The Regents Of The University Of California | Method of separating films from bulk substrates by plasma immersion ion implantation |
US6548382B1 (en) | 1997-07-18 | 2003-04-15 | Silicon Genesis Corporation | Gettering technique for wafers made using a controlled cleaving process |
US6291326B1 (en) | 1998-06-23 | 2001-09-18 | Silicon Genesis Corporation | Pre-semiconductor process implant and post-process film separation |
US6500732B1 (en) | 1999-08-10 | 2002-12-31 | Silicon Genesis Corporation | Cleaving process to fabricate multilayered substrates using low implantation doses |
US6263941B1 (en) | 1999-08-10 | 2001-07-24 | Silicon Genesis Corporation | Nozzle for cleaving substrates |
US8187377B2 (en) | 2002-10-04 | 2012-05-29 | Silicon Genesis Corporation | Non-contact etch annealing of strained layers |
US8993410B2 (en) | 2006-09-08 | 2015-03-31 | Silicon Genesis Corporation | Substrate cleaving under controlled stress conditions |
US8293619B2 (en) | 2008-08-28 | 2012-10-23 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled propagation |
US7811900B2 (en) | 2006-09-08 | 2010-10-12 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
US9362439B2 (en) | 2008-05-07 | 2016-06-07 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled shear region |
US8330126B2 (en) | 2008-08-25 | 2012-12-11 | Silicon Genesis Corporation | Race track configuration and method for wafering silicon solar substrates |
US8329557B2 (en) | 2009-05-13 | 2012-12-11 | Silicon Genesis Corporation | Techniques for forming thin films by implantation with reduced channeling |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117022A (en) * | 1960-09-06 | 1964-01-07 | Space Technhology Lab Inc | Deposition arrangement |
DE1298851B (de) * | 1963-12-02 | 1969-07-03 | Steigerwald | Verfahren zur Materialbearbeitung mittels Strahlungsenergie |
US3419487A (en) * | 1966-01-24 | 1968-12-31 | Dow Corning | Method of growing thin film semiconductors using an electron beam |
-
1967
- 1967-05-29 US US642013A patent/US3516855A/en not_active Expired - Lifetime
-
1968
- 1968-03-28 FR FR1558881D patent/FR1558881A/fr not_active Expired
- 1968-04-25 GB GB09634/68A patent/GB1209266A/en not_active Expired
- 1968-05-16 DE DE19681765417 patent/DE1765417A1/de active Pending
- 1968-05-22 CH CH763568A patent/CH491207A/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB1209266A (en) | 1970-10-21 |
US3516855A (en) | 1970-06-23 |
DE1765417A1 (de) | 1972-01-05 |
FR1558881A (de) | 1969-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH491207A (de) | Maskenloses Aufdampfverfahren | |
CS174800B2 (cs) | Způsob přípravy bis-stilbenových sloučenin | |
DK137232B (da) | Analogifremgangsmåde til fremstilling af phenylethanolaminer. | |
FI48727C (fi) | Menetelmä asetyyliguanidiinien valmistamiseksi. | |
CH506818A (de) | Abbildungsverfahren | |
CH512656A (fr) | Serrure | |
AT299008B (de) | Zylinderschlosz | |
FI49473C (fi) | Menetelmä tablettien päällystämiseksi. | |
NL156676B (nl) | Alkyleringswerkwijze. | |
AT287740B (de) | Kondenstopf | |
FR94682E (fr) | Procédé de photoélectropolymérisation. | |
FI791055A (fi) | Foerfarande foer framstaellning av 5-fenyl-1h-1,5-bensodiazepin-2,4-dioner | |
BR6898711D0 (pt) | Aparelho distribuidor | |
AT297482B (de) | Abbildungsverfahren | |
IT1056722B (it) | Composti eterocielici | |
DK119663B (da) | Analogifremgangsmåde til fremstilling af 2-benzolsulfonamidopyrimidinforbindelser. | |
NL160264C (nl) | Werkwijze ter bereiding van heterocyclische verbindingen. | |
CH523523A (de) | Abbildungsverfahren | |
NL143548B (nl) | Werkwijze ter bereiding van alfa-sinensal. | |
AT294502B (de) | Rohrleitungsverteiler | |
FR1485473A (fr) | Procédé de revêtement par diffusion de vapeur | |
CH456834A (de) | Vakuumventil | |
FI50879C (fi) | Menetelmä terapeuttisesti vaikuttavien substituoitujen 3-aminoasyyliam ino-tiofeenien valmistamiseksi. | |
DK117568B (da) | Analogifremgangsmåde til fremstilling af ftalazino-ftalazindioner. | |
FI49830C (fi) | Menetelmä bakteerienvastaisten 2-amino-3-karbamoyylikinoksaliini-di-N- oksidien valmistamiseksi. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |