CA3047122A1 - Optical coupler and waveguide system - Google Patents

Optical coupler and waveguide system Download PDF

Info

Publication number
CA3047122A1
CA3047122A1 CA3047122A CA3047122A CA3047122A1 CA 3047122 A1 CA3047122 A1 CA 3047122A1 CA 3047122 A CA3047122 A CA 3047122A CA 3047122 A CA3047122 A CA 3047122A CA 3047122 A1 CA3047122 A1 CA 3047122A1
Authority
CA
Canada
Prior art keywords
integrated device
waveguide
waveguides
sample
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3047122A
Other languages
English (en)
French (fr)
Inventor
Jonathan M. Rothberg
Ali KABIRI
Gerard Schmid
Jason W. Sickler
Paul E. Glenn
Lawrence C. West
Kyle Preston
Alexander Gondarenko
Benjamin CIPRIANY
James Beach
Keith G. Fife
Farshid GHASEMI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantum Si Inc
Original Assignee
Quantum Si Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of CA3047122A1 publication Critical patent/CA3047122A1/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/35—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/251—Colorimeters; Construction thereof
    • G01N21/253—Colorimeters; Construction thereof for batch operation, i.e. multisample apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29317—Light guides of the optical fibre type
    • G02B6/29319—With a cascade of diffractive elements or of diffraction operations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29344—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by modal interference or beating, i.e. of transverse modes, e.g. zero-gap directional coupler, MMI
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Measuring Cells (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Paper (AREA)
CA3047122A 2016-12-16 2017-12-15 Optical coupler and waveguide system Pending CA3047122A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662435693P 2016-12-16 2016-12-16
US62/435,693 2016-12-16
PCT/US2017/066717 WO2018112367A2 (en) 2016-12-16 2017-12-15 Optical coupler and waveguide system

Publications (1)

Publication Number Publication Date
CA3047122A1 true CA3047122A1 (en) 2018-06-21

Family

ID=60943149

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3047122A Pending CA3047122A1 (en) 2016-12-16 2017-12-15 Optical coupler and waveguide system

Country Status (11)

Country Link
US (2) US20180172906A1 (https=)
EP (2) EP4141416B1 (https=)
JP (2) JP7189874B2 (https=)
KR (1) KR102574176B1 (https=)
CN (2) CN115327709A (https=)
AU (2) AU2017377057B2 (https=)
BR (1) BR112019012070A2 (https=)
CA (1) CA3047122A1 (https=)
MX (1) MX2019007070A (https=)
TW (2) TWI842077B (https=)
WO (1) WO2018112367A2 (https=)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3088855B1 (en) * 2015-04-28 2020-10-21 IMEC vzw A compact interferometer
WO2018013243A1 (en) 2016-06-01 2018-01-18 Quantum-Si Incorporated Integrated device for detecting and analyzing molecules
CN116466494A (zh) 2016-12-16 2023-07-21 宽腾矽公司 紧密的光束整形及操纵总成
US11072827B2 (en) 2018-01-08 2021-07-27 Quantum-Si Incorporated System and methods for electrokinetic loading of sub-micron-scale reaction chambers
FR3086758B1 (fr) * 2018-09-28 2020-10-02 Commissariat Energie Atomique Procede et dispositif d'observation d'un echantillon sous lumiere ambiante
BR112021008098A2 (pt) 2018-11-15 2021-08-10 Quantum-Si Incorporated métodos e composições para o sequenciamento de proteínas
CA3142922A1 (en) * 2019-06-14 2020-12-17 Quantum-Si Incorporated Sliced grating coupler with increased beam alignment sensitivity
EP3990185B1 (en) * 2019-06-28 2024-09-11 Illumina Cambridge Limited Flowcells with linear waveguides
AU2020372908A1 (en) 2019-10-29 2022-06-02 Quantum-Si Incorporated Peristaltic pumping of fluids and associated methods, systems, and devices
AU2021207899A1 (en) * 2020-01-14 2022-09-08 Quantum-Si Incorporated Waveguide excitation uniformity
TW202145595A (zh) 2020-01-14 2021-12-01 美商寬騰矽公司 用於壽命及光譜特性分析之感應器
JP7763763B2 (ja) 2020-01-14 2025-11-04 クアンタム－エスアイ インコーポレイテッド 寿命特性評価のための集積センサ
KR20220137027A (ko) 2020-01-14 2022-10-11 퀀텀-에스아이 인코포레이티드 진폭 변조 레이저
US11378750B2 (en) * 2020-01-17 2022-07-05 Taiwan Semiconductor Manufacturing Company, Ltd. Germanium photodetector embedded in a multi-mode interferometer
WO2021166597A1 (ja) * 2020-02-19 2021-08-26 ソニーセミコンダクタソリューションズ株式会社 生体由来物質検出用チップ、生体由来物質検出装置及び生体由来物質検出システム
TW202147591A (zh) 2020-03-02 2021-12-16 美商寬騰矽公司 用於多維信號分析之整合感應器
JP7567175B2 (ja) * 2020-03-02 2024-10-16 富士通オプティカルコンポーネンツ株式会社 光デバイス及び光デバイスの試験方法
EP4133524A2 (en) 2020-04-08 2023-02-15 Quantum-si Incorporated Integrated sensor with reduced skew
EP3904897A1 (en) * 2020-04-29 2021-11-03 Technische Universität München Parallelized magnetic sensing of samples using solid-state spin systems
WO2021236983A2 (en) 2020-05-20 2021-11-25 Quantum-Si Incorporated Methods and compositions for protein sequencing
JP7552083B2 (ja) * 2020-06-12 2024-09-18 住友電気工業株式会社 光モジュール
CN112129775B (zh) * 2020-09-23 2023-03-24 哈尔滨工业大学 一种匀光棒条形光源及基于该光源的光学元件损伤检测装置
US11442230B2 (en) * 2020-11-13 2022-09-13 Taiwan Semiconductor Manufacturing Company Limited Silicon photonics coupling structure using an etch stop layer and methods of forming the same
JP2023554368A (ja) 2020-12-15 2023-12-27 クアンタム－エスアイ インコーポレイテッド 単一分子速度論による分子バーコード分析
EP4305405A1 (en) * 2021-04-13 2024-01-17 Quantum-si Incorporated Optical pulse stretcher
WO2023137051A2 (en) 2022-01-12 2023-07-20 Quantum-Si Incorporated Integrated sensor
CN114637072B (zh) * 2022-01-18 2023-10-13 浙江大学 一种浅刻蚀多模干涉耦合的多通道平顶型波分复用接收器
US11899240B2 (en) * 2022-06-09 2024-02-13 Taiwan Semiconductor Manufacturing Co., Ltd. Photonic device, system and method of making same
US12422630B2 (en) * 2022-10-18 2025-09-23 Visera Technologies Company Limited Optical device

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7560273B2 (en) * 2002-07-23 2009-07-14 Applied Biosystems, Llc Slip cover for heated platen assembly
JPH08271744A (ja) * 1995-02-03 1996-10-18 Nhk Spring Co Ltd 光分岐デバイス
US7175811B2 (en) 2000-04-28 2007-02-13 Edgelight Biosciences Micro-array evanescent wave fluorescence detection device
US7452712B2 (en) * 2002-07-30 2008-11-18 Applied Biosystems Inc. Sample block apparatus and method of maintaining a microcard on a sample block
US7148043B2 (en) * 2003-05-08 2006-12-12 Bio-Rad Laboratories, Inc. Systems and methods for fluorescence detection with a movable detection module
US9813152B2 (en) * 2004-01-14 2017-11-07 Luxtera, Inc. Method and system for optoelectronics transceivers integrated on a CMOS chip
US20060030036A1 (en) * 2004-05-28 2006-02-09 Victor Joseph Chips for multiplex analyses
CA2588806A1 (en) * 2004-12-09 2006-06-15 Rpo Pty Limited Optical power distribution devices
US7483140B1 (en) * 2004-12-10 2009-01-27 University Of Central Florida Research Foundation, Inc. Micro integrated planar optical waveguide type SPR sensor
TWI247886B (en) * 2005-01-06 2006-01-21 Univ Nat Taiwan Improved linear wave-guide type surface plasmon resonance micro sensor
US8288157B2 (en) * 2007-09-12 2012-10-16 Plc Diagnostics, Inc. Waveguide-based optical scanning systems
KR100795447B1 (ko) * 2006-09-11 2008-01-16 노키아 코포레이션 광 가이드, 광가이드 제조 장치, 제조 시스템, 및 제조 방법
WO2008115871A1 (en) * 2007-03-16 2008-09-25 Ia, Inc. Biosensor cartridge and biosensor mounting system with integral fluid storage and fluid selection mechanisms
US7974504B2 (en) * 2008-03-28 2011-07-05 Infinera Corporation Reflection suppression in a photonic integrated circuit
CA2737505C (en) * 2008-09-16 2017-08-29 Pacific Biosciences Of California, Inc. Substrates and optical systems and methods of use thereof
US8218151B2 (en) * 2009-03-12 2012-07-10 Tel Aviv University Future Technology Development Ltd Light-emitting intra-cavity interferometric sensors
US8636955B2 (en) * 2009-08-03 2014-01-28 Omega Optics, Inc. Packaged chip for multiplexing photonic crystal waveguide and photonic crystal slot waveguide devices for chip-integrated label-free detection and absorption spectroscopy with high throughput, sensitivity, and specificity
US8791405B2 (en) * 2009-12-03 2014-07-29 Samsung Electronics Co., Ltd. Optical waveguide and coupler apparatus and method of manufacturing the same
CN102985803A (zh) * 2010-02-19 2013-03-20 加利福尼亚太平洋生物科学股份有限公司 集成的分析系统和方法
US8865078B2 (en) 2010-06-11 2014-10-21 Industrial Technology Research Institute Apparatus for single-molecule detection
US8865077B2 (en) * 2010-06-11 2014-10-21 Industrial Technology Research Institute Apparatus for single-molecule detection
US20120156100A1 (en) * 2010-12-20 2012-06-21 Industrial Technology Research Institute Apparatus for single molecule detection and method thereof
EP3699577B1 (en) * 2012-08-20 2023-11-08 Illumina, Inc. System for fluorescence lifetime based sequencing
TW201416061A (zh) * 2012-10-19 2014-05-01 Nat Univ Chung Cheng 雙面光柵波導生物感測器
US9223084B2 (en) * 2012-12-18 2015-12-29 Pacific Biosciences Of California, Inc. Illumination of optical analytical devices
US9624540B2 (en) * 2013-02-22 2017-04-18 Pacific Biosciences Of California, Inc. Integrated illumination of optical analytical devices
WO2015110614A1 (en) 2014-01-23 2015-07-30 Imec Vzw Integrated waveguide structure for fluorescence analysis
JP6548581B2 (ja) * 2014-01-24 2019-07-24 技術研究組合光電子融合基盤技術研究所 グレーティングカプラ
EP2977801B1 (en) * 2014-07-24 2019-11-06 IMEC vzw Integrated grating coupler and power splitter
CN104155244B (zh) * 2014-08-08 2017-05-03 浙江大学 一种应用于智能手机上的光波导生物传感器
MX384725B (es) 2014-08-08 2025-03-14 Quantum Si Inc Dispositivo integrado con fuente de luz externa para el sondeo, detección y análisis de moléculas.
EP3271762B1 (en) 2015-03-16 2023-01-04 Pacific Biosciences of California, Inc. Analytical system comprising integrated devices and systems for free-space optical coupling
JP2016197020A (ja) * 2015-04-02 2016-11-24 富士通株式会社 光センサ
AU2016264737B2 (en) * 2015-05-20 2021-09-09 Quantum-Si Incorporated Pulsed laser and bioanalytic system
CA2986237A1 (en) * 2015-05-20 2016-11-24 Quantum-Si Incorporated Method of determining the sequence of a nucleic acid using time resolved luminescence
EP4425153A3 (en) * 2015-06-12 2024-11-20 Pacific Biosciences Of California, Inc. Integrated target waveguide devices and systems for optical coupling

Also Published As

Publication number Publication date
EP4141416B1 (en) 2025-10-08
TW202323893A (zh) 2023-06-16
JP2020515880A (ja) 2020-05-28
TWI778993B (zh) 2022-10-01
BR112019012070A2 (pt) 2020-01-07
US20230258862A1 (en) 2023-08-17
JP2023039960A (ja) 2023-03-22
KR102574176B1 (ko) 2023-09-06
EP3555591A2 (en) 2019-10-23
EP4141416A3 (en) 2023-06-07
AU2017377057B2 (en) 2022-11-17
AU2017377057A1 (en) 2019-06-20
JP7189874B2 (ja) 2022-12-14
EP3555591B1 (en) 2022-07-06
EP4141416A2 (en) 2023-03-01
KR20190097163A (ko) 2019-08-20
AU2023200860B2 (en) 2025-01-02
WO2018112367A2 (en) 2018-06-21
CN110088594B (zh) 2022-09-20
TW201831938A (zh) 2018-09-01
MX2019007070A (es) 2019-08-01
US20180172906A1 (en) 2018-06-21
CN115327709A (zh) 2022-11-11
CN110088594A (zh) 2019-08-02
WO2018112367A3 (en) 2018-07-26
TWI842077B (zh) 2024-05-11
AU2023200860A1 (en) 2023-03-16
JP7542048B2 (ja) 2024-08-29

Similar Documents

Publication Publication Date Title
AU2023200860B2 (en) Optical coupler and waveguide system
US12259323B2 (en) Photonic structures and integrated device for detecting and analyzing molecules
US11237326B2 (en) Optical rejection photonic structures using two spatial filters
US20200408690A1 (en) Optical and electrical secondary path rejection
CA3124962A1 (en) Optical waveguides and couplers for delivering light to an array of photonic elements
US12188868B2 (en) Waveguide excitation uniformity
JP2023510577A (ja) 寿命特性評価のための集積センサ
HK40090371A (en) Integrated device and method of forming the same
HK40013616A (en) Optical coupler and waveguide system
HK40013616B (en) Optical coupler and waveguide system

Legal Events

Date Code Title Description
EEER Examination request

Effective date: 20220926

D15 Examination report completed

Free format text: ST27 STATUS EVENT CODE: A-2-2-D10-D15-D126 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: EXAMINER'S REPORT

Effective date: 20241120

MFA Maintenance fee for application paid

Free format text: FEE DESCRIPTION TEXT: MF (APPLICATION, 7TH ANNIV.) - STANDARD

Year of fee payment: 7

U00 Fee paid

Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U00-U101 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE REQUEST RECEIVED

Effective date: 20250103

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT DETERMINED COMPLIANT

Effective date: 20250103

Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT PAID IN FULL

Effective date: 20250103

B12 Application deemed to be withdrawn, abandoned or lapsed

Free format text: ST27 STATUS EVENT CODE: N-2-6-B10-B12-B303 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: DEEMED ABANDONED - FAILURE TO RESPOND TO AN EXAMINER'S REQUISITION

Effective date: 20250320

W00 Other event occurred

Free format text: ST27 STATUS EVENT CODE: A-2-2-W10-W00-W100 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: LETTER SENT

Effective date: 20251030

W00 Other event occurred

Free format text: ST27 STATUS EVENT CODE: A-2-2-W10-W00-W100 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: LETTER SENT

Effective date: 20260205