CA2719044C - Electrodeposition of dielectric coatings on semiconductive substrates - Google Patents

Electrodeposition of dielectric coatings on semiconductive substrates Download PDF

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Publication number
CA2719044C
CA2719044C CA2719044A CA2719044A CA2719044C CA 2719044 C CA2719044 C CA 2719044C CA 2719044 A CA2719044 A CA 2719044A CA 2719044 A CA2719044 A CA 2719044A CA 2719044 C CA2719044 C CA 2719044C
Authority
CA
Canada
Prior art keywords
composition
weight
percent
resin
resin solids
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2719044A
Other languages
English (en)
French (fr)
Other versions
CA2719044A1 (en
Inventor
Kelly L. Moore
Michael J. Pawlik
Michael G. Sandala
Craig A. Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Ohio Inc
Original Assignee
PPG Industries Ohio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Ohio Inc filed Critical PPG Industries Ohio Inc
Publication of CA2719044A1 publication Critical patent/CA2719044A1/en
Application granted granted Critical
Publication of CA2719044C publication Critical patent/CA2719044C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/22—Servicing or operating apparatus or multistep processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4407—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained by polymerisation reactions involving only carbon-to-carbon unsaturated bonds
    • C09D5/4411—Homopolymers or copolymers of acrylates or methacrylates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4407—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained by polymerisation reactions involving only carbon-to-carbon unsaturated bonds
    • C09D5/4415—Copolymers wherein one of the monomers is based on an epoxy resin
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4419—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained otherwise than by polymerisation reactions only involving carbon-to-carbon unsaturated bonds
    • C09D5/443—Polyepoxides
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/12—Electrophoretic coating characterised by the process characterised by the article coated
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/04—Electrophoretic coating characterised by the process with organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Wood Science & Technology (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Paints Or Removers (AREA)
CA2719044A 2008-03-19 2009-03-18 Electrodeposition of dielectric coatings on semiconductive substrates Expired - Fee Related CA2719044C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US3781408P 2008-03-19 2008-03-19
US61/037,814 2008-03-19
US12/405,299 2009-03-17
US12/405,299 US8057654B2 (en) 2008-03-19 2009-03-17 Electrodeposition of dielectric coatings on semiconductive substrates
PCT/US2009/037489 WO2009117475A1 (en) 2008-03-19 2009-03-18 Electrodeposition of dielectric coatings on semiconductive substrates

Publications (2)

Publication Number Publication Date
CA2719044A1 CA2719044A1 (en) 2009-09-24
CA2719044C true CA2719044C (en) 2012-12-11

Family

ID=41087812

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2719044A Expired - Fee Related CA2719044C (en) 2008-03-19 2009-03-18 Electrodeposition of dielectric coatings on semiconductive substrates

Country Status (8)

Country Link
US (2) US8057654B2 (enExample)
EP (1) EP2265750A1 (enExample)
JP (1) JP5496178B2 (enExample)
KR (1) KR101242884B1 (enExample)
CN (1) CN102016131B (enExample)
CA (1) CA2719044C (enExample)
IL (1) IL208202A (enExample)
WO (1) WO2009117475A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8877029B2 (en) 2007-08-15 2014-11-04 Ppg Industries Ohio, Inc. Electrodeposition coatings including a lanthanide series element for use over aluminum substrates
CN102965179B (zh) * 2012-07-23 2014-09-17 贵州航天精工制造有限公司 一种二硫化钼液体润滑剂及其制备方法
JP2020030448A (ja) * 2018-08-20 2020-02-27 地方独立行政法人大阪産業技術研究所 静電容量式タッチセンサおよびその製造方法
US20210269667A1 (en) * 2020-02-27 2021-09-02 Axalta Coating Systems Ip Co., Llc Electrocoating composition
MX2024011606A (es) * 2022-03-21 2024-09-30 Ppg Ind Ohio Inc Composiciones de recubrimiento electrodepositable.

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984922A (en) * 1944-10-10 1976-10-12 Leo Rosen Rotors
DE1546840C3 (de) * 1965-02-27 1975-05-22 Basf Ag, 6700 Ludwigshafen Verfahren zum Herstellen von Überzügen
US4001101A (en) * 1969-07-10 1977-01-04 Ppg Industries, Inc. Electrodeposition of epoxy compositions
US3975346A (en) * 1968-10-31 1976-08-17 Ppg Industries, Inc. Boron-containing, quaternary ammonium salt-containing resin compositions
US3663389A (en) * 1970-04-17 1972-05-16 American Cyanamid Co Method of electrodepositing novel coating
US3984299A (en) * 1970-06-19 1976-10-05 Ppg Industries, Inc. Process for electrodepositing cationic compositions
US3962165A (en) * 1971-06-29 1976-06-08 Ppg Industries, Inc. Quaternary ammonium salt-containing resin compositions
US3947338A (en) * 1971-10-28 1976-03-30 Ppg Industries, Inc. Method of electrodepositing self-crosslinking cationic compositions
US3947339A (en) * 1971-12-01 1976-03-30 Ppg Industries, Inc. Method of electrodepositing primary amine group-containing cationic resins
US3749657A (en) * 1972-01-04 1973-07-31 Ppg Industries Inc Treatment of electrodeposition rinse water
US3793278A (en) * 1972-03-10 1974-02-19 Ppg Industries Inc Method of preparing sulfonium group containing compositions
US3928157A (en) * 1972-05-15 1975-12-23 Shinto Paint Co Ltd Cathodic treatment of chromium-plated surfaces
BE857754A (fr) * 1976-08-18 1978-02-13 Celanese Polymer Special Co Composition de resine pour revetements, notamment par electrodeposition cathodique
DE2711425A1 (de) * 1977-03-16 1978-09-21 Basf Ag Lackbindemittel fuer die kathodische elektrotauchlackierung
DE2963277D1 (en) 1978-12-11 1982-08-19 Shell Int Research Thermosetting resinous binder compositions, their preparation, and use as coating materials
JPS5785820A (en) * 1980-11-17 1982-05-28 Asahi Chem Ind Co Ltd Novel resin composition, paint containing said resin composition and painting thereof
US5096556A (en) * 1990-06-25 1992-03-17 Ppg Industries, Inc. Cationic microgels and their use in electrodeposition
US5371120A (en) * 1993-07-19 1994-12-06 E. I. Du Pont De Nemours And Company Crosslinked microgel for cathodic electrocoating compositions
US6165338A (en) * 1998-12-21 2000-12-26 Basf Corporation Cathodic electrocoat having a carbamate functional resin
US6713587B2 (en) * 2001-03-08 2004-03-30 Ppg Industries Ohio, Inc. Electrodepositable dielectric coating compositions and methods related thereto
US20060141143A1 (en) * 2004-12-17 2006-06-29 J Mccollum Gregory Method for creating circuit assemblies
JP5155879B2 (ja) * 2005-12-30 2013-03-06 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 電子基板
KR100755415B1 (ko) * 2005-12-30 2007-09-04 (주)디피아이 홀딩스 양이온성 전착도료 조성물 및 그 제조 방법
EP1994101B1 (en) * 2006-02-28 2014-12-31 Alchimer Formation of organic electro-grafted films on the surface of electrically conductive or semi-conductive surfaces

Also Published As

Publication number Publication date
US8333879B2 (en) 2012-12-18
CN102016131A (zh) 2011-04-13
JP5496178B2 (ja) 2014-05-21
JP2011515583A (ja) 2011-05-19
US20090236231A1 (en) 2009-09-24
IL208202A0 (en) 2010-12-30
KR101242884B1 (ko) 2013-03-12
CA2719044A1 (en) 2009-09-24
KR20100126524A (ko) 2010-12-01
CN102016131B (zh) 2012-12-26
HK1152353A1 (en) 2012-02-24
US20120006683A1 (en) 2012-01-12
US8057654B2 (en) 2011-11-15
IL208202A (en) 2014-07-31
WO2009117475A1 (en) 2009-09-24
EP2265750A1 (en) 2010-12-29

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Effective date: 20160318