CA954736A - Photo etching method and apparatus - Google Patents

Photo etching method and apparatus

Info

Publication number
CA954736A
CA954736A CA121,139A CA121139A CA954736A CA 954736 A CA954736 A CA 954736A CA 121139 A CA121139 A CA 121139A CA 954736 A CA954736 A CA 954736A
Authority
CA
Canada
Prior art keywords
etching method
photo etching
photo
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA121,139A
Other versions
CA121139S (en
Inventor
Harold A. Kerstetter
Ray N. Shaak
James R. Hildebrand
J.A. Crumley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TE Connectivity Corp
Original Assignee
AMP Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AMP Inc filed Critical AMP Inc
Application granted granted Critical
Publication of CA954736A publication Critical patent/CA954736A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
CA121,139A 1970-09-25 1971-08-23 Photo etching method and apparatus Expired CA954736A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7539770A 1970-09-25 1970-09-25

Publications (1)

Publication Number Publication Date
CA954736A true CA954736A (en) 1974-09-17

Family

ID=22125455

Family Applications (1)

Application Number Title Priority Date Filing Date
CA121,139A Expired CA954736A (en) 1970-09-25 1971-08-23 Photo etching method and apparatus

Country Status (14)

Country Link
US (1) US3712735A (en)
AR (1) AR193046A1 (en)
AT (1) AT314563B (en)
AU (1) AU459847B2 (en)
BE (1) BE772895A (en)
BR (1) BR7106267D0 (en)
CA (1) CA954736A (en)
DE (1) DE2145849A1 (en)
ES (1) ES395232A1 (en)
FR (1) FR2108569A5 (en)
GB (1) GB1329214A (en)
IT (1) IT938800B (en)
NL (1) NL7112870A (en)
SE (1) SE372111B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR8302994A (en) * 1982-06-11 1984-01-31 Du Pont EXPOSURE PROCESS FOR FORMATION OF ACTIVE RADIATION IMAGE
ZA837453B (en) * 1982-10-11 1984-06-27 Fisher & Paykel Clothes driers
EP0136534B1 (en) * 1983-09-06 1990-06-13 Energy Conversion Devices, Inc. Method of forming a large surface area integrated circuit
US5250758A (en) * 1991-05-21 1993-10-05 Elf Technologies, Inc. Methods and systems of preparing extended length flexible harnesses
CA2233448A1 (en) * 1995-09-29 1997-04-03 Sage Technology, Incorporated Optical digital media recording and reproduction system
WO1997026570A1 (en) * 1996-01-16 1997-07-24 British Telecommunications Public Limited Company Method and device for recording a refractive index pattern in an optical medium
US8042267B2 (en) * 2003-01-17 2011-10-25 microTec Gesellschaft für Mikrotechnologie mbH Method for producing microsystems

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US607648A (en) * 1898-07-19 schwarz
US1299792A (en) * 1917-10-25 1919-04-08 Iwan Serrurier Picture-projecting apparatus.
US1725944A (en) * 1924-05-28 1929-08-27 Spoor Thompson Machine Company Film printer
US1843172A (en) * 1927-07-13 1932-02-02 Freeman H Owens Printing apparatus
US2041478A (en) * 1933-06-03 1936-05-19 Niederle Max Means for light or photo printing
US2835180A (en) * 1954-07-01 1958-05-20 Eastman Kodak Co Continuous printer for sound-color film
US2928327A (en) * 1955-09-01 1960-03-15 Eastman Kodak Co Continuous photographic printer
DE1238775B (en) * 1964-08-01 1967-04-13 Werner Moll Fa Rotary imagesetter for photopolymer printing plates
US3323434A (en) * 1964-09-24 1967-06-06 Metro Kalvar Inc Apparatus for sound and image printing of irradiation sensitive film
US3479120A (en) * 1964-10-05 1969-11-18 Columbia Broadcasting Syst Inc Apparatus for duplicating reelable film
US3313223A (en) * 1965-03-24 1967-04-11 Buckbee Mears Co Endless belt film for making photoprinted reproductions
US3531200A (en) * 1966-11-30 1970-09-29 Werner Moll Circular exposing device
DE1572298A1 (en) * 1967-04-07 1970-02-19 Gerhard Ritzerfeld Thermal copier with a hollow cylinder permeable to infrared rays

Also Published As

Publication number Publication date
AR193046A1 (en) 1973-03-30
FR2108569A5 (en) 1972-05-19
SE372111B (en) 1974-12-09
DE2145849A1 (en) 1972-03-30
BE772895A (en) 1972-03-21
AU459847B2 (en) 1975-04-10
AU3347271A (en) 1973-03-22
IT938800B (en) 1973-02-10
ES395232A1 (en) 1974-11-01
NL7112870A (en) 1972-03-28
US3712735A (en) 1973-01-23
AT314563B (en) 1974-04-10
BR7106267D0 (en) 1973-07-03
GB1329214A (en) 1973-09-05

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