CA953908A - Electro-optical incremental motion and position indicator - Google Patents

Electro-optical incremental motion and position indicator

Info

Publication number
CA953908A
CA953908A CA149,528A CA149528A CA953908A CA 953908 A CA953908 A CA 953908A CA 149528 A CA149528 A CA 149528A CA 953908 A CA953908 A CA 953908A
Authority
CA
Canada
Prior art keywords
electro
position indicator
incremental motion
optical incremental
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA149,528A
Other languages
English (en)
Other versions
CA149528S (en
Inventor
Kent E. Erickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keuffel and Esser Co
Original Assignee
Keuffel and Esser Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keuffel and Esser Co filed Critical Keuffel and Esser Co
Application granted granted Critical
Publication of CA953908A publication Critical patent/CA953908A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Illuminated Signs And Luminous Advertising (AREA)
CA149,528A 1971-08-17 1972-08-16 Electro-optical incremental motion and position indicator Expired CA953908A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17238371A 1971-08-17 1971-08-17

Publications (1)

Publication Number Publication Date
CA953908A true CA953908A (en) 1974-09-03

Family

ID=22627487

Family Applications (1)

Application Number Title Priority Date Filing Date
CA149,528A Expired CA953908A (en) 1971-08-17 1972-08-16 Electro-optical incremental motion and position indicator

Country Status (7)

Country Link
US (1) US3768911A (de)
JP (1) JPS5531882B2 (de)
CA (1) CA953908A (de)
CH (1) CH553962A (de)
DE (1) DE2238413C3 (de)
GB (1) GB1367039A (de)
SE (1) SE388273B (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1432122A (en) * 1973-04-02 1976-04-14 Facit Ab Device for sensing the direction of movement of a perforated code carrier
DE2431551C2 (de) * 1974-07-01 1981-09-17 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Anordnung zur Messung von Bewegungen und Geschwindigkeiten
GB1504691A (en) * 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
DE2511350A1 (de) * 1974-03-15 1975-10-09 Nat Research Dev Corp London Vorrichtung zum messen der verschiebung eines ersten elementes bezueglich eines zweiten
DE2427236C2 (de) * 1974-06-06 1985-09-05 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Beugung von interferenzfähigem Licht
GB1523584A (en) * 1974-09-05 1978-09-06 Strathearn Audio Ltd Apparatus for indicating angular displacement
US3957378A (en) * 1974-11-25 1976-05-18 The Bendix Corporation Two-axis moire fringe displacement transducer
US4049965A (en) * 1975-03-06 1977-09-20 National Research Development Corporation Measurement apparatus
US4039805A (en) * 1975-03-27 1977-08-02 The Measuregraph Company Apparatus for calculating the price of measured lengths of material
US4021116A (en) * 1975-09-02 1977-05-03 Bausch & Lomb Incorporated High resolution distance measuring apparatus
FR2436967A1 (fr) * 1978-09-19 1980-04-18 Thomson Csf Procede d'alignement optique de motifs dans deux plans rapproches et dispositif d'alignement mettant en oeuvre un tel procede
US4318617A (en) * 1979-12-14 1982-03-09 Keuffel & Esser Company DC Shift error correction for electro-optical measuring system
US4293188A (en) * 1980-03-24 1981-10-06 Sperry Corporation Fiber optic small displacement sensor
US4286871A (en) * 1980-08-11 1981-09-01 Keuffel & Esser Company Photogrammetric measuring system
DE3412980A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters
DE3526735A1 (de) * 1985-07-26 1987-02-05 Heidenhain Gmbh Dr Johannes Fehlergesicherte inkrementale positionsmesseinrichtung
AT397308B (de) * 1985-07-10 1994-03-25 Rsf Elektronik Gmbh Messsystem für die messung von längen und winkeln
US4731744A (en) * 1985-07-16 1988-03-15 Neal Hare Position sensor and system
GB8615197D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
IN168444B (de) * 1986-08-15 1991-04-06 Mitutoyo Mfg Co Ltd
US4722600A (en) * 1986-10-14 1988-02-02 Chiang Fu Pen Apparatus and method for measuring strain
DE3636744C1 (de) * 1986-10-29 1988-03-24 Heidenhain Gmbh Dr Johannes Lichtelektrische Laengen- oder Winkelmesseinrichtung
US4827436A (en) * 1987-04-22 1989-05-02 Micro Component Technology, Inc. Non-contact high resolution displacement measurement technique
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
DE8816647U1 (de) * 1988-03-25 1990-02-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung
US5012080A (en) * 1990-04-19 1991-04-30 Griscom Daniel T Directional particle filter
DE69128869T2 (de) * 1990-11-16 1998-06-25 Canon Kk Verfahren und Vorrichtung zum Messen von Verschiebungen
JP2862417B2 (ja) * 1990-11-16 1999-03-03 キヤノン株式会社 変位測定装置及び方法
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
US6535280B1 (en) * 2001-08-31 2003-03-18 Advanced Micro Devices, Inc. Phase-shift-moiré focus monitor
JP2006013400A (ja) * 2004-06-29 2006-01-12 Canon Inc ２つの対象物間の相対的位置ずれ検出方法及び装置
US7482575B2 (en) * 2006-08-21 2009-01-27 Gsi Group Corporation Rotary optical encoder employing multiple subencoders with common reticle substrate
RU2509324C2 (ru) * 2010-05-11 2014-03-10 Рустам Сабирович Закируллин Способ регулирования направленного светопропускания
EP2946045A4 (de) * 2013-01-01 2016-11-16 Active Glass Technologies Ltd Gesteuerte durchlässigkeit und reflexion bei fenstern
JP6386337B2 (ja) * 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
CN110487219A (zh) * 2019-08-15 2019-11-22 卢振武 一种运动机构直线度的检测系统及其检测方法
CN113029006B (zh) * 2021-04-27 2022-09-30 重庆理工大学 一种基于莫尔条纹的检测装置和检测方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1153909B (de) * 1956-01-27 1963-09-05 Schenck Gmbh Carl Vorrichtung zum Messen von Verstellwegen
US2993279A (en) * 1958-04-08 1961-07-25 North American Aviation Inc Photoelectric gage
DE1084928B (de) * 1958-06-12 1960-07-07 North American Aviation Inc Messvorrichtung mit zwei optischen Gittern
DE1259621B (de) * 1965-03-25 1968-01-25 Telefunken Patent Lichtelektrischer Messgenerator

Also Published As

Publication number Publication date
US3768911A (en) 1973-10-30
JPS5531882B2 (de) 1980-08-21
DE2238413A1 (de) 1973-03-01
JPS4829464A (de) 1973-04-19
GB1367039A (en) 1974-09-18
CH553962A (de) 1974-09-13
SE388273B (sv) 1976-09-27
DE2238413C3 (de) 1981-09-03
DE2238413B2 (de) 1980-12-18

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