CA954736A - Photo etching method and apparatus - Google Patents
Photo etching method and apparatusInfo
- Publication number
- CA954736A CA954736A CA121,139A CA121139A CA954736A CA 954736 A CA954736 A CA 954736A CA 121139 A CA121139 A CA 121139A CA 954736 A CA954736 A CA 954736A
- Authority
- CA
- Canada
- Prior art keywords
- etching method
- photo etching
- photo
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/24—Curved surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0393—Flexible materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/15—Position of the PCB during processing
- H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Lead Frames For Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7539770A | 1970-09-25 | 1970-09-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA954736A true CA954736A (en) | 1974-09-17 |
Family
ID=22125455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA121,139A Expired CA954736A (en) | 1970-09-25 | 1971-08-23 | Photo etching method and apparatus |
Country Status (14)
Country | Link |
---|---|
US (1) | US3712735A (xx) |
AR (1) | AR193046A1 (xx) |
AT (1) | AT314563B (xx) |
AU (1) | AU459847B2 (xx) |
BE (1) | BE772895A (xx) |
BR (1) | BR7106267D0 (xx) |
CA (1) | CA954736A (xx) |
DE (1) | DE2145849A1 (xx) |
ES (1) | ES395232A1 (xx) |
FR (1) | FR2108569A5 (xx) |
GB (1) | GB1329214A (xx) |
IT (1) | IT938800B (xx) |
NL (1) | NL7112870A (xx) |
SE (1) | SE372111B (xx) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR8302994A (pt) * | 1982-06-11 | 1984-01-31 | Du Pont | Processo de exposicao para formacao de imagem a radiacao actinica |
AU560520B2 (en) * | 1982-10-11 | 1987-04-09 | Fisher & Paykel Appliances Limited | Improvements in or relating to clothes driers |
EP0136534B1 (en) * | 1983-09-06 | 1990-06-13 | Energy Conversion Devices, Inc. | Method of forming a large surface area integrated circuit |
US5250758A (en) * | 1991-05-21 | 1993-10-05 | Elf Technologies, Inc. | Methods and systems of preparing extended length flexible harnesses |
CN1201532A (zh) * | 1995-09-29 | 1998-12-09 | 纽罗姆技术股份有限公司 | 数字光学媒体录制和复制系统 |
WO1997026570A1 (en) * | 1996-01-16 | 1997-07-24 | British Telecommunications Public Limited Company | Method and device for recording a refractive index pattern in an optical medium |
CN100435331C (zh) * | 2003-01-17 | 2008-11-19 | 迈克罗泰克微技术有限公司 | 微系统的制造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US607648A (en) * | 1898-07-19 | schwarz | ||
US1299792A (en) * | 1917-10-25 | 1919-04-08 | Iwan Serrurier | Picture-projecting apparatus. |
US1725944A (en) * | 1924-05-28 | 1929-08-27 | Spoor Thompson Machine Company | Film printer |
US1843172A (en) * | 1927-07-13 | 1932-02-02 | Freeman H Owens | Printing apparatus |
US2041478A (en) * | 1933-06-03 | 1936-05-19 | Niederle Max | Means for light or photo printing |
US2835180A (en) * | 1954-07-01 | 1958-05-20 | Eastman Kodak Co | Continuous printer for sound-color film |
US2928327A (en) * | 1955-09-01 | 1960-03-15 | Eastman Kodak Co | Continuous photographic printer |
DE1238775B (de) * | 1964-08-01 | 1967-04-13 | Werner Moll Fa | Rundbelichter fuer Fotopolymer-Druckplatten |
US3323434A (en) * | 1964-09-24 | 1967-06-06 | Metro Kalvar Inc | Apparatus for sound and image printing of irradiation sensitive film |
US3479120A (en) * | 1964-10-05 | 1969-11-18 | Columbia Broadcasting Syst Inc | Apparatus for duplicating reelable film |
US3313223A (en) * | 1965-03-24 | 1967-04-11 | Buckbee Mears Co | Endless belt film for making photoprinted reproductions |
US3531200A (en) * | 1966-11-30 | 1970-09-29 | Werner Moll | Circular exposing device |
DE1572298A1 (de) * | 1967-04-07 | 1970-02-19 | Gerhard Ritzerfeld | Thermokopiergeraet mit einem infrarotstrahlendurchlaessigen Hohlzylinder |
-
1970
- 1970-09-25 US US00075397A patent/US3712735A/en not_active Expired - Lifetime
-
1971
- 1971-08-23 CA CA121,139A patent/CA954736A/en not_active Expired
- 1971-08-24 GB GB3975571A patent/GB1329214A/en not_active Expired
- 1971-09-14 DE DE19712145849 patent/DE2145849A1/de active Pending
- 1971-09-15 AU AU33472/71A patent/AU459847B2/en not_active Expired
- 1971-09-16 AT AT805771A patent/AT314563B/de not_active IP Right Cessation
- 1971-09-20 ES ES395232A patent/ES395232A1/es not_active Expired
- 1971-09-20 NL NL7112870A patent/NL7112870A/xx unknown
- 1971-09-21 BE BE772895A patent/BE772895A/xx unknown
- 1971-09-21 SE SE7111929A patent/SE372111B/xx unknown
- 1971-09-22 IT IT28947/71A patent/IT938800B/it active
- 1971-09-22 BR BR6267/71A patent/BR7106267D0/pt unknown
- 1971-09-23 AR AR238129A patent/AR193046A1/es active
- 1971-09-24 FR FR7134547A patent/FR2108569A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2145849A1 (de) | 1972-03-30 |
BR7106267D0 (pt) | 1973-07-03 |
US3712735A (en) | 1973-01-23 |
SE372111B (xx) | 1974-12-09 |
ES395232A1 (es) | 1974-11-01 |
AT314563B (de) | 1974-04-10 |
FR2108569A5 (xx) | 1972-05-19 |
AU459847B2 (en) | 1975-04-10 |
NL7112870A (xx) | 1972-03-28 |
AR193046A1 (es) | 1973-03-30 |
GB1329214A (en) | 1973-09-05 |
AU3347271A (en) | 1973-03-22 |
BE772895A (fr) | 1972-03-21 |
IT938800B (it) | 1973-02-10 |
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