CH415861A - Verfahren zur Herstellung dünnschichtiger Gitterstrukturen - Google Patents

Verfahren zur Herstellung dünnschichtiger Gitterstrukturen

Info

Publication number
CH415861A
CH415861A CH674863A CH674863A CH415861A CH 415861 A CH415861 A CH 415861A CH 674863 A CH674863 A CH 674863A CH 674863 A CH674863 A CH 674863A CH 415861 A CH415861 A CH 415861A
Authority
CH
Switzerland
Prior art keywords
thin
production
lattice structures
layer lattice
layer
Prior art date
Application number
CH674863A
Other languages
English (en)
Inventor
Eduard Thun Rudolf
Stanley Wajda Edward
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH415861A publication Critical patent/CH415861A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J19/00Details of vacuum tubes of the types covered by group H01J21/00
    • H01J19/28Non-electron-emitting electrodes; Screens
    • H01J19/30Non-electron-emitting electrodes; Screens characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/0001Electrodes and electrode systems suitable for discharge tubes or lamps
    • H01J2893/0012Constructional arrangements
    • H01J2893/0019Chemical composition and manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Insulating Bodies (AREA)
  • Bipolar Transistors (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
CH674863A 1962-06-01 1963-05-29 Verfahren zur Herstellung dünnschichtiger Gitterstrukturen CH415861A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19944962A 1962-06-01 1962-06-01
US199450A US3202543A (en) 1962-06-01 1962-06-01 Method of forming a thin film grid

Publications (1)

Publication Number Publication Date
CH415861A true CH415861A (de) 1966-06-30

Family

ID=26894786

Family Applications (2)

Application Number Title Priority Date Filing Date
CH663063A CH413114A (de) 1962-06-01 1963-05-28 Dünnschichtiges aktives Festkörperelement
CH674863A CH415861A (de) 1962-06-01 1963-05-29 Verfahren zur Herstellung dünnschichtiger Gitterstrukturen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CH663063A CH413114A (de) 1962-06-01 1963-05-28 Dünnschichtiges aktives Festkörperelement

Country Status (9)

Country Link
US (1) US3202543A (de)
BE (1) BE633151A (de)
CH (2) CH413114A (de)
DE (2) DE1244310B (de)
DK (1) DK126462B (de)
FR (2) FR1357559A (de)
GB (1) GB994241A (de)
NL (1) NL293391A (de)
SE (1) SE321990B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4022928A (en) * 1975-05-22 1977-05-10 Piwcyzk Bernhard P Vacuum deposition methods and masking structure
SU1005223A1 (ru) * 1980-05-16 1983-03-15 Ордена Трудового Красного Знамени Институт Радиотехники И Электроники Ан Ссср Полупроводниковое запоминающее устройство
US4978558A (en) * 1988-06-10 1990-12-18 United Technologies Corporation Method for applying diffusion coating masks
EP2276075A1 (de) * 2000-02-15 2011-01-19 OSRAM Opto Semiconductors GmbH Strahlung emittierendes Halbleiterbauelement und Verfahren zu dessen Herstellung
DE10006738C2 (de) * 2000-02-15 2002-01-17 Osram Opto Semiconductors Gmbh Lichtemittierendes Bauelement mit verbesserter Lichtauskopplung und Verfahren zu seiner Herstellung
DE20111659U1 (de) * 2000-05-23 2001-12-13 Osram Opto Semiconductors Gmbh Bauelement für die Optoelektronik
KR100831843B1 (ko) * 2006-11-07 2008-05-22 주식회사 실트론 금속층 위에 성장된 화합물 반도체 기판, 그 제조 방법 및이를 이용한 화합물 반도체 소자
EP2177644A1 (de) 2008-10-14 2010-04-21 Applied Materials, Inc. Beschichtung maskierter Substrate
CN110981479B (zh) * 2020-01-10 2022-03-01 陕西科技大学 一种高击穿的铁电陶瓷及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB500342A (en) * 1937-09-18 1939-02-07 British Thomson Houston Co Ltd Improvements relating to dry surface-contact electric rectifiers
GB500344A (en) * 1937-09-22 1939-02-07 British Thomson Houston Co Ltd Improvements in and relating to dry surface-contact electric rectifiers
CH307776A (de) * 1952-01-08 1955-06-15 Ericsson Telefon Ab L M Kontaktvorrichtung an einem Halbleiterelement.
US2815462A (en) * 1953-05-19 1957-12-03 Electronique Sa Soc Gen Method of forming a film supported a short distance from a surface and cathode-ray tube incorporating such film
US2906637A (en) * 1953-05-19 1959-09-29 Electronique Soc Gen Method of forming a film a short distance from a surface
FR1266933A (fr) * 1959-09-09 1961-07-17 Ass Elect Ind Perfectionnements aux dispositifs à semi-conducteurs

Also Published As

Publication number Publication date
DK126462B (da) 1973-07-16
NL293391A (de)
SE321990B (de) 1970-03-23
GB994241A (en) 1965-06-02
DE1246898B (de) 1967-08-10
DE1244310B (de) 1967-07-13
CH413114A (de) 1966-05-15
US3202543A (en) 1965-08-24
FR1357559A (fr) 1964-04-03
FR1357558A (fr) 1964-04-03
BE633151A (de)

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