CH406440A - Verfahren zur abschliessenden Formgebung von Übergängen zwischen Gebieten unterschiedlichen Leistungstyps in Halbleitersystemen - Google Patents

Verfahren zur abschliessenden Formgebung von Übergängen zwischen Gebieten unterschiedlichen Leistungstyps in Halbleitersystemen

Info

Publication number
CH406440A
CH406440A CH1180362A CH1180362A CH406440A CH 406440 A CH406440 A CH 406440A CH 1180362 A CH1180362 A CH 1180362A CH 1180362 A CH1180362 A CH 1180362A CH 406440 A CH406440 A CH 406440A
Authority
CH
Switzerland
Prior art keywords
transitions
areas
different performance
final shaping
semiconductor systems
Prior art date
Application number
CH1180362A
Other languages
English (en)
Inventor
Guenther Dr Kesel
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH406440A publication Critical patent/CH406440A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Weting (AREA)
CH1180362A 1961-11-22 1962-10-08 Verfahren zur abschliessenden Formgebung von Übergängen zwischen Gebieten unterschiedlichen Leistungstyps in Halbleitersystemen CH406440A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES76788A DE1212216B (de) 1961-11-22 1961-11-22 Verfahren zum elektrolytischen AEtzen der pn-UEbergaenge von Halbleiterbauelementen

Publications (1)

Publication Number Publication Date
CH406440A true CH406440A (de) 1966-01-31

Family

ID=7506366

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1180362A CH406440A (de) 1961-11-22 1962-10-08 Verfahren zur abschliessenden Formgebung von Übergängen zwischen Gebieten unterschiedlichen Leistungstyps in Halbleitersystemen

Country Status (6)

Country Link
CH (1) CH406440A (de)
DE (1) DE1212216B (de)
FR (1) FR1339892A (de)
GB (1) GB1017652A (de)
NL (2) NL137553C (de)
SE (1) SE307195B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374405A (en) * 1965-06-22 1968-03-19 Philco Ford Corp Semiconductive device and method of fabricating the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1275836A (fr) * 1959-12-11 1961-11-10 Thomson Houston Comp Francaise Dispositifs à semi-conducteur et méthode de fabrication

Also Published As

Publication number Publication date
SE307195B (de) 1968-12-23
FR1339892A (fr) 1963-10-11
NL284485A (de)
NL137553C (de)
GB1017652A (en) 1966-01-19
DE1212216B (de) 1966-03-10

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