WO2008101669A8 - Massenspektrometer - Google Patents

Massenspektrometer

Info

Publication number
WO2008101669A8
WO2008101669A8 PCT/EP2008/001287 EP2008001287W WO2008101669A8 WO 2008101669 A8 WO2008101669 A8 WO 2008101669A8 EP 2008001287 W EP2008001287 W EP 2008001287W WO 2008101669 A8 WO2008101669 A8 WO 2008101669A8
Authority
WO
WIPO (PCT)
Prior art keywords
ions
mass spectrometer
sector
energy filter
conductive substrate
Prior art date
Application number
PCT/EP2008/001287
Other languages
English (en)
French (fr)
Other versions
WO2008101669A1 (de
Inventor
Joerg Mueller
Eric Wapelhorst
Jan-Peter Hauschild
Original Assignee
Univ Hamburg Harburg Tech
Tutech Innovation Gmbh
Joerg Mueller
Eric Wapelhorst
Jan-Peter Hauschild
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Hamburg Harburg Tech, Tutech Innovation Gmbh, Joerg Mueller, Eric Wapelhorst, Jan-Peter Hauschild filed Critical Univ Hamburg Harburg Tech
Priority to JP2009549804A priority Critical patent/JP2010519687A/ja
Priority to US12/526,163 priority patent/US8134120B2/en
Priority to CN200880005532.7A priority patent/CN101636814B/zh
Priority to CA002678460A priority patent/CA2678460A1/en
Publication of WO2008101669A1 publication Critical patent/WO2008101669A1/de
Publication of WO2008101669A8 publication Critical patent/WO2008101669A8/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Das Massenspektrometer zeichnet sich dadurch aus, dass es vollständig planar aufgebaut ist, die Komponenten auf einem ebenen nichtleitenden Substrat angeordnet sind, es einen als Sektor, insbesondere 90°-Sektor ausgeführten Energiefilter (k) für die Ionen aufweist, die Ionisationskammer (b), die Elektroden (g, h j) zum Beschleunigen der Elektronen und Ionen, der Detektor (1) für die Ionen und der Energiefilter (k) durch Photolithographie und Ätzen eines auf das Substrat und die Verdrahtung aufgebrachten dotierten Halbleiterplättchens hergestellt sind und die vorgenannten Teile durch ein zweites flaches nichtleitendes Substrat bedeckt sind.
PCT/EP2008/001287 2007-02-19 2008-02-19 Massenspektrometer WO2008101669A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009549804A JP2010519687A (ja) 2007-02-19 2008-02-19 質量分析計
US12/526,163 US8134120B2 (en) 2007-02-19 2008-02-19 Mass spectrometer
CN200880005532.7A CN101636814B (zh) 2007-02-19 2008-02-19 质谱仪
CA002678460A CA2678460A1 (en) 2007-02-19 2008-02-19 Mass spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07003392.3 2007-02-19
EP07003392A EP1959476A1 (de) 2007-02-19 2007-02-19 Massenspektrometer

Publications (2)

Publication Number Publication Date
WO2008101669A1 WO2008101669A1 (de) 2008-08-28
WO2008101669A8 true WO2008101669A8 (de) 2008-12-24

Family

ID=38235375

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/001287 WO2008101669A1 (de) 2007-02-19 2008-02-19 Massenspektrometer

Country Status (6)

Country Link
US (1) US8134120B2 (de)
EP (1) EP1959476A1 (de)
JP (1) JP2010519687A (de)
CN (1) CN101636814B (de)
CA (1) CA2678460A1 (de)
WO (1) WO2008101669A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010018830A1 (de) 2010-04-29 2011-11-03 Bayer Technology Services Gmbh Flüssigkeitsverdampfer
CN101963596B (zh) * 2010-09-01 2012-09-05 中国科学院广州地球化学研究所 基于四极杆质谱的稀有气体测定系统
DE102011015595B8 (de) * 2011-03-30 2015-01-29 Krohne Messtechnik Gmbh Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators
JP5813536B2 (ja) * 2012-03-02 2015-11-17 株式会社東芝 イオン源
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
DE102014003356A1 (de) * 2014-03-06 2015-09-10 Gregor Quiring Vorrichtung zur Ionentrennung durch selektive Beschleunigung
JP6624482B2 (ja) 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
JP7018090B2 (ja) * 2020-04-08 2022-02-09 俊 保坂 超小型加速器および超小型質量分析装置およびイオン注入装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2765890B2 (ja) * 1988-12-09 1998-06-18 株式会社日立製作所 プラズマイオン源微量元素質量分析装置
US5087815A (en) * 1989-11-08 1992-02-11 Schultz J Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
JP2774878B2 (ja) * 1991-04-25 1998-07-09 株式会社日立製作所 多層膜絶縁物試料の二次イオン質量分析方法
US5466932A (en) 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
US5492867A (en) 1993-09-22 1996-02-20 Westinghouse Elect. Corp. Method for manufacturing a miniaturized solid state mass spectrograph
US5386115A (en) 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5481110A (en) 1993-09-22 1996-01-02 Westinghouse Electric Corp Thin film preconcentrator array
US5536939A (en) * 1993-09-22 1996-07-16 Northrop Grumman Corporation Miniaturized mass filter
US5486697A (en) * 1994-11-14 1996-01-23 California Institute Of Technology Array of micro-machined mass energy micro-filters for charged particles
EP0745268B1 (de) * 1994-11-22 1998-10-21 Northrop Grumman Corporation Mikrostruktarierter festkörpermassenspektrograph für verwendung als sensor für einen gasdetektor
DE19720278B4 (de) 1997-05-13 2007-08-02 Sls Micro Technology Gmbh Miniaturisiertes Massenspektrometer
JPH11250854A (ja) * 1998-03-02 1999-09-17 Ulvac Corp エッチングプラズマにおける基板入射イオンの分析法及び装置
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US6396057B1 (en) * 2000-04-18 2002-05-28 Waters Investments Limited Electrospray and other LC/MS interfaces
GB2391694B (en) 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
CA2605871A1 (en) * 2004-05-07 2005-11-24 Stillwater Scientific Instruments Microfabricated miniature grids
JP5221954B2 (ja) * 2004-08-02 2013-06-26 オウルストーン リミテッド イオン移動度分光計
EP1746631B1 (de) * 2005-07-20 2013-06-19 Microsaic Systems PLC Mikromechanisches Nano-Elektrodensystem

Also Published As

Publication number Publication date
US8134120B2 (en) 2012-03-13
JP2010519687A (ja) 2010-06-03
CN101636814A (zh) 2010-01-27
US20100090103A1 (en) 2010-04-15
WO2008101669A1 (de) 2008-08-28
CN101636814B (zh) 2013-01-23
EP1959476A1 (de) 2008-08-20
CA2678460A1 (en) 2008-08-28

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