CH380960A - Vorrichtung zur Halterung von stabförmigem Halbleitermaterial in Einrichtungen zum tiegelfreien Zonenschmelzen - Google Patents
Vorrichtung zur Halterung von stabförmigem Halbleitermaterial in Einrichtungen zum tiegelfreien ZonenschmelzenInfo
- Publication number
- CH380960A CH380960A CH1190360A CH1190360A CH380960A CH 380960 A CH380960 A CH 380960A CH 1190360 A CH1190360 A CH 1190360A CH 1190360 A CH1190360 A CH 1190360A CH 380960 A CH380960 A CH 380960A
- Authority
- CH
- Switzerland
- Prior art keywords
- crucible
- devices
- semiconductor material
- holding rod
- shaped semiconductor
- Prior art date
Links
- 239000000463 material Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000004857 zone melting Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/17—Socket type
- Y10T279/17213—Transversely oscillating jaws
- Y10T279/17222—Screw actuated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/18—Pivoted jaw
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/26—Chucks or sockets with centering means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Furnace Details (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES66491A DE1114171B (de) | 1959-12-31 | 1959-12-31 | Halterung fuer stabfoermiges Halbleitermaterial in Vorrichtungen zum tiegelfreien Zonenschmelzen |
Publications (1)
Publication Number | Publication Date |
---|---|
CH380960A true CH380960A (de) | 1964-08-15 |
Family
ID=7498855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1190360A CH380960A (de) | 1959-12-31 | 1960-10-25 | Vorrichtung zur Halterung von stabförmigem Halbleitermaterial in Einrichtungen zum tiegelfreien Zonenschmelzen |
Country Status (4)
Country | Link |
---|---|
US (1) | US3191924A (de) |
CH (1) | CH380960A (de) |
DE (1) | DE1114171B (de) |
GB (1) | GB911416A (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1265708B (de) * | 1965-11-30 | 1968-04-11 | Siemens Ag | Vorrichtung zum tiegelfreien Zonenschmelzen |
US3494742A (en) * | 1968-12-23 | 1970-02-10 | Western Electric Co | Apparatus for float zone melting fusible material |
DE2322969C3 (de) * | 1973-05-07 | 1980-10-16 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Haltern der Stabenden beim tiegelfreien Zonenschmelzen |
DE2529366A1 (de) * | 1975-07-01 | 1977-01-20 | Wacker Chemitronic | Vorrichtung zum stuetzen eines kristallinen stabes |
US4589667A (en) * | 1984-10-16 | 1986-05-20 | Hewlett-Packard Company | Vacuum compatible colleting spindle |
JP2617258B2 (ja) * | 1991-11-28 | 1997-06-04 | 信越半導体株式会社 | シリコン多結晶棒自重締付保持具 |
JP3402038B2 (ja) * | 1995-12-25 | 2003-04-28 | 信越半導体株式会社 | 単結晶引上げ装置 |
JP3874883B2 (ja) * | 1997-03-26 | 2007-01-31 | コマツ電子金属株式会社 | 単結晶引き上げ装置及び引き上げ方法 |
US8840723B2 (en) * | 2009-03-10 | 2014-09-23 | Mitsubishi Materials Corporation | Manufacturing apparatus of polycrystalline silicon |
DE202010002486U1 (de) * | 2009-03-31 | 2010-06-10 | Centrotherm Sitec Gmbh | Spann- und Kontaktierungsvorrichtung für Silizium-Dünnstäbe |
DE102014213628B3 (de) * | 2014-07-14 | 2015-10-22 | Wacker Chemie Ag | Halterung für Impflingskristalle und Siliciumstäbe sowie Verfahren zur Herstellung eines einkristallinen Siliciumstabes |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE471438A (de) * | 1946-04-04 | |||
US2667356A (en) * | 1952-03-29 | 1954-01-26 | Cons Machine Tool Corp | Hydraulic chuck |
NL89230C (de) * | 1952-12-17 | 1900-01-01 | ||
DE1061527B (de) * | 1953-02-14 | 1959-07-16 | Siemens Ag | Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken |
US2972525A (en) * | 1953-02-26 | 1961-02-21 | Siemens Ag | Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance |
US2750715A (en) * | 1953-04-21 | 1956-06-19 | Roy A Farnam | Steady rest and indicator gauge assembly for shaft grinder |
-
1959
- 1959-12-31 DE DES66491A patent/DE1114171B/de active Pending
-
1960
- 1960-10-25 CH CH1190360A patent/CH380960A/de unknown
- 1960-12-28 US US78904A patent/US3191924A/en not_active Expired - Lifetime
-
1961
- 1961-01-02 GB GB144/61A patent/GB911416A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3191924A (en) | 1965-06-29 |
DE1114171B (de) | 1961-09-28 |
GB911416A (en) | 1962-11-28 |
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