CH434487A - Verfahren zur Herstellung von Feldeffekt-Transistoren mit isolierter Steuerelektrode - Google Patents
Verfahren zur Herstellung von Feldeffekt-Transistoren mit isolierter SteuerelektrodeInfo
- Publication number
- CH434487A CH434487A CH1195065A CH1195065A CH434487A CH 434487 A CH434487 A CH 434487A CH 1195065 A CH1195065 A CH 1195065A CH 1195065 A CH1195065 A CH 1195065A CH 434487 A CH434487 A CH 434487A
- Authority
- CH
- Switzerland
- Prior art keywords
- production
- field effect
- control electrode
- effect transistors
- insulated control
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/126—Power FETs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/91—Controlling charging state at semiconductor-insulator interface
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US392144A US3386163A (en) | 1964-08-26 | 1964-08-26 | Method for fabricating insulated-gate field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
CH434487A true CH434487A (de) | 1967-04-30 |
Family
ID=23549423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1195065A CH434487A (de) | 1964-08-26 | 1965-08-25 | Verfahren zur Herstellung von Feldeffekt-Transistoren mit isolierter Steuerelektrode |
Country Status (4)
Country | Link |
---|---|
US (1) | US3386163A (de) |
CH (1) | CH434487A (de) |
DE (1) | DE1514038C3 (de) |
GB (1) | GB1095412A (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3465209A (en) * | 1966-07-07 | 1969-09-02 | Rca Corp | Semiconductor devices and methods of manufacture thereof |
CH454279A (de) * | 1966-12-02 | 1968-04-15 | Bbc Brown Boveri & Cie | Halbleiterventil |
USRE28402E (en) * | 1967-01-13 | 1975-04-29 | Method for controlling semiconductor surface potential | |
US3767463A (en) * | 1967-01-13 | 1973-10-23 | Ibm | Method for controlling semiconductor surface potential |
US3502950A (en) * | 1967-06-20 | 1970-03-24 | Bell Telephone Labor Inc | Gate structure for insulated gate field effect transistor |
US3470610A (en) * | 1967-08-18 | 1969-10-07 | Conductron Corp | Method of producing a control system |
US3967310A (en) * | 1968-10-09 | 1976-06-29 | Hitachi, Ltd. | Semiconductor device having controlled surface charges by passivation films formed thereon |
US3663870A (en) * | 1968-11-13 | 1972-05-16 | Tokyo Shibaura Electric Co | Semiconductor device passivated with rare earth oxide layer |
US3590477A (en) * | 1968-12-19 | 1971-07-06 | Ibm | Method for fabricating insulated-gate field effect transistors having controlled operating characeristics |
JPS5126035B1 (de) * | 1970-06-11 | 1976-08-04 | ||
JPS5126036B1 (de) * | 1970-06-19 | 1976-08-04 | ||
US3706918A (en) * | 1970-10-05 | 1972-12-19 | Frank J Barone | Silicon-silicon dioxide interface of predetermined space charge polarity |
US3856587A (en) * | 1971-03-26 | 1974-12-24 | Co Yamazaki Kogyo Kk | Method of fabricating semiconductor memory device gate |
US4003071A (en) * | 1971-09-18 | 1977-01-11 | Fujitsu Ltd. | Method of manufacturing an insulated gate field effect transistor |
US3882530A (en) * | 1971-12-09 | 1975-05-06 | Us Government | Radiation hardening of mos devices by boron |
US3787251A (en) * | 1972-04-24 | 1974-01-22 | Signetics Corp | Mos semiconductor structure with increased field threshold and method for making the same |
US3849204A (en) * | 1973-06-29 | 1974-11-19 | Ibm | Process for the elimination of interface states in mios structures |
DE2452289A1 (de) * | 1974-11-04 | 1976-05-06 | Siemens Ag | Halbleiterbauelement |
US4161814A (en) * | 1975-12-08 | 1979-07-24 | Cornell Research Foundation, Inc. | Tunnel injection of minority carriers in semi-conductors |
US4116721A (en) * | 1977-11-25 | 1978-09-26 | International Business Machines Corporation | Gate charge neutralization for insulated gate field-effect transistors |
JP5460375B2 (ja) * | 2010-02-22 | 2014-04-02 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
US9761620B1 (en) * | 2016-09-19 | 2017-09-12 | Peter C. Salmon, Llc | Method and system for manufacturing using a programmable patterning structure |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE500536A (de) * | 1950-01-31 | |||
US2787564A (en) * | 1954-10-28 | 1957-04-02 | Bell Telephone Labor Inc | Forming semiconductive devices by ionic bombardment |
US2981646A (en) * | 1958-02-11 | 1961-04-25 | Sprague Electric Co | Process of forming barrier layers |
US3040218A (en) * | 1959-03-10 | 1962-06-19 | Hoffman Electronics Corp | Constant current devices |
NL267831A (de) * | 1960-08-17 | |||
US3183128A (en) * | 1962-06-11 | 1965-05-11 | Fairchild Camera Instr Co | Method of making field-effect transistors |
NL293292A (de) * | 1962-06-11 | |||
BE636316A (de) * | 1962-08-23 | 1900-01-01 | ||
US3177100A (en) * | 1963-09-09 | 1965-04-06 | Rca Corp | Depositing epitaxial layer of silicon from a vapor mixture of sih4 and h3 |
-
0
- GB GB1095412D patent/GB1095412A/en active Active
-
1964
- 1964-08-26 US US392144A patent/US3386163A/en not_active Expired - Lifetime
-
1965
- 1965-08-19 DE DE1514038A patent/DE1514038C3/de not_active Expired
- 1965-08-25 CH CH1195065A patent/CH434487A/de unknown
Also Published As
Publication number | Publication date |
---|---|
DE1514038A1 (de) | 1969-06-26 |
GB1095412A (de) | |
DE1514038C3 (de) | 1974-03-14 |
US3386163A (en) | 1968-06-04 |
DE1514038B2 (de) | 1972-09-07 |
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