CA2678460A1 - Mass spectrometer - Google Patents
Mass spectrometer Download PDFInfo
- Publication number
- CA2678460A1 CA2678460A1 CA002678460A CA2678460A CA2678460A1 CA 2678460 A1 CA2678460 A1 CA 2678460A1 CA 002678460 A CA002678460 A CA 002678460A CA 2678460 A CA2678460 A CA 2678460A CA 2678460 A1 CA2678460 A1 CA 2678460A1
- Authority
- CA
- Canada
- Prior art keywords
- ions
- mass spectrometer
- electrodes
- wiring
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 150000002500 ions Chemical class 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000004065 semiconductor Substances 0.000 claims abstract description 24
- 238000005530 etching Methods 0.000 claims abstract description 13
- 238000000206 photolithography Methods 0.000 claims abstract description 6
- 239000004020 conductor Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 230000001419 dependent effect Effects 0.000 claims description 7
- 230000005496 eutectics Effects 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000005388 borosilicate glass Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910052756 noble gas Inorganic materials 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 239000007789 gas Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241001116459 Sequoia Species 0.000 description 1
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/40—Time-of-flight spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07003392A EP1959476A1 (de) | 2007-02-19 | 2007-02-19 | Massenspektrometer |
| EP07003392.3 | 2007-02-19 | ||
| PCT/EP2008/001287 WO2008101669A1 (de) | 2007-02-19 | 2008-02-19 | Massenspektrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2678460A1 true CA2678460A1 (en) | 2008-08-28 |
Family
ID=38235375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002678460A Abandoned CA2678460A1 (en) | 2007-02-19 | 2008-02-19 | Mass spectrometer |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8134120B2 (enExample) |
| EP (1) | EP1959476A1 (enExample) |
| JP (1) | JP2010519687A (enExample) |
| CN (1) | CN101636814B (enExample) |
| CA (1) | CA2678460A1 (enExample) |
| WO (1) | WO2008101669A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010018830A1 (de) | 2010-04-29 | 2011-11-03 | Bayer Technology Services Gmbh | Flüssigkeitsverdampfer |
| CN101963596B (zh) * | 2010-09-01 | 2012-09-05 | 中国科学院广州地球化学研究所 | 基于四极杆质谱的稀有气体测定系统 |
| DE102011015595B8 (de) * | 2011-03-30 | 2015-01-29 | Krohne Messtechnik Gmbh | Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators |
| JP5813536B2 (ja) * | 2012-03-02 | 2015-11-17 | 株式会社東芝 | イオン源 |
| US9418827B2 (en) * | 2013-07-23 | 2016-08-16 | Hamilton Sundstrand Corporation | Methods of ion source fabrication |
| DE102014003356A1 (de) | 2014-03-06 | 2015-09-10 | Gregor Quiring | Vorrichtung zur Ionentrennung durch selektive Beschleunigung |
| JP6624482B2 (ja) * | 2014-07-29 | 2019-12-25 | 俊 保坂 | 超小型加速器および超小型質量分析装置 |
| JP7018090B2 (ja) * | 2020-04-08 | 2022-02-09 | 俊 保坂 | 超小型加速器および超小型質量分析装置およびイオン注入装置 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2765890B2 (ja) * | 1988-12-09 | 1998-06-18 | 株式会社日立製作所 | プラズマイオン源微量元素質量分析装置 |
| US5087815A (en) | 1989-11-08 | 1992-02-11 | Schultz J Albert | High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis |
| JP2774878B2 (ja) * | 1991-04-25 | 1998-07-09 | 株式会社日立製作所 | 多層膜絶縁物試料の二次イオン質量分析方法 |
| US5492867A (en) | 1993-09-22 | 1996-02-20 | Westinghouse Elect. Corp. | Method for manufacturing a miniaturized solid state mass spectrograph |
| US5466932A (en) | 1993-09-22 | 1995-11-14 | Westinghouse Electric Corp. | Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases |
| US5481110A (en) | 1993-09-22 | 1996-01-02 | Westinghouse Electric Corp | Thin film preconcentrator array |
| US5536939A (en) * | 1993-09-22 | 1996-07-16 | Northrop Grumman Corporation | Miniaturized mass filter |
| US5386115A (en) | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
| US5486697A (en) * | 1994-11-14 | 1996-01-23 | California Institute Of Technology | Array of micro-machined mass energy micro-filters for charged particles |
| JPH09511614A (ja) * | 1994-11-22 | 1997-11-18 | ノースロップ グルマン コーポレーション | ソリッドステート型の質量分析器汎用ガス検出センサ |
| DE19720278B4 (de) | 1997-05-13 | 2007-08-02 | Sls Micro Technology Gmbh | Miniaturisiertes Massenspektrometer |
| JPH11250854A (ja) * | 1998-03-02 | 1999-09-17 | Ulvac Corp | エッチングプラズマにおける基板入射イオンの分析法及び装置 |
| US6815668B2 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry |
| US6396057B1 (en) * | 2000-04-18 | 2002-05-28 | Waters Investments Limited | Electrospray and other LC/MS interfaces |
| GB2391694B (en) | 2002-08-01 | 2006-03-01 | Microsaic Systems Ltd | Monolithic micro-engineered mass spectrometer |
| US7358593B2 (en) * | 2004-05-07 | 2008-04-15 | University Of Maine | Microfabricated miniature grids |
| JP5221954B2 (ja) * | 2004-08-02 | 2013-06-26 | オウルストーン リミテッド | イオン移動度分光計 |
| CA2552086C (en) * | 2005-07-20 | 2014-09-09 | Microsaic Systems Limited | Microengineered nanospray electrode system |
-
2007
- 2007-02-19 EP EP07003392A patent/EP1959476A1/de not_active Withdrawn
-
2008
- 2008-02-19 CA CA002678460A patent/CA2678460A1/en not_active Abandoned
- 2008-02-19 JP JP2009549804A patent/JP2010519687A/ja active Pending
- 2008-02-19 CN CN200880005532.7A patent/CN101636814B/zh not_active Expired - Fee Related
- 2008-02-19 WO PCT/EP2008/001287 patent/WO2008101669A1/de not_active Ceased
- 2008-02-19 US US12/526,163 patent/US8134120B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008101669A8 (de) | 2008-12-24 |
| EP1959476A1 (de) | 2008-08-20 |
| CN101636814B (zh) | 2013-01-23 |
| US8134120B2 (en) | 2012-03-13 |
| JP2010519687A (ja) | 2010-06-03 |
| CN101636814A (zh) | 2010-01-27 |
| US20100090103A1 (en) | 2010-04-15 |
| WO2008101669A1 (de) | 2008-08-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20130219 |
|
| FZDE | Discontinued |
Effective date: 20180504 |