CA969756A - Precision measuring apparatus with guides in pneumostatic bearings - Google Patents

Precision measuring apparatus with guides in pneumostatic bearings

Info

Publication number
CA969756A
CA969756A CA146,332A CA146332A CA969756A CA 969756 A CA969756 A CA 969756A CA 146332 A CA146332 A CA 146332A CA 969756 A CA969756 A CA 969756A
Authority
CA
Canada
Prior art keywords
guides
measuring apparatus
precision measuring
pneumostatic
bearings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA146,332A
Other languages
English (en)
Other versions
CA146332S (en
Inventor
Carlo Guerci
Elio Pagella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telecom Italia SpA
Original Assignee
Ing C Olivetti and C SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ing C Olivetti and C SpA filed Critical Ing C Olivetti and C SpA
Application granted granted Critical
Publication of CA969756A publication Critical patent/CA969756A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0028—Arrangements compensating weight or flexion on parts of the machine by actively reacting to a change of the configuration of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0016—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to weight
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49195—Slide, guideway, robot arm deviation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49271—Air bearing slide, hydraulic, electromagnetic bearing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/02—Air

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
CA146,332A 1971-07-09 1972-07-05 Precision measuring apparatus with guides in pneumostatic bearings Expired CA969756A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT6933971 1971-07-09

Publications (1)

Publication Number Publication Date
CA969756A true CA969756A (en) 1975-06-24

Family

ID=11311910

Family Applications (1)

Application Number Title Priority Date Filing Date
CA146,332A Expired CA969756A (en) 1971-07-09 1972-07-05 Precision measuring apparatus with guides in pneumostatic bearings

Country Status (8)

Country Link
US (1) US3831283A (de)
CA (1) CA969756A (de)
CH (1) CH537570A (de)
DD (1) DD101974A5 (de)
DE (1) DE2231644A1 (de)
FR (1) FR2145931A5 (de)
GB (1) GB1393035A (de)
SU (1) SU518161A3 (de)

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DE2724858A1 (de) * 1977-06-02 1978-12-07 Heidenhain Gmbh Dr Johannes Laengenmessgeraet mit korrektureinrichtung
JPS5478581A (en) * 1977-12-05 1979-06-22 Toshiba Mach Co Ltd Centering method in lathe and its device
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
US4213244A (en) * 1978-05-08 1980-07-22 The Bendix Corporation Coordinate measuring machine having a failsafe protection system
US4207680A (en) * 1978-05-08 1980-06-17 The Bendix Corporation Coordinate measuring machine having an air counterbalance system
US4209910A (en) * 1978-05-12 1980-07-01 Gunther Rathsack Ingenieurtechnik Auxiliary device for vertical turning and boring machine tools
DE2941412A1 (de) * 1979-10-12 1981-04-23 Schneider & Kern, 7119 Niedernhall Messmaschine, insbesondere zur laengenmessung
DE3024455C2 (de) * 1980-06-28 1986-10-09 Daimler-Benz Ag, 7000 Stuttgart Mehrkoordinaten-Meßgerät
GB2099151B (en) * 1981-02-14 1985-09-04 Lk Tool Co Ltd Measuring machine
IL63856A (en) * 1981-09-16 1984-12-31 Beta Eng & Dev Ltd Three dimensional digitizer for digitizing the surface contour of a solid body
DE3243088C2 (de) * 1981-11-25 1986-08-07 Mitutoyo Mfg. Co., Ltd., Tokio/Tokyo Koordinatenmeßmaschine
GB2112140B (en) * 1981-12-16 1985-08-07 Mauser Werke Oberndorf Coordinate measuring machine
DE3150977A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und einrichtung zur ermittlung und korrektur von fuehrungsfehlern
DE3150978A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Messmaschine in portalbauweise
US4507868A (en) * 1982-08-30 1985-04-02 The Warner & Swasey Company Coordinate measuring machine with a self aligning pneumatic counterbalance
JPS5978533A (ja) * 1982-10-27 1984-05-07 Canon Inc 露光装置
DE3336002C2 (de) * 1983-10-04 1985-11-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Führungsvorrichtung
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JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4882847A (en) * 1989-02-03 1989-11-28 The Warner And Swasey Company Coordinate measuring machine with improved carriage way arrangement
US4887360A (en) * 1989-02-03 1989-12-19 The Warner & Swasey Company Way bearing arrangement for a horizontal arm coordinate measuring machine
US4958438A (en) * 1989-03-30 1990-09-25 The Warner & Swasey Company Rotary table for a coordinate measuring machine and method of determining the axis of table rotation
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
SE468727B (sv) * 1991-07-09 1993-03-08 Johansson Ab C E Maskinstativ, saerskilt foer s k koordinatmaetmaskiner, jaemte saett att utfoera maskinstativet
DE4126532A1 (de) * 1991-08-10 1993-02-11 Plath Hans Henning Dr Ing Koordinatenmessgeraet
IT1257067B (it) * 1992-07-31 1996-01-05 Dea Spa Macchina di misura.
KR0141161B1 (ko) * 1995-03-20 1998-07-01 이대원 회전 테이블을 구비한 스테이지 장치 및 스테이지 장치의 구동 방법
IT1289550B1 (it) * 1996-12-31 1998-10-15 Inpeco S R L Processo per la fabbricazione di un basamento per lo scorrimento a sostentamento pneumostatico di carri mobili,particolarmente
JP2004142035A (ja) * 2002-10-25 2004-05-20 Mori Seiki Co Ltd 工作機械
FR2853056B1 (fr) * 2003-03-28 2005-07-15 Snecma Moteurs Dispositif et procede de mesure de profil
SE527899C2 (sv) * 2004-12-15 2006-07-04 Hexagon Metrology Ab Koordinatmätmaskin med inbördes förflyttbara ben
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US7421795B2 (en) * 2006-08-04 2008-09-09 Seagate Technology Llc Sapphire alignment fixture
US7885786B2 (en) * 2008-10-15 2011-02-08 Seagate Technology Llc Sleeve cone quality measurement system and method
DE102009008722A1 (de) * 2009-02-06 2010-08-19 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt sowie ein Tastkopfsystem für ein solches Koordinatenmessgerät
CN102012204B (zh) * 2010-11-24 2011-12-21 南京工业大学 数控静压转台的精度检测装置及方法
US9435766B2 (en) * 2013-12-05 2016-09-06 General Electric Company System and method for inspection of components
WO2018193229A1 (en) 2017-04-19 2018-10-25 Renishaw Plc Positioning apparatus
EP3392611B1 (de) 2017-04-19 2019-12-25 Renishaw PLC Kontaminationsfalle
EP3392610B1 (de) 2017-04-19 2022-02-23 Renishaw PLC Lagerbefestigung
US10826369B2 (en) 2017-04-19 2020-11-03 Renishaw Plc Positioning apparatus with relatively moveable members and a linear motor mounted thereon
JP7199375B2 (ja) 2017-04-19 2023-01-05 レニショウ パブリック リミテッド カンパニー ベアリング構成部
CN109551308B (zh) * 2018-12-04 2020-08-11 中国航发贵州红林航空动力控制科技有限公司 一种高精度阀组件的加工方法
CN111256558B (zh) * 2020-02-27 2021-08-06 浙江博阳压缩机有限公司 一种用于气缸滑片槽的综合检测装置及方法

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US3639993A (en) * 1970-02-09 1972-02-08 Dea Spa Improvements relating to machines and apparatus having a support for guiding a movable member

Also Published As

Publication number Publication date
DE2231644A1 (de) 1973-01-18
SU518161A3 (ru) 1976-06-15
FR2145931A5 (de) 1973-02-23
CH537570A (it) 1973-05-31
GB1393035A (en) 1975-05-07
DD101974A5 (de) 1973-11-20
US3831283A (en) 1974-08-27

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