CA997255A - Apparatus for growing single crystals - Google Patents

Apparatus for growing single crystals

Info

Publication number
CA997255A
CA997255A CA152,978A CA152978A CA997255A CA 997255 A CA997255 A CA 997255A CA 152978 A CA152978 A CA 152978A CA 997255 A CA997255 A CA 997255A
Authority
CA
Canada
Prior art keywords
single crystals
growing single
growing
crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA152,978A
Other languages
English (en)
Other versions
CA152978S (en
Inventor
Reinhard Kersten
Ulrich Gross
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA997255A publication Critical patent/CA997255A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CA152,978A 1971-10-01 1972-10-02 Apparatus for growing single crystals Expired CA997255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712149093 DE2149093C3 (de) 1971-10-01 1971-10-01 Vorrichtung zur Züchtung von Einkristallen durch Ziehen aus einer Schmelze

Publications (1)

Publication Number Publication Date
CA997255A true CA997255A (en) 1976-09-21

Family

ID=5821216

Family Applications (1)

Application Number Title Priority Date Filing Date
CA152,978A Expired CA997255A (en) 1971-10-01 1972-10-02 Apparatus for growing single crystals

Country Status (10)

Country Link
JP (2) JPS5238512B2 (ja)
AU (2) AU4716772A (ja)
BE (2) BE789553A (ja)
CA (1) CA997255A (ja)
CH (2) CH559062A5 (ja)
DE (1) DE2149093C3 (ja)
FR (2) FR2154776B1 (ja)
GB (2) GB1400593A (ja)
IT (2) IT967978B (ja)
NL (2) NL7213119A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5485802A (en) * 1993-01-16 1996-01-23 Leybold Aktiengesellschaft Method and apparatus for pulling monocrystals from a melt

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612863B2 (ja) * 1973-07-11 1981-03-25
JPS6033299A (ja) * 1983-07-29 1985-02-20 Toshiba Corp 単結晶の製造装置
JPS63307186A (ja) * 1987-06-05 1988-12-14 Shin Etsu Handotai Co Ltd 晶出結晶径制御装置
FI87660C (fi) * 1988-03-03 1993-02-10 Leybold Ag Foerfarande och anordning foer dragning av monokristaller
FI911857A (fi) * 1990-04-27 1991-10-28 Nippon Kokan Kk Foerfarande och apparat foer kontroll av diametern hos en enskild silikonkristall.
CN115178756B (zh) * 2022-07-15 2023-05-12 中国科学院重庆绿色智能技术研究院 一种激光选区熔化瞬态熔池特征高分辨率成像装置及方法
CN115613121A (zh) * 2022-11-18 2023-01-17 浙江晶盛机电股份有限公司 晶体生产设备及籽晶的断裂方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5485802A (en) * 1993-01-16 1996-01-23 Leybold Aktiengesellschaft Method and apparatus for pulling monocrystals from a melt

Also Published As

Publication number Publication date
NL7213119A (ja) 1973-04-03
AU4716872A (en) 1974-04-04
DE2149093C3 (de) 1975-07-24
CH558206A (de) 1975-01-31
BE789553A (fr) 1973-03-29
DE2149093A1 (de) 1973-04-05
JPS4842981A (ja) 1973-06-21
FR2154777A1 (ja) 1973-05-11
IT967978B (it) 1974-03-11
NL7213118A (ja) 1973-04-03
CH559062A5 (ja) 1975-02-28
DE2149093B2 (de) 1974-12-05
FR2154776B1 (ja) 1976-08-20
AU4716772A (en) 1974-04-04
FR2154776A1 (ja) 1973-05-11
FR2154777B1 (ja) 1976-08-20
IT967977B (it) 1974-03-11
JPS5238512B2 (ja) 1977-09-29
JPS533757B2 (ja) 1978-02-09
BE789554A (fr) 1973-03-29
GB1405447A (en) 1975-09-10
GB1400593A (en) 1975-07-16
JPS4842980A (ja) 1973-06-21

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