CA970077A - Method of manufacturing an fet wherein part of a sunken oxide layer is removed - Google Patents
Method of manufacturing an fet wherein part of a sunken oxide layer is removedInfo
- Publication number
- CA970077A CA970077A CA157,158A CA157158A CA970077A CA 970077 A CA970077 A CA 970077A CA 157158 A CA157158 A CA 157158A CA 970077 A CA970077 A CA 970077A
- Authority
- CA
- Canada
- Prior art keywords
- fet
- manufacturing
- oxide layer
- sunken oxide
- sunken
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/891—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D44/00, e.g. integration of charge-coupled devices [CCD] or charge injection devices [CID
- H10D84/895—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D44/00, e.g. integration of charge-coupled devices [CCD] or charge injection devices [CID comprising bucket-brigade charge-coupled devices
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is AC
- G05F1/24—Regulating voltage or current wherein the variable actually regulated by the final control device is AC using bucking or boosting transformers as final control devices
- G05F1/247—Regulating voltage or current wherein the variable actually regulated by the final control device is AC using bucking or boosting transformers as final control devices with motor in control circuit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H10P76/40—
-
- H10W10/0125—
-
- H10W10/13—
-
- H10D64/01336—
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Radar, Positioning & Navigation (AREA)
- Electromagnetism (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7116182A NL7116182A (enExample) | 1971-11-25 | 1971-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA970077A true CA970077A (en) | 1975-06-24 |
Family
ID=19814543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA157,158A Expired CA970077A (en) | 1971-11-25 | 1972-11-22 | Method of manufacturing an fet wherein part of a sunken oxide layer is removed |
Country Status (11)
| Country | Link |
|---|---|
| JP (1) | JPS4861078A (enExample) |
| AR (1) | AR194520A1 (enExample) |
| AT (1) | ATA994272A (enExample) |
| AU (1) | AU469642B2 (enExample) |
| CA (1) | CA970077A (enExample) |
| DE (1) | DE2254821A1 (enExample) |
| ES (1) | ES408908A1 (enExample) |
| FR (1) | FR2161003B1 (enExample) |
| GB (1) | GB1409095A (enExample) |
| IT (1) | IT975824B (enExample) |
| NL (1) | NL7116182A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4142199A (en) * | 1977-06-24 | 1979-02-27 | International Business Machines Corporation | Bucket brigade device and process |
| JPS5534493A (en) * | 1978-08-31 | 1980-03-11 | Ibm | Bucket brigade cell |
-
1971
- 1971-11-25 NL NL7116182A patent/NL7116182A/xx unknown
-
1972
- 1972-11-09 DE DE2254821A patent/DE2254821A1/de not_active Ceased
- 1972-11-15 AR AR245155A patent/AR194520A1/es active
- 1972-11-21 AU AU49080/72A patent/AU469642B2/en not_active Expired
- 1972-11-22 CA CA157,158A patent/CA970077A/en not_active Expired
- 1972-11-22 GB GB5395172A patent/GB1409095A/en not_active Expired
- 1972-11-22 IT IT70676/72A patent/IT975824B/it active
- 1972-11-22 AT AT994272A patent/ATA994272A/de not_active Application Discontinuation
- 1972-11-22 JP JP47116740A patent/JPS4861078A/ja active Pending
- 1972-11-23 FR FR7241650A patent/FR2161003B1/fr not_active Expired
- 1972-11-23 ES ES408908A patent/ES408908A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| AR194520A1 (es) | 1973-07-23 |
| AU469642B2 (en) | 1976-02-19 |
| AU4908072A (en) | 1974-05-23 |
| NL7116182A (enExample) | 1973-05-29 |
| GB1409095A (en) | 1975-10-08 |
| FR2161003B1 (enExample) | 1978-02-03 |
| JPS4861078A (enExample) | 1973-08-27 |
| IT975824B (it) | 1974-08-10 |
| ES408908A1 (es) | 1975-10-16 |
| DE2254821A1 (de) | 1973-05-30 |
| FR2161003A1 (enExample) | 1973-07-06 |
| ATA994272A (de) | 1975-08-15 |
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