CN101636814B - 质谱仪 - Google Patents

质谱仪 Download PDF

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Publication number
CN101636814B
CN101636814B CN200880005532.7A CN200880005532A CN101636814B CN 101636814 B CN101636814 B CN 101636814B CN 200880005532 A CN200880005532 A CN 200880005532A CN 101636814 B CN101636814 B CN 101636814B
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CN
China
Prior art keywords
ions
mass spectrometer
electrodes
mass
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200880005532.7A
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English (en)
Chinese (zh)
Other versions
CN101636814A (zh
Inventor
J·米勒
E·瓦佩尔霍斯特
J·-P·豪希尔德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ludwig Crene & Co KG GmbH
Bayer AG
Original Assignee
Bayer Technology Services GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Technology Services GmbH filed Critical Bayer Technology Services GmbH
Publication of CN101636814A publication Critical patent/CN101636814A/zh
Application granted granted Critical
Publication of CN101636814B publication Critical patent/CN101636814B/zh
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN200880005532.7A 2007-02-19 2008-02-19 质谱仪 Expired - Fee Related CN101636814B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07003392A EP1959476A1 (de) 2007-02-19 2007-02-19 Massenspektrometer
EP07003392.3 2007-02-19
PCT/EP2008/001287 WO2008101669A1 (de) 2007-02-19 2008-02-19 Massenspektrometer

Publications (2)

Publication Number Publication Date
CN101636814A CN101636814A (zh) 2010-01-27
CN101636814B true CN101636814B (zh) 2013-01-23

Family

ID=38235375

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880005532.7A Expired - Fee Related CN101636814B (zh) 2007-02-19 2008-02-19 质谱仪

Country Status (6)

Country Link
US (1) US8134120B2 (enExample)
EP (1) EP1959476A1 (enExample)
JP (1) JP2010519687A (enExample)
CN (1) CN101636814B (enExample)
CA (1) CA2678460A1 (enExample)
WO (1) WO2008101669A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010018830A1 (de) 2010-04-29 2011-11-03 Bayer Technology Services Gmbh Flüssigkeitsverdampfer
CN101963596B (zh) * 2010-09-01 2012-09-05 中国科学院广州地球化学研究所 基于四极杆质谱的稀有气体测定系统
DE102011015595B8 (de) * 2011-03-30 2015-01-29 Krohne Messtechnik Gmbh Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators
JP5813536B2 (ja) * 2012-03-02 2015-11-17 株式会社東芝 イオン源
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
DE102014003356A1 (de) 2014-03-06 2015-09-10 Gregor Quiring Vorrichtung zur Ionentrennung durch selektive Beschleunigung
JP6624482B2 (ja) * 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
JP7018090B2 (ja) * 2020-04-08 2022-02-09 俊 保坂 超小型加速器および超小型質量分析装置およびイオン注入装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0427532A2 (en) * 1989-11-08 1991-05-15 Schultz, J. Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
US5486697A (en) * 1994-11-14 1996-01-23 California Institute Of Technology Array of micro-machined mass energy micro-filters for charged particles
WO1996011492A1 (en) * 1994-10-07 1996-04-18 Northrop Grumman Corporation Miniaturized mass filter

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2765890B2 (ja) * 1988-12-09 1998-06-18 株式会社日立製作所 プラズマイオン源微量元素質量分析装置
JP2774878B2 (ja) * 1991-04-25 1998-07-09 株式会社日立製作所 多層膜絶縁物試料の二次イオン質量分析方法
US5492867A (en) 1993-09-22 1996-02-20 Westinghouse Elect. Corp. Method for manufacturing a miniaturized solid state mass spectrograph
US5466932A (en) 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
US5481110A (en) 1993-09-22 1996-01-02 Westinghouse Electric Corp Thin film preconcentrator array
US5386115A (en) 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
JPH09511614A (ja) * 1994-11-22 1997-11-18 ノースロップ グルマン コーポレーション ソリッドステート型の質量分析器汎用ガス検出センサ
DE19720278B4 (de) 1997-05-13 2007-08-02 Sls Micro Technology Gmbh Miniaturisiertes Massenspektrometer
JPH11250854A (ja) * 1998-03-02 1999-09-17 Ulvac Corp エッチングプラズマにおける基板入射イオンの分析法及び装置
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US6396057B1 (en) * 2000-04-18 2002-05-28 Waters Investments Limited Electrospray and other LC/MS interfaces
GB2391694B (en) 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
US7358593B2 (en) * 2004-05-07 2008-04-15 University Of Maine Microfabricated miniature grids
JP5221954B2 (ja) * 2004-08-02 2013-06-26 オウルストーン リミテッド イオン移動度分光計
CA2552086C (en) * 2005-07-20 2014-09-09 Microsaic Systems Limited Microengineered nanospray electrode system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0427532A2 (en) * 1989-11-08 1991-05-15 Schultz, J. Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
WO1996011492A1 (en) * 1994-10-07 1996-04-18 Northrop Grumman Corporation Miniaturized mass filter
US5486697A (en) * 1994-11-14 1996-01-23 California Institute Of Technology Array of micro-machined mass energy micro-filters for charged particles

Also Published As

Publication number Publication date
WO2008101669A8 (de) 2008-12-24
EP1959476A1 (de) 2008-08-20
US8134120B2 (en) 2012-03-13
JP2010519687A (ja) 2010-06-03
CN101636814A (zh) 2010-01-27
CA2678460A1 (en) 2008-08-28
US20100090103A1 (en) 2010-04-15
WO2008101669A1 (de) 2008-08-28

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C06 Publication
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C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: LUDWIG-KROHNE GMBH + CO. KG

Effective date: 20130422

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20130422

Address after: Germany Leverkusen

Patentee after: Bayer Ag

Patentee after: Ludwig crene GmbH & Co. kg

Address before: Germany Leverkusen

Patentee before: Bayer Ag

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Owner name: BAYER INTELLECTUAL PROPERTY GMBH

Free format text: FORMER OWNER: BAYER AG

Effective date: 20140220

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Patentee after: Bayer Pharma Aktiengesellschaft

Patentee after: Ludwig crene GmbH & Co. kg

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Patentee before: Bayer Ag

Patentee before: Ludwig crene GmbH & Co. kg

TR01 Transfer of patent right
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20161207

Address after: Germany Leverkusen

Patentee after: BAYER AG

Patentee after: Ludwig crene GmbH & Co. kg

Address before: German Monheim

Patentee before: Bayer Pharma Aktiengesellschaft

Patentee before: Ludwig crene GmbH & Co. kg

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130123

Termination date: 20180219