CA2422572A1 - Dispositif d'isolation entre des zones a conduction optique - Google Patents
Dispositif d'isolation entre des zones a conduction optique Download PDFInfo
- Publication number
- CA2422572A1 CA2422572A1 CA002422572A CA2422572A CA2422572A1 CA 2422572 A1 CA2422572 A1 CA 2422572A1 CA 002422572 A CA002422572 A CA 002422572A CA 2422572 A CA2422572 A CA 2422572A CA 2422572 A1 CA2422572 A1 CA 2422572A1
- Authority
- CA
- Canada
- Prior art keywords
- elongate
- regions
- optically conductive
- region
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000002955 isolation Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 239000002019 doping agent Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000012212 insulator Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12126—Light absorber
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Optical Integrated Circuits (AREA)
Abstract
L'invention concerne un dispositif d'isolation con×u pour fournir une isolation optique et ~lectrique entre des zones ~ conduction optique (1A, 1B), telles que des guides d'ondes parallles d'une puce optique int~gr~e. Ce dispositif comprend une premire r~gion allong~e (4) dop~e au moyen d'un premier dopant (p+), une deuxime r~gion allong~e (5) sur un cÙt~ de la premire r~gion allong~e (4) et une troisime r~gion allong~e (6) sur le cÙt~ oppos~ de la premire r~gion allong~e (4), la deuxime et la troisime r~gion allong~e (5, 6) ~tant dop~es au moyen d'un second dopant (n+) de polarit~ oppos~e ~ celle du premier dopant (p+). Une premire diode est form~e entre la deuxime et la premire r~gion allong~e (5, 4) et une seconde diode est form~e entre la premire et la troisime r~gion allong~e (4, 6), la premire et la seconde diode ~tant connect~es en s~rie avec une polarit~ oppos~e. Les diodes oppos~es bloquent le passage du courant ~lectrique et les r~gions dop~es (4, 5, 6) absorbent la lumire essayant de passer ~ travers.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0023133A GB2367187B (en) | 2000-09-21 | 2000-09-21 | An isolation device |
GB0023133.2 | 2000-09-21 | ||
US09/850,060 US6628852B2 (en) | 2000-09-21 | 2001-05-08 | Isolation device |
US09/850,060 | 2001-05-08 | ||
PCT/GB2001/004191 WO2002025334A1 (fr) | 2000-09-21 | 2001-09-20 | Dispositif d'isolation entre des zones a conduction optique |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2422572A1 true CA2422572A1 (fr) | 2002-03-28 |
Family
ID=26245033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002422572A Abandoned CA2422572A1 (fr) | 2000-09-21 | 2001-09-20 | Dispositif d'isolation entre des zones a conduction optique |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1319193A1 (fr) |
CN (1) | CN1461418A (fr) |
AU (1) | AU2001287900A1 (fr) |
CA (1) | CA2422572A1 (fr) |
WO (1) | WO2002025334A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102403321A (zh) * | 2011-09-30 | 2012-04-04 | 上海新傲科技股份有限公司 | 半导体装置及制备方法 |
US9946023B2 (en) * | 2015-08-05 | 2018-04-17 | Huawei Technologies Co., Ltd. | Optical attenuator and fabrication method thereof |
CN107039070B (zh) | 2016-01-29 | 2022-06-14 | 三星电子株式会社 | 用于选择性地执行隔离功能的半导体器件及其布局替代方法 |
CN114898791A (zh) | 2016-01-29 | 2022-08-12 | 三星电子株式会社 | 用于选择性地执行隔离功能的半导体器件及其布局替代方法 |
US11442296B2 (en) | 2020-07-20 | 2022-09-13 | Taiwan Semiconductor Manufacturing Company Ltd. | Waveguide structure and method for forming the same |
US20240012199A1 (en) * | 2022-07-08 | 2024-01-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and methods of formation |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL185118C (nl) * | 1979-06-07 | 1990-01-16 | Philips Nv | Halfgeleiderschakelinrichting voor het geleiden en versterken van straling. |
US4637125A (en) * | 1983-09-22 | 1987-01-20 | Kabushiki Kaisha Toshiba | Method for making a semiconductor integrated device including bipolar transistor and CMOS transistor |
FR2710455B1 (fr) * | 1993-09-24 | 1995-12-15 | Frederic Ghirardi | Procédé de réalisation d'une structure intégrée monolithique incorporant des composants opto-électroniques et structure ainsi réalisée. |
EP0955681A3 (fr) * | 1994-09-28 | 2000-11-29 | Nippon Telegraph And Telephone Corporation | Dispositif optique à semi-conducteur et méthode de fabrication |
JPH08116135A (ja) * | 1994-10-17 | 1996-05-07 | Mitsubishi Electric Corp | 導波路集積素子の製造方法,及び導波路集積素子 |
-
2001
- 2001-09-20 EP EP01967526A patent/EP1319193A1/fr not_active Withdrawn
- 2001-09-20 CN CN 01815964 patent/CN1461418A/zh active Pending
- 2001-09-20 CA CA002422572A patent/CA2422572A1/fr not_active Abandoned
- 2001-09-20 AU AU2001287900A patent/AU2001287900A1/en not_active Abandoned
- 2001-09-20 WO PCT/GB2001/004191 patent/WO2002025334A1/fr not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU2001287900A1 (en) | 2002-04-02 |
WO2002025334B1 (fr) | 2002-07-04 |
WO2002025334A1 (fr) | 2002-03-28 |
EP1319193A1 (fr) | 2003-06-18 |
CN1461418A (zh) | 2003-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |